JPS60184259U - analytical electron microscope - Google Patents
analytical electron microscopeInfo
- Publication number
- JPS60184259U JPS60184259U JP7241384U JP7241384U JPS60184259U JP S60184259 U JPS60184259 U JP S60184259U JP 7241384 U JP7241384 U JP 7241384U JP 7241384 U JP7241384 U JP 7241384U JP S60184259 U JPS60184259 U JP S60184259U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron microscope
- magnetic pole
- pole piece
- upper magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
゛ 第1図は従来装置を説明するための図、第2図は本
考案の一実施例の構成図、第3図は本考案を説明するた
めの図、第4図は他の実施例の要部を説明するための図
である。
1:電子線、2:試料、3:X線検出器、4:対物レン
ズ上磁極片、6:コリメータ、7:孔、10:反射電子
防止板、11:移動手段、12−二反射電子検出器。゛ Fig. 1 is a diagram for explaining a conventional device, Fig. 2 is a configuration diagram of one embodiment of the present invention, Fig. 3 is a diagram for explaining the present invention, and Fig. 4 is a diagram of another embodiment. FIG. 3 is a diagram for explaining main parts. 1: Electron beam, 2: Sample, 3: X-ray detector, 4: Objective lens upper magnetic pole piece, 6: Collimator, 7: Hole, 10: Backscattered electron prevention plate, 11: Moving means, 12-Two backscattered electron detection vessel.
Claims (2)
X線を検出するため、対物レンズ上磁極片の上に配置さ
れたX線検出器と、該上磁極片の開口に挿入されて配置
され試料から該X線検出器を見込む孔を有するコリメー
タとを備えた装置において、該対物レンズ上磁極片と試
料との′ 間に設けられた反射電子防止板と、該反射電
子防止板を移動するための移動手段を設けたことを特徴
とする分析電子顕微鏡。(1) In order to detect the X-rays generated by the sample when the sample is irradiated with an electron beam, an X-ray detector is placed above the upper magnetic pole piece of the objective lens, and an X-ray detector is inserted into the opening of the upper magnetic pole piece. In an apparatus equipped with a collimator having a hole through which the X-ray detector can be viewed from the sample, a backscattered electron prevention plate provided between the upper magnetic pole piece of the objective lens and the sample, and the backscattered electron prevention plate are moved. An analytical electron microscope characterized by being provided with a means of transportation for carrying out the analysis.
た実用新案登録請求の範囲第1項記載の分析電子顕微鏡
。(2) The analytical electron microscope according to claim 1, wherein a backscattered electron detector is attached to the backscattered electron prevention plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7241384U JPS60184259U (en) | 1984-05-17 | 1984-05-17 | analytical electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7241384U JPS60184259U (en) | 1984-05-17 | 1984-05-17 | analytical electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60184259U true JPS60184259U (en) | 1985-12-06 |
Family
ID=30610794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7241384U Pending JPS60184259U (en) | 1984-05-17 | 1984-05-17 | analytical electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60184259U (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5817856B2 (en) * | 1975-05-23 | 1983-04-09 | 株式会社クボタ | Kensetsukikainoyouratsuho-surenketsukouzo |
-
1984
- 1984-05-17 JP JP7241384U patent/JPS60184259U/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5817856B2 (en) * | 1975-05-23 | 1983-04-09 | 株式会社クボタ | Kensetsukikainoyouratsuho-surenketsukouzo |
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