JPS60161523A - 三次元測定機 - Google Patents

三次元測定機

Info

Publication number: JPS60161523A
Authority: JP; Japan
Prior art keywords: scale; light; main scale; index; measuring machine
Prior art date: 1984-02-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP1746384A

Other languages

English (en)

Japanese (ja)

Inventor

Hiroshi Hanaoka

花岡　浩

Sadayuki Matsumiya

貞行松宮

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Mitsutoyo Manufacturing Co Ltd

Original Assignee

Mitsutoyo Manufacturing Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-02-02

Filing date

1984-02-02

Publication date

1985-08-23

1984-02-02 Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd

1984-02-02 Priority to JP1746384A priority Critical patent/JPS60161523A/ja

1985-01-22 Priority to US06/693,658 priority patent/US4684257A/en

1985-01-23 Priority to GB08501708A priority patent/GB2153995B/en

1985-01-30 Priority to DE19853503116 priority patent/DE3503116A1/de

1985-08-23 Publication of JPS60161523A publication Critical patent/JPS60161523A/ja

Status Pending legal-status Critical Current

Links

238000006073 displacement reaction Methods 0.000 claims abstract description 34
238000001514 detection method Methods 0.000 claims abstract description 24
239000011521 glass Substances 0.000 claims abstract description 17
230000003287 optical effect Effects 0.000 claims description 17
230000002265 prevention Effects 0.000 claims description 14
239000000463 material Substances 0.000 claims description 9
239000011358 absorbing material Substances 0.000 claims description 4
239000010409 thin film Substances 0.000 claims description 4
238000005259 measurement Methods 0.000 abstract description 9
239000000523 sample Substances 0.000 description 6
230000000694 effects Effects 0.000 description 4
239000002184 metal Substances 0.000 description 4
201000003373 familial cold autoinflammatory syndrome 3 Diseases 0.000 description 3
239000004575 stone Substances 0.000 description 3
230000002411 adverse Effects 0.000 description 2
230000008602 contraction Effects 0.000 description 2
238000005530 etching Methods 0.000 description 2
239000010408 film Substances 0.000 description 2
238000000034 method Methods 0.000 description 2
239000002253 acid Substances 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
238000009434 installation Methods 0.000 description 1
238000003754 machining Methods 0.000 description 1
239000003973 paint Substances 0.000 description 1
229920003002 synthetic resin Polymers 0.000 description 1
239000000057 synthetic resin Substances 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optical Transform (AREA)
Length Measuring Devices By Optical Means (AREA)

JP1746384A 1984-02-02 1984-02-02 三次元測定機 Pending JPS60161523A (ja)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
JP1746384A JPS60161523A (ja)	1984-02-02	1984-02-02	三次元測定機
US06/693,658 US4684257A (en)	1984-02-02	1985-01-22	Measuring instrument
GB08501708A GB2153995B (en)	1984-02-02	1985-01-23	Coordinate measuring instrument
DE19853503116 DE3503116A1 (de)	1984-02-02	1985-01-30	Messinstrument

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1746384A JPS60161523A (ja)	1984-02-02	1984-02-02	三次元測定機

Publications (1)

Publication Number	Publication Date
JPS60161523A true JPS60161523A (ja)	1985-08-23

Family

ID=11944715

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1746384A Pending JPS60161523A (ja)	1984-02-02	1984-02-02	三次元測定機

Country Status (3)

Country	Link
JP (1)	JPS60161523A (de)
DE (1)	DE3503116A1 (de)
GB (1)	GB2153995B (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS62265520A (ja) *	1986-05-12	1987-11-18	Mitsutoyo Corp	２つの検出子を備えた三次元測定機
JPH03287015A (ja) *	1990-04-04	1991-12-17	Mitsutoyo Corp	反射型光学式変位検出器

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE4113842A1 (de) *	1991-04-27	1992-11-05	Deutsche Forsch Luft Raumfahrt	Verfahren und einrichtung zur messung und bestimmung einer wegdifferenz in interferometern nach michelson
DE19912310B4 (de) *	1999-03-19	2007-11-29	Dr. Johannes Heidenhain Gmbh	Positionsmeßeinrichtung
DE10011872A1 (de) *	2000-03-10	2001-09-27	Heidenhain Gmbh Dr Johannes	Reflexions-Messteilung und Verfahren zur Herstellung derselben
JP2004028862A (ja) *	2002-06-27	2004-01-29	Harmonic Drive Syst Ind Co Ltd	投影型エンコーダ
JP5140260B2 (ja) *	2006-10-06	2013-02-06	株式会社ミツトヨ	画像測定機用校正スケール

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE1588018B2 (de) *	1967-11-03	1976-06-10	Jenoptik Jena GmbH, χ 6900 Jena	Einrichtung zur x,y-positionierung von kreuztischen
DE2010187A1 (de) *	1970-03-04	1971-09-23	Siemens Ag	Tastengesteuerte Fünfercode-Typenhebel-Fernschreibmaschine mit vier Typengruppen
JPS57157118A (en) *	1981-03-24	1982-09-28	Mitsutoyo Mfg Co Ltd	Photoelectric type displacement detecting device
ATA395181A (de) *	1981-09-14	1986-12-15	Rieder Heinz	Handmessgeraet
US4442607A (en) *	1981-11-25	1984-04-17	Mitutoyo Mfg. Co., Ltd.	Measuring instrument

1984
- 1984-02-02 JP JP1746384A patent/JPS60161523A/ja active Pending
1985
- 1985-01-23 GB GB08501708A patent/GB2153995B/en not_active Expired
- 1985-01-30 DE DE19853503116 patent/DE3503116A1/de active Granted

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS62265520A (ja) *	1986-05-12	1987-11-18	Mitsutoyo Corp	２つの検出子を備えた三次元測定機
JPH0478929B2 (de) *	1986-05-12	1992-12-14	Mitutoyo Corp
JPH03287015A (ja) *	1990-04-04	1991-12-17	Mitsutoyo Corp	反射型光学式変位検出器

Also Published As

Publication number	Publication date
DE3503116C2 (de)	1987-10-01
GB8501708D0 (en)	1985-02-27
DE3503116A1 (de)	1985-08-08
GB2153995A (en)	1985-08-29
GB2153995B (en)	1987-06-10

Publication	Publication Date	Title
CN100473952C (zh)	2009-04-01	光电编码器、用于光电编码器的比例尺及其制造方法
US7388674B2 (en)	2008-06-17	Laser tracking interferometer
GB2511979A (en)	2014-09-17	Outline profile surface roughness measurement device and outline profile surface roughness measurement method
JPS6127690B2 (de)	1986-06-26
JPH03223609A (ja)	1991-10-02	タッチプローブ
JPS60161523A (ja)	1985-08-23	三次元測定機
US4684257A (en)	1987-08-04	Measuring instrument
KR0149741B1 (ko)	1998-12-01	위치좌표 측정방법 및 위치좌표 측정장치
GB2170005A (en)	1986-07-23	Interferometric multicoordinate measuring device
US4725146A (en)	1988-02-16	Method and apparatus for sensing position
JP5337419B2 (ja)	2013-11-06	変位測定装置、それを用いたシール部材形状測定装置及びそれらに用いられる変位検出装置
US4115008A (en)	1978-09-19	Displacement measuring apparatus
US5644399A (en)	1997-07-01	Apparatus for measuring dimension of article and scale to be used in the same
US4824245A (en)	1989-04-25	Response ratioing angle of arrival sensor that is responsive to scintillation
JPS5875004A (ja)	1983-05-06	光電式変位検出装置の反射型スケ−ルの製造方法
JPS6248167B2 (de)	1987-10-13
JPH0374769B2 (de)	1991-11-28
JP3369110B2 (ja)	2003-01-20	光電式エンコーダ
JP3240411U (ja)	2023-01-06	測定装置および位置決め装置
JPH0233962B2 (de)	1990-07-31
JP2000121388A (ja)	2000-04-28	光学式エンコーダ
JPH07318314A (ja)	1995-12-08	測長装置
JPH07270121A (ja)	1995-10-20	位置センサ
JPS6321509A (ja)	1988-01-29	測長装置
JPH05180642A (ja)	1993-07-23	平面物体の真直度測定機