JPS6056493U - direct drive robot - Google Patents

direct drive robot

Info

Publication number
JPS6056493U
JPS6056493U JP14900083U JP14900083U JPS6056493U JP S6056493 U JPS6056493 U JP S6056493U JP 14900083 U JP14900083 U JP 14900083U JP 14900083 U JP14900083 U JP 14900083U JP S6056493 U JPS6056493 U JP S6056493U
Authority
JP
Japan
Prior art keywords
pulse motor
stator
rotor
fixed
direct drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14900083U
Other languages
Japanese (ja)
Inventor
一 桑原
裕 小野
二階堂 光宏
Original Assignee
横河電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 横河電機株式会社 filed Critical 横河電機株式会社
Priority to JP14900083U priority Critical patent/JPS6056493U/en
Publication of JPS6056493U publication Critical patent/JPS6056493U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図Aは本考案の一実施例の上面図、第1図Bは同正
面図、第2図Aは第1図の実施例の一部を示す構成正面
図、第2図Bは第2図AのA−A線断面図である。 1・・・台部、2・・・第1のパルスモータ、3・・・
上腕部、4・・・第2のパルスモータ、5・・・前腕部
、10   ゛・・・内側固定子、10a、10b・・
・磁性体、12・・・回転子、13−・・静磁石、15
a〜15dy  16a〜16d・・・励磁コイル。
FIG. 1A is a top view of an embodiment of the present invention, FIG. 1B is a front view of the same, FIG. FIG. 2 is a sectional view taken along line A-A in FIG. 2A. 1... Base part, 2... First pulse motor, 3...
Upper arm part, 4... Second pulse motor, 5... Forearm part, 10 ゛... Inner stator, 10a, 10b...
・Magnetic material, 12... Rotor, 13-... Static magnet, 15
a~15dy 16a~16d...excitation coil.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 台部と、この台部にその固定子または回転子の一方が固
定される第1のパルスモータと、この第1のパルスモー
タの前記固定子または回転子の他方にその一端が固定さ
れ前記第1のパルスモータの回転軸を中心として水平に
回動される上腕部と、この上腕部の他端にその固定子ま
たは回転子の一方が固定される第2のパルスモータと、
この第2のパルスモータの前記固定子または回転子の他
方にその一端が固定され前記第2のパルスモータの回転
軸を中心として水平に回動される前腕部とを備え、前記
第1、第2のパルスモータが、2枚の磁性体の間を静磁
石で接続するとともに励磁コイルを備えた内側固定子を
有し、前記内側固定子の外側に回転子を配したことを特
徴とする直接駆動形ロボット。
a first pulse motor having one of its stator or rotor fixed to the base; and a first pulse motor having one end fixed to the other of the stator or rotor of the first pulse motor. a second pulse motor having either a stator or a rotor fixed to the other end of the upper arm;
a forearm portion having one end fixed to the other of the stator or rotor of the second pulse motor and rotating horizontally about the rotation axis of the second pulse motor; The direct pulse motor according to No. 2 has an inner stator that connects two magnetic bodies with a static magnet and is equipped with an excitation coil, and a rotor is disposed outside the inner stator. Drive type robot.
JP14900083U 1983-09-27 1983-09-27 direct drive robot Pending JPS6056493U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14900083U JPS6056493U (en) 1983-09-27 1983-09-27 direct drive robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14900083U JPS6056493U (en) 1983-09-27 1983-09-27 direct drive robot

Publications (1)

Publication Number Publication Date
JPS6056493U true JPS6056493U (en) 1985-04-19

Family

ID=30330880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14900083U Pending JPS6056493U (en) 1983-09-27 1983-09-27 direct drive robot

Country Status (1)

Country Link
JP (1) JPS6056493U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017022426A (en) * 2007-07-17 2017-01-26 ブルックス オートメーション インコーポレイテッド Substrate processing apparatus with motors integrated with chamber walls

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157494A (en) * 1979-05-22 1980-12-08 Fujitsu Ltd Joint structure of robot

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157494A (en) * 1979-05-22 1980-12-08 Fujitsu Ltd Joint structure of robot

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017022426A (en) * 2007-07-17 2017-01-26 ブルックス オートメーション インコーポレイテッド Substrate processing apparatus with motors integrated with chamber walls

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