JPS6015087A - Laser beam diaphragm - Google Patents
Laser beam diaphragmInfo
- Publication number
- JPS6015087A JPS6015087A JP58123381A JP12338183A JPS6015087A JP S6015087 A JPS6015087 A JP S6015087A JP 58123381 A JP58123381 A JP 58123381A JP 12338183 A JP12338183 A JP 12338183A JP S6015087 A JPS6015087 A JP S6015087A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- laser beam
- light
- lens
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、レーザ加工装置に不可欠の集光光学系として
利用でき、特に、レーザビームを小さく絞り込む方式と
して有効である。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention can be used as a condensing optical system essential to a laser processing device, and is particularly effective as a method for focusing a laser beam into a small size.
以下、従来のレーザビーム絞シ装置を第１〜第２図をも
って説明する。Hereinafter, a conventional laser beam focusing device will be explained with reference to FIGS. 1 and 2.
第１図に示すように、レーザ発振器１よシ入射されたレ
ーザビーム３は、導光路２を経て、折返し平面鏡４によ
シ方向変換し、集光レンズ５ケ介して、テーブル８上に
セットされた被加工物７の表面に、レーザスポットとし
て照射される。まノζ、アシストガス６は集光レンズ５
を冷却および保僅のために用いられている。As shown in FIG. 1, a laser beam 3 incident from a laser oscillator 1 passes through a light guide path 2, changes its direction to a folding plane mirror 4, passes through five condensing lenses, and is set on a table 8. The surface of the processed workpiece 7 is irradiated as a laser spot. Mano ζ, assist gas 6 is condensing lens 5
It is used for cooling and preservation.
この場合、被加工物７に照射されるレーザスポットの径
ｄは、第２図に示すように平行光（ビーム径φＤ＋）で
のスポット径ｄ、と、レーザビームの発散角（θ／２）
とによシ生じる発散光（ビーム径φＤｓ）でのスポット
径ｄ、の関係から、これらの合成された形で表わされ一
般に、（１）式で表わされる。In this case, the diameter d of the laser spot irradiated onto the workpiece 7 is the spot diameter d in parallel light (beam diameter φD+) and the divergence angle (θ/2) of the laser beam, as shown in FIG.
From the relationship between the spot diameter d and the resulting divergent light (beam diameter φDs), it is expressed in a combined form, and is generally expressed by equation (1).
４λ
ｃｔ＝に−ｆ ・・・・・・・・・（１）πＤ
ここで係数にはＫ）１となるが、加工効率ｒ上げるだめ
にはパワー密度ｐ＝４ ｐ／πｄ” （Ｗ／；デ）：ｐ
照射パワー（Ｗ）を大きくした方が良すことから、スポ
ット径ｄを小さく、すなわち同−焦点距＃Ｉ ｆの集光
レンズではに中１となるような光学系とすることが望ま
しい。この従来方式では、発散光の影響によ、ＤＫ＞１
．５程度となシ、小さく絞シ切れないため、あまシ加工
効率を上げられないという問題点を有していた。4λ ct= -f ・・・・・・・・・(1)πD Here, the coefficient is K)1, but in order to increase the machining efficiency r, the power density p=4 p/πd” (W/ ;de):p
Since it is better to increase the irradiation power (W), it is desirable to use an optical system in which the spot diameter d is small, that is, it is one in the middle of a condensing lens having the same focal length #If. In this conventional method, DK > 1 due to the influence of divergent light.
．． 5 or so, and the problem was that it was not possible to increase the cutting efficiency because it could not be drawn to a small size.
本発明の目的は、入射レーザビームの発散光の影響を受
けず、効率的にレーザビームを小径のスポットに絞り込
むレーザビーム絞シ装置を提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a laser beam focusing device that efficiently focuses a laser beam into a small diameter spot without being affected by diverging light of an incident laser beam.
本発明のレーザビーム絞υ装置は、レーザビームと被加
工物の間に、ビーム方向変換およびビーム径縮少も兼ね
た球面鏡を配置し、この球面鏡と抜刀ロエ物の間に、入
射レーザビームの平行光と発散光とのビーム径が同一に
なるように球面鏡により縮少されだ位（ビｔに集光レン
ズを配置して、発散光の影響をあまり受けずにスポット
径を小さく絞れるようにしたことにある。The laser beam diaphragm device of the present invention has a spherical mirror that also serves to change the beam direction and reduce the beam diameter placed between the laser beam and the workpiece, and between the spherical mirror and the cutting tool, the incident laser beam is A spherical mirror is used to reduce the beam diameters of parallel light and diverging light so that they are the same (by placing a condenser lens on the bit, the spot diameter can be narrowed down to a small size without being affected by the divergent light). It's what I did.
〔発明の実施例〕
以下、第３図に本発明によるレーザビーム絞り装置を説
明する。[Embodiments of the Invention] A laser beam diaphragm device according to the present invention will be described below with reference to FIG.
第３図に示すようにル−ザ発撮器１と被加工物７の間に
球面鏡１０と集光レンズ５が配置されている。球面鏡１
０の平均曲率半径Ｒによる焦点位置０＋ （焦点距離は
Ｒ／２で与えられる。）は、集光レンズ５による焦点位
置′０２ （焦点距離ｆ）よシも大きくなるようにＲ＞
ｆなる条件で、球面鏡１０が形成され、かつ入射ビーム
の平行光と発散光のビーム径が球面鏡１０によシ同−ビ
ーム径りに集光される位置に集光レンズ５が配置されて
いる。As shown in FIG. 3, a spherical mirror 10 and a condensing lens 5 are arranged between the loser emitter 1 and the workpiece 7. Spherical mirror 1
The focal position 0+ (focal length is given by R/2) due to the average radius of curvature R of 0 is R> so that the focal position '02 (focal length f) due to the condenser lens 5 is also larger
A spherical mirror 10 is formed under the condition f, and a condensing lens 5 is arranged at a position where the beam diameters of the parallel light and the diverging light of the incident beam are converged by the spherical mirror 10 to have the same beam diameter. .
本発明によれば、従来のような発散光によるスポット径
ｄ２の影響を受けずに集光できるので、４λ
ｄ、Ｆｌ■ｆと小さく絞シ込むことができる。すなわち
従来の１ ／ １．５以下の集光スポット径に絞シ込蝉
６とができる。According to the present invention, the light can be focused without being affected by the spot diameter d2 due to the diverging light as in the conventional case, so it is possible to focus the light as small as 4λ d, Fl■f. In other words, it is possible to narrow down the condensed spot 6 to a diameter of 1/1.5 or less of that of the conventional method.
本発明によれば、スポット径を１／１．５以下に絞シ込
む仁とができる。すなわち、パワー密度を（１，５）”
倍以上に上げることができるので、加工速度を２倍以上
に上げることができるという効果がある。According to the present invention, it is possible to reduce the spot diameter to 1/1.5 or less. In other words, the power density is (1,5)"
Since the processing speed can be increased by more than twice as much, there is an effect that the processing speed can be increased by more than twice.
第１図は従来のレーザビーム絞シ装置の概略側断面図、
第２図は、第１図の集光状態を示す焦点レンズ附近の側
断面図、第３図は本発明による実施例のレーザビーム装
置の側断面図、第４図は第１図の焦点レンズ附近の側断
面図である。Figure 1 is a schematic side sectional view of a conventional laser beam focusing device.
FIG. 2 is a side sectional view of the vicinity of the focusing lens showing the condensing state of FIG. 1, FIG. 3 is a side sectional view of the laser beam device according to the embodiment of the present invention, and FIG. It is a side sectional view of the vicinity.
Claims (1)
返鏡と、折シ返鏡からのレーザ光を焦点レンズを介して
被加工物に照射するものにおいて、上記折り返鏡を凹面
鏡で形成することを特徴とするレーザビーム絞シ装置。 ２、焦点レンズは凸レンズを使用することを特徴とする
特許請求の範囲第１項記載のレーザビーム絞シ装置。[Scope of Claims] 1. A folding mirror that reflects laser light in a direction different from the traveling direction of the laser beam, and a laser beam from the folding mirror that irradiates a workpiece through a focusing lens. A laser beam focusing device characterized in that a return mirror is formed by a concave mirror. 2. The laser beam focusing device according to claim 1, wherein a convex lens is used as the focusing lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58123381A JPS6015087A (en) | 1983-07-08 | 1983-07-08 | Laser beam diaphragm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58123381A JPS6015087A (en) | 1983-07-08 | 1983-07-08 | Laser beam diaphragm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6015087A true JPS6015087A (en) | 1985-01-25 |
Family
ID=14859168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58123381A Pending JPS6015087A (en) | 1983-07-08 | 1983-07-08 | Laser beam diaphragm |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6015087A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100636505B1 (en) | 2004-03-24 | 2006-10-18 | 진 호 정 | Optical illumination system of pattern inspection using line CCD |
| US7205502B2 (en) | 2004-05-26 | 2007-04-17 | Yamazaki Mazak Corporation | Reflector-mirror drive shaft controller for laser beam machine |
-
1983
- 1983-07-08 JP JP58123381A patent/JPS6015087A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100636505B1 (en) | 2004-03-24 | 2006-10-18 | 진 호 정 | Optical illumination system of pattern inspection using line CCD |
| US7205502B2 (en) | 2004-05-26 | 2007-04-17 | Yamazaki Mazak Corporation | Reflector-mirror drive shaft controller for laser beam machine |
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