JPS6026310B2 - gas laser equipment - Google Patents
gas laser equipmentInfo
- Publication number
- JPS6026310B2 JPS6026310B2 JP9018577A JP9018577A JPS6026310B2 JP S6026310 B2 JPS6026310 B2 JP S6026310B2 JP 9018577 A JP9018577 A JP 9018577A JP 9018577 A JP9018577 A JP 9018577A JP S6026310 B2 JPS6026310 B2 JP S6026310B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- metal electrode
- gas laser
- high voltage
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
この発明は、高出力機励起形無声放電式ガスレーザ装置
の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a high-power pumped silent discharge gas laser device.
まず、従来のガスレーザ装置を横励起形C02ガスを例
にとって説明する。First, a conventional gas laser device will be explained using a horizontally excited C02 gas as an example.
第1図はその構成原理図であり、1は接地金属電極、2
は接地金属電極1とで放電電極を構成する高電圧金属電
極で、放電面は誘電体3で覆われている。Figure 1 is a diagram showing the principle of its construction, where 1 is a grounded metal electrode, 2
is a high-voltage metal electrode that constitutes a discharge electrode together with a grounded metal electrode 1, and the discharge surface is covered with a dielectric 3.
4は放電空間、5は変圧器、6は高周波電源、7は全反
射鏡、8は出力側反射鏡(一部透過)、9は冷却水循環
ポンプ、101ま冷水器、ilはイオン交換純水器であ
る。4 is a discharge space, 5 is a transformer, 6 is a high frequency power supply, 7 is a total reflection mirror, 8 is an output side reflection mirror (partially transparent), 9 is a cooling water circulation pump, 101 is a water cooler, il is ion exchange pure water It is a vessel.
上記の構成において、高電圧金属電極2に、高周波電源
6と変圧器5により交流高電圧が印加されると、放電空
間4に無声放電と呼ばれる安定な放電が起る。In the above configuration, when an AC high voltage is applied to the high voltage metal electrode 2 by the high frequency power source 6 and the transformer 5, a stable discharge called a silent discharge occurs in the discharge space 4.
この無声放電は、高電圧金属電極2と接地金属電極1間
に誘電体3を介して生じる交流放電であるため、アーク
放電に移行することなく、電子温度のみが高く、分子温
度の上昇しない非平衡放電が安定に実現できる。放電空
間4内で励起された分子による光誘導頚射過程の説明は
省略するが、放電空間4内で無声放電が起ると、全反射
鏡7と出力側反射鏡8により構成される共振器内でレー
ザ発振が起り、出力側反射鏡8よりレーザ光が出る。接
地金属電極1と高電圧金属電極2はともに電気伝導度の
小さい冷却水で冷却されており、冷却水は冷却水循環ポ
ンプ9で冷水器10、イオン交換純水器11を適して循
環される。イオン交換純水器11は冷却水の電気伝導度
を小さくして高電圧金属電極2からの電流漏洩を防ぐた
めに必要である。なお、図には示してないが、放電空間
4のガスは接地金属電極1と高電圧金属電極2間をレー
ザ光と直角で、電極面に平行な方向に高速で流れている
。したがって、放電により励起される分子の濃度も電極
中心より少しガス流の下流側で最高となり、レーザ共振
空間もガス中心より少し下流にとる(後述する第2図B
の破線円内)。第2図A,Bは放電極の拡大図で、接地
金属電極1、高電圧金属電極2ともに放電面は平行板で
あり、放電は両金属電極1,2間でほぼ一様に起る。This silent discharge is an alternating current discharge that occurs between the high voltage metal electrode 2 and the ground metal electrode 1 via the dielectric 3, so it does not transition to an arc discharge, and only the electron temperature is high and the molecular temperature does not increase. Balanced discharge can be achieved stably. Although a description of the photoinduced ejaculation process by excited molecules in the discharge space 4 will be omitted, when a silent discharge occurs in the discharge space 4, a resonator formed by the total reflection mirror 7 and the output side reflection mirror 8 Laser oscillation occurs inside, and laser light is emitted from the output side reflecting mirror 8. Both the ground metal electrode 1 and the high voltage metal electrode 2 are cooled with cooling water having low electrical conductivity, and the cooling water is appropriately circulated through a water cooler 10 and an ion exchange deionizer 11 by a cooling water circulation pump 9. The ion exchange deionizer 11 is necessary to reduce the electrical conductivity of the cooling water and prevent current leakage from the high voltage metal electrode 2. Although not shown in the figure, gas in the discharge space 4 flows at high speed between the ground metal electrode 1 and the high voltage metal electrode 2 in a direction perpendicular to the laser beam and parallel to the electrode surface. Therefore, the concentration of molecules excited by the discharge is also highest a little downstream of the gas flow from the electrode center, and the laser resonance space is also a little downstream from the gas center (see Figure 2
(within the dashed circle). 2A and 2B are enlarged views of the discharge electrodes. The discharge surfaces of both the ground metal electrode 1 and the high voltage metal electrode 2 are parallel plates, and discharge occurs almost uniformly between the two metal electrodes 1 and 2.
ここで、無声放電の特性について簡単に説明する。Here, the characteristics of silent discharge will be briefly explained.
無声放電は譲霞体3を介して生じる交流放電であり、電
源電圧の上昇にしたがって放電空間4の電圧が上昇し放
電開始電圧に達すると放電が起る。放電が起ると、誘電
体3表面に電荷が堆積し、放電空間4の電圧が低下して
放電が消滅する。電源電圧の上昇により再び放電空間4
の電圧が放電開始電圧に達すると放電が起り、交流電源
の半サイクル中に数回の放電を繰返すことになる。また
、次の半サイクルでは逆極性の放電が同様に繰返えされ
るものであって、上記放電開始電圧は、ほぼ放電極の間
隔に比例する。従釆のガスレーザ装置として横励起形C
02レーザを上述したが、このようなしーザにおいて、
レーザ光の出力を大きくするためには放電空間4に投入
する放電電力を大きくすればよいが、その時共振器の鏡
径も大きくして鏡面のレーザ光密度をあまり大きくしな
いようにしないと全反射鏡7および出力側反射鏡8が損
傷を受ける。The silent discharge is an alternating current discharge that occurs through the transfer body 3, and when the voltage in the discharge space 4 increases as the power supply voltage increases and reaches the discharge start voltage, discharge occurs. When a discharge occurs, charges are deposited on the surface of the dielectric 3, the voltage in the discharge space 4 decreases, and the discharge disappears. Due to the rise in power supply voltage, the discharge space 4
When the voltage reaches the discharge start voltage, a discharge occurs, and the discharge is repeated several times during a half cycle of the AC power supply. Further, in the next half cycle, the discharge with the opposite polarity is repeated in the same way, and the discharge starting voltage is approximately proportional to the interval between the discharge electrodes. Lateral excitation type C as a secondary gas laser device
Although the 02 laser has been described above, in such a laser,
In order to increase the output of the laser beam, it is possible to increase the discharge power input into the discharge space 4, but at that time, the mirror diameter of the resonator must also be increased so that the laser beam density on the mirror surface does not become too large, otherwise total reflection will occur. Mirror 7 and output side reflecting mirror 8 are damaged.
しかし、鏡径を大きくすると放電空間4の光路径も大き
くなるから、放電極の間隔も大きくなる。したがって、
放電開始電圧が高くなり、高周波電源6など電源の絶縁
などに問題が生じる。また、電源電圧が高くなると、誘
電体3の絶縁耐力も問題になり、全体として安定運転の
信頼性が著しく低下する。この発明は上記の点に鑑みな
されたもので、電極構造を改良することにより、光路径
を大きくとっても電源電圧を低くすることができるガス
レ−ザ装置を提供することを目的とする。However, when the mirror diameter is increased, the optical path diameter of the discharge space 4 is also increased, and therefore the interval between the discharge electrodes is also increased. therefore,
The discharge starting voltage becomes high, causing problems with the insulation of power sources such as the high frequency power source 6. Further, as the power supply voltage increases, the dielectric strength of the dielectric 3 also becomes a problem, and the reliability of stable operation as a whole is significantly reduced. The present invention has been made in view of the above points, and an object of the present invention is to provide a gas laser device in which the power supply voltage can be lowered even when the optical path diameter is increased by improving the electrode structure.
以下この発明の一実施例を図面を参照して説明する。An embodiment of the present invention will be described below with reference to the drawings.
第3図A,Bは放電極を示す。この図において、21・
,212 は冷却水で冷却された2つの高電圧金属電極
で、それぞれは誘電体22,,222 で覆われている
。また、2つの高電圧金属電極21,,212 には高
電圧が等しく印加される。23は2つの高電圧金属電極
21,,212の中間で、ガス流の上流側に配置された
接地金属電極で、冷却水で冷却されており、断面は円形
をしている。Figures 3A and 3B show discharge electrodes. In this figure, 21・
, 212 are two high voltage metal electrodes cooled by cooling water, each covered with a dielectric material 22, 222 . Further, high voltage is equally applied to the two high voltage metal electrodes 21, 212. A grounded metal electrode 23 is located between the two high voltage metal electrodes 21, 212 and on the upstream side of the gas flow, is cooled with cooling water, and has a circular cross section.
以上のような構成された放電極においては、高電圧を等
しく高電圧金属電極21,,212に加えるので、接地
金属電極23との間で対称な放電空間24,,242が
形成される。In the discharge electrode configured as described above, high voltage is equally applied to the high voltage metal electrodes 21, 212, so that symmetrical discharge spaces 24, 242 with the ground metal electrode 23 are formed.
また、高電圧金属電極21,,212がそれぞれ誘電体
22,,222で覆われているので、放電空間24,,
242 は高電圧側で一様に分散したものとなり、アー
ク放電のように集中した放電にならず、ガス誘電体励起
に都合のよい放電を維持する。そして、放電空間24,
,242 で生成された励起分子がガス流にしたがって
数側〜十数柳下流に流される間に一様に分布し、第3図
B破線円で示した空間に入るので、この空間でレーザ共
振を起すことができる。また、上記放電極において放電
開始電圧は、接地金属電極23と高電圧金属電極21・
,212のそれぞれの電極間隔に対する放電開始電圧で
ある。それゆえ、この場合の放電開始電圧は、見掛け上
の放電空間間隔(高電圧金属電極21,と212 の間
隔)に対応する放電開始電圧の約1/2となる。したが
って、このようなガスレーザ装置によれば、放電開始電
圧を実質的に半減した無声放電空間を作ることができる
ので、光路径を大きくとっても電源電圧を低くすること
ができ、光路径の大きなレーザ共振を実現する上で、実
用的な効果は大きい。Furthermore, since the high voltage metal electrodes 21, 212 are covered with dielectrics 22, 222, respectively, the discharge spaces 24, 212 are covered with dielectrics 22, 222, respectively.
242 is uniformly distributed on the high voltage side, and does not become a concentrated discharge like an arc discharge, but maintains a discharge that is convenient for excitation of the gas dielectric. And discharge space 24,
The excited molecules generated in can be caused. Further, in the discharge electrode, the discharge starting voltage is between the ground metal electrode 23 and the high voltage metal electrode 21.
, 212 is the discharge starting voltage for each electrode spacing. Therefore, the firing voltage in this case is approximately 1/2 of the firing voltage corresponding to the apparent discharge space interval (the interval between the high voltage metal electrodes 21 and 212). Therefore, according to such a gas laser device, it is possible to create a silent discharge space where the discharge starting voltage is substantially halved, so even if the optical path diameter is increased, the power supply voltage can be lowered, and the laser resonance with a large optical path diameter can be achieved. The practical effects are significant in realizing this.
なお、接地金属電極23はガス流を著しく乱さず、かつ
放電が接地金属電極23側で過度に集中しなければよく
、簡便のために断面円形のものを採用しているが、楕円
、方形、板状のものでもさしつかえない。Note that the ground metal electrode 23 should not significantly disturb the gas flow and discharge should not be excessively concentrated on the ground metal electrode 23 side, and for simplicity, a circular cross-section is adopted, but elliptical, rectangular, A plate-shaped one is also acceptable.
また、接地金属電極23側の放電もより一様に分散させ
れば、この発明の効果はよりよく発揮できる。Furthermore, the effects of the present invention can be better exhibited if the discharge on the ground metal electrode 23 side is also more uniformly dispersed.
したがって、接地金属電極23も全周をうすく譲露体で
覆ってもよい。以上詳述したように、この発明によれば
、非常に大なる効果を有するガスレーザ装装置を提供で
きる。Therefore, the entire circumference of the ground metal electrode 23 may be thinly covered with the exposed body. As detailed above, according to the present invention, it is possible to provide a gas laser equipment having very great effects.
第1図は従来のガスレーザ装置として横励起形C02レ
ーザを示す構成原理図、第2図は上記しーザの放電極の
拡大図で、Aは縦断面図、Bは横断面図、第3図はの発
明によるガスレーザ装置の一実施例を説明するための図
で、Aは縦断面図、Bは横断面図である。
21,,212・・・・・・高電圧金属電極、22,,
222・・・・・・誘電体、23・・・・・・接地金属
電極、24,,242・・・・・・放電空間。
なお、図中同一符号は同一または相当部分を示す。第1
図
第2図
第3図Fig. 1 is a diagram showing the principle of construction of a horizontally pumped C02 laser as a conventional gas laser device, Fig. 2 is an enlarged view of the discharge electrode of the laser, A is a longitudinal sectional view, B is a transverse sectional view, and Fig. 2 is an enlarged view of the discharge electrode of the laser. The figures are diagrams for explaining one embodiment of the gas laser device according to the invention, in which A is a longitudinal cross-sectional view and B is a cross-sectional view. 21,,212...High voltage metal electrode, 22,,
222...Dielectric, 23...Grounded metal electrode, 24, 242...Discharge space. Note that the same reference numerals in the figures indicate the same or corresponding parts. 1st
Figure 2 Figure 3
Claims (1)
体で覆われた等しい電位の2つの電極と、その中間に置
かれた金属電極とを有し、両者の間に高電圧を印加し放
電部を形成することを特徴とするガスレーザ装置。 2 中間に置かれた金属電極を誘電体で覆うことを特徴
とする特許請求の範囲第1項記載のガスレーザ装置。[Claims] 1. A horizontally excited silent discharge gas laser device, which has two electrodes covered with a dielectric material and having the same potential, and a metal electrode placed between them, and a high voltage is applied between the two electrodes. A gas laser device characterized in that a discharge portion is formed by applying a . 2. The gas laser device according to claim 1, wherein the metal electrode placed in the middle is covered with a dielectric material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9018577A JPS6026310B2 (en) | 1977-07-26 | 1977-07-26 | gas laser equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9018577A JPS6026310B2 (en) | 1977-07-26 | 1977-07-26 | gas laser equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5424591A JPS5424591A (en) | 1979-02-23 |
JPS6026310B2 true JPS6026310B2 (en) | 1985-06-22 |
Family
ID=13991416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9018577A Expired JPS6026310B2 (en) | 1977-07-26 | 1977-07-26 | gas laser equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6026310B2 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5673484A (en) * | 1979-11-21 | 1981-06-18 | Mitsubishi Electric Corp | Voiceless discharge gas laser device |
JPS56131983A (en) * | 1980-03-19 | 1981-10-15 | Mitsubishi Electric Corp | Gas laser device |
JPS5848485A (en) * | 1981-09-16 | 1983-03-22 | Mitsubishi Electric Corp | Pulse laser oscillator |
JPS5846687A (en) * | 1981-09-16 | 1983-03-18 | Mitsubishi Electric Corp | Gas circulating type laser |
JPS6029443U (en) * | 1983-08-03 | 1985-02-27 | 株式会社ダイフク | Reciprocating device drive device |
US4596018A (en) * | 1983-10-07 | 1986-06-17 | Minnesota Laser Corp. | External electrode transverse high frequency gas discharge laser |
JPS61174016A (en) * | 1985-01-26 | 1986-08-05 | Shinko Kogyo Kk | Suspension conveyer rail apparatus |
JPH02132871A (en) * | 1989-09-08 | 1990-05-22 | Mitsubishi Electric Corp | Silent discharge type laser |
-
1977
- 1977-07-26 JP JP9018577A patent/JPS6026310B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5424591A (en) | 1979-02-23 |
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