JPS60875A - Device for supplying ultra-pure water - Google Patents

Abstract

PURPOSE:To eliminate labor for washing and to improve productivity by maintaining the inside of a storage tank in which the produced ultra-pure water is stored in the pressurized state at all times by the gas sealed therein through a germ-free air filter at all times. CONSTITUTION:The ultra-pure water produced with a device 1 for producing ultra-pure water is stored in a storage tank 2. A germ-free air filter is provided by a vent pipe 2' at the top of the tank 2 and a pressure switch 6 is provided in a suitable position. The inside of the storage tank is maintained in the pressurized state at all times by the gas sealed through the germ-free air filter by which the backflow of bacteria from a place 4 of use into the pipeline is prevented. The washing operation is thus considerably decreased and productivity is improved.

Description

【発明の詳細な説明】 この発明は超純水供給装置に閏、する。純度の高い水は
電子工業用洗浄卒、医薬用水、原子力用水に用いちれる
。しかも、近年はこれらの工業の高度化に伴い純度が理
論純水に近い超純水が請求されている。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrapure water supply device. Highly purified water is used for electronic industry cleaning, medical water, and nuclear power water. Moreover, in recent years, as these industries have become more sophisticated, ultrapure water whose purity is close to theoretically pure water has been demanded.

超純水は限外濾過膜装置、逆浸透膜装置などの膜分離装
置やイオン交換樹脂装置またはこれらの組合せからなる
超純水製造装置で製造してタンクに貯蔵し、タンクから
管路にょシ使用個所へ供給する。し７５他、使用個所で
使用中に使用個所から訓自が通入して純＃を低下するこ
とがめると共に、場合によっては製造装置そのものも却
１菌で汚染されることがあシ、そうなると使用箇所での
用水は満足すべきものではな俺り、この用水を用いるプ
ロセス側では製品の歩留の低下と言う不都合が生じる。Ultrapure water is produced using ultrapure water production equipment consisting of membrane separation equipment such as ultrafiltration membrane equipment, reverse osmosis membrane equipment, ion exchange resin equipment, or a combination of these, stored in tanks, and transported from the tank to pipes. Supply to the point of use. 75 In addition, it is possible that the purity level of the product may be reduced by penetration of the product from the place of use during use, and in some cases, the manufacturing equipment itself may become contaminated with bacteria, and if this happens, the product may be used. The amount of water used at these locations is unsatisfactory, and the processes that use this water have the disadvantage of lowering the yield of products.

又、製造装置が汚染されると高純度の水はなかなか製造
できなくなると言う欠点を有する。Another drawback is that if the production equipment becomes contaminated, it becomes difficult to produce highly purified water.

そこで本発明は製造した超純水を管路で使用個所□に供
給するために貯える貯蔵タンクの内部を無菌エアフィル
タＣ細菌を透過しないフィルタ）を通じて封入した気体
によ）常時、加圧状態に保って管路中に使用箇所から菌
が通入するのを防止し、上述の問題点全解消したのであ
る。以下、図示の実施例を参照して本発明を説明する。Therefore, in the present invention, in order to supply the produced ultrapure water to the point of use via a pipe, the inside of the storage tank is kept under pressure at all times by gas sealed through a sterile air filter (filter that does not pass bacteria). This prevents bacteria from entering the pipe from the point where it is used, and all of the above-mentioned problems have been solved. The invention will now be described with reference to illustrated embodiments.

ｌは前述した超純水製造装置、コは上記製造装置が製造
した超純水を貯蔵する貯蔵タンク、３はタンク中の超純
水を使用個所ダにポンプＰで導く管路を示し、使用個所
で超純水を使用するには弁ダ′に開く。貯蔵タンクコに
は例えば頂部に無菌エアフィルタを通気管−′で設ける
と共に、適宜の位置に圧力スイッチＡｆ設ける。1 is the ultrapure water production device described above, 3 is a storage tank for storing the ultrapure water produced by the above production device, and 3 is a pipe line that leads the ultrapure water in the tank to the point of use by a pump P. To use ultrapure water at a specific location, open the valve. For example, a sterile air filter is provided at the top of the storage tank via a ventilation pipe -', and a pressure switch Af is provided at an appropriate position.

無菌エアフィルタＳは通気管コ′が内部に連通したフィ
ルタエレメントｇａと、フィルタニレメントラ収容した
ケースｓｂからな９、ケースｓｂには圧縮空気、不活性
ガス、例えば窒素ガスを圧入する気体の圧入管７と、タ
ンク内から排気するための排気管ｇを接続する。The sterile air filter S consists of a filter element ga with a vent tube communicating with the inside, and a case sb housing the filter element 9.The case sb has a gas injected with compressed air, an inert gas, for example, nitrogen gas. The press-in pipe 7 is connected to an exhaust pipe g for exhausting air from inside the tank.

そして圧入管乙には電磁式の開閉弁Ｖ＋、排気管ｇには
電磁式の開閉弁ｖ２を設け、開閉弁ｖ１とｖ２を圧力ス
イッチ乙に結線し、圧力スイッチはタンク内圧が例えば
０．２’ｈ／ａＡ以下になったら圧入管の開閉弁ｖ１を
開くと共に排気管の開閉弁Ｖ、を閉じ、又、例えばｔ）
、ａＫｇ／ａ４になったら開閉弁ｖ１を閉じる。又、０
．ｊｉＫｆ／ａＡ以上になったら開閉弁ｖ２を開き、上
限をこの値に維持する様にする。Then, the press-fit pipe B is provided with an electromagnetic on-off valve V+, and the exhaust pipe g is provided with an electromagnetic on-off valve v2, and the on-off valves v1 and v2 are connected to the pressure switch O. 'h/aA or less, open the on-off valve v1 of the press-in pipe and close the on-off valve V of the exhaust pipe, and, for example, t)
, aKg/a4, close the on-off valve v1. Also, 0
．． When the value exceeds jiKf/aA, open/close valve v2 is opened to maintain the upper limit at this value.

これによシ貯蔵タンク内にはタンク内圧が０．＄ｆ’ｃ
ｄ以下になると圧縮空気や不活性ガスなどの気体が無菌
エアフィルタのエレメント！；ａを通じ注入され、又、
内圧がθ、／ＩＫｔ／ｃｒＡ以上になると貯蔵タンク内
からは注入された気体が排出され、かくして超純水製造
装置ｌは製造した純水を貯蔵タンクに補給し、使用箇所
では随時貯蔵タンクから管路３を通じ超純水を取出して
使用しているなかで、貯蔵タンクの内圧は常時例えばＯ
，コ〜θ、４’　Ｋｇ／ｃｔＡの一定範囲に保たれ、タ
ンク及び管路中の水を加圧する。従って、この加圧によ
シ使用箇所から細菌が管路中に通入することを完全に防
止できる。又、貯蔵タンクの内圧を一定範囲に維持する
ための注気と排気は無菌エアフィルタを通じて行ってい
るので細菌がタンクに侵入することもない。As a result, the tank internal pressure in the storage tank is 0. $f'c
When the temperature is below d, gases such as compressed air and inert gases become sterile air filter elements! ; injected through a;
When the internal pressure exceeds θ, /IKt/crA, the injected gas is discharged from the storage tank, and the ultrapure water production equipment replenishes the purified water into the storage tank. While ultrapure water is taken out and used through pipe 3, the internal pressure of the storage tank is always maintained at, for example, O.
, θ, 4' Kg/ctA, and pressurizes the water in the tank and pipes. Therefore, this pressurization can completely prevent bacteria from entering the pipe from the point where the pipe is used. In addition, since air is injected and exhausted to maintain the internal pressure of the storage tank within a certain range through a sterile air filter, bacteria do not enter the tank.

従って従来は使用箇所から管路中に送入した細菌を殺菌
するために１週間に１回位の割合で管路、貯蔵タンク内
の水を空け、加熱蒸気で洗浄を行い、その間、超純水は
使用できなかったが、本発明によれば洗浄は１年以上行
わなくて済み、今洗浄の手数が省けると共に、超純水の
使用の中断がない分、生産性をあげることができる。又
、超純水の使用の中断を避けるには、従来は一つの超純
水製造装置に対し並列に貯蔵タンク、管路を設備し、一
方を洗浄中は他方から超純水を取出す必要があるが、本
発明によればその様に貯蔵タンクと管路を並列に設ける
無駄も省ける。Therefore, conventionally, in order to sterilize bacteria introduced into the pipes from the point of use, the water in the pipes and storage tanks was emptied once a week and cleaned with heated steam. Although water could not be used, according to the present invention, cleaning is not required for more than one year, which saves the labor of cleaning, and increases productivity because there is no interruption in the use of ultrapure water. Additionally, in order to avoid interruptions in the use of ultrapure water, conventionally it was necessary to install storage tanks and pipelines in parallel to one ultrapure water production device, and while cleaning one, the ultrapure water had to be taken out from the other. However, according to the present invention, such wasteful provision of the storage tank and the pipe line in parallel can be eliminated.

そして、装置を新設する以外に、既存の設備の貯蔵タン
クに無菌フィルタと圧力スイッチを設け、無菌フィルタ
に圧入管と排気管を接続し、簡単に改造して実施するこ
ともできる。In addition to installing a new device, it is also possible to easily modify existing equipment by installing a sterile filter and a pressure switch in the storage tank, and connecting a press-in pipe and an exhaust pipe to the sterile filter.

尚、貯蔵タンクの内圧を一定範囲に維持するための圧力
値０．コ〜０．ＩＩＫｙ／ａｌは例示であ２て、これに
限定されるものではなく、少くともタンク内圧が加圧を
維持することができればよい。又、この実施例では圧入
管と排気管を一つの無菌エアフィルタに接続したが、タ
ンクに無菌エアフィルタ七二つ設け、圧入管を一つのフ
ィルタ、排気管を他のフィルタに接続してもよい。Note that the pressure value is 0.0 to maintain the internal pressure of the storage tank within a certain range. Ko~0. IIKy/al is an example, and is not limited thereto, as long as the internal pressure of the tank can be maintained at least pressurized. Also, in this example, the press-fit pipe and the exhaust pipe were connected to one sterile air filter, but it is also possible to install seven sterile air filters in the tank and connect the press-fit pipe to one filter and the exhaust pipe to the other filter. good.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明の一実施例のフローシートであって、図中
、ｌは超純水製造装置、コは貯蔵タンク、Ｓは無菌エア
フィルタ、６は圧力スイッチ、７は圧入管、ざは排気管
を示す。 特許出願人　栗田工業株式会社The drawing is a flow sheet of one embodiment of the present invention, and in the drawing, l is an ultrapure water production device, C is a storage tank, S is a sterile air filter, 6 is a pressure switch, 7 is a press-fit pipe, and is an exhaust gas. Showing the tube. Patent applicant Kurita Industries Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] （１）　超純水製造装置と、超純水供給装置が製造した
超純水の貯蔵タンクと、貯蔵タンクから使用箇所に超純
水を導く管路とからなる超純水供給装置において、 貯蔵タンクには無菌エアフィルタを介して気体を圧入す
る手段と、無菌エアフィルタを介してタンク内から排気
する手段と、タンク内の圧力を検出する手段とを有し、
圧力を検出する手段で気体のタンク内への圧入と、タン
ク内からの排気を制御することを特徴とする超純水供給
装置。 （２、特許請求の範囲（１）の装置において、気体をタ
ンク中に圧入する手段と、タンク中から排気する手段に
は夫々開閉弁が設けられ−Ｃいる超純水供給装置。(1) In an ultrapure water supply device consisting of an ultrapure water production device, a storage tank for the ultrapure water produced by the ultrapure water supply device, and a pipe line that leads the ultrapure water from the storage tank to the point of use, The tank has means for pressurizing gas through a sterile air filter, means for exhausting gas from inside the tank through the sterile air filter, and means for detecting the pressure inside the tank,
An ultrapure water supply device characterized by controlling the pressurization of gas into a tank and the exhaustion of gas from the tank by means of detecting pressure. (2. The ultrapure water supply device according to claim (1), wherein the means for pressurizing gas into the tank and the means for exhausting gas from the tank are each provided with an on-off valve.