JPS6112982U - cryopump - Google Patents

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は各種気体の蒸気圧曲線図、第２図は従来構造例
クライオポンプの排気時の動作説明図、第３図は従来構
造例タライポンプの再生時の動作説明図、第４図は本考
案の一実施例のタライオポンプの構成図である。 １・・・ルーバーバツフル、２・・・輻射シールト板、
３・・・クライオパネルζ ４・・・クライオポンプ容
器、５・・・人気ゲートバルブ、６・・・真空容器、７
・・・冷媒、訃・・乾燥窒素ガス封入管、９・・・バル
ブ、１０・・・乾燥窒素。Fig. 1 is a diagram of vapor pressure curves of various gases, Fig. 2 is an explanatory diagram of the operation of a cryopump with a conventional structure during pumping, Fig. 3 is an explanatory diagram of the operation of a Tarai pump with an example of a conventional structure during regeneration, and Fig. 4 is an illustration of the operation of a cryopump with a conventional structure during regeneration. FIG. 1 is a configuration diagram of a Talio pump according to an embodiment of the present invention. 1... Louver full, 2... Radiation shield plate,
3... Cryopanel ζ 4... Cryopump container, 5... Popular gate valve, 6... Vacuum container, 7
... Refrigerant, ... Dry nitrogen gas filled tube, 9... Valve, 10... Dry nitrogen.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] クライオパネル存び輻射シールド板の前段にバツフルを
有するクライオポンプに於いて、クライオパネル及び輻
射シールド板とバツフル間に１箇所又はそれ以上のタラ
イポンプ再生用ガス封入管を配置したことを特徴とする
クライオ・ポンプ。A cryopump having a buttful in front of the cryopanel and the radiation shield plate, characterized in that one or more gas-filled tubes for regenerating the Tarai pump are arranged between the cryopanel, the radiation shield plate, and the buttful. cryo pump.