JPS6070075U - 金属膜抵抗測定用電極 - Google Patents

金属膜抵抗測定用電極

Info

Publication number
JPS6070075U
JPS6070075U JP16154583U JP16154583U JPS6070075U JP S6070075 U JPS6070075 U JP S6070075U JP 16154583 U JP16154583 U JP 16154583U JP 16154583 U JP16154583 U JP 16154583U JP S6070075 U JPS6070075 U JP S6070075U
Authority
JP
Japan
Prior art keywords
electrode
metal film
film resistance
resistance measurement
center point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16154583U
Other languages
English (en)
Other versions
JPH0424454Y2 (ja
Inventor
正美 高橋
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP16154583U priority Critical patent/JPS6070075U/ja
Publication of JPS6070075U publication Critical patent/JPS6070075U/ja
Application granted granted Critical
Publication of JPH0424454Y2 publication Critical patent/JPH0424454Y2/ja
Granted legal-status Critical Current

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  • Measurement Of Resistance Or Impedance (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図、第２図は従来の電極を用いて測定する場合の電
極配置の平面図、第３図は本考案の実施例の電極配置の
側面断面図、第４図、第５図は本考案による電極部のみ
を示す電極配置平面図である。なお図において、 １・・・・・・固定電極、２・・・・・・移動電極、３
・・・・・・リード線、４・・・・・・試験片、５・・
・・・・中心導体、６・・・・・・誘電体、７・・・・
・・金属膜、１１・・・・・・外電極、１２，１３・・
・・・・内電極である。

Claims (1)

    【実用新案登録請求の範囲】
  1. 底面が円形状の内電極と、この内電極の中心点と一致し
    た中心点をもちかつこの内電極よりも大きな内径の円環
    状の底面をもつ外電極とを備え、前記各底面を測定すべ
    き金属膜に接触できるように構成した金属膜抵抗測定用
    電極。
JP16154583U 1983-10-19 1983-10-19 金属膜抵抗測定用電極 Granted JPS6070075U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16154583U JPS6070075U (ja) 1983-10-19 1983-10-19 金属膜抵抗測定用電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16154583U JPS6070075U (ja) 1983-10-19 1983-10-19 金属膜抵抗測定用電極

Publications (2)

Publication Number Publication Date
JPS6070075U true JPS6070075U (ja) 1985-05-17
JPH0424454Y2 JPH0424454Y2 (ja) 1992-06-09

Family

ID=30354995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16154583U Granted JPS6070075U (ja) 1983-10-19 1983-10-19 金属膜抵抗測定用電極

Country Status (1)

Country Link
JP (1) JPS6070075U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008249482A (ja) * 2007-03-30 2008-10-16 Tokyo Electron Ltd 測定システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138470U (ja) * 1974-09-17 1976-03-23

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138470B2 (ja) * 1972-01-21 1976-10-21 Nippon Kokan Kk

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138470U (ja) * 1974-09-17 1976-03-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008249482A (ja) * 2007-03-30 2008-10-16 Tokyo Electron Ltd 測定システム

Also Published As

Publication number Publication date
JPH0424454Y2 (ja) 1992-06-09

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