JPS60161523A - 三次元測定機 - Google Patents
三次元測定機Info
- Publication number
- JPS60161523A JPS60161523A JP1746384A JP1746384A JPS60161523A JP S60161523 A JPS60161523 A JP S60161523A JP 1746384 A JP1746384 A JP 1746384A JP 1746384 A JP1746384 A JP 1746384A JP S60161523 A JPS60161523 A JP S60161523A
- Authority
- JP
- Japan
- Prior art keywords
- scale
- light
- main scale
- index
- measuring machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 34
- 238000001514 detection method Methods 0.000 claims abstract description 24
- 239000011521 glass Substances 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims description 17
- 230000002265 prevention Effects 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 9
- 239000011358 absorbing material Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 9
- 239000000523 sample Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 201000003373 familial cold autoinflammatory syndrome 3 Diseases 0.000 description 3
- 239000004575 stone Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1746384A JPS60161523A (ja) | 1984-02-02 | 1984-02-02 | 三次元測定機 |
US06/693,658 US4684257A (en) | 1984-02-02 | 1985-01-22 | Measuring instrument |
GB08501708A GB2153995B (en) | 1984-02-02 | 1985-01-23 | Coordinate measuring instrument |
DE19853503116 DE3503116A1 (de) | 1984-02-02 | 1985-01-30 | Messinstrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1746384A JPS60161523A (ja) | 1984-02-02 | 1984-02-02 | 三次元測定機 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60161523A true JPS60161523A (ja) | 1985-08-23 |
Family
ID=11944715
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1746384A Pending JPS60161523A (ja) | 1984-02-02 | 1984-02-02 | 三次元測定機 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS60161523A (de) |
DE (1) | DE3503116A1 (de) |
GB (1) | GB2153995B (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62265520A (ja) * | 1986-05-12 | 1987-11-18 | Mitsutoyo Corp | 2つの検出子を備えた三次元測定機 |
JPH03287015A (ja) * | 1990-04-04 | 1991-12-17 | Mitsutoyo Corp | 反射型光学式変位検出器 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4113842A1 (de) * | 1991-04-27 | 1992-11-05 | Deutsche Forsch Luft Raumfahrt | Verfahren und einrichtung zur messung und bestimmung einer wegdifferenz in interferometern nach michelson |
DE19912310B4 (de) * | 1999-03-19 | 2007-11-29 | Dr. Johannes Heidenhain Gmbh | Positionsmeßeinrichtung |
DE10011872A1 (de) * | 2000-03-10 | 2001-09-27 | Heidenhain Gmbh Dr Johannes | Reflexions-Messteilung und Verfahren zur Herstellung derselben |
JP2004028862A (ja) * | 2002-06-27 | 2004-01-29 | Harmonic Drive Syst Ind Co Ltd | 投影型エンコーダ |
JP5140260B2 (ja) * | 2006-10-06 | 2013-02-06 | 株式会社ミツトヨ | 画像測定機用校正スケール |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1588018B2 (de) * | 1967-11-03 | 1976-06-10 | Jenoptik Jena GmbH, χ 6900 Jena | Einrichtung zur x,y-positionierung von kreuztischen |
DE2010187A1 (de) * | 1970-03-04 | 1971-09-23 | Siemens Ag | Tastengesteuerte Fünfercode-Typenhebel-Fernschreibmaschine mit vier Typengruppen |
JPS57157118A (en) * | 1981-03-24 | 1982-09-28 | Mitsutoyo Mfg Co Ltd | Photoelectric type displacement detecting device |
ATA395181A (de) * | 1981-09-14 | 1986-12-15 | Rieder Heinz | Handmessgeraet |
US4442607A (en) * | 1981-11-25 | 1984-04-17 | Mitutoyo Mfg. Co., Ltd. | Measuring instrument |
-
1984
- 1984-02-02 JP JP1746384A patent/JPS60161523A/ja active Pending
-
1985
- 1985-01-23 GB GB08501708A patent/GB2153995B/en not_active Expired
- 1985-01-30 DE DE19853503116 patent/DE3503116A1/de active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62265520A (ja) * | 1986-05-12 | 1987-11-18 | Mitsutoyo Corp | 2つの検出子を備えた三次元測定機 |
JPH0478929B2 (de) * | 1986-05-12 | 1992-12-14 | Mitutoyo Corp | |
JPH03287015A (ja) * | 1990-04-04 | 1991-12-17 | Mitsutoyo Corp | 反射型光学式変位検出器 |
Also Published As
Publication number | Publication date |
---|---|
DE3503116C2 (de) | 1987-10-01 |
GB8501708D0 (en) | 1985-02-27 |
DE3503116A1 (de) | 1985-08-08 |
GB2153995A (en) | 1985-08-29 |
GB2153995B (en) | 1987-06-10 |
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