JPS60258718A - Multi-element thin film magnetic head - Google Patents
Multi-element thin film magnetic headInfo
- Publication number
- JPS60258718A JPS60258718A JP11454184A JP11454184A JPS60258718A JP S60258718 A JPS60258718 A JP S60258718A JP 11454184 A JP11454184 A JP 11454184A JP 11454184 A JP11454184 A JP 11454184A JP S60258718 A JPS60258718 A JP S60258718A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic head
- magnetic
- substrate
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、クロストーク、コンタ−効果およびコイル抵
抗を低減したアナログ記録再生に好適な多素子薄膜磁気
ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a multi-element thin film magnetic head suitable for analog recording and reproducing which reduces crosstalk, contour effects and coil resistance.
多素子薄膜磁気ヘッドとしては特開昭５８−２１２６１
６号公報に示される様な構造が一般的である。As a multi-element thin film magnetic head, Japanese Patent Application Laid-Open No. 58-21261
A structure as shown in Publication No. 6 is common.
このヘッド構造は、ディジタル磁気記録の記録専用に用
いられ、電子スチルカメラの様にアナログの記録再生兼
用として用いる場合、下部コアがトラック間で連続して
いることがらトラック間のクロスト−りが大きいこと、
上部、下部コアの膜端間が磁気ギャップ面と平行となっ
てお多端面が擬似磁気ギャップとなってｆ特のうね）を
生ずるいわゆるコンタ−効果が発生する仁と、および、
トランク間隔が狭い場合に、コイル配役スペースが狭く
なりコイル幅が充分１ことれないことによりコイル抵抗
が増大し、再生時のインピーダンスノイズが増大する等
の問題点がある。This head structure is used exclusively for digital magnetic recording, and when used for both analog recording and playback, such as in electronic still cameras, crosstalk between tracks is large because the lower core is continuous between tracks. thing,
A so-called contour effect occurs in which the film edges of the upper and lower cores are parallel to the magnetic gap plane, and the many end faces become a pseudo magnetic gap, creating a so-called contour effect, and
When the trunk spacing is narrow, the coil placement space becomes narrow and the coil width is not sufficiently widened, resulting in an increase in coil resistance and problems such as an increase in impedance noise during reproduction.
〔発明の目的ｊ
本発明の目的は上記の問題点をなくシ、クロストーク、
コンタ−効果およびコイル抵抗を改善したアナログ記録
再生に好適な多素子薄膜磁気ヘッドを提供するにある。[Object of the invention j The object of the present invention is to eliminate the above-mentioned problems, reduce crosstalk,
It is an object of the present invention to provide a multi-element thin film magnetic head suitable for analog recording and reproducing which has improved contour effect and coil resistance.
本発明の特徴は、非磁性基板に下部コアを埋込む溝を該
溝の底面が基板表面と非平行となる様各トラック毎に設
け、トラック間で下部コアが連続することをさけクロス
トークな改善するとともに下部コア端面がギャップ面と
非平行とすることによシコンター効果を改善すること、
また、隣接トラックのギャッズ間隔より上部。A feature of the present invention is that a groove for embedding the lower core in the non-magnetic substrate is provided for each track so that the bottom surface of the groove is non-parallel to the substrate surface, thereby avoiding crosstalk by avoiding continuity of the lower core between tracks. and to improve the contour effect by making the lower core end surface non-parallel to the gap surface.
Also, above the gap between adjacent tracks.
下部コアの後部コア接続部のトラック間隔を太きくする
ことによりコイル配役スペースを広げコイル抵抗を小さ
くし併せコアの磁気抵抗を小さくし磁束の絞シ効果も生
ずる様にしたことである。By widening the track spacing at the rear core connecting portion of the lower core, the coil placement space is expanded and the coil resistance is reduced.In addition, the magnetic resistance of the core is reduced and a magnetic flux throttling effect is produced.
以下、本発明の実施例を図面を用いて説明する。第１図
は、本発明の実施例である多素子薄膜磁気ヘッドの平面
図、第２図は記録媒体摺動面、第３図は第１図のＡ−Ａ
’断面図、第４図はヘッド全体の斜視図を示したもので
ある。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view of a multi-element thin film magnetic head which is an embodiment of the present invention, FIG. 2 is a recording medium sliding surface, and FIG. 3 is an A-A in FIG. 1.
The sectional view, FIG. 4, is a perspective view of the entire head.
第１図、第２図および第３図において１は非磁性基板、
２（Ｚ、２１）は各隣接するトラックの下部コア、６は
非磁性のギャップ材、６，６ａ、６ｂ、６Ｃは絶縁体、
７ａ、７ｂは第１層目コイル、８ａ、８ｂは第２層目コ
イル、４ａ、４ｂは上部コア、５は保護層、１０ａ、Ｉ
Ｌｌｂは第１層目コイルと第２層目コイルを接続するた
めの接続部、９ａ、９ｂは下部コブと上部コアを接続す
るための後部コア接続部である。また第４図は、前記多
累薄膜ヘッド累子１２を、ヘッドベース１１上ｌこ、ス
テップアップトランス１３α、１３ｂとともに一体ｌこ
組み込んだヘッド全体図で、７α、８α、 ７ｂ 、
８ｂのコイルをステップアップトランス１３α、１６ｂ
の一次側コイルと接続し、該トランスの２次側コイル１
５α、 １５ｂ ヨり信号を取シ出す構成となっている
。1, 2 and 3, 1 is a non-magnetic substrate;
2 (Z, 21) is the lower core of each adjacent track, 6 is a non-magnetic gap material, 6, 6a, 6b, 6C is an insulator,
7a and 7b are first layer coils, 8a and 8b are second layer coils, 4a and 4b are upper cores, 5 is a protective layer, 10a and I
Llb is a connecting portion for connecting the first layer coil and the second layer coil, and 9a and 9b are rear core connecting portions for connecting the lower bump and the upper core. FIG. 4 is an overall view of the head in which the multilayer thin film head transducer 12 is integrally integrated with the step-up transformers 13α, 13b on the head base 11.
8b coil step up transformer 13α, 16b
The secondary coil 1 of the transformer is connected to the primary coil of the transformer.
5α, 15b It is configured to output a yaw signal.
以下、本発明の実施例の製造法について具体的に説明す
る。第５図における１は、ガラス。Hereinafter, a manufacturing method of an example of the present invention will be specifically explained. 1 in FIG. 5 is glass.
セラミック、フェライト等の非磁性基板で本実施例では
、ＭｎＯとＮｉＯの焼結基板を用いたｎこの基板はＭｎ
Ｏが５０〜６０係のモル係の含有率で熱膨張係数が約１
４０ Ｘ １０−’７Ｇとなシ、コア材として用いるセ
ンダストあるいはアモルファス等の軟磁性膜の熱膨張係
数とほぼ同じ値となっている。′まだ、この基板は、特
にメタル粉等を用いた記録媒体と良好な尚接をする。ま
ず該非磁性基板に下部コア埋込み用の溝を形成する。溝
形状は、溝底面が基板１の表面と非平行となる様、幅約
２００μｍ１深さ２０〜６０μｍで機械加工等によシ溝
を形成する。次に、下部コアとしてセンダストあるいは
アモルファス等の軟磁性膜を約３０μｍスパッタ等によ
り形成し、ラッピング等によシ平担化する。ここで、下
部コアを形成する前に、密着層としてＣｒあるいはＺｒ
等をスパッタ等によす０１μｍ〜１／４７７１程度形成
すれば、更に基板１と下部コア２’ａ 、 ２ｂのイづ
着が向上する。得られた上記基板（第５区）のｆ３−Ｂ
’断面が第６図である。A non-magnetic substrate made of ceramic, ferrite, etc. In this example, a sintered substrate of MnO and NiO was used.
The coefficient of thermal expansion is approximately 1 at a molar content of O of 50 to 60 parts.
The coefficient of thermal expansion is 40 x 10-'7G, which is approximately the same value as the coefficient of thermal expansion of a soft magnetic film such as sendust or amorphous used as the core material. 'However, this substrate still makes good contact with recording media, especially those using metal powder or the like. First, a groove for embedding the lower core is formed in the nonmagnetic substrate. The groove shape is formed by machining or the like with a width of about 200 μm and a depth of 20 to 60 μm so that the bottom surface of the groove is non-parallel to the surface of the substrate 1. Next, a soft magnetic film such as sendust or amorphous is formed as a lower core by sputtering or the like to a thickness of approximately 30 μm, and is made flat by lapping or the like. Here, before forming the lower core, Cr or Zr is applied as an adhesive layer.
If the thickness is formed by sputtering or the like to a thickness of about 01 μm to 1/4771, the adhesion between the substrate 1 and the lower cores 2'a and 2b will be further improved. f3-B of the obtained above board (section 5)
'The cross section is shown in Figure 6.
次に、第７図、第７図のＣ−Ｃ’断面を示した第８図に
示す様に、ギャップ長を規制する為のギャップ＃６とし
て０２〜０６μ〃１の非磁性体をスパッタにより形成す
る。ギャップ材３としては、アモルファス材（Ｃｏ −
Ｎｏ−Ｚｒ系）を用いる場合ニハ、ＣｒあるいはＺｒの
金属材料が、センダストを用いる場合にはＳｉｎ、が付
着力の点から適している。更に、絶縁体６αとしてＳ
Ｚ（Ｊ、を約１μｍの膜厚でスパッタリングによ多形成
し、第１層コイル７ａ 、 ７ｂとしてＣｒを約５ｏｏ
Ｘ、 Ｃｕを約４μｍ更にＣｒを約５００１順次積層し
、所定の形状にエツチング等の手法によ多形成する。こ
の場合、第１層コイル７ａ’、７ｂの各トラックα、ｂ
間のコイル幅は約１００μｍである。Next, as shown in FIG. 7 and FIG. 8 which shows the CC' cross section of FIG. Form. As the gap material 3, an amorphous material (Co −
Ni, Cr, or Zr metal materials are suitable when using Sendust (No--Zr type), and Sin is suitable from the viewpoint of adhesion when Sendust is used. Furthermore, as an insulator 6α, S
Z(J) was formed by sputtering to a thickness of about 1 μm, and about 50 mm of Cr was formed as the first layer coils 7a and 7b.
X, Cu of approximately 4 μm thick and Cr of approximately 5,001 mm are sequentially laminated and formed into a predetermined shape by a technique such as etching. In this case, each track α, b of the first layer coils 7a', 7b
The coil width between them is approximately 100 μm.
次に、第９図、第９図のＤ−Ｄ’断面を示した第１０図
に示す尿に、層間絶縁体６ｂとしてＳＬｏ□を約２μｍ
形成し、第１層と第２層コイルの接続の為に、接続部１
０α、１０ｂの絶縁体６ｂをエツチングしスルーホール
を形成する。更に第１層コイルと同様にＣｒ 、 Ｃｕ
、 Ｃｒを積層し、所定の形状に形成する。ここで、
第９図のコイル７ａ 、 ７ｂ 、 ８α。Next, about 2 μm of SLo□ was applied as an interlayer insulator 6b to the urine shown in FIG. 9 and FIG. 10 showing the DD′ cross section of FIG.
Connecting part 1 is formed to connect the first layer and second layer coils.
The insulator 6b of 0α, 10b is etched to form a through hole. Furthermore, like the first layer coil, Cr, Cu
, Cr is laminated and formed into a predetermined shape. here,
Coils 7a, 7b, 8α in FIG.
８ｂの下側のパッド部において、コイル抵抗低減のため
に第１層および第２層コイルの多層として膜厚を厚くす
る構成とする。The lower pad portion of the coil 8b is configured to have a multi-layered structure including a first layer and a second layer coil to increase the film thickness in order to reduce the coil resistance.
更に、第１１図、第１１図のＥＥ’断面を示しｌ た第
１２図に示す様に、層間絶縁体６ｃ としてｈ ｓ ｉ
ｏｔを約５μｎＬ形成し、トラック幅（５０〜６０ｔｔ
ｍ ）を規制するギャップ部１６α、１６ｂおよび、後
部の上部、下部コア接続部９α、９ｂにスルーホール形
成のため絶縁体ｓ ｔｏｗのエツチングを行う。更に、
コア接続部９ｂにおけるＱｒｌあるいはＺｒのギャップ
材をエツチングによシ取り去る。また、ギャップ材３と
して層間材と同じ＜ ＳＺＯ＋を用いた場合には、製造
法が異な）、ギャップ材３は、ギャップ部１６α、１６
ｂおよびコア接続部９ａ 、 ９ｂのＳｔＯ，を取如除
いた後に、ギャップ長ｔこ見合う膜厚だけ形成し、その
後、コア接続部９α、９ｂについてギャップ材３を取シ
除く。Furthermore, as shown in FIG. 11 and FIG. 12, which shows the EE' cross section of FIG.
The track width (50 to 60tt) is formed by approximately 5 μnL.
The insulator stow is etched to form through-holes in the gap portions 16α, 16b regulating the upper and lower core connection portions 9α, 9b at the rear. Furthermore,
The Qrl or Zr gap material at the core connection portion 9b is removed by etching. In addition, if the same material as the interlayer material <SZO+ is used as the gap material 3, the manufacturing method is different).
After removing StO of the core connection parts 9a and 9b, a film thickness corresponding to the gap length t is formed, and then the gap material 3 is removed from the core connection parts 9a and 9b.
次に、上部コアとしてアモルファスあるいはセンダスト
磁性体を約２０μ７ｎの膜厚だけスパッタリングにより
形成し、所定の形状にパターニングし、更に保護膜とし
て上部コアとしてセンダストを用いた場合にはｓｉｏ、
を、またアモルファスを用いた場合にはＭｇＯとＳ ｔ
Ｏｔの混合膜をスパッタリングあるいは蒸着によシ約１
０μｍ以上の膜厚だけマスクを用いることによりコイル
パッド部を除く部分に形成する。更に、第１１図の）−
■−′線に沿う形状に機械加工等により整形するととに
よシ、第１図、第２図および第３図に示した本発明の実
施例である多素子薄膜磁気ヘッドが得られる。Next, an amorphous or sendust magnetic material is formed as the upper core by sputtering to a thickness of about 20μ7n, patterned into a predetermined shape, and a protective film is formed using sio, if sendust is used as the upper core.
, and when amorphous is used, MgO and S t
A mixed film of Ot is formed by sputtering or vapor deposition.
A mask is used to form a film with a thickness of 0 μm or more in areas excluding the coil pad portion. Furthermore, in Fig. 11)-
By shaping the magnetic head into a shape along line 1--' by machining or the like, a multi-element thin film magnetic head according to an embodiment of the present invention shown in FIGS. 1, 2 and 3 is obtained.
この様に構成した多素子薄膜磁気ヘッドでは、隣接する
トラック間で下部コア２α、２ｂが離間していることか
ら、従来の連続した構成に比較してクロストークが改善
する。また、第１図および第１１図に示す様に、トラッ
ク間隔Ｌ１に対して、後部のコア接続部９ａ 、 ９ｂ
間の間隔り、を、Ｌｌに対して充分大きくした事により
、トラック間隔Ｌ１が小さい場合においても、コイルの
配役スペースが広くとれることから、コイル幅が大きく
なシ、コイル抵抗を充分小さくすることが出来ることか
らインピーダンスノイズが低減できる。更に、第２図に
見る様に、下部コア２ａ、２ｂの埋込み溝を溝底面がギ
ャップ面（基板表面）乙に対して非平行に設けたことか
ら、下部コア下端面の擬似ギャップとギャップ３が位相
干渉することがなく、いわゆるコンタ−効果を防ぐこと
ができる。更に第４図に示す様に、ヘッドベース１１に
、上記薄膜ヘッド素子１２とステップアップトランス１
３α、１３ｂを近接して一体化したことにより、該トラ
ンス１＋ａ、１５ｂの一次側コイル１４ａ 、 １４ｂ
の引き回し線が短くなることから無効インダクタンス（
インピーダンスノイズの原因）が低減でき、信号のステ
ップアップが有効に行うことができる。In the multi-element thin film magnetic head constructed in this manner, the lower cores 2α, 2b are spaced apart between adjacent tracks, so that crosstalk is improved compared to the conventional structure in which they are continuous. Further, as shown in FIGS. 1 and 11, the rear core connecting portions 9a and 9b are connected to each other with respect to the track interval L1.
By making the distance between tracks sufficiently larger than Ll, even when the track distance L1 is small, the space for coil placement can be widened, so even if the coil width is large, the coil resistance can be made sufficiently small. This allows impedance noise to be reduced. Furthermore, as shown in FIG. 2, since the buried grooves of the lower cores 2a and 2b are provided so that the groove bottom surface is non-parallel to the gap surface (substrate surface) B, the pseudo gap on the lower end surface of the lower core and the gap 3 There is no phase interference between the two, and the so-called contour effect can be prevented. Furthermore, as shown in FIG. 4, the thin film head element 12 and the step-up transformer 1 are mounted on the head base 11.
By integrating 3α and 13b in close proximity, the primary coils 14a and 14b of the transformers 1+a and 15b
The effective inductance (
(Causes of impedance noise) can be reduced, and the signal can be effectively stepped up.
本発明によれば、従来ディジタル記録にのみ使用されて
いたものを、クロストーク、コンタ−効果、コイル抵抗
を改善したことにより、アナログ記録再生に充分使用で
きる多素子薄膜磁気ヘッドな提供することができる。According to the present invention, it is possible to provide a multi-element thin film magnetic head, which has been conventionally used only for digital recording, but can be used satisfactorily for analog recording and reproduction by improving crosstalk, contour effect, and coil resistance. can.
第１図は本発明の実施例で多素子薄膜磁気ヘッドの平面
図、第２図はその摺動面を示す図、第３図は第１図のＡ
−Ａ’断面図、第４図は組立の斜視図、第５図、第７図
、第９図、第１１図は製造法の説明図、第６図は第５図
のＢ−Ｂ’断面図、第８図は第７図のｃ−ｃ’断面図、
第１０図は第９図の１．） −Ｄ’断面図、第１２図は
第１１図の］シーＥ′断面図である。
１・・非磁性基板、
２ａ 、 ２ｂ 、 ４Ｃ、４ｂ 磁気コア、６ ギャ
ップ材、
６．６α、 ６ｂ 、 ６Ｃ・絶縁体、７、、．７ｂ、
８ａ、８ｂ コイル、
１１ ヘッドベース、
＋３（Ｚ 、 １３ｂ ステップアップトランス。
１ｎｉ）
！Ｊ１
１泪Ｒ
釦 々 ″
メ５引
）
イと１刀
メ／／ｒ刀
手続補正書（方式）
昭和 ５９ 年特許願第 １１４５４１ シＪ−発明の
名称
多木子渾族輯気ヘッド
補正をする者
１１イ′巨の聞１ 特許出願人
ンｉ １７１： ’５１１１）ｌ□；・（ぐ臼Ｉ １１
立 製 作 所代 理 人
居 所 〒１（ト）東京都千代田区丸の内−丁１」５番
１号（１式会Ｈ１）’Ｌ製イア１所内 ・往；：Ｊ、Ｊ
・トノ１２１１１１Ｌ人代補正の内容
＊＊及びＢ簀に成功に絡付した明練誓の伊誉−別厭通り
（内容に哀史なし）。FIG. 1 is a plan view of a multi-element thin film magnetic head according to an embodiment of the present invention, FIG. 2 is a diagram showing its sliding surface, and FIG. 3 is an A of FIG. 1.
-A' sectional view, Fig. 4 is a perspective view of assembly, Fig. 5, Fig. 7, Fig. 9, and Fig. 11 are illustrations of the manufacturing method, and Fig. 6 is BB' cross section of Fig. 5. Figure 8 is a sectional view taken along line c-c' in Figure 7.
Figure 10 shows 1 of Figure 9. )-D' sectional view, and FIG. 12 is a ]-E' sectional view of FIG. 11. 1. Non-magnetic substrate, 2a, 2b, 4C, 4b magnetic core, 6 gap material, 6.6α, 6b, 6C insulator, 7, . 7b,
8a, 8b coil, 11 head base, +3 (Z, 13b step up transformer. 1ni)! J1 1 tears R buttons ``Me 5 pulls) A and 1 sword method//r sword procedural amendment (method) 1981 Patent Application No. 114541 CJ-Name of the invention Takiko Kunzoku People who make head corrections 11 I'Giant Story 1 Patent Applicant 171: '5111)l□;・(Guusu I 11
Standing Production Office Management Personnel Location 1 (G) Marunouchi-1, Chiyoda-ku, Tokyo, No. 5-1 (1 Ceremony H1) 'L Seiya 1 ・From: J, J
・Contents of Tono 121111L compensation for human expenses ** and Iyo-Bekkei-dori of Meiren Seisan who successfully entwined with B-san (there is no sad history in the contents).
Claims (1)
所定の形状に形成してなる薄膜磁気ヘッドにおいて、隣
接するトラックの磁気ギャップ間の間隔に対して、上部
と下部の磁気コアを接続する後部コア接続部のトラック
間の間隔を広げたことを特徴とする多素子薄膜磁気ヘッ
ド□ ２）上記基板として非磁性基板を用い、各トラックの下
部コア埋込み用溝を、該溝底面がギャップ面と非平行と
なる様設け、下部コアを形成後平坦化したことを特徴と
する特許請求の範囲第１項記載の多素子薄膜磁気ヘッド
。 ３）上記非磁性基板として、少なくもＭｎＯとＮｉＯを
含む焼結体としたことを特徴とする特許請求の範囲第１
または第２項記載の多素子薄膜磁気ヘッド。 ４）上記磁気コアとして、ＣＯベースで少なくもＮｂあ
るいはＺｒを含むアモルファス軟磁性体とし、かつギャ
ップ材としてＣｒあるいはＺｒを、保護膜をＭｇＯおよ
びＳｉｎ、の混合体としたことを特徴とする多素子薄膜
磁気ヘッド。 ５）基板上に磁性体層、導電体層、絶縁体層等の薄膜を
所定の形状に形成してなる薄膜磁気ヘッドと、該薄膜磁
気ヘッドの信号増幅のためのステップアップトランスを
接続し、ヘッドベース上に一体化したことを特徴とする
多素子薄膜磁気ヘッド。[Claims] 1) In a thin film magnetic head in which a thin film such as a magnetic layer, a conductive layer, an insulating layer, etc. is formed on a substrate in a predetermined shape, the distance between the magnetic gaps of adjacent tracks is 2) A non-magnetic substrate is used as the substrate, and the lower core of each track is widened. 2. The multi-element thin film magnetic head according to claim 1, wherein the embedding groove is provided so that the bottom surface of the groove is non-parallel to the gap surface, and is flattened after forming the lower core. 3) Claim 1, characterized in that the non-magnetic substrate is a sintered body containing at least MnO and NiO.
Or the multi-element thin film magnetic head according to item 2. 4) The magnetic core is a CO-based amorphous soft magnetic material containing at least Nb or Zr, the gap material is Cr or Zr, and the protective film is a mixture of MgO and Sin. Element thin film magnetic head. 5) Connecting a thin-film magnetic head formed by forming thin films such as a magnetic layer, a conductive layer, and an insulating layer in a predetermined shape on a substrate and a step-up transformer for signal amplification of the thin-film magnetic head; A multi-element thin film magnetic head characterized by being integrated onto the head base.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11454184A JPS60258718A (en) | 1984-06-06 | 1984-06-06 | Multi-element thin film magnetic head |
| US06/719,057 US4752850A (en) | 1984-06-06 | 1985-04-02 | Multi-track magnetic thin film heads |
| DE8585105985T DE3579498D1 (en) | 1984-06-06 | 1985-05-15 | THICK LAYER MULTIPLE TRACK MAGNETIC HEADS AND METHOD FOR THE PRODUCTION THEREOF. |
| EP85105985A EP0163998B1 (en) | 1984-06-06 | 1985-05-15 | Multi-track magnetic thin film heads and a method of producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11454184A JPS60258718A (en) | 1984-06-06 | 1984-06-06 | Multi-element thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60258718A true JPS60258718A (en) | 1985-12-20 |
| JPH0516081B2 JPH0516081B2 (en) | 1993-03-03 |
Family
ID=14640346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11454184A Granted JPS60258718A (en) | 1984-06-06 | 1984-06-06 | Multi-element thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60258718A (en) |
-
1984
- 1984-06-06 JP JP11454184A patent/JPS60258718A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0516081B2 (en) | 1993-03-03 |
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