JPS6078871U - surface treatment equipment - Google Patents

surface treatment equipment

Info

Publication number
JPS6078871U
JPS6078871U JP17019683U JP17019683U JPS6078871U JP S6078871 U JPS6078871 U JP S6078871U JP 17019683 U JP17019683 U JP 17019683U JP 17019683 U JP17019683 U JP 17019683U JP S6078871 U JPS6078871 U JP S6078871U
Authority
JP
Japan
Prior art keywords
cylindrical body
surface treatment
discharge pipe
tank
storage tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17019683U
Other languages
Japanese (ja)
Other versions
JPS6319331Y2 (en
Inventor
播磨　義忠
Original Assignee
大日本スクリーン製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリーン製造株式会社 filed Critical 大日本スクリーン製造株式会社
Priority to JP17019683U priority Critical patent/JPS6078871U/en
Publication of JPS6078871U publication Critical patent/JPS6078871U/en
Application granted granted Critical
Publication of JPS6319331Y2 publication Critical patent/JPS6319331Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例の断面図、第２図は他の従来例の断面図
、第３図は本考案に係る表面処理装置の１実施例を示す
断面図、第４図は他の実施例を示す要部斜視断面図であ
る。 １・・・・・・貯溜槽、２・・・・・・処理槽、３・・
・・・・排出管、１３・・・・・・スカート、１４・・
・・・・泡送り出し管。Fig. 1 is a sectional view of a conventional example, Fig. 2 is a sectional view of another conventional example, Fig. 3 is a sectional view showing one embodiment of the surface treatment apparatus according to the present invention, and Fig. 4 is another embodiment. FIG. 2 is a perspective sectional view of main parts. 1... Storage tank, 2... Processing tank, 3...
...Exhaust pipe, 13...Skirt, 14...
...Foam delivery pipe.

Claims (5)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）基板等に所定の処理液により表面処理を施す′た
めの処理槽、該処理槽に隣接し、当該処理槽から排出管
を介して排出される処理液を貯溜するための貯溜槽、前
記処理槽と貯溜槽との間に処理液を循環させるための手
段を備えた表面処理装置において、排出管の貯溜検測開
口部分に、その一端が貯溜槽の処扉液中に開口して空間
部分を形成すべく配設された筒状体と、該筒状体の空間
部分にその一端が連通ずる泡送り出し管と、該泡送り出
し管の他端に連通ずる排気チャンバーとから成る消泡手
段を付設したことを特徴とする表面処理装置。(1) A processing tank for surface-treating substrates etc. with a predetermined processing liquid; a storage tank adjacent to the processing tank for storing the processing liquid discharged from the processing tank via a discharge pipe; In the surface treatment apparatus equipped with a means for circulating the treatment liquid between the treatment tank and the storage tank, one end of the discharge pipe is opened into the treatment door liquid of the storage tank at the storage measurement opening part of the discharge pipe. A defoaming device comprising a cylindrical body arranged to form a space, a foam delivery pipe whose one end communicates with the space of the cylindrical body, and an exhaust chamber that communicates with the other end of the foam delivery pipe. A surface treatment device characterized by being equipped with means. （２）処理槽と貯溜槽とを上下に隣接し、筒状体の一端
を該処理槽の底部に固着した実用新案登録請求の範囲第
１項に記載の表面処理装置。(2) The surface treatment apparatus according to claim 1, which is a registered utility model, wherein a processing tank and a storage tank are vertically adjacent to each other, and one end of the cylindrical body is fixed to the bottom of the processing tank. （３）排出管と筒状体との間に、その一端が貯溜槽底部
に固着され、他端が開口した第２の筒状体を設けた実用
新案登録請求の範囲第１項もしくは第２項のいずれかに
記載の表面処理装置。(3) Utility model registration claim 1 or 2, in which a second cylindrical body is provided between the discharge pipe and the cylindrical body, one end of which is fixed to the bottom of the storage tank and the other end is open. The surface treatment device according to any one of paragraphs. （４）排出管と第２の筒状体との間、もしくは筒状体と
第２の筒状体との間１こ螺旋状の傾斜板を付設した実用
新案請求の範囲第３項に記載の表面処理装置。(4) A utility model according to claim 3, in which a spiral inclined plate is provided between the discharge pipe and the second cylindrical body or between the cylindrical body and the second cylindrical body. surface treatment equipment. （５）　　排気チャンバー内にミストキャッチャ−を設
けた実用新案登録請求の範囲第１項乃至第４項のいずれ
かに記載の表面処理装置。(5) The surface treatment apparatus according to any one of claims 1 to 4, which is provided with a mist catcher in the exhaust chamber.
JP17019683U 1983-11-02 1983-11-02 surface treatment equipment Granted JPS6078871U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17019683U JPS6078871U (en) 1983-11-02 1983-11-02 surface treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17019683U JPS6078871U (en) 1983-11-02 1983-11-02 surface treatment equipment

Publications (2)

Publication Number Publication Date
JPS6078871U true JPS6078871U (en) 1985-06-01
JPS6319331Y2 JPS6319331Y2 (en) 1988-05-30

Family

ID=30371608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17019683U Granted JPS6078871U (en) 1983-11-02 1983-11-02 surface treatment equipment

Country Status (1)

Country Link
JP (1) JPS6078871U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001032081A (en) * 1999-07-19 2001-02-06 Electroplating Eng Of Japan Co Additive feeding device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001032081A (en) * 1999-07-19 2001-02-06 Electroplating Eng Of Japan Co Additive feeding device

Also Published As

Publication number Publication date
JPS6319331Y2 (en) 1988-05-30

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