JPS608625B2 - Characteristic testing equipment for semiconductor devices - Google Patents
Characteristic testing equipment for semiconductor devicesInfo
- Publication number
- JPS608625B2 JPS608625B2 JP50116614A JP11661475A JPS608625B2 JP S608625 B2 JPS608625 B2 JP S608625B2 JP 50116614 A JP50116614 A JP 50116614A JP 11661475 A JP11661475 A JP 11661475A JP S608625 B2 JPS608625 B2 JP S608625B2
- Authority
- JP
- Japan
- Prior art keywords
- test
- characteristic
- tests
- results
- semiconductor devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
【発明の詳細な説明】
本発明は半導体装置の特性試験に使用する特性試験装置
、特に、自動ゥェハープローバーのような装置を外部に
接続することができる特性試験装置を使用した半導体装
置の特性試験装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a characteristic testing apparatus used for characteristic testing of semiconductor devices, and in particular to a characteristic testing apparatus that can be connected to an external device such as an automatic wafer prober. This relates to a characteristic testing device.
一般に半導体装置の特性を試験するための装置としては
特性試験器があるが高速で大量に試験することを目的と
して自動ウェハープローバーやオートハンドラー等の機
器を接続している。Characteristic testers are generally used to test the characteristics of semiconductor devices, but they are connected to devices such as automatic wafer probers and autohandlers for the purpose of high-speed, large-volume testing.
しかしながら高速で大量に試験できるため、特性試験器
や接続機器の故障に気付かずに試験を行った場合には大
量の不良品を出してしまう。However, since it is possible to test a large number of products at high speed, if a test is performed without noticing a failure in the characteristic tester or connected equipment, a large number of defective products will be produced.
従って特性試験器や接続機器の故障は勿論のことゥェハ
ーの特性試験における半導体装置の電極に対する探針の
位置ズレ等は厳重にチェックされねばならない。従来、
これらチェックやチェック後の装置の停止はオペレータ
ーに一任されている。しかし、高速で大量に特性試験を
行っている場合、オペレーターが試験状態の異常に気付
いたときは既に大量の半導体装置の試験が終了しており
、大量の不良品を生産することになる。従って特性試験
器や接続機器を停止させる判断をオペレーターに依存す
ることは最良の策とは言えない。本発明の目的は特性試
験における歩蟹りの異常を検出させて試験を自動的に停
止させる装置を提供することにある。本発明によれば特
性試験における試験数と試験結果数、例えば平均的な不
良数や良品数をスイッチとカウンター等を用いて予め設
定しておく設定手段と、実際の試験の試験数と試験結果
数を蓄積する電気的或は機械的に動作するカウンター等
の蓄積手段と、試験結果数の設定値に対する蓄積値を比
較し蓄積値が設定値に等しいかそれ以上の場合、逆に蓄
積値が設定値に等しいかそれ以下の場合にそれぞれ停止
信号を発し試験を自動停止する手段と、停止信号を発す
る前記条件を満さぬ場合は蓄積値をクリヤーすると共に
停止信号を発せずに試験を続行する手段とを有し、これ
らは自動ゥェハープローバ−やオートハンドラー等と連
動させる構成とする。Therefore, not only malfunctions of the characteristic tester and connected equipment but also misalignment of the probe with respect to the electrode of the semiconductor device during the wafer characteristic test must be strictly checked. Conventionally,
These checks and stopping the equipment after the checks are left to the operator. However, when a large number of characteristic tests are performed at high speed, by the time an operator notices an abnormality in the test state, a large number of semiconductor devices have already been tested, resulting in a large number of defective products being produced. Therefore, relying on the operator to make the decision to stop the characteristic tester or connected equipment is not the best solution. SUMMARY OF THE INVENTION An object of the present invention is to provide an apparatus that detects an abnormality in gait in a characteristic test and automatically stops the test. According to the present invention, there is provided a setting means for presetting the number of tests and the number of test results in a characteristic test, for example, the average number of defects and the number of non-defective products using a switch, a counter, etc., and the number of tests and test results of an actual test. Compare the accumulation means such as an electrically or mechanically operated counter that accumulates the number with the accumulated value against the set value of the test result number, and if the accumulated value is equal to or greater than the set value, conversely, the accumulated value is A means for automatically stopping the test by issuing a stop signal when the value is equal to or less than the set value, and a means for automatically stopping the test by issuing a stop signal when the above conditions for issuing the stop signal are not met, clearing the accumulated value and continuing the test without issuing the stop signal. These devices are configured to operate in conjunction with an automatic wafer prober, an automatic handler, or the like.
しかる後特・性試験をする品種に合せて設定手段に試験
数と結果数と結果数以下の場合に停止信号を発するよう
に設定しておく。このようにして特性試験を実行すれば
、試験数の設定値と蓄積値が一致したら結果数の設定値
と蓄積値が比較される。その結果設定値以上の場合はそ
れまでの蓄積値をクリヤーすると同時に試験を続行する
。一方設定値以下の場合は停止信号を発し特性試験を自
動停止することができる。Thereafter, the setting means is set to issue a stop signal when the number of tests, the number of results, and the number of results are equal to or less than the number of results, depending on the variety to be tested. When the characteristic test is executed in this manner, if the set value for the number of tests and the accumulated value match, the set value for the number of results and the accumulated value are compared. If the result is higher than the set value, the accumulated value up to that point is cleared and the test is continued at the same time. On the other hand, if the value is below the set value, a stop signal can be issued to automatically stop the characteristic test.
この時結果数を測定品種の平均良品数に設定すれば、異
常に低い歩留りの場合は自動的に特性試験を停止するた
め特性試験器やブローバ一等の故障による歩蟹りの低下
は最少限で防止できる。又、本発明は再特性試験ができ
もこくいウェハー特性試験の場合にその効果は大である
。At this time, if the number of results is set to the average number of non-defective products of the measured product, the characteristic test will automatically stop if the yield is abnormally low, so the decrease in yield due to failure of the characteristic tester, blower, etc. will be minimized. This can be prevented. Further, the present invention is highly effective in wafer characteristic tests where re-characteristic tests are difficult.
以下、本発明を図面を参照して説明する。Hereinafter, the present invention will be explained with reference to the drawings.
第耳図は従来における特性試験方法を説明するためのブ
ロック図である。Diagram No. 2 is a block diagram for explaining a conventional characteristic testing method.
まず被試験素子を特性試験する場合、特性試験器１‘こ
自動ゥェハープローバーやオートハンドラー等の接続装
置２をケーブル３で接続し連動させる。この方法は試験
中の歩留り低下等の理由により試験の停止はオベレ−タ
ーの判断と操作に頼ることになり、常に監視している必
要があるし、異常をみつけたら直ちに装置を停止する操
作を必ずせねばならないことになる。第２図は本発明の
一実施例を示すブロック図である。本図によれば特性試
験器１と接続装置２の間には任意の数が設定できるスイ
ッチと電気的又は機械的カウンターから成る設定手段４
があり、これには試験数と試験結果数が設定できる。First, when performing a characteristic test on a device under test, a characteristic tester 1' is connected to a connecting device 2 such as an automatic wafer prober or an autohandler via a cable 3 and interlocked. This method relies on the judgment and operation of the operator to stop the test due to reasons such as a decrease in yield during the test, and constant monitoring is required, and if an abnormality is found, the operator must stop the test immediately. It will definitely have to be done. FIG. 2 is a block diagram showing one embodiment of the present invention. According to this figure, a setting means 4 is provided between the characteristic tester 1 and the connecting device 2, which consists of switches and electrical or mechanical counters that can be set in any number.
The number of tests and the number of test results can be set.
そしてこれと接続して実際の試験における試験数と結果
数６が蓄積できるカウンターと試験数の設定値と蓄積値
が一致した時結果数の設定値と蓄積値を比較して停止信
号７を発したり、発しない場合は蓄積値をクリヤーでき
る蓄積手段５があり、蓄積手段５からの停止信号７は援
続装置２を停止させる。即ち試験を停止させる。このよ
うな構成にしておいて、半導体ゥェハ−の特性試験を実
行する場合、実行前に測定品種（試験数＝Ａ，最少良品
数＝Ｂ）に合わせ、設定手段４を次の如く設定する。A counter is connected to this and can accumulate the number of tests and results 6 in the actual test, and when the set value of the number of tests and the accumulated value match, the set value of the number of results and the accumulated value are compared and a stop signal 7 is issued. There is a storage means 5 which can clear the stored value if the signal is not generated or not, and a stop signal 7 from the storage means 5 causes the support device 2 to stop. In other words, the test is stopped. With such a configuration, when performing a characteristic test of a semiconductor wafer, the setting means 4 is set as follows in accordance with the type of test (number of tests=A, minimum number of non-defective products=B) before the test is performed.
（試験数＝１′３Ａ，結果数＝良品数＝１′３Ｂ，停止
条件＝１′３Ｂ以下）しかる後、試験を実行すると素子
１ケの試験が終了する毎に試験数と結果数６は蓄積手段
５に蓄積され試験数の設定値と蓄積値が一致（１′３Ａ
）すると良品数の蓄積値が設定値と比較され停止条件を
満せば試験は自動で停止される。即ち特性試験器ｈや接
続装置２の故障による歩蟹りの低下は最少限で防止でき
ることになる。又停止条件を満さない場合は蓄積値をク
リヤーすると共に試験は続行され同様な動作を繰り返す
。勿論結果数は良品数の代りに不良数でも良いし、停止
条件も以上でも以下でも任意に選ぶことができる。第３
図は本発明の他の実施例を示すブロック図である。本図
は第２図の機能に停止したことをオベレ−ターに警告す
るランプ８やブザー９が付加されたもので「停止信号７
１こよりランプ８やブザー９が動作し、オペレーターに
報知する方法である。又、蓄積手段や設定手段を接続装
置や特性試験器に備えても良いし、電気的又は機械的カ
ウンターの代りにコンピュータ−の記憶装置のソフトウ
ェア−を使用しても本発明を実現できる。(Number of tests = 1'3A, number of results = number of non-defective products = 1'3B, stopping condition = 1'3B or less) After that, when the test is executed, the number of tests and the number of results 6 will increase every time the test of one element is completed. The set value of the number of tests accumulated in the accumulation means 5 and the accumulated value match (1'3A
) Then, the accumulated value of the number of non-defective products is compared with the set value, and if the stop conditions are met, the test is automatically stopped. In other words, a decrease in speed due to failure of the characteristic tester h or the connecting device 2 can be prevented to a minimum. If the stop condition is not satisfied, the accumulated value is cleared and the test is continued and the same operation is repeated. Of course, the number of results may be the number of defective products instead of the number of good products, and the stopping condition can be arbitrarily selected from above or below. Third
The figure is a block diagram showing another embodiment of the present invention. This diagram shows the function shown in Figure 2 with the addition of a lamp 8 and a buzzer 9 to warn the operator that the machine has stopped.
This is a method in which a lamp 8 and a buzzer 9 are activated from the first line to notify the operator. Further, the present invention can be implemented by providing the storage means and setting means in the connecting device or the characteristic tester, or by using software in a computer storage device instead of an electrical or mechanical counter.
第１図は従釆からの特性試験方法を示す図、第２図は本
発明の１実施例、第３図は本発明の他の実施例を示す図
。
１・・…・特性試験器、２…・・・自動ゥェハープロー
バーやオートハンドラー等の接続装置、３…・・・ケー
フル、４・・・・・・カウンター等の設定手段、５・・
…．カウンター等の蓄積手段、６…・・・試験数と結果
数、７・…・・停止信号、８…・・・ランプ、９…・・
・プザ−−。
袋′図
繁２図
愛３図FIG. 1 is a diagram showing a method for testing characteristics from a secondary structure, FIG. 2 is a diagram showing one embodiment of the present invention, and FIG. 3 is a diagram showing another embodiment of the present invention. 1...Characteristic tester, 2...Connection device such as automatic wafer prober or autohandler, 3...Cable, 4...Setting means for counter etc., 5...
…． Accumulating means such as a counter, 6... Number of tests and number of results, 7... Stop signal, 8... Lamp, 9...
・Puza-. Fukuro'Douji 2 Ai 3
Claims (1)
験回数を蓄積する第１の蓄積手段と、前記試験により良
または不良と判定された前記試験回数の少なくとも一方
の数を蓄積する第２の蓄積手段と、前記第１および第２
の蓄積手段に蓄積された結果に依存して前記試験を停止
する手段とを有することを特徴とする半導体装置の特性
試験装置。1. In a test device for testing characteristics of a semiconductor device, a first storage means for storing the number of times of testing, and a second storage means for storing at least one of the number of times of testing determined to be good or bad by the test. and the first and second
and means for stopping the test depending on the results accumulated in the accumulating means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50116614A JPS608625B2 (en) | 1975-09-26 | 1975-09-26 | Characteristic testing equipment for semiconductor devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50116614A JPS608625B2 (en) | 1975-09-26 | 1975-09-26 | Characteristic testing equipment for semiconductor devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5240979A JPS5240979A (en) | 1977-03-30 |
| JPS608625B2 true JPS608625B2 (en) | 1985-03-04 |
Family
ID=14691528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50116614A Expired JPS608625B2 (en) | 1975-09-26 | 1975-09-26 | Characteristic testing equipment for semiconductor devices |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS608625B2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4827501A (en) * | 1971-08-13 | 1973-04-11 | ||
| JPS5036553A (en) * | 1973-08-03 | 1975-04-05 |
-
1975
- 1975-09-26 JP JP50116614A patent/JPS608625B2/en not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4827501A (en) * | 1971-08-13 | 1973-04-11 | ||
| JPS5036553A (en) * | 1973-08-03 | 1975-04-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5240979A (en) | 1977-03-30 |
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