JPS60160561U - semiconductor pressure sensor - Google Patents
semiconductor pressure sensorInfo
- Publication number
- JPS60160561U JPS60160561U JP4865884U JP4865884U JPS60160561U JP S60160561 U JPS60160561 U JP S60160561U JP 4865884 U JP4865884 U JP 4865884U JP 4865884 U JP4865884 U JP 4865884U JP S60160561 U JPS60160561 U JP S60160561U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- semiconductor pressure
- diaphragm
- resistance region
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は半導体圧力センサを示し、第１図は従来例、第セ図
は本案の実施例の断面図である。
４・・・半導体薄板、４ａ・・・ダイヤフラム部、４ｂ
・・・支持部、５・・・抵抗領域、６・・・絶縁膜。The figures show semiconductor pressure sensors, with FIG. 1 being a sectional view of a conventional example and FIG. 4...Semiconductor thin plate, 4a...Diaphragm part, 4b
... Support part, 5... Resistance region, 6... Insulating film.
Claims (1)
肉厚の支持部を構成し、少なくとも前記ダイヤプラム部
の主表面に前記抵抗領域を形成し、前記ダイヤグラム部
主表面に前記抵抗領域の表面を含めて絶縁性保護膜を密
着させた保護膜と同質で等厚の絶縁膜をダイヤフラム部
の裏面にも設けた半導体圧力センサ。A thin semiconductor plate constitutes a thin diagram portion and a thick support portion surrounding the core portion, the resistance region is formed on at least the main surface of the diaphragm portion, and the resistance region is formed on the main surface of the diagram portion. A semiconductor pressure sensor that has an insulating protective film in close contact with the protective film, including the surface, and an insulating film of the same quality and thickness on the back side of the diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4865884U JPS60160561U (en) | 1984-04-03 | 1984-04-03 | semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4865884U JPS60160561U (en) | 1984-04-03 | 1984-04-03 | semiconductor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60160561U true JPS60160561U (en) | 1985-10-25 |
Family
ID=30565123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4865884U Pending JPS60160561U (en) | 1984-04-03 | 1984-04-03 | semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60160561U (en) |
-
1984
- 1984-04-03 JP JP4865884U patent/JPS60160561U/en active Pending
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