JPS60241566A - Static pressure screw - Google Patents
Static pressure screwInfo
- Publication number
- JPS60241566A JPS60241566A JP9456184A JP9456184A JPS60241566A JP S60241566 A JPS60241566 A JP S60241566A JP 9456184 A JP9456184 A JP 9456184A JP 9456184 A JP9456184 A JP 9456184A JP S60241566 A JPS60241566 A JP S60241566A
- Authority
- JP
- Japan
- Prior art keywords
- screw
- thread
- air
- static pressure
- female
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transmission Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔技術分野〕
本発明は、工作機械或いは測定器等のテーブルの送り機
構に用いられる静圧空気送りネジ機構に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a hydrostatic air feed screw mechanism used in a table feed mechanism of a machine tool, a measuring instrument, or the like.
従来のこの種の静圧ネジを第８図によって説明する。図
において、■は多孔質材料からなる雌ネジ２を駆動する
雄ネジで、雌ネジ２の両端部２ａ。A conventional static pressure screw of this type will be explained with reference to FIG. In the figure, ■ is a male screw that drives a female screw 2 made of a porous material, and both ends 2a of the female screw 2 are shown.
２ｂは空気流出抜止用の目つぶしがなされている。2b is closed to prevent air from leaking out.
３は外筒、４は給気孔、５は螺線状給気孔で、空気を雌
ネジ全面に効率的に導くためネジと同ピツチで加工され
ている。3 is an outer cylinder, 4 is an air supply hole, and 5 is a spiral air supply hole, which is machined at the same pitch as the screw in order to efficiently guide air to the entire surface of the female thread.
ここで、雌ネジフランク面２ｃと雄ネジフランク面１ａ
との隙間、雌ネジ谷径部面２ｄと雄ネジ外径部面１ｂと
の隙間、及び雌ネジ内径部面２ｅと雄ネジ谷径部面１ｃ
との隙間は夫々数μｍ程度になされ、空気は雌ネジ全面
から噴射されるように構成されている。このため送りネ
ジ装置のラジアル剛性は噴射空気の静圧により増大しそ
の大きさは数ｋＦＶＩｔｍ の値となっている。従って
このような構造の静圧ネジにおいては、雄ネジｌに回転
による軸振れが発生したり雄ネジ１のネジ形状に加工誤
差があると、雌ネジ２もこれに対応して変位し、この結
果、雌ネジ２と固定しである図示しないテーブルにピッ
チングやヨーイングを発生させてしまう欠点があった。Here, the female thread flank surface 2c and the male thread flank surface 1a
the gap between the female screw root diameter surface 2d and the male screw outer diameter surface 1b, and the gap between the female screw root diameter surface 2e and the male screw root diameter surface 1c.
The gap between the two is approximately several micrometers, and the air is injected from the entire surface of the female thread. Therefore, the radial rigidity of the feed screw device increases due to the static pressure of the jetted air, and its magnitude reaches a value of several kFVItm. Therefore, in a static pressure screw with such a structure, if axial runout occurs in the male thread l due to rotation or there is a machining error in the thread shape of the male thread 1, the female thread 2 will also be displaced correspondingly. As a result, the table (not shown) that is fixed to the female screw 2 has the disadvantage of causing pitching and yawing.
本発明の目的は、上記の欠点を克服し、送りネジ装置の
ラジアル剛性を減少させることにより、雄ネジの回転に
よる軸振れやネジ加工精度に誤差があってもこれらがテ
ーブルの精度に影響を及ぼすことのない静圧ネジを提供
することにある。The purpose of the present invention is to overcome the above-mentioned drawbacks and reduce the radial rigidity of the feed screw device, so that even if there is axial runout due to the rotation of the male screw or errors in screw machining accuracy, these will not affect the accuracy of the table. The object of the present invention is to provide a static pressure screw that does not exert excessive force.
＼ ＼
即ち′後述する本発明の実施例は、回転運動を直線運動
に変換する送りネジ装置において、前記送りネジ装置の
雄ネジ外径部面と雌ネジ谷径部１面との隙間及び雄ネジ
谷径部面と雌ネジ内径部面との隙間を大きくとり、前記
雄ネジ並びに雌ネジのネジ山角度を小さくし、前記雌ネ
ジに形成される通気部のうち、雌ネジ谷径部面近傍及び
雌ネジ内径部面の通気部を閉止し該個所からの流体噴出
を防出することにより、送りネジ装置のラジアル剛性を
減少させ、雄ネジの回転による軸振れやイ・ジ加工精度
に誤差があってもこれらがテーブルの精度に影響を及ぼ
すことのないように構成した静圧ネジである。＼ ＼ That is, in the embodiment of the present invention described later, in a feed screw device that converts rotational motion into linear motion, A large gap is provided between the thread root diameter surface and the female thread inner diameter surface, the thread angles of the male thread and the female thread are made small, and the female thread root diameter surface of the ventilation portion formed in the female screw is made large. By closing the vents near the inner diameter of the female thread and preventing fluid from ejecting from these areas, the radial rigidity of the feed screw device is reduced, and the axial runout caused by the rotation of the male thread and the machining accuracy are reduced. This static pressure screw is constructed so that even if there are errors, these do not affect the accuracy of the table.
以下、本発明の実施例について添付図面を参照して説明
する。笹１図は本発明の一実施例を示す静圧ネジ部一部
の縦断面図、第２図は本発明の他の実施例を示す静圧ネ
ジ部一部の縦断面図である。Embodiments of the present invention will be described below with reference to the accompanying drawings. Figure 1 is a vertical cross-sectional view of a portion of the static pressure screw section showing one embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view of a portion of the static pressure screw section showing another embodiment of the present invention.
第１図において、６は多孔質である雌ネジ２の表面にな
された目つぶしで、この目つぶし６は雄ネジ谷径部面２
ｂ−、雌ネジ内径部面２Ｃ１及び雌ネジフランク面２ｃ
上で雄ネジフランク面１ａと対向しない部分２ｆに施さ
れている。７は雌イ・シフランク面２ｃと雄ネジフラン
ク面１ａとの隙間で数μｍ程度になされている。８並び
に９は、夫々雌ネジ谷径部面２ｂと雄ネジ外径部面１ｂ
、並びに雌ネジ内径部面２Ｃと雄ネジ内径部面１ｃとの
隙間で、各々０５〜Ｉｎｏｎ程度になされている。In FIG. 1, 6 is a hole made on the surface of the female screw 2 which is porous, and this hole 6 is the hole 2 on the root diameter surface of the male screw.
b-, female thread inner diameter surface 2C1 and female thread flank surface 2c
It is applied to the upper portion 2f that does not face the male thread flank surface 1a. 7 is a gap between the female screw flank surface 2c and the male screw flank surface 1a, which is approximately several μm apart. 8 and 9 are the female thread root diameter surface 2b and the male thread outer diameter surface 1b, respectively.
, and the gap between the female thread inner diameter surface 2C and the male thread inner diameter surface 1c, each of which is approximately 0.05 to Inon.
このような構成において、螺線状給気溝５から供給され
た空気は多孔質材料である雌ネジ２の全表面から噴射さ
れようとするが、雌ネジ谷径部面２ｂと雌ネジ内径部面
２ｅにおいては目つぷし６が施されているため空気噴出
は行われず、静圧は上昇することがないので空気噴射に
よるラジアル剛性は生じない。また、雌ネジフランク面
２ｃから噴射された空気は隙間７における圧力を上昇さ
せたのち隙間８及び９に流入し、これら隙間８．９にお
ける圧力を上昇させようとするが、隙間８．９は０．５
〜１ｍ程度と大きいためその圧力は殆んど上昇せず、従
って若しラジアル剛性が生じてもその大きさは非常に僅
かとなる。また一方において、このように隙間８及び９
を大きくとると雌フランク面２ｃ上で雄ネジフランク面
１ａと対向せぬ部分２ｆが生じ、この部分２ｆがら空気
が噴射されるとラジアル剛性が生ずるが、本実施例にお
いては前記部２ｆには目つぶし′６が施されており空気
噴射が行われないので、ラジアル剛性を生ずることはな
い。このように隙間８及び９においてはラジアル剛性が
生じないので、静圧ネジのラジアル剛性は隙間７に生ず
るラジアル剛性のみとなり、このときの大きさは隙間７
における全剛性の５ｉｎ２（ＯＡ）成分のみとなる。従
って従来の静圧ネジに比べてラジアル剛性を大巾に減小
させることができる。更にここにおいて、ネジ山角度θ
は従来通常とられる６ ０’から３０２下にとられてい
るので、前記ラジアル剛性の成分５ｉｎ２（ＯＡ）は従
来の６０゜における場合の全剛性に対する２５チから約
１７−以下に減少することができる。In such a configuration, the air supplied from the spiral air supply groove 5 tries to be injected from the entire surface of the female thread 2, which is a porous material, but the air is injected from the entire surface of the female thread 2, which is a porous material. Since the blind 6 is provided on the surface 2e, no air is ejected, and the static pressure does not increase, so that no radial stiffness is generated by the air injection. Furthermore, the air injected from the female thread flank surface 2c increases the pressure in the gap 7 and then flows into the gaps 8 and 9, trying to increase the pressure in these gaps 8.9, but the air in the gap 8.9 0.5
Since it is large, about 1 m, the pressure hardly increases, and therefore even if radial stiffness occurs, its magnitude will be very small. On the other hand, gaps 8 and 9
If it is made large, a portion 2f that does not face the male threaded flank surface 1a will be created on the female flank surface 2c, and when air is injected through this portion 2f, radial rigidity will occur, but in this embodiment, the portion 2f is Since the blinds '6 are provided and no air injection is performed, no radial stiffness occurs. In this way, since no radial rigidity occurs in gaps 8 and 9, the radial rigidity of the static pressure screw is only the radial rigidity generated in gap 7, and the size in this case is
It is only the 5in2 (OA) component of the total stiffness at . Therefore, the radial rigidity can be significantly reduced compared to conventional static pressure screws. Furthermore, here, the thread angle θ
is set below 302' from the conventionally usual 60', so the radial stiffness component 5 in2 (OA) can be reduced from the conventional 25 inches for the total stiffness at 60 degrees to about 17 inches or less. can.
このようにラジアル剛性が減少した状態で雄イ・ジｌを
回転する場合には、雄ネジの軸振れや雄イ・ジ１のネジ
形状の加工誤差のために雄ネジ１と雌ネジ２との間の隙
間８，９の間隔が変化しても、前述したラジアル剛性が
非常に小さいことと且つ隙間８，９が非常に大きいこと
により、雌ネジ２は径方向には殆んど変位することがな
（・。従って、雌ネジ２に固定される図示しないテーブ
ルにもピッチングやヨーイングを生じさせることがない
。When rotating the male screw 1 with reduced radial rigidity, the male screw 1 and the female screw 2 may be rotated due to axial runout of the male screw and machining errors in the thread shape of the male screw 1. Even if the distance between the gaps 8 and 9 changes, the female screw 2 will hardly be displaced in the radial direction due to the extremely small radial rigidity mentioned above and the very large gaps 8 and 9. Therefore, the table (not shown) fixed to the female screw 2 will not cause pitching or yawing.
また隙間８，９は０５■から１ｍｍ程度と大きくとられ
ていることから、従来のように隙間が数μｍになる様に
雌ネジの谷径、内径及び雄ネジの外径、谷径を加工する
のに対し、ネジの径方向の寸法が多少ラフでもよく加工
が容易となる。In addition, since the gaps 8 and 9 are set to be large, about 1 mm from 05■, the root diameter and inner diameter of the female screw and the outer diameter and root diameter of the male screw are processed so that the gap is several μm, as in the conventional method. In contrast, the radial dimension of the screw can be somewhat rough and can be easily processed.
なお、上記の説明においては、雌ネジを多孔質材で形成
しその表面の所定個所に目つぶしを施した場合について
述べたが、オリフィス型又は絞り型の通気部を用いる場
合においても給気孔を雌ネジフランク面中央付近のみに
設置すれば、上述したと同様の効果が達成されることは
明らかである。In addition, in the above explanation, we have described the case where the female screw is made of a porous material and the specified areas on its surface are closed. However, when using an orifice-type or aperture-type ventilation part, It is clear that the same effect as described above can be achieved if it is installed only near the center of the screw flank surface.
次いで、第２図は本発明による他の実施例でネジ山形状
が矩形になされた場合を示す。即ち、第１図に示す実施
例におけるネジ山角度θを０としたものである。本実施
例においては隙間７に発生する圧力はすべて軸方向成分
となるからラジアル剛性はゼロとなる。従ってこの場合
、雄ネジ１の精度は雌ネジ２に固定される図示しないテ
ーブルの精度には全く影響しないこととなる。Next, FIG. 2 shows another embodiment of the present invention in which the thread shape is rectangular. That is, the thread angle θ in the embodiment shown in FIG. 1 is set to zero. In this embodiment, all the pressure generated in the gap 7 has an axial component, so the radial rigidity is zero. Therefore, in this case, the accuracy of the male screw 1 does not affect the accuracy of the table (not shown) fixed to the female screw 2 at all.
以上説明したように、本発明は、雄ネジと雌ネジの径方
向の隙間を大きくとり、ネジ山角度な小さくし、雌ネジ
の谷径部面及び内径部面に目つぶしを行なうことにより
、送りネジ装置のラジアル剛性を減少させたものである
から、雄ネジの回転による軸振れやイ・ジ加工精度の誤
差が雌ネジに固定されるテーブルの精度に悪影響を及ぼ
すことがなくなるという利点があると共に、ネジの径方
向の加工を従来に比べて大巾に簡単且つ容易にできる利
点がある。As explained above, the present invention increases the radial gap between the male thread and the female thread, reduces the thread angle, and closes the root diameter surface and inner diameter surface of the female thread. Since the radial rigidity of the screw device is reduced, it has the advantage that axial runout due to the rotation of the male screw and errors in precision machining will not have a negative effect on the accuracy of the table fixed to the female screw. At the same time, there is an advantage that the radial direction machining of the screw can be made much more simply and easily than in the past.
第１図は本発明の一実施例を示す静圧ネジ一部の縦断面
図、第２図は本発明の他の実施例を示す静圧ネジ一部の
縦断面図、第３図は従来の静圧ネジを示す縦断面図であ
る。
■・・・・・・雄ネジ。
ｌａ・・・・・・雄ネジフランク面。
■ｂ・・・・・・雄ネジ外径部面。
ｌｃ・・・・・・雄ネジ谷径部面。
２・・・・・・雌ネジ。
Ｚａ、Ｚｂ・・・・・・雌ネジ端面。
２ｃ・・・・・・雌ネジフランク面。
２ｄ・・・・・・雌ネジ谷径部面。
２ｅ・・・・・・雌ネジ内径部面。
３・・・・・・・・・外筒。
４・・・・・・・・・給気筒。
５・・・・・・・・・螺線状給気溝。
６・・・・・・・・・目つぶし。
７、８．９・・・・・・隙間。
θ・・・・・・・・・ネジ山角度。
特許出願人 キャノン株式会社
代 理 人 若 林 忠
第１図 第２図
第３図FIG. 1 is a vertical sectional view of a portion of a static pressure screw showing one embodiment of the present invention, FIG. 2 is a longitudinal sectional view of a portion of a static pressure screw showing another embodiment of the invention, and FIG. 3 is a conventional FIG. ■・・・・・・Male thread. la... Male thread flank surface. ■b... Male thread outer diameter surface. lc... Male thread root diameter surface. 2...Female thread. Za, Zb...Female thread end face. 2c...Female screw flank surface. 2d...Female screw root diameter surface. 2e...Female thread inner diameter surface. 3・・・・・・・・・Outer tube. 4・・・・・・・・・Supplementary cylinder. 5...Spiral air supply groove. 6...Blind your eyes. 7, 8.9...Gap. θ・・・・・・Screw thread angle. Patent applicant: Canon Co., Ltd. Agent: Tadashi Wakabayashi Figure 1 Figure 2 Figure 3
Claims (1)
において、径方向の剛性を減少させ調心作用を低下する
ことを特徴とする静圧ネジ２、前記送りネジ装置の雄ネ
ジ外径部面と雌ネジ谷径部面との隙間を大きくとること
を特徴とする特許請求の範囲第１項に記載の静圧ネジ８
、 前記雄ネジ並びに雌ネジのネジ山角度を小さくする
ことを特徴とする特許請求の範囲第１項に記載した静圧
ネジ ４、前記雌ネジに形成される通気部のうち、雌ネジ谷径
部面近傍及び雌ネジ内径部面の通気部を閉止し、該個所
からの流体噴出を防止するようにした特許請求の範囲第
１項記載の静圧ネジ[Scope of Claims] 1. A static pressure screw in a feed screw device for converting rotational motion into linear motion, characterized in that the rigidity in the radial direction is reduced and the alignment effect is reduced; 2. The feed screw device; The static pressure screw 8 according to claim 1, characterized in that a large gap is provided between the outer diameter surface of the male thread and the root diameter surface of the female thread.
, the static pressure screw 4 according to claim 1, characterized in that the thread angles of the male thread and the female thread are made small; The static pressure screw according to claim 1, wherein the ventilation portion near the inner diameter portion of the female thread is closed to prevent fluid from being ejected from the portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9456184A JPS60241566A (en) | 1984-05-14 | 1984-05-14 | Static pressure screw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9456184A JPS60241566A (en) | 1984-05-14 | 1984-05-14 | Static pressure screw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60241566A true JPS60241566A (en) | 1985-11-30 |
Family
ID=14113729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9456184A Pending JPS60241566A (en) | 1984-05-14 | 1984-05-14 | Static pressure screw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60241566A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4793201A (en) * | 1987-06-29 | 1988-12-27 | Nippon Telegraph And Telephone Corporation | Porous static pressure guide |
| US20150345552A1 (en) * | 2014-05-27 | 2015-12-03 | Metal Industries Research & Development Centre | Aerostatic bearing |
-
1984
- 1984-05-14 JP JP9456184A patent/JPS60241566A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4793201A (en) * | 1987-06-29 | 1988-12-27 | Nippon Telegraph And Telephone Corporation | Porous static pressure guide |
| US20150345552A1 (en) * | 2014-05-27 | 2015-12-03 | Metal Industries Research & Development Centre | Aerostatic bearing |
| US9400010B2 (en) * | 2014-05-27 | 2016-07-26 | Metal Industries Research & Development Centre | Aerostatic bearing |
| US9739305B2 (en) | 2014-05-27 | 2017-08-22 | Metal Industries Research & Development Centre | Aerostatic bearing |
| US10030699B2 (en) | 2014-05-27 | 2018-07-24 | Metal Industries Research & Development Centre | Aerostatic bearing |
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