JPS6086419A - Apparatus for measuring flow rate of fluid - Google Patents

Apparatus for measuring flow rate of fluid

Info

Publication number
JPS6086419A
JPS6086419A JP19344683A JP19344683A JPS6086419A JP S6086419 A JPS6086419 A JP S6086419A JP 19344683 A JP19344683 A JP 19344683A JP 19344683 A JP19344683 A JP 19344683A JP S6086419 A JPS6086419 A JP S6086419A
Authority
JP
Japan
Prior art keywords
deviation
flow rate
measured value
differential pressure
low flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19344683A
Other languages
Japanese (ja)
Inventor
Yasuhiro Kano
加納 泰宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP19344683A priority Critical patent/JPS6086419A/en
Publication of JPS6086419A publication Critical patent/JPS6086419A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Abstract

PURPOSE:To prevent a generation of frequent alarms with respect to large deviation and measurement interception, etc. during a low flow rate by judging a pressure difference due to large and small deviations of plural measured values of plural pressure difference detectors to determine the measured value, and enlarging the permissible deviation during the low flow rate. CONSTITUTION:The plural pressure difference detectors 23, 24 detect the pressure difference between up and down stream sides of an orifice and convert it to an electrical signal. The electrical signal is converted to a flow rate signal through an input device 25 and an input processing means 26. Next, an appropriate measured value is determined through a deviation quantity detecting means 27 for detecting the deviation quantity between two flow rates, a permissible deviation selecting means 28 for indicating the permissible deviation to the deviation quantity detecting means, and an appropriate measured value determining means 29 for determining the appropriate measured value. The permittable deviation is enlarged during the low flow rate in which measuring error is large. Thereby, generation of frequent alarms due to the large deviation and the measuring interception, etc. during the low flow rate can be prevented.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明はオリフィス、ノズル等の絞シ機構を用いた流体
の流量測定装flK関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a fluid flow rate measuring device flK using a throttling mechanism such as an orifice or a nozzle.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

流体の流量測定方法としてオリフィス、ノズル等の絞り
機構を流体の通過する導管内に設置し、絞り機構の上流
側の圧力上下流側の圧力との差(差圧)から流体の流量
を測定する方法が一般に行なわれている。そして測定値
がプロセス制御等に用いられる場合等特に信頼度を要求
される場合、測定値の妥当性を判断するために1つの絞
り機構に複数の差圧検出器を設け、そのうちの2つの測
定値の偏差の大小によって2つの測定値の妥当性全判断
している。すなわち、偏差があらかじめ決められた許容
偏差を越えた場合に、入力不良として警報を発したり、
測定を中止したり、この測定値を用いている制御を中止
し7Ijvすることが行なわれる。
To measure fluid flow rate, a restriction mechanism such as an orifice or nozzle is installed in a conduit through which the fluid passes, and the fluid flow rate is measured from the difference (differential pressure) between the pressure on the upstream side of the restriction mechanism and the pressure on the downstream side. The method is commonly used. When reliability is particularly required, such as when measured values are used for process control, etc., multiple differential pressure detectors are installed in one throttle mechanism to determine the validity of the measured values, and two of them are used to measure The validity of two measured values is determined based on the magnitude of the deviation of the values. In other words, if the deviation exceeds a predetermined tolerance, an alarm will be issued as an input failure, or
Measurement is stopped or control using this measured value is stopped and 7Ijv is performed.

しかしながら、絞り機構ケ用いた流量計測方法では低流
量域での流量測定誤差が大きく、従来許容偏差が全流量
域で一足であったために、低流量時に人力した差圧のわ
ずかな誤差によって偏差が許容偏差を逸脱して頻繁に警
報が発生したり、流量がOから徐々に増加している迷中
の低流量域で、偏差大となって、この測定値を用いてい
る制御を中止されるといった不具合が発生していた。
However, the flow rate measurement method using a throttling mechanism has a large flow rate measurement error in the low flow rate range, and conventionally the allowable deviation was one foot over the entire flow rate range, so a slight error in the manually applied differential pressure at low flow rates can cause deviations. If the tolerance deviation is exceeded and alarms are generated frequently, or in a low flow area where the flow rate is gradually increasing from O, the deviation becomes large and the control using this measured value is stopped. Problems such as this were occurring.

以下に低流量時の流量測距誤差について説明する。流量
を絞り機構の上流側、下流側の圧力の差(差圧)からめ
る場合、流量は差圧の平方根に比例し、低流量時には差
圧の誤差に対する流量変化が大きく誤差が大きくなる。
The flow rate measurement error at low flow rates will be explained below. When the flow rate is calculated from the difference in pressure between the upstream side and the downstream side of the throttle mechanism (differential pressure), the flow rate is proportional to the square root of the differential pressure, and at low flow rates, the flow rate change with respect to the error in the differential pressure is large, and the error becomes large.

第1図は差圧Pと流量Qとの関係を表わした図であり、
横軸が差圧P、縦軸が流量Qであり、流量Qは差圧Pの
平方根に比例する。胃流量時は差圧の変化△P2に対す
る流量の変化△Q2は小さいが、低流量時の差圧の変化
ΔP4に対する流量の変化ΔQ4はこれに比べ大きくな
る。したがって低流“量時すなわち低差圧時の計測した
差圧の誤差は流量に変換するときわめて大きな誤差とな
る。
FIG. 1 is a diagram showing the relationship between differential pressure P and flow rate Q.
The horizontal axis is the differential pressure P, the vertical axis is the flow rate Q, and the flow rate Q is proportional to the square root of the differential pressure P. At the time of gastric flow, the change in flow rate ΔQ2 with respect to the change in differential pressure ΔP2 is small, but the change in flow rate ΔQ4 with respect to the change in differential pressure ΔP4 at the time of low flow rate is larger than this. Therefore, the error in the differential pressure measured when the flow rate is low, that is, when the differential pressure is low, becomes an extremely large error when converted to a flow rate.

〔発明の目的〕[Purpose of the invention]

本発明の目的は測定値の誤差が大きくなる低流量時に発
生する測定値の偏差大によって、頻繁に警報が発生した
り、測定値の用いられている制御が中止されたりするこ
とを防止することにある。 −〔発明の概要〕 本発明は絞り機構と差圧検出器を用いた流体の流量計測
装置に関して差圧検出器を複数台設け、複数の測定値を
得て、これらを相互に比較し、その偏差の大小で測定値
の妥当性を判断し、その結果から複数の測定値から妥当
な測定値を決定する流量の計測装置であり、測定誤差の
大きい低流量時には許容偏差を大きくすることによって
、低流量時の頻繁な偏差大警報の発生計測中止等を防止
することを特徴とする。
The purpose of the present invention is to prevent frequent alarms from being generated or control using measured values to be stopped due to large deviations in measured values that occur at low flow rates when the errors in measured values become large. It is in. - [Summary of the Invention] The present invention relates to a fluid flow rate measuring device using a throttle mechanism and a differential pressure detector. This is a flow rate measuring device that determines the validity of a measured value based on the magnitude of the deviation, and then determines a valid measured value from multiple measured values.By increasing the allowable deviation at low flow rates with large measurement errors, It is characterized by preventing frequent occurrence of large deviation alarms and suspension of measurement during low flow rates.

〔発明の実施例〕[Embodiments of the invention]

以下本発明の一実施例を第2図および第3図を参照して
説明する。第2図は本発明の実施例を示す流量計測装置
の全体構成図である。21は流体の流れる導管、22は
導管内に設けられた絞り機構の一種でおるオリアイス2
3.24はオリフィスの上流側と下流側の差圧を検出し
これを電気信号に変換する差圧検出器、25はこの電気
信号を入力する入力装置、26は入力装置より2つの差
圧信号を入力しこれらを流量に変換する入力処理手段、
27は変換された2つの流量の偏差人を検出する偏差大
検用手段、28は偏差太検出手段に許容偏差を指示する
許容偏差選択手段、29は2つの流量から妥当な測定値
を決定する妥当測定値決定手段であり、30は偏差大検
出時にしかるべき処理を行なう偏差入処理手段である。
An embodiment of the present invention will be described below with reference to FIGS. 2 and 3. FIG. 2 is an overall configuration diagram of a flow rate measuring device showing an embodiment of the present invention. Reference numeral 21 indicates a conduit through which fluid flows, and 22 indicates an oriice 2, which is a type of throttling mechanism provided within the conduit.
3.24 is a differential pressure detector that detects the differential pressure between the upstream and downstream sides of the orifice and converts it into an electrical signal, 25 is an input device that inputs this electrical signal, and 26 is a differential pressure signal that receives two differential pressure signals from the input device. input processing means that inputs and converts these into flow rates;
27 is a large deviation detection means for detecting the deviation of the two converted flow rates; 28 is an allowable deviation selection means for instructing the deviation detection means to an allowable deviation; and 29 is for determining an appropriate measured value from the two flow rates. It is a valid measured value determining means, and 30 is a deviation input processing means that performs appropriate processing when a large deviation is detected.

第3図は第2図における入力処理手段26、偏差大検用
手段27、許容偏差選択手段28、妥当測定値決定手段
29、偏差入処理手段30の動作全示すフローチャート
である。31.32は入力処理手段26で行なわれ、3
1は入力装置を用いて差圧検出器よりの電気信号を入力
し、これ以降の処理に適し比信号に変換する処理であり
、32は2つの差圧検出器の測定した差圧D1.Dt’
rそれぞれ流量f、、f、に変換する処理である。f、
、f、は第2図に示すように、偏差大検用手段27.許
容偏差選択手段28、妥当測定値決定手段29へ送られ
る。
FIG. 3 is a flowchart showing all the operations of the input processing means 26, the large deviation inspection means 27, the allowable deviation selection means 28, the appropriate measured value determination means 29, and the deviation input processing means 30 in FIG. 31 and 32 are performed by the input processing means 26, and 3
1 is a process of inputting an electrical signal from a differential pressure detector using an input device and converting it into a ratio signal suitable for subsequent processing, and 32 is a process of inputting an electrical signal from a differential pressure detector using an input device, and 32 is a process of inputting an electrical signal from a differential pressure detector using an input device, and 32 is a process of inputting an electrical signal from a differential pressure detector using an input device, and converting it into a ratio signal suitable for subsequent processing. Dt'
This process converts r into flow rates f, , f, respectively. f,
, f, as shown in FIG. It is sent to the allowable deviation selection means 28 and the appropriate measured value determination means 29.

35は許容備差選択手段28にて行なわれ、計測した流
:11t f1+ ftの大小によって2つの測定値の
許容偏差として厳しい値fL1と緩い値fr、tのどち
らを選択するかを判断する処理であり、2つの測定され
た流量f、とf2の算術平均があらかじめ決められた許
容偏差切換値foe:v大きいかどうかでfLlまたは
fI、tが選択される。許容偏差fL1 、fLl及び
許容偏差切換値fDは流量計測範囲、差圧検出器の精度
、要求されている計測精度等を勘案して決定されるがた
とえば次の様な基準で決定できる。
35 is carried out by the tolerance selection means 28, and is a process of determining which of the strict value fL1 and the relaxed value fr, t should be selected as the tolerance deviation between the two measured values, depending on the magnitude of the measured flow: 11t f1 + ft. fLl or fI,t is selected depending on whether the arithmetic mean of the two measured flow rates f and f2 is greater than a predetermined tolerance deviation switching value foe:v. The allowable deviations fL1, fLl and the allowable deviation switching value fD are determined by taking into account the flow rate measurement range, the accuracy of the differential pressure detector, the required measurement accuracy, etc., and can be determined based on, for example, the following criteria.

差圧検出器のもつ誤差を流量に換′Nすると、流量の誤
差は低流量になる程大きくなる7、この誤差が要求精度
をみたすための許容誤差fmを越える点を許容偏差切換
値fDとし、この値以上では許容偏差fL1を許容誤差
fI11&シこれ以下では偏差大が頻繁に発生しない程
度の値にすることにより許容偏差切換値fD以上の流量
計測時は要求精度を保つよう偏差太監視を行ない、fD
以下の流量計測時は頻繁に偏差大とならない様調整でき
る。
When the error of the differential pressure detector is converted into a flow rate, the error in the flow rate becomes larger as the flow rate becomes lower7.The point at which this error exceeds the tolerance fm to satisfy the required accuracy is defined as the tolerance switching value fD. , above this value, the allowable deviation fL1 is set to a value that does not cause large deviations frequently, and below this value, the deviation is monitored to maintain the required accuracy when measuring the flow rate above the allowable deviation switching value fD. conduct, fD
Adjustments can be made to prevent frequent deviations when measuring the following flow rates.

36.37は偏差大検用手段27で行なわれ35で選択
され次許容偏差fL1またはfLgt’2つの測足流i
t: f+ 、 h間の偏差が越えているかどうかの判
断を行なう処理であり、許容偏差として厳しい値fLl
が選択されていれば36の処理が行なわれ、緩い値fL
2が選択されていれば37の処理が行なわれる。36 
、37の処理では、2つの測定値の偏差が選択されてい
る許容偏差より大のときは偏差入処理手段30にて38
の偏差犬侍の処理が行なわれ警報の出力や、この測’?
L (ti、 f:用いている制御の中止等の処理全行
ない、許容偏差以下であれば、測定値は妥当な値である
として、妥当測定値状足手段29によりたとえば両者の
平均値金とって測定値とする39の処理が行なわれる。
36.37 is carried out by the large deviation checking means 27, and the next allowable deviation fL1 or fLgt' selected in 35 is the two measurement flows i.
t: This is a process to judge whether the deviation between f+ and h exceeds the strict value fLl as an allowable deviation.
is selected, 36 processes are performed and a loose value fL
If 2 is selected, processing 37 is performed. 36
, 37, when the deviation between the two measured values is larger than the selected tolerance deviation, the deviation input processing means 30
The deviation of Inu Samurai is processed and the alarm output or this measurement'?
L (ti, f: If all processes such as stopping the control being used have been carried out and the measured value is below the allowable deviation, the measured value is considered to be a valid value, and the valid measured value footing means 29 calculates, for example, the average value of both. 39 processes are performed to obtain a measured value.

以上の処理によって低流量時には2つの測定値の許容偏
差を中高流量時より大とすることができる。
By the above processing, the allowable deviation between the two measured values can be made larger at low flow rates than at medium and high flow rates.

〔発明の効果〕〔Effect of the invention〕

以上の説明のように絞り機構と多重化された差圧検出器
上用いた流量計測装置に関して、多重化された差圧検出
器の複数の測定値の偏差の大小によって測定値の妥当性
を判断し、その結果によつ測定誤差の大きくなる低流量
時に頻繁に偏差大となって入力不良として警報が発生し
たり、測定値を用いて行なわれている制御を中止したり
することが抑制でき、かつ本来偏差大全検出すべき中高
流量域では従来の偏差大監視を行なうことが可能である
As explained above, regarding the flow rate measuring device used on the throttle mechanism and the multiplexed differential pressure detector, the validity of the measured value is determined based on the magnitude of the deviation of multiple measured values of the multiplexed differential pressure detector. As a result, it is possible to prevent deviations from frequently occurring at low flow rates, where measurement errors become large, resulting in alarms due to input failures, or from stopping control that is being performed using measured values. , and it is possible to carry out conventional large deviation monitoring in medium and high flow rate ranges where all deviations should be detected.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は絞り機構を用いた流体の流量測定において、計
測した差圧と流量との関係を示す特性図、第2図は本発
明の実施例を示す流量計測装置の全体構成図、第3図は
本発明の流量計測装置の動作を示すフローチャートであ
る。 21・・・導管 22・・・オリフィス23 、24・
・・差圧検出器 25・・・入力装置26・・・入力処
理手段 27・・・偏差大検山手段28・・・許容偏差
検出手段 29・・・妥当測定値状足手段 30・・・偏差入処理手段
Fig. 1 is a characteristic diagram showing the relationship between the measured differential pressure and the flow rate in fluid flow rate measurement using a throttle mechanism, Fig. 2 is an overall configuration diagram of a flow rate measuring device showing an embodiment of the present invention, and Fig. 3 The figure is a flowchart showing the operation of the flow rate measuring device of the present invention. 21... Conduit 22... Orifice 23, 24.
... Differential pressure detector 25 ... Input device 26 ... Input processing means 27 ... Large deviation detection means 28 ... Allowable deviation detection means 29 ... Valid measurement value foot means 30 ... Deviation input processing means

Claims (1)

【特許請求の範囲】[Claims] 流体の流れる導管内に設けられた絞り機構と絞り機構の
上流側と下流側の圧力差を検出する複数の差圧検出器と
、これら検出器からの信号を入力装置を介して読込む入
力処理手段と、複数の検出器からの測定値の偏差を検出
する偏差検出手段と、測定誤差の大きい低流量時には大
きい許容偏差を選択し測定誤差の小さい高流量時には小
さい許容偏差を選択する許容備差選択手段と、前記偏差
検出手段で検出された測定値の偏差が前記許容偏差より
大のときは警報を出力しそれ以外のときは妥当な測定値
全算出する偏差検出手段とからなる流体の流量測定装置
A throttling mechanism installed in a conduit through which fluid flows, multiple differential pressure detectors that detect the pressure difference between the upstream and downstream sides of the throttling mechanism, and input processing that reads signals from these detectors via an input device. a deviation detection means for detecting the deviation of measured values from multiple detectors; and a tolerance detection means for selecting a large tolerance deviation at low flow rates with a large measurement error and selecting a small tolerance deviation at high flow rates with a small measurement error. A fluid flow rate comprising a selection means and a deviation detection means that outputs an alarm when the deviation of the measured value detected by the deviation detection means is larger than the permissible deviation, and otherwise calculates all reasonable measured values. measuring device.
JP19344683A 1983-10-18 1983-10-18 Apparatus for measuring flow rate of fluid Pending JPS6086419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19344683A JPS6086419A (en) 1983-10-18 1983-10-18 Apparatus for measuring flow rate of fluid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19344683A JPS6086419A (en) 1983-10-18 1983-10-18 Apparatus for measuring flow rate of fluid

Publications (1)

Publication Number Publication Date
JPS6086419A true JPS6086419A (en) 1985-05-16

Family

ID=16308124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19344683A Pending JPS6086419A (en) 1983-10-18 1983-10-18 Apparatus for measuring flow rate of fluid

Country Status (1)

Country Link
JP (1) JPS6086419A (en)

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