JPS5967849U - Vacuum exhaust system vibration isolator - Google Patents

Vacuum exhaust system vibration isolator

Info

Publication number
JPS5967849U
JPS5967849U JP16399682U JP16399682U JPS5967849U JP S5967849 U JPS5967849 U JP S5967849U JP 16399682 U JP16399682 U JP 16399682U JP 16399682 U JP16399682 U JP 16399682U JP S5967849 U JPS5967849 U JP S5967849U
Authority
JP
Japan
Prior art keywords
bellows
vacuum
vibration isolator
exhaust system
vacuum exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16399682U
Other languages
Japanese (ja)
Other versions
JPS6340845Y2 (en
Inventor
英昭 鹿熊
Original Assignee
株式会社明石製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社明石製作所 filed Critical 株式会社明石製作所
Priority to JP16399682U priority Critical patent/JPS5967849U/en
Publication of JPS5967849U publication Critical patent/JPS5967849U/en
Application granted granted Critical
Publication of JPS6340845Y2 publication Critical patent/JPS6340845Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Joints Allowing Movement (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１．２図は従来の真空排気系の防振装置を示すもので
、第１図はその概略構成を示す模式図、第２図はその作
用を説明するための模式図であり、第３図は本考案の一
実施例としての真空排気系の防振装置の概略構成を示す
模式図である。 １・・・電子顕微鏡、２・・・真空ポンプ、３・・・真
空にされるべきチャンバとしての試料室、４・・・真空
排気通路、５・・・内側ベローズ、６・・・外側ベロー
ズ、７・・・環状スペース、８・・・弁、９・・・通路
、Ａ・・・真空排気系、Ｍ・・・ベローズ式防振機構。Fig. 1.2 shows a conventional vibration isolator for a vacuum pumping system, Fig. 1 is a schematic diagram showing its general structure, Fig. 2 is a schematic diagram for explaining its operation, and Fig. 3 is a schematic diagram showing its general structure. The figure is a schematic diagram showing a schematic configuration of a vibration isolator for a vacuum pumping system as an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Electron microscope, 2... Vacuum pump, 3... Sample chamber as a chamber to be evacuated, 4... Vacuum exhaust passage, 5... Inner bellows, 6... Outer bellows , 7... Annular space, 8... Valve, 9... Passage, A... Vacuum exhaust system, M... Bellows type vibration isolation mechanism.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空排気系において、真空ポンプ側と真空にされるべき
チャンバ側との間に、上記真空ポンプ側からの振動が上
記チャンバ側へ伝達するのを防止すべく、ベローズ式防
振機構が介装されて、ベローズ式防振機構が、内部に真
空排気通路を形成する内側ベローズと、同内側ベローズ
との間に流体を封入しうる環状スペースを形成すべく上
記内側ベローズよりも外側に設けられた外側ベローズと
で構成されたことを特徴とする、真空排気系の防振装置
。In the vacuum evacuation system, a bellows-type vibration isolation mechanism is interposed between the vacuum pump side and the chamber side to be evacuated in order to prevent vibrations from the vacuum pump side from being transmitted to the chamber side. The bellows-type vibration isolation mechanism includes an inner bellows that forms a vacuum exhaust passage therein, and an outer bellows provided outside the inner bellows to form an annular space in which fluid can be sealed between the inner bellows and the inner bellows. A vacuum-exhaust system vibration isolator characterized by comprising a bellows.
JP16399682U 1982-10-29 1982-10-29 Vacuum exhaust system vibration isolator Granted JPS5967849U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16399682U JPS5967849U (en) 1982-10-29 1982-10-29 Vacuum exhaust system vibration isolator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16399682U JPS5967849U (en) 1982-10-29 1982-10-29 Vacuum exhaust system vibration isolator

Publications (2)

Publication Number Publication Date
JPS5967849U true JPS5967849U (en) 1984-05-08
JPS6340845Y2 JPS6340845Y2 (en) 1988-10-25

Family

ID=30359665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16399682U Granted JPS5967849U (en) 1982-10-29 1982-10-29 Vacuum exhaust system vibration isolator

Country Status (1)

Country Link
JP (1) JPS5967849U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010519475A (en) * 2007-02-23 2010-06-03 オーリコン レイボルド バキューム ゲーエムベーハー Decompression line
JP4691802B2 (en) * 2001-02-28 2011-06-01 ソニー株式会社 Electron beam irradiation device
JP2017535787A (en) * 2014-12-22 2017-11-30 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Substrate inspection device, substrate inspection method, large area substrate inspection device, and operation method thereof
CN108351602A (en) * 2015-11-10 2018-07-31 Asml荷兰有限公司 Vibration isolation system and lithographic equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009097673A (en) * 2007-10-18 2009-05-07 Kurashiki Kako Co Ltd Vibration isolating joint

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4691802B2 (en) * 2001-02-28 2011-06-01 ソニー株式会社 Electron beam irradiation device
JP2010519475A (en) * 2007-02-23 2010-06-03 オーリコン レイボルド バキューム ゲーエムベーハー Decompression line
JP2017535787A (en) * 2014-12-22 2017-11-30 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Substrate inspection device, substrate inspection method, large area substrate inspection device, and operation method thereof
TWI673748B (en) * 2014-12-22 2019-10-01 美商應用材料股份有限公司 Apparatus for inspecting a substrate, method for inspecting a substrate
CN108351602A (en) * 2015-11-10 2018-07-31 Asml荷兰有限公司 Vibration isolation system and lithographic equipment
JP2018538560A (en) * 2015-11-10 2018-12-27 エーエスエムエル ネザーランズ ビー．ブイ． Vibration isolation system and lithographic apparatus
US10545414B2 (en) 2015-11-10 2020-01-28 Asml Netherlands B.V. Vibration isolation system and lithographic apparatus
CN108351602B (en) * 2015-11-10 2020-08-18 Asml荷兰有限公司 Vibration isolation system and lithographic apparatus

Also Published As

Publication number Publication date
JPS6340845Y2 (en) 1988-10-25

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