JPS6085840A - Supporting/moving device of movable table - Google Patents

Supporting/moving device of movable table

Info

Publication number
JPS6085840A
JPS6085840A JP19303083A JP19303083A JPS6085840A JP S6085840 A JPS6085840 A JP S6085840A JP 19303083 A JP19303083 A JP 19303083A JP 19303083 A JP19303083 A JP 19303083A JP S6085840 A JPS6085840 A JP S6085840A
Authority
JP
Japan
Prior art keywords
movable table
fixed
wire
compressed air
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19303083A
Other languages
Japanese (ja)
Inventor
Yasuo Shimoda
下田　靖雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP19303083A priority Critical patent/JPS6085840A/en
Publication of JPS6085840A publication Critical patent/JPS6085840A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/58—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To facilitate assembly, reduce the cost, improve precision, and attain a high speed by stretching and fitting a wire to a movable table in the moving direction of the movable table and pulling this wire a motor. CONSTITUTION:In a supporting/moving device of an air-floating movable table, facing surfaces between the movable table 17 and fixed rails 11, 12 are formed with a combination of V-grooves 11a, 12a and reverse V-lugs 17a, 17b, and an air hole 17c is formed in the table 17 so that compressed air is blown at the V-grooves 11a, 12a from the table 17. Next, when a DC servo motor 25 is rotated in the normal or reverse direction while compressed air is fed into a pipe 18 and with the table 17 being floated, a roller 23 is also rotated in the same direction, and the table 17 is moved to a predetermined position along the rails 11, 12 via wires 20, 21. According to this constitution, assembly is facilitated, the cost is reduced, and precision can be improved.

Description

【発明の詳細な説明】 （発明の利用分野） 本発明は可動テーブルの支持移動装置、特に空気浮動式
の可動テーブルの支持移動装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Application of the Invention) The present invention relates to an apparatus for supporting and moving a movable table, and more particularly to an apparatus for supporting and moving an air floating type movable table.

（従来技術） 最近、可動テーブルの支持移動装置は、摩耗の極小化、
振動の防止等の高性能が要求されてきた。(Prior art) Recently, movable table support and movement devices have been developed to minimize wear and
High performance such as vibration prevention has been required.

特に半導体、電子部品産業において用いられる可動テー
ブルの支持移動装置は、その要求が厳しい。Particularly strict requirements are placed on movable table support and movement devices used in the semiconductor and electronic component industries.

このため、従来、第１図に示すように、矩形状の固定レ
ール１に若干の空隙２をもって箱型の可動テーブル３を
組合せてなる。前記可動テーブル３には前記空隙２に連
通ずる細い穴３ａを設け、パイプ４より細い穴３ａに圧
縮空気を吹き込み、固定レール１の四方に高圧をかけ、
この時の圧縮空気によって可動テーブル３は固定レール
１より完全をこ浮き、力）つ相互の摩擦なしに可動テー
ブル３を固定レール１に対して移動させることができる
ようになっている。For this reason, conventionally, as shown in FIG. 1, a rectangular fixed rail 1 is combined with a box-shaped movable table 3 with a slight gap 2 between them. The movable table 3 is provided with a thin hole 3a that communicates with the gap 2, and compressed air is blown into the hole 3a, which is thinner than the pipe 4, to apply high pressure to all sides of the fixed rail 1.
The compressed air at this time causes the movable table 3 to completely float above the fixed rail 1, so that the movable table 3 can be moved relative to the fixed rail 1 without any mutual friction.

しかしながら、かかる構造は、固定Ｖ−ル１に箱型の可
動テーブル３を挿入してなるので、固定Ｖ−ル１及び可
動テーブル３の加工に高精度が要求され、コスト高にな
る。また製作誤差による空ができないという欠点があっ
た。However, in this structure, since the box-shaped movable table 3 is inserted into the fixed V-rule 1, high precision is required for machining the fixed V-rule 1 and the movable table 3, resulting in high costs. Another drawback was that it could not be blanked due to manufacturing errors.

また力）かる空気浮動式の可動テーブル３を移動させる
場合、従来は送りねじとナツトの螺合機構を用いている
ので、この部分のアライメント壷こ支配され無摩擦の意
味を失ってしまう。また送りねじの場合、送り方向の主
軸と各基を完全に一致させる芯出し作業は大変な労力を
要する。また送りねじの摩擦を減少及び送り精度を向上
させるために、送りねじに高価なボービレねじを使用し
なければならない。また送りねじによる駆動は可動テー
ブル３を高速で駆動することができないと共に、ねじの
バックラッシュによって高精度の送りができない。In addition, when moving the air-floating movable table 3, conventionally a threaded mechanism of a feed screw and a nut is used, so the alignment pot is dominated by this part and the meaning of frictionless is lost. Furthermore, in the case of a feed screw, it takes a lot of effort to center the main shaft in the feed direction and each base to perfectly match each other. Moreover, in order to reduce friction of the feed screw and improve feed accuracy, an expensive Beauvillet screw must be used for the feed screw. Further, driving by a feed screw cannot drive the movable table 3 at high speed, and also cannot perform highly accurate feeding due to backlash of the screw.

（発明の目的） 本発明の目的は、組立が容易で、コストダウン、高精度
化及び高速度化が図れる可動テーブルの支持移動装置を
提供することにある。(Object of the Invention) An object of the present invention is to provide a movable table support and movement device that is easy to assemble, reduces costs, and achieves high accuracy and high speed.

（発明の実施例） 以下、本発明の一実施例を第２図〜第５図により説明す
る。(Embodiment of the Invention) Hereinafter, an embodiment of the present invention will be described with reference to FIGS. 2 to 5.

まず、第２図、第４図により可動テーブルの支持装置に
ついて説明する。固定台１０上には、相対向面にＶ溝１
１ａ、１２ａがそれぞれ形成された２個の固定Ｖ−ル１
１．１２がそれぞれ固定ねじ１３．１４で固定されてい
る。前記一方の固定レール１１の前記固定ねじ１３が挿
通された穴１１ｂは、固定レール１１．１２間の幅が調
整できるように、’Ｖｌｌｌｌａの形成方向と直角方向
が長い長穴に形成されている。そして、固定Ｖ−ル１１
は固定台１０に固定された支持板１５ζこ螺合した調整
ねじ１６によって調整できるようになっている。First, the support device for the movable table will be explained with reference to FIGS. 2 and 4. On the fixed base 10, there is a V groove 1 on the opposing surface.
Two fixed V-rules 1 each formed with 1a and 12a.
1.12 are respectively fixed with fixing screws 13.14. The hole 11b of the one fixed rail 11 through which the fixing screw 13 is inserted is formed into a long hole that is long in the direction perpendicular to the direction in which the 'Vlllla is formed, so that the width between the fixed rails 11 and 12 can be adjusted. . And fixed V-ru 11
can be adjusted by an adjustment screw 16 screwed into a support plate 15ζ fixed to the fixed base 10.

前記固定レール１１．１２間には、固定レール１１．１
２のＶ溝１１ａ、１２ａへの対向面にそれぞれ逆Ｖ突部
１７ａ、１７ｂが形成された可動テーブル１７が固定レ
ール１１．１２と若干の空隙を保って配設されている。Between the fixed rails 11.12, there is a fixed rail 11.1.
A movable table 17 having inverted V protrusions 17a and 17b formed on the surface facing the V grooves 11a and 12a of No. 2, respectively, is arranged with a slight gap from the fixed rail 11.12.

前記可動チルプル１７１こは、前記固定Ｖ−／ｌ／１１
．１２のＶ溝１１ａ、１２ａ面にそれぞれ垂直に圧縮空
気を吹き付ける空気孔１７ｃが形成されており、この空
気孔１７ｃｄこは図示しないコンブＶツサに連結された
パイプ１８を通して圧縮空気が送り込まれるようになっ
ている。The movable tilt pull 171 is connected to the fixed V-/l/11
．． Air holes 17c for blowing compressed air perpendicularly are formed on the surfaces of the 12 V grooves 11a and 12a, respectively, and the air holes 17c are arranged so that the compressed air is sent through a pipe 18 connected to a kelp V shank (not shown). It has become.

そこで、固定レール１１．１２及び可動テーブル１７の
調整は、固定ねじ１３を緩め、調整ねじ１６を前後させ
て可動テーブル１゛７と固定レール１１．１２間が適当
な空隙をもち、かつ平行になるように調整し、その後に
固定ねじ１３を締付ける。Therefore, the fixed rail 11.12 and the movable table 17 can be adjusted by loosening the fixing screw 13 and moving the adjusting screw 16 back and forth so that the movable table 1-7 and the fixed rail 11.12 have an appropriate gap and are parallel to each other. After that, tighten the fixing screw 13.

そして、パイプ１８を通して可動テーブル１７の空気孔
１７ａに圧縮空気を送り込むと、固定レール１１．１２
のＶ溝１１ａ、１２ａに垂直に圧縮空気が作用する。今
、第５図１こ示すようｌこ、■溝１１ａ、１２ａに作用
する前記圧縮空気のカをＦ、Ｆとし、この力Ｆと水平方
向の角度をθとすると、前記力Ｆ、Ｆは上下（垂直）方
向の成分Ｆ。Then, when compressed air is sent into the air hole 17a of the movable table 17 through the pipe 18, the fixed rail 11.12
Compressed air acts perpendicularly to the V-grooves 11a and 12a. Now, as shown in FIG. Component F in the vertical (vertical) direction.

＝Ｆｓｉｎθ、Ｆ、と左右（水平）方向の成分Ｆ２＝２
　Ｆ　ｃｏｓθに分けられ、可動テーブル１７は固定レ
ール１１．１２より浮上する。=Fsinθ, F, and the component in the left and right (horizontal) direction F2 = 2
F cos θ, and the movable table 17 floats above the fixed rails 11.12.

このように、可動テーブル１７の両側に一燈空隙を保っ
てそれぞれ固定レール１１．１２を配設し、前記可動テ
ーブル１７と前記固定レール１１．１２との対向面をそ
れぞれＶ溝１１ａ、１２ａと逆■突起１７ａ、１７ｂの
組合せにより形成し、前記固定レール１１．１２の■溝
１１ａ、１２ａに前記可動テーブル１７より圧縮空気を
吹き付けるように前記可動テーブル１７に空気孔１７ｃ
を形成してなるので、前記固定レール１１．１２及び可
動テーブル１７の製作は容易でコストダウンが図れる。In this way, the fixed rails 11.12 are arranged on both sides of the movable table 17 with a gap between them, and the facing surfaces of the movable table 17 and the fixed rails 11.12 are formed into V grooves 11a and 12a, respectively. An air hole 17c is formed in the movable table 17 so as to blow compressed air from the movable table 17 into the grooves 11a and 12a of the fixed rail 11.12.
Since the fixed rails 11, 12 and the movable table 17 are easily manufactured, costs can be reduced.

また前記一方の固定レール１１の位置調整を行うことに
より、容易に可動テーブル１７と固定レール１１．１２
間の空隙及び平行度が調整でき、高精度化が図れる。Moreover, by adjusting the position of one of the fixed rails 11, the movable table 17 and the fixed rails 11 and 12 can be easily moved.
The gap between them and the parallelism can be adjusted to achieve high precision.

なお、上記実施例においては、固定レール１１．１２に
■溝１１ａ、１２ａを形成し、可動テーブル１７に逆Ｖ
突起１７Ｃを形成したが、逆に固定ｖ−／Ｌ／１１．１
２に逆■突起を、可動テーブル１７にＶ溝を形成しても
よい。In the above embodiment, grooves 11a and 12a are formed in the fixed rails 11 and 12, and an inverted V is formed in the movable table 17.
Protrusion 17C was formed, but on the contrary, fixed v-/L/11.1
The movable table 17 may be provided with an inverted 3-shaped protrusion and a V-groove on the movable table 17.

次に第２図、第３図により可動テーブルの移動装置につ
いて説明する。可動テーブル１７の重心を通る送り方向
に沿って可動テーブル１７に細いワイヤ２０．２１を張
り、図示しない固定部に回転自在に支承されたローラ２
２，２３にワイヤ２０．２１を適当数巻回し、ワイヤ２
ｏ、２１が緩まない′ようにワイヤ２０．２１の一端を
スプリング２４で接続してエンドＶスループに形成して
なる。また前記一方のローラ２３にはＤＣ（直流）サー
ボモータ２５が接続されている。Next, a movable table moving device will be explained with reference to FIGS. 2 and 3. A thin wire 20, 21 is stretched across the movable table 17 along the feeding direction passing through the center of gravity of the movable table 17, and the roller 2 is rotatably supported by a fixed part (not shown).
Wrap the wires 20 and 21 around wires 2 and 23 an appropriate number of times, and
One end of the wires 20 and 21 is connected with a spring 24 to form an end V-sloop so that the wires 20 and 21 do not come loose. Further, a DC (direct current) servo motor 25 is connected to the one roller 23 .

なお、ワイヤ２０．２１　ｊ、ＪエンドＶスループでな
くてもよい。例えばワイヤ２ｏの一端にスプリング２４
を固定し、このスプリング２４の一端をローラ２２又は
固定台１ｏに固定し、ワイヤ２１の一端はローラ２３に
巻回して直接ローラ２３に固定してもよい。Note that the wire 20.21j does not have to be a J-end V-sloop. For example, a spring 24 is attached to one end of the wire 2o.
may be fixed, one end of the spring 24 may be fixed to the roller 22 or the fixed base 1o, and one end of the wire 21 may be wound around the roller 23 and fixed directly to the roller 23.

従って、前記のようにパイプ１８（第４図参照）に圧縮
空気を送り込んで可動テーブル１７を浮上させた状態で
ＤＣサーボモータ２５を正又は逆転させると、ローラ２
３も同方向に回転し、ワイヤ２０．２１を介して可動テ
ーブル１７は固定レール１１．１２に沿って所定位置ま
で移動する。Therefore, when the DC servo motor 25 is rotated in the forward or reverse direction with the movable table 17 floating by sending compressed air into the pipe 18 (see FIG. 4) as described above, the roller 2
3 also rotates in the same direction, and via the wire 20.21 the movable table 17 is moved along the fixed rail 11.12 to a predetermined position.

この場合、可動テーブル１７の位置精度を高めるため、
第４図に示すように、可動テーブル１７の下端にはリニ
ヤスタンダードスケール３ｏが固定され、固定台１０に
はリニヤスタンダードスケール３０の目盛を無接触で読
み取る光学読取り器３１が固定されている。そして、Ｄ
Ｃサーボモータ２５を例えば第６図に示すようなりＣサ
ーボモータ制御回路で制御させる。In this case, in order to improve the positional accuracy of the movable table 17,
As shown in FIG. 4, a linear standard scale 3o is fixed to the lower end of the movable table 17, and an optical reader 31 for reading the scale of the linear standard scale 30 without contact is fixed to the fixed base 10. And D
The C servo motor 25 is controlled by a C servo motor control circuit as shown in FIG. 6, for example.

第６図に示すよ領こ、可動テーブル１７の停止位置指令
信号４０は比較器４１に入力され、比較器４１の出力信
号は増幅器４２、比較器４３、増幅器４４を経てＤＣサ
ーボモータ２５に入力され、タコジェネレータ４５が発
電してＤＣサーボモータ２５が回転する。これにより、
可動テーブル１７が移動する。可動テーブル１７の移動
量はリニヤスタンダードスケール３０を光学読取り器３
１が読取ることによりめられる。前記光学読取り器３１
のパルス信号はマイクロコンピュータ４６によってデー
タ処理信号変換４７され、アナログ領域に入ったら、パ
ルスとパルスの間にアナログ的なデータ処理が行われる
。前記データ処理信号変換４７の出力は補償回路４８を
経て前記比較回路４１に入力され、前記停止位置指令信
号４０が減算される。そして、比較器４１の出力信号が
零になるまで可動テーブル１７は駆動される。また前記
タコジェネレータ４５の出力は補償回路４９を経て比較
器４３に入力されるようになっており、安定回路を形成
している。As shown in FIG. 6, the stop position command signal 40 of the movable table 17 is input to a comparator 41, and the output signal of the comparator 41 is input to the DC servo motor 25 via an amplifier 42, a comparator 43, and an amplifier 44. Then, the tacho generator 45 generates electricity and the DC servo motor 25 rotates. This results in
The movable table 17 moves. The amount of movement of the movable table 17 is determined by measuring the linear standard scale 30 with the optical reader 3.
1 is determined by reading. The optical reader 31
The pulse signal is subjected to data processing signal conversion 47 by the microcomputer 46, and when it enters the analog domain, analog data processing is performed between the pulses. The output of the data processing signal conversion 47 is inputted to the comparison circuit 41 via a compensation circuit 48, and the stop position command signal 40 is subtracted therefrom. The movable table 17 is then driven until the output signal of the comparator 41 becomes zero. Further, the output of the tacho generator 45 is input to a comparator 43 via a compensation circuit 49, forming a stabilizing circuit.

このように、高価なボーＩしねじ、ナツト及びクロスロ
ーラ等を使用しないので、コストダウンが図れると共に
、バックラッシュもなく高精度の駆動ができ、更に組立
、芯合せも容易である。またワイヤ２０．２１を引張る
ことにより可動テーブル１７は移動するので、可動テー
ブル１７は無摩擦で駆動され、超高速の移動ができる。In this way, since expensive bow I screws, nuts, cross rollers, etc. are not used, costs can be reduced, high precision driving can be achieved without backlash, and assembly and alignment are also easy. Furthermore, since the movable table 17 is moved by pulling the wires 20 and 21, the movable table 17 is driven without friction and can be moved at extremely high speed.

またローラ２３、ＤＣサーボモータ２５に振動があって
も、その振動はワイヤ２０．２１で吸収されるので、可
動テーブル１７に影響を及ぼすことはなく、可動テーブ
ル１７は無振動で駆動される。ここで、圧縮空気を固定
Ｖ−ル１１．１２に吹き付けることによる乱流、渦流が
可動テーブル１７に及ぼす振動振幅は、実験によれば０
．１μｍ以下であり無視できる。またかかる空気浮動式
の可動テーブル１７では、可動テーブル１７の慣性が大
きく、急発振、急停止は非常に難しいが、ＤＣサーボモ
ータ２５の制御回路を閉ループとし、適当な補償回路４
８．４９を設けることで、これらの問題は解決される。Furthermore, even if there is vibration in the roller 23 or the DC servo motor 25, the vibration is absorbed by the wires 20, 21, so it does not affect the movable table 17, and the movable table 17 is driven without vibration. Here, according to an experiment, the vibration amplitude exerted on the movable table 17 by the turbulence and vortex flow caused by blowing compressed air onto the fixed V-ru 11.12 is 0.
．． It is less than 1 μm and can be ignored. In addition, in such an air-floating movable table 17, the inertia of the movable table 17 is large, and sudden oscillation and sudden stop are very difficult.
8.49 solves these problems.

更にＤＣサーボモータ２５に加わる入力信号もパルス系
列とアナログ式の組合せが併用でき、アナログ領域に入
ったら、その波形は適当な関数波形として発進、停止さ
せることができる。Furthermore, the input signal applied to the DC servo motor 25 can be a combination of a pulse series and an analog type, and once it enters the analog range, its waveform can be started and stopped as an appropriate function waveform.

（発明の効果） 本発明によれば、可動テーブルの両側ζこ一定空隙を保
ってそれぞれ固定レールを配設し、前記可動テーブルと
前記固定Ｖ−ルとの対向面をそれぞれＶ溝と逆Ｖ突起の
組合せにより形成し、前記固定レールの対向面に前記可
動テーブルより圧縮空気を吹き付けるようζこ前記可動
テーブルに空気孔を形成し、前記可動テーブルにワイヤ
を前記可動テーブルの移動方向に緊張させて取付け、前
記ワイヤをモータで引張るように構成してなるので、組
立が容易で、コストダウン、高精度化及び高速変化が図
れる。(Effects of the Invention) According to the present invention, the fixed rails are arranged on both sides ζ of the movable table while maintaining a constant gap, and the facing surfaces of the movable table and the fixed V-ru are formed into V grooves and inverted V grooves, respectively. An air hole is formed in the movable table so as to blow compressed air from the movable table onto the opposing surface of the fixed rail, and a wire is tensioned in the movable table in the moving direction of the movable table. Since the structure is such that the wire is attached by a motor and the wire is pulled by a motor, assembly is easy, and costs can be reduced, precision can be increased, and changes can be made at high speed.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例の原理を示し、（ａ）は斜視図、ｆｂ）
は断面図、第２図は本発明の一実施例を示す斜視図、第
３図は第２図の概略正面図、第４図は第２図の断面図、
第５図は空気浮動力のベクトル成分の説明図、第６図は
ＤＣサーボモータ制御回路の説明図である。 １１．１２・・・固定レール、　ｌｌａ、１２ａ・・・
Ｖ溝、　１７−・・可動テーブル、　１７ａ、１７ｂ・
・・逆Ｖ突起、　１７ｃ・・・空気孔、２０．２１・・
・ワイヤ、　２２．２３・・・ローラ、２４・・・スプ
リング、　２５・・・ＤＣサーボモータ。 第１図 第２図 第３図 第４図Figure 1 shows the principle of the conventional example, (a) is a perspective view, fb)
is a sectional view, FIG. 2 is a perspective view showing an embodiment of the present invention, FIG. 3 is a schematic front view of FIG. 2, and FIG. 4 is a sectional view of FIG. 2.
FIG. 5 is an explanatory diagram of the vector component of the air floating force, and FIG. 6 is an explanatory diagram of the DC servo motor control circuit. 11.12...Fixed rail, lla, 12a...
V groove, 17-...Movable table, 17a, 17b.
・・Inverted V protrusion, 17c・Air hole, 20.21・・
・Wire, 22.23...Roller, 24...Spring, 25...DC servo motor. Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

【特許請求の範囲】[Claims] 可動テーブルの両側に一定空隙を保ってそれぞれ固定レ
ールを配設し、前記可動テーブルと前記固定Ｖ−ルとの
対向面をそれぞれＶ溝と逆Ｖ突起の組合せにより形成し
、前記固定レールの対向面ｆこ前記可動テーブルより圧
縮空気を吹き付けるように前記可動テーブルに空気孔を
形成し、前記可動テーブルにワイヤを前記可動テーブル
の移動方向に緊張させて取付け、前記ワイヤをモータで
引張るように構成してなる可動テーブルの支持移動装置
。Fixed rails are arranged on both sides of the movable table with a constant gap maintained, and the opposing surfaces of the movable table and the fixed V-ru are each formed by a combination of a V groove and an inverted V protrusion, and the opposing surfaces of the fixed rail are formed by a combination of a V groove and an inverted V protrusion. An air hole is formed in the movable table so as to blow compressed air from the movable table, a wire is attached to the movable table under tension in the moving direction of the movable table, and the wire is pulled by a motor. A support and movement device for a movable table.
JP19303083A 1983-10-15 1983-10-15 Supporting/moving device of movable table Pending JPS6085840A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19303083A JPS6085840A (en) 1983-10-15 1983-10-15 Supporting/moving device of movable table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19303083A JPS6085840A (en) 1983-10-15 1983-10-15 Supporting/moving device of movable table

Publications (1)

Publication Number Publication Date
JPS6085840A true JPS6085840A (en) 1985-05-15

Family

ID=16300996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19303083A Pending JPS6085840A (en) 1983-10-15 1983-10-15 Supporting/moving device of movable table

Country Status (1)

Country Link
JP (1) JPS6085840A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0713748A1 (en) * 1994-11-24 1996-05-29 SMC Kabushiki Kaisha Linear Actuator
CN1294638C (en) * 2004-03-18 2007-01-10 上海交通大学 Air floation XY coordinates plane movoment platform
US7950883B2 (en) * 2008-02-04 2011-05-31 Yuehting Chen Compact engraving machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0713748A1 (en) * 1994-11-24 1996-05-29 SMC Kabushiki Kaisha Linear Actuator
CN1294638C (en) * 2004-03-18 2007-01-10 上海交通大学 Air floation XY coordinates plane movoment platform
US7950883B2 (en) * 2008-02-04 2011-05-31 Yuehting Chen Compact engraving machine

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