JPS6080656U - electron beam equipment - Google Patents

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はレンズ電流の正逆切換えに伴うヨーク内磁束密
度のヒステリシス特性を示すための図、第２図は本考案
の一実施例を示すための図、第３図は第２図に示した一
実施例装置の各回路よりの出力信号を例示するための図
である。 １：電子銃、２：集束レンズ、３：対物レンズ、４：試
料、５：偏向コイル、６：走査信号発生回路、７：陰極
線管、８：二次電子検出器、９：励磁゛電源、１０，１
２：スイッチ回路、１１：補助信号発生回路、１３：励
磁電流調節回路、１４，１６：切換信号発生回路、１５
，１７：オンオフスイッチ。Figure 1 is a diagram showing the hysteresis characteristics of the magnetic flux density in the yoke due to forward/reverse switching of the lens current, Figure 2 is a diagram showing an embodiment of the present invention, and Figure 3 is shown in Figure 2. FIG. 7 is a diagram illustrating output signals from each circuit of the device according to the embodiment. 1: Electron gun, 2: Focusing lens, 3: Objective lens, 4: Sample, 5: Deflection coil, 6: Scanning signal generation circuit, 7: Cathode ray tube, 8: Secondary electron detector, 9: Excitation power supply, 10,1
2: Switch circuit, 11: Auxiliary signal generation circuit, 13: Excitation current adjustment circuit, 14, 16: Switching signal generation circuit, 15
, 17: On-off switch.

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）電子銃よりの電子線を細く絞って試料に照射する
ための複数段の電子レンズより成るレンズ系と、該レン
ズ系によって絞られた電子線を二次元的に走査するため
の走査手段と、該走査に同期して走査され検出信号の供
給に基づいて試料像を表示するための表示装置と、前記
複数段の電子レンズ間相互の軸を合わせるための手段と
、該軸合わせに際して励磁電源から電子レンズに供給す
る電流の向きを正逆切換えるための極性反転手段とを備
えた装置において、該励磁電源は該対物レンズの焦点を
合わせるために任意の励磁電流を供給するための第１の
電源と１、電子レンズの励磁履歴を同一にするための一
定の励磁電流を発生する補助用の第２の電源とから成り
、前記電子レンズを該第１、第２の電源間で切換接続す
るための手段を具備していることを特徴とする電子線装
置。(1) A lens system consisting of a plurality of stages of electron lenses to narrow down the electron beam from the electron gun and irradiate the sample, and a scanning means to two-dimensionally scan the electron beam narrowed by the lens system. a display device that scans in synchronization with the scanning and displays a sample image based on the supply of a detection signal; a means for aligning the axes of the plurality of electron lenses; and excitation during the alignment. In the device, the excitation power supply has a polarity reversing means for switching the direction of the current supplied from the power supply to the electron lens, and the excitation power supply has a first polarity reversal means for supplying an arbitrary excitation current to focus the objective lens. and (1) an auxiliary second power source that generates a constant excitation current to make the excitation history of the electronic lens the same, and the electronic lens is switchably connected between the first and second power sources. An electron beam device characterized by comprising means for. （２）前記極性反転手段による極性の反転に伴なって、
自動的に該電子レンズを該第２の電源に一定時間接続し
た後、該第１の電源に接続するための手段を具備する実
用新案登録請求の範囲第（１）項記載の電子線装置。(2) Along with the polarity reversal by the polarity reversing means,
The electron beam apparatus according to claim (1) of the utility model registration, comprising means for automatically connecting the electron lens to the second power source for a certain period of time and then connecting it to the first power source. （３）該極性反転手段を周期的に作動させるための手段
を具備する実用新案登録請求の範囲第（１）項記載の電
子線装置。(3) The electron beam apparatus according to claim (1), which is provided with means for periodically operating the polarity reversing means.