JPS607044U - semiconductor pressure sensor - Google Patents

semiconductor pressure sensor

Info

Publication number
JPS607044U
JPS607044U JP9967483U JP9967483U JPS607044U JP S607044 U JPS607044 U JP S607044U JP 9967483 U JP9967483 U JP 9967483U JP 9967483 U JP9967483 U JP 9967483U JP S607044 U JPS607044 U JP S607044U
Authority
JP
Japan
Prior art keywords
pressure sensor
semiconductor pressure
diaphragm
abstract
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9967483U
Other languages
Japanese (ja)
Inventor
新免　徹
上田　尚武
Original Assignee
株式会社フジクラ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社フジクラ filed Critical 株式会社フジクラ
Priority to JP9967483U priority Critical patent/JPS607044U/en
Publication of JPS607044U publication Critical patent/JPS607044U/en
Pending legal-status Critical Current

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Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図は各々従来の半導体圧力センサの構成を
示す断面図、第３図、第４図は各々この考案の実施例に
よる半導体圧力センサの構成を示す断面図、第５図イ９
口は各々、第３図、第４図に示す実施例におけるダイヤ
フラム１１の構成を示す断面図および下面図である。 １１・・・・・・ダイヤフラム、１２・・・・・・突起
。1 and 2 are cross-sectional views showing the structure of a conventional semiconductor pressure sensor, FIG. 3 and 4 are cross-sectional views showing the structure of a semiconductor pressure sensor according to an embodiment of this invention, and FIG. 9
The openings are a sectional view and a bottom view showing the structure of the diaphragm 11 in the embodiment shown in FIGS. 3 and 4, respectively. 11...Diaphragm, 12...Protrusion.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ダイヤフラムに形成された抵抗体の抵抗値の変化に基づ
いて被測定媒体の圧力を検出する半導体圧力センサにお
いて、前記ダイヤフラムの内面の中央部に突起を形成し
てなる半導体圧力センサ。A semiconductor pressure sensor that detects the pressure of a medium to be measured based on a change in the resistance value of a resistor formed on a diaphragm, the semiconductor pressure sensor comprising a protrusion formed in the center of the inner surface of the diaphragm.
JP9967483U 1983-06-28 1983-06-28 semiconductor pressure sensor Pending JPS607044U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9967483U JPS607044U (en) 1983-06-28 1983-06-28 semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9967483U JPS607044U (en) 1983-06-28 1983-06-28 semiconductor pressure sensor

Publications (1)

Publication Number Publication Date
JPS607044U true JPS607044U (en) 1985-01-18

Family

ID=30236116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9967483U Pending JPS607044U (en) 1983-06-28 1983-06-28 semiconductor pressure sensor

Country Status (1)

Country Link
JP (1) JPS607044U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63237482A (en) * 1987-03-25 1988-10-03 Nippon Denso Co Ltd Semiconductor pressure sensor
JP2004245696A (en) * 2003-02-13 2004-09-02 Kyocera Corp Package for pressure detector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5845533A (en) * 1981-09-14 1983-03-16 Hitachi Ltd Pressure detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5845533A (en) * 1981-09-14 1983-03-16 Hitachi Ltd Pressure detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63237482A (en) * 1987-03-25 1988-10-03 Nippon Denso Co Ltd Semiconductor pressure sensor
JP2004245696A (en) * 2003-02-13 2004-09-02 Kyocera Corp Package for pressure detector

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