JPS60256667A - Pre-load adjusting mechanism for ball screw feeding device - Google Patents

Pre-load adjusting mechanism for ball screw feeding device

Info

Publication number
JPS60256667A
JPS60256667A JP10962084A JP10962084A JPS60256667A JP S60256667 A JPS60256667 A JP S60256667A JP 10962084 A JP10962084 A JP 10962084A JP 10962084 A JP10962084 A JP 10962084A JP S60256667 A JPS60256667 A JP S60256667A
Authority
JP
Japan
Prior art keywords
nut
pole
preload
ball nut
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10962084A
Other languages
Japanese (ja)
Other versions
JPH0570745B2 (en
Inventor
Masaaki Tsukiji
築地 正彰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP10962084A priority Critical patent/JPS60256667A/en
Publication of JPS60256667A publication Critical patent/JPS60256667A/en
Publication of JPH0570745B2 publication Critical patent/JPH0570745B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H25/00Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20Screw mechanisms
    • F16H25/22Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F16H25/2204Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
    • F16H25/2209Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls with arrangements for taking up backlash

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)

Abstract

PURPOSE:To obtain a proper amount of pre-load with a simple method by inserting a member for attaining minute expansion and contraction on a supporting surface for supporting a nut, as an intermediate seat, and enabling said nut to be freely displaced in the axial direction. CONSTITUTION:Piezoelectric elements 3, 3' are inserted between two ball nut flange surfaces 4', 4'' and a housing 4 or between one ball nut 1 and the other ball nut 2 as an intermediate seat, so that the movable-side ball nut 2 can be freely displaced in the axial direction. Thus, the displacement of the ball nut 2 for adjusting amount of pre-load is carried out through a piezoelectric element 3, 3' which are inserted as an intermediate seat, making its construction simple while miniaturizing the device, to be freely installed in a small size feed screw device. Since the piezoelectric element is quick in response while it can be finely displaced, the amount of pre-load can be adjusted accurately and with high response.

Description

【発明の詳細な説明】 〔技術分野〕 本発明は、送りねじ軸に多数のポールを介して螺合する
ポールナツトの相対位置を変化させることにより、適正
な予圧量を得ることを可能としたポールねじ送り装置の
予圧調整機構に関するものである。
[Detailed Description of the Invention] [Technical Field] The present invention provides a pole that makes it possible to obtain an appropriate amount of preload by changing the relative position of a pole nut that is screwed onto a feed screw shaft through a large number of poles. This invention relates to a preload adjustment mechanism for a screw feeding device.

〔従来技術〕[Prior art]

ボールねじ送り機構で必要な剛性を得またねじ軸とポー
ルナツトのバックラッシュを除くために2つのポールナ
ツトを用いて予圧を負荷しているものがあるが、しかし
高速移動時や高頻度な使用状態においては前記予圧によ
る摩擦によりねじ軸にその摩耗、発熱による変形が生じ
、ために位置決め精度が悪化してしまう欠点ぶある。
Some ball screw feed mechanisms use two pole nuts to apply preload in order to obtain the necessary rigidity and eliminate backlash between the screw shaft and the pole nut, but this is difficult to do when moving at high speed or under frequent use. The disadvantage of this is that the friction caused by the preload causes the screw shaft to wear and deform due to heat generation, resulting in deterioration of positioning accuracy.

そこで上記欠点を解決するため、上記予圧量を各作業工
程に応じてそれら工程毎に必要充分な予圧量とし、予圧
による摩擦を極力低減してねじ軸の変形を防止するよう
にした所謂予圧調整機構が知られている。この種の機構
としては特開昭58−225256に示されるような機
構等があるが、例えば該機構によれば、一方のナツトは
ハウジングに固定されており、他方のナツトはポールベ
アリングを介してハウジングに取り付けられ円周方向の
回転は自在であるが軸方向の移動は不可能となっており
、パルスモータにより減速機を介して前記他方のナツト
に回転変位を与えることにより、各作動工程に応じた所
期の予圧量を得るように構成されている。これにより、
予圧による摩擦が低減しねじ軸の変形が押えられるので
、前述した位置決め精度の悪化を防ぐことができる。
Therefore, in order to solve the above-mentioned drawbacks, the above-mentioned preload amount is set to a necessary and sufficient preload amount for each work process, and the so-called preload adjustment is made to reduce the friction caused by the preload as much as possible and prevent deformation of the screw shaft. The mechanism is known. As this type of mechanism, there is a mechanism such as that shown in Japanese Patent Application Laid-open No. 58-225256. For example, according to this mechanism, one nut is fixed to the housing, and the other nut is connected via a pole bearing. It is attached to the housing and can freely rotate in the circumferential direction, but cannot move in the axial direction. By applying rotational displacement to the other nut via a speed reducer using a pulse motor, each operating process is controlled. It is configured to obtain the desired preload amount accordingly. This results in
Since friction due to preload is reduced and deformation of the screw shaft is suppressed, the aforementioned deterioration in positioning accuracy can be prevented.

しかしながら例示した前記機構からも明らかなように、
この種の予圧調整機構は例えばパルスモータや減速機等
を必要とすることからその装置が複雑、大型化し、ため
に小規模の送りねじ装置には側底適用することが不可能
なものであった。
However, as is clear from the above-mentioned mechanism,
This type of preload adjustment mechanism requires a pulse motor, speed reducer, etc., making the device complex and large, making it impossible to apply it to a small-scale feed screw device. Ta.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、かかる欠点を克服し、ナツトを支持す
る支持面に微小な伸縮を達成する素子を間座として挿入
し、ナツトの軸方向の変位を自在とすることにより、各
作動工程毎に適正な予圧量を簡単に得るようにした小型
な予圧調整装置を提供することにある。
The object of the present invention is to overcome such drawbacks and to insert an element that achieves minute expansion and contraction into the support surface that supports the nut as a spacer, thereby making it possible to freely displace the nut in the axial direction. To provide a small-sized preload adjustment device that can easily obtain an appropriate amount of preload.

即ち後述する本発明の実施例による予圧調整機構は、2
つのポールナツトを使用するポールねじ送り装置におい
て、ポールナツトフランジ面とハウジングの間または一
方のポールナツトと他方の9 よ−7,、−ッ、よ。、
1゜ユ、ヵエヶ、よよ、アユいし、ポールナツトの軸方
向変位が自在となるように構成されている。
That is, the preload adjustment mechanism according to the embodiment of the present invention to be described later has two
In a pole screw feeding device that uses two pole nuts, there is a gap between the pole nut flange surface and the housing, or between one pole nut and the other. ,
It is constructed so that the pole nut can be freely displaced in the axial direction by 1 degree, 1 degree, 1 degree, 1 degree, 1 degree, 1 degree, 1 degree, 2 degrees, 2 degrees, 2 degrees.

〔実施例〕〔Example〕

以下、本発明の実施例について添付図面を参照して説明
する。第1図並びに第2図は夫々1つの圧電素子を用い
た場合の本発明の実施例、第6図は2つの圧電素子を用
いた場合の本発明の実施例である。
Embodiments of the present invention will be described below with reference to the accompanying drawings. 1 and 2 each show an embodiment of the invention using one piezoelectric element, and FIG. 6 shows an embodiment of the invention using two piezoelectric elements.

先ず第1図及び第2図において、1は送りねじ5に螺合
する固定側ポールナツトで、ハウジング4のフランジ4
′に固定されている。2は仝じく送りねじ5に螺合する
可動側ポールナツトで、ハウジング4のフランジ4“に
固定されている。7はフランジ4“を間座として挿入さ
れた圧電素子6を介してハウジング4に取り付けるボル
トで、プラスチック等の弾性材料で形成され、圧電素子
3の膨張、収縮に伴いフランジ4“をねじ軸輪方向に変
位自在に支持している。6は移動テーブルで例えば ゛
測定器等を載置する。なお、ポールねじ5の軸承、[ や回転駆動器は省く。又ポルト7は調整量かわず ;□
)かであれば金属でも良い。
First, in FIGS. 1 and 2, reference numeral 1 denotes a fixed side pole nut that is screwed into the feed screw 5, and is attached to the flange 4 of the housing 4.
’ is fixed. 2 is a movable pole nut that is screwed onto the feed screw 5, and is fixed to the flange 4'' of the housing 4. 7 is connected to the housing 4 via a piezoelectric element 6 inserted using the flange 4'' as a spacer. The mounting bolt is made of an elastic material such as plastic, and supports the flange 4" so that it can be freely displaced in the direction of the screw shaft ring as the piezoelectric element 3 expands and contracts. 6 is a movable table that can hold, for example, a measuring instrument, etc. The shaft bearing of the pole screw 5, [ and the rotation driver are omitted. Also, the adjustment amount of the port 7 does not matter; □
) or metal.

このような構成において、図示しない制御装置から所要
の電圧を圧電素子6に与え圧電素子6を膨張或いは収縮
させることにより、可動側ポールナツト2を送りねじ5
の軸方向にのみ所定量変位させ、固定側ポールナツト1
と可動側ポールナツト2との間の相対変位を増大もしく
は減少させ予圧量を変化させるものである。又このとき
前記制御装置にテーブル乙の移動速度や或いは加工負荷
等に応じた適正な予圧量を予め設定しておくことにより
、各作業工程毎に必要、充分な予圧量を負荷することが
できる。このようにして例えばテーブルの高速移動時等
高い剛性を必要としないときは自動的に予圧量が低減さ
れるので、摩擦が減小しねじ軸の変形が押えられ、高速
にもかかわらず高精度の位置決めが可能となる。またこ
れと同時に摩擦力の減小に伴いポールねじの摩耗が減小
しその寿命を延長することができると共に、また仮りに
ポールねじが摩耗してもその摩耗に対する補正を制御装
置に与えることによりこれによる精度の低下を防止する
ことができる。
In such a configuration, by applying a required voltage from a control device (not shown) to the piezoelectric element 6 to expand or contract the piezoelectric element 6, the movable pole nut 2 is connected to the feed screw 5.
Displace the fixed side pole nut 1 by a predetermined amount only in the axial direction.
The amount of preload is changed by increasing or decreasing the relative displacement between the pole nut 2 and the movable pole nut 2. Also, at this time, by setting in advance an appropriate amount of preload in the control device according to the moving speed of table B, processing load, etc., it is possible to apply a necessary and sufficient amount of preload for each work process. . In this way, the amount of preload is automatically reduced when high rigidity is not required, such as when the table is moving at high speed, reducing friction and suppressing deformation of the screw shaft, resulting in high precision even at high speeds. positioning becomes possible. At the same time, as the frictional force is reduced, the wear of the pole screw is reduced and its lifespan can be extended, and even if the pole screw wears out, compensation for the wear can be given to the control device. It is possible to prevent a decrease in accuracy due to this.

以上説明したように本実施例による予圧調整機構は、ポ
ールナツトの支持面に圧電素子を間座として挿入するだ
けの簡単な構成であるから、極めて小型、簡単に形成す
ることができ従って小規模の送りねじ装置にも自由に装
着することができる。
As explained above, the preload adjustment mechanism according to this embodiment has a simple structure in which a piezoelectric element is inserted as a spacer into the support surface of the pole nut, so it can be extremely compact and easily formed, and therefore can be used on a small scale. It can also be freely attached to a feed screw device.

更にまた、圧電素子はその特性上応答が速く且つミクロ
ンオーダーの微小変位が可能であることから、負荷すべ
き予圧量を極めて正確に且つ応答よく調整することがで
き前述した位置決め精度の向上等に極めて効果的である
Furthermore, piezoelectric elements have a fast response due to their characteristics and are capable of minute displacements on the micron order, so the amount of preload to be applied can be adjusted extremely accurately and with good response, which contributes to the aforementioned improvement in positioning accuracy. Extremely effective.

次に第6図を参照すると、図は2つの圧電素子3.6′
を用いた場合を示すが、図において、固定側ポールナツ
ト1はハウジング4に固定されており、一方可動側ポー
ルナット2は、その−側面が圧電素子6を介して固定側
ポールナツト1にその他側面が圧電素子3′を介して弾
性的に変位可能なナツト押え板8に対接している。即ち
可動側ポールナツト2は圧電素子6,3′の膨張収縮に
伴いキー9に案内されてねじ軸5軸方向に変位自在に構
成されている。
Referring now to FIG. 6, the diagram shows two piezoelectric elements 3.6'
In the figure, the fixed side pole nut 1 is fixed to the housing 4, while the other side of the movable side pole nut 2 is connected to the fixed side pole nut 1 via the piezoelectric element 6. It is in contact with a nut holding plate 8 which is elastically displaceable via a piezoelectric element 3'. That is, the movable pole nut 2 is guided by the key 9 and is configured to be freely displaceable in the axial direction of the screw shaft 5 as the piezoelectric elements 6, 3' expand and contract.

このような構成において、制御装置からは2つの圧電素
子3,6′に夫々所定の電圧が与えられ、片方の圧電素
子が膨張するときは他方の圧電素子が収縮することによ
り、可動側ポールナツト2と固定側ポールナツト1との
間の相対変位を増大もシ<は減少させ予圧量を変化させ
るが、このとき、制御、装置はテーブル乙の移動方向に
応じて2つのポールナツト1,2による予圧の向きを引
張り或いは圧縮の向きの何れかに変換し、テーブル乙の
送り負荷を常に固定側のポールナツト1で受けるように
制御する。従ってこの場合2つのポールナツト1,2に
負荷される予圧量は全体的(二は更に減少し摩擦による
摩耗や発熱量を更に減少することができる、。
In such a configuration, the control device applies a predetermined voltage to each of the two piezoelectric elements 3 and 6', and when one piezoelectric element expands, the other piezoelectric element contracts, so that the movable pole nut 2 The amount of preload is changed by increasing or decreasing the relative displacement between the pole nut 1 and the fixed side pole nut 1. At this time, the control and device adjust the preload by the two pole nuts 1 and 2 according to the direction of movement of the table B. The direction is changed to either a tension or compression direction, and control is performed so that the feed load of the table B is always received by the pole nut 1 on the fixed side. Therefore, in this case, the overall amount of preload applied to the two pole nuts 1 and 2 is further reduced, making it possible to further reduce wear and heat generation due to friction.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明による予圧調整装置によれ
ば、予圧量な調整するポールナツトの変位を間座として
挿入した圧電素子を介して行なう? ものであるから、
その構造が簡単で装置が極めて小型となり小規模の送り
ねじ装置にも自由に装着できる利点がある。更にこれと
同時に、圧電素子はその特性上応答が速く且つ微小変位
が可能であることから、負荷すべき予圧量を極めて正確
に且つ応答よく調整でき、従って予圧に伴う摩擦が可及
的に減小し、ねじ軸の変形が可及的に押えられ極めて高
精度に位置決めを行うことができる利点がある。また前
記摩擦の減小に伴い、ポールねじの寿命を延長すると共
に更にポールねじの摩耗による精度の低下を防止できる
利点がある。
As explained above, according to the preload adjustment device according to the present invention, the displacement of the pole nut to be adjusted by the amount of preload is performed via the piezoelectric element inserted as a spacer. Because it is a thing,
The structure is simple, the device is extremely compact, and it has the advantage of being able to be freely attached to small-scale feed screw devices. Furthermore, at the same time, piezoelectric elements have a quick response due to their characteristics and are capable of minute displacements, so the amount of preload to be applied can be adjusted extremely accurately and with good response, and therefore the friction associated with preload can be reduced as much as possible. Although the screw shaft is small, deformation of the screw shaft can be suppressed as much as possible and positioning can be performed with extremely high precision. Furthermore, with the reduction in friction, there is an advantage that the life of the pole screw can be extended, and furthermore, a decrease in accuracy due to wear of the pole screw can be prevented.

【図面の簡単な説明】[Brief explanation of drawings]

第1図並びに第2図は1つの圧電素子を用いた場合の本
発明の実施例、第3図は2つの圧電素子を用いた場合の
本発明の実施例である。 1 固定側ポールナツト 2 可動側ポールナツト 6.6′ 圧電素子 4 ハウジング 4′、4“ フランジ 5 送りねじ 6 移動テーブル 7 ボルト 8 ナツト押え板 9 キー ・ j゛、 ii 第1図 !PJ20 第3図
1 and 2 show an embodiment of the invention using one piezoelectric element, and FIG. 3 shows an embodiment of the invention using two piezoelectric elements. 1 Fixed side pole nut 2 Movable side pole nut 6.6' Piezoelectric element 4 Housing 4', 4" flange 5 Feed screw 6 Moving table 7 Bolt 8 Nut holding plate 9 Key ・ j゛, ii Figure 1! PJ20 Figure 3

Claims (1)

【特許請求の範囲】[Claims] 1、複数のポールナツトを使用するボールねじ送り装置
において、ボールナツトフランジ面とハウジングの間ま
たは一方のボールナツトと他方のポールナツトとの間に
圧電素子を間座として挿入し、ポールナツトの軸方向変
位を自在としたことを特徴とするボールねじ送り装置の
予圧調整機構。
1. In a ball screw feeding device that uses multiple pole nuts, a piezoelectric element is inserted as a spacer between the ball nut flange surface and the housing or between one ball nut and the other pole nut, so that the pole nuts can be freely displaced in the axial direction. A preload adjustment mechanism for a ball screw feeder, characterized by:
JP10962084A 1984-05-31 1984-05-31 Pre-load adjusting mechanism for ball screw feeding device Granted JPS60256667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10962084A JPS60256667A (en) 1984-05-31 1984-05-31 Pre-load adjusting mechanism for ball screw feeding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10962084A JPS60256667A (en) 1984-05-31 1984-05-31 Pre-load adjusting mechanism for ball screw feeding device

Publications (2)

Publication Number Publication Date
JPS60256667A true JPS60256667A (en) 1985-12-18
JPH0570745B2 JPH0570745B2 (en) 1993-10-05

Family

ID=14514904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10962084A Granted JPS60256667A (en) 1984-05-31 1984-05-31 Pre-load adjusting mechanism for ball screw feeding device

Country Status (1)

Country Link
JP (1) JPS60256667A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4116627A1 (en) * 1990-09-20 1992-03-26 Asuka Trading Co Automatic pressure control for ball lead-screw - has two ball-screw nuts separated by fluid pressure-controlled flexible spacer
DE102004059844A1 (en) * 2004-12-10 2006-07-06 Raith Gmbh Linear drive has screw driven slide with coplanar piezoelectric or shape memory drive blocks
WO2012120670A1 (en) 2011-03-09 2012-09-13 株式会社日立製作所 Linear actuator
JP2013096479A (en) * 2011-10-31 2013-05-20 Jtekt Corp Feed screw device
CN104141759A (en) * 2014-07-14 2014-11-12 沈阳化工大学 Axial pre-tightening device of screw rod nut pair with controllable pre-tightening force

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5370268A (en) * 1976-12-03 1978-06-22 Gambro Ag Adjustment mechanism for performing fine adjustment and rough adjustment
JPS5830129A (en) * 1981-08-17 1983-02-22 Hitachi Ltd Horizontal fine adjustment device
JPS58225256A (en) * 1982-06-23 1983-12-27 Nippon Seiko Kk Feed screw apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5370268A (en) * 1976-12-03 1978-06-22 Gambro Ag Adjustment mechanism for performing fine adjustment and rough adjustment
JPS5830129A (en) * 1981-08-17 1983-02-22 Hitachi Ltd Horizontal fine adjustment device
JPS58225256A (en) * 1982-06-23 1983-12-27 Nippon Seiko Kk Feed screw apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4116627A1 (en) * 1990-09-20 1992-03-26 Asuka Trading Co Automatic pressure control for ball lead-screw - has two ball-screw nuts separated by fluid pressure-controlled flexible spacer
DE102004059844A1 (en) * 2004-12-10 2006-07-06 Raith Gmbh Linear drive has screw driven slide with coplanar piezoelectric or shape memory drive blocks
DE102004059844B4 (en) * 2004-12-10 2010-09-02 Raith Gmbh Linear guide arrangement
WO2012120670A1 (en) 2011-03-09 2012-09-13 株式会社日立製作所 Linear actuator
JP5535396B2 (en) * 2011-03-09 2014-07-02 株式会社日立製作所 Linear actuator
JP2013096479A (en) * 2011-10-31 2013-05-20 Jtekt Corp Feed screw device
CN104141759A (en) * 2014-07-14 2014-11-12 沈阳化工大学 Axial pre-tightening device of screw rod nut pair with controllable pre-tightening force

Also Published As

Publication number Publication date
JPH0570745B2 (en) 1993-10-05

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