JPS6032994B2 - How to connect magnetoelectric conversion elements - Google Patents
How to connect magnetoelectric conversion elementsInfo
- Publication number
- JPS6032994B2 JPS6032994B2 JP52113350A JP11335077A JPS6032994B2 JP S6032994 B2 JPS6032994 B2 JP S6032994B2 JP 52113350 A JP52113350 A JP 52113350A JP 11335077 A JP11335077 A JP 11335077A JP S6032994 B2 JPS6032994 B2 JP S6032994B2
- Authority
- JP
- Japan
- Prior art keywords
- hall
- elements
- noise
- connect
- conversion elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Hall/Mr Elements (AREA)
Description
【発明の詳細な説明】
本発明は、主としてｌｎＳｂなどの化合物半導体薄膜に
よって形成される磁電変換素子から発生する雑音を低減
する方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of reducing noise generated from a magnetoelectric transducer mainly formed of a compound semiconductor thin film such as lnSb.
従来の磁電変換素子、例えばホール素子は第１図に示す
ような構造をもち、電流端子１および１′間に電流を印
加し、ホール出力端子２および２′間に、ＥＯ力ロ磁界
に比例した信号電圧を得ていた。A conventional magnetoelectric transducer, for example, a Hall element, has a structure as shown in Figure 1, in which a current is applied between current terminals 1 and 1', and an EO force proportional to the magnetic field is applied between Hall output terminals 2 and 2'. I was getting a signal voltage.
しかしこのときホール出力端子間には上記の信号電圧に
加え、半導体薄膜の結晶欠陥などに由来する雑音電圧が
重畳する。このため印加磁界が小さい場合、信号電圧と
雑音電圧の区別が不可能となり、検出可能な最小磁界に
限界があった。このためとくに微小磁界を検出するため
の素子としては、上記雑音電圧を小さくせしめることが
重要課題であった。本発明は複数個のホール素子を第２
図に示すようにコンデンサー７をもつて並列に接続する
ことにより、雑音電圧を低減できることを見出した。However, at this time, in addition to the above-mentioned signal voltage, a noise voltage originating from crystal defects in the semiconductor thin film is superimposed between the Hall output terminals. For this reason, when the applied magnetic field is small, it becomes impossible to distinguish between the signal voltage and the noise voltage, and there is a limit to the minimum detectable magnetic field. For this reason, it has been an important issue to reduce the noise voltage, especially for elements for detecting minute magnetic fields. In the present invention, a plurality of Hall elements are connected to a second
It has been found that the noise voltage can be reduced by connecting the capacitors 7 in parallel as shown in the figure.
このときのコンデンサーの値は印加磁界の周波数帯城に
よって適時定める。第２図に示すような方法によって雑
音が低減される理由はあきらかでないがおよそ次のよう
に考えられる。第２図において２個のホール素子３およ
び４は等しい感度をもつホール素子であって、印加電流
は可変抵抗５および６によって互に等しく調節されてい
る。この２個のホール素子に磁界が印加された場合、そ
の出力電圧は互いに等しく、またコンデンサーによって
並列に接続されているため、外部には１個のホール素子
のホール電圧と等しい信号電圧がとり出される。一方雑
音電圧に関しては、双方のホール素子の雑音電圧の位相
は相互に無関係であるため、コンデンサーによる並列結
線により部分的に打ち消し合い、１個のホール素子の雑
音電圧よりも小となる。このため使用するホール素子の
個数を増加することにより雑音を低減することができる
。以上述べた雑音低減法を実施例によって具体的に説明
する。The value of the capacitor at this time is determined as appropriate depending on the frequency band of the applied magnetic field. The reason why noise is reduced by the method shown in FIG. 2 is not clear, but it is thought to be approximately as follows. In FIG. 2, two Hall elements 3 and 4 have equal sensitivity, and the applied currents are adjusted equally by variable resistors 5 and 6. When a magnetic field is applied to these two Hall elements, their output voltages are equal to each other, and since they are connected in parallel by a capacitor, a signal voltage equal to the Hall voltage of one Hall element is extracted to the outside. It will be done. On the other hand, regarding the noise voltage, since the phases of the noise voltages of both Hall elements are unrelated to each other, they are partially canceled out by the parallel connection using the capacitor, and the noise voltage becomes smaller than the noise voltage of one Hall element. Therefore, noise can be reduced by increasing the number of Hall elements used. The above-described noise reduction method will be specifically explained using examples.
実施例 １
マイクロゾーンメルト法により作成した幅２００仏ｍ、
厚さ１．４ｙｍのｌｎＳｂホール素子を数個用意し、第
２図に示す結線法でホール素子を並列に接続した。Example 1 Width 200 m, created by micro zone melt method.
Several lnSb Hall elements having a thickness of 1.4 ym were prepared, and the Hall elements were connected in parallel using the wiring method shown in FIG.
コンデンサーの容量は４００仏Ｆとした。このようにし
て各素子に１肌Ａの電流を流し、素子の接続個数と雑音
電圧の関係を調べた。このとき雑音電圧は周波数帯城１
００ＨＺ〜１０ｋＨＺで観測される雑音電圧の実効値で
評価した。第３図はホール素子の接続個数と雑音電圧の
関係を示す図であるが素子を多数使用するほど雑音電圧
が小となる。実施例 ２
実施例１と同様マイクロゾーンメルト法により厚さ１．
４山ｍ、幅２００仏ｍのホール素子を作成し、この素子
に複数組のホール出力端子を設け、互いにコンデンサー
により並列に接続した。The capacitance of the capacitor was 400F. In this way, a current of 1 A was applied to each element, and the relationship between the number of connected elements and the noise voltage was investigated. At this time, the noise voltage is in the frequency band 1
Evaluation was made using the effective value of the noise voltage observed at 00Hz to 10kHz. FIG. 3 is a diagram showing the relationship between the number of connected Hall elements and the noise voltage, and the more elements used, the smaller the noise voltage becomes. Example 2 As in Example 1, the thickness was 1.5 mm using the microzone melt method.
A Hall element with a width of 4 meters and a width of 200 meters was prepared, and a plurality of sets of Hall output terminals were provided on this element and connected in parallel to each other by capacitors.
第４図ａおよびｂにホール出力端子が２組および３組の
場合の結線例を示す。このようにしてホール端子の接続
個数と雑音電圧の関係を実施例１と同様にして調べたと
ころ、第３図と同様な結果が得られ、雑音低減に効果が
あることがわかった。実施例１においては使用するホー
ル素子の個数を増加するほど消費電力が増加する欠点を
有していたが、実施例２はこの欠点を除去したものであ
る。以上の結線はホール素子について述べたが、磁気抵
抗素子についても同様に雑音を低減できる。Figures 4a and 4b show examples of connections when there are two and three sets of Hall output terminals. When the relationship between the number of connected Hall terminals and the noise voltage was investigated in the same manner as in Example 1, results similar to those shown in FIG. 3 were obtained, and it was found that noise reduction is effective. Although the first embodiment had a drawback that the power consumption increased as the number of Hall elements used increased, the second embodiment eliminates this drawback. Although the above wiring connection has been described for a Hall element, noise can be similarly reduced for a magnetoresistive element.
第５図は２個の磁気抵抗素子の結線例である。８および
８′は定電流電源、９および９′は同じ感度を有する磁
気抵抗素子である。FIG. 5 shows an example of the connection of two magnetoresistive elements. 8 and 8' are constant current power supplies, and 9 and 9' are magnetoresistive elements having the same sensitivity.
以上述べたごとく、本発明は滋雷変換素子の雑音を低減
するためにきわめて有効な方法であり、工業上の利益は
大きい。As described above, the present invention is an extremely effective method for reducing noise in energy conversion elements, and has great industrial benefits.
第１図はホール素子の形状を示す図であり、１および１
′は電流端子、２および２′はホール出力端子を示す。
第２図は本発明によるホール素子の結線例を示す図でホ
ール素子３および４のホール出力端子はコンデンサー７
および７′によって並列に接続される。第３図はホール
素子の接続個数と雑音電圧との関係を示す図である。第
４図は複数組のホール出力端子をもつホール素子におけ
る結線例を示す。第５図は磁気抵抗素子の結線例であっ
て、磁気抵抗素子９および９′はコンデンサー７および
７′によって並列に接続される。努丁隣努之函
第３図
多イ‐図
努タ図FIG. 1 is a diagram showing the shape of the Hall element, 1 and 1.
' is a current terminal, and 2 and 2' are Hall output terminals. FIG. 2 is a diagram showing an example of the connection of Hall elements according to the present invention, in which the Hall output terminals of Hall elements 3 and 4 are connected to capacitor 7.
and 7' are connected in parallel. FIG. 3 is a diagram showing the relationship between the number of connected Hall elements and the noise voltage. FIG. 4 shows an example of wiring in a Hall element having multiple sets of Hall output terminals. FIG. 5 shows an example of the connection of magnetoresistive elements, in which magnetoresistive elements 9 and 9' are connected in parallel by capacitors 7 and 7'. Tsutomu next to Tsutomu box Figure 3: Tsutomuta map
Claims (1)
もつ磁電変換素子より引出した複数組の出力端子をコン
デンサーにより互に並列に接続することを特徴とする磁
電変換素子の接続法。1. A method for connecting magnetoelectric transducers, characterized by connecting a plurality of sets of output terminals drawn out from a plurality of magnetoelectric transducers or a magnetoelectric transducer having a plurality of sets of output terminals in parallel with each other using a capacitor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52113350A JPS6032994B2 (en) | 1977-09-22 | 1977-09-22 | How to connect magnetoelectric conversion elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52113350A JPS6032994B2 (en) | 1977-09-22 | 1977-09-22 | How to connect magnetoelectric conversion elements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5447588A JPS5447588A (en) | 1979-04-14 |
| JPS6032994B2 true JPS6032994B2 (en) | 1985-07-31 |
Family
ID=14610022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52113350A Expired JPS6032994B2 (en) | 1977-09-22 | 1977-09-22 | How to connect magnetoelectric conversion elements |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6032994B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0666781U (en) * | 1993-03-05 | 1994-09-20 | 隆光 森▲崎▼ | Structure of rocking equipment leg |
-
1977
- 1977-09-22 JP JP52113350A patent/JPS6032994B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0666781U (en) * | 1993-03-05 | 1994-09-20 | 隆光 森▲崎▼ | Structure of rocking equipment leg |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5447588A (en) | 1979-04-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20120025819A1 (en) | Magnetoresistive sensor | |
| JPS58106462A (en) | Rotation detector | |
| US4994742A (en) | Hall effect device and magnetic coil circuits for magnetic field detection | |
| JPH02170061A (en) | Electric power detecting device | |
| JPS6032994B2 (en) | How to connect magnetoelectric conversion elements | |
| JPH0442629B2 (en) | ||
| US2477337A (en) | Magnetic detector | |
| JPH0330089B2 (en) | ||
| JPH045525A (en) | Noncontact type displacement detector | |
| JPS5868615A (en) | Output circuit of magnetic type rotary encoder | |
| JPH0261710B2 (en) | ||
| JP2003254992A (en) | Physical quantity detecting circuit | |
| CN219456209U (en) | Capacitive MEMS accelerometer | |
| SU1679421A1 (en) | Method of finding of point of reduced resistance of insulation of power network and device to implement it | |
| SU590621A1 (en) | Pressure transmitter | |
| SU809311A1 (en) | Multiplying device | |
| JP2767281B2 (en) | Magnetic sensor | |
| KR970005807Y1 (en) | Magnetic resistance device | |
| JPS6192414A (en) | Magneto-resistance device | |
| JP2594939B2 (en) | Speed signal detection circuit of electromagnetic drive | |
| JPS6135717B2 (en) | ||
| SU610257A2 (en) | Induction-type shaft angular position sensor | |
| SU100913A1 (en) | Full-Wavelength DC Contact Vibrator to AC | |
| KR920010309B1 (en) | Distortion detecting apparatus | |
| JPS597269A (en) | Current detector |