JPS60144601A - Multidimensional measuring machine - Google Patents

Abstract

PURPOSE:To fix a body to be measured by a fixing means and to take a measurement of size in various directions by supporting the body at the upper side of a horizontal base movably in three dimensions and detecting the extent of the movement displacement. CONSTITUTION:The body 13 to be detected is supported at the upper side of the horizontal base 11 movable in three dimensions through a moving mechanism 12. An X-axial slider 16 is supported movably on an X-axial rail 14 arranged on the horizontal base 11 in the X-axial direction. Both ends of a perpendicular base 21 stood fixedly on the X-axial slider 16 support an Y-axial rail 22, and an Y- axial slider 23 is supported on its round shaft material movably in the Y-axial direction. The body moves on a Z-axial rail 31 in the Z-axial direction by operating a feed handle 34 fitted to the Y-axial slider 23. Three-dimensional detection signals of the detected body 13 from respective displacement detectors 18, 25, and 35 are sent to a data processor 38 through a cord 37 and the data processor 38 display the measured values.

Description

【発明の詳細な説明】 ［技術分野］ 本発明は、被測定物の種々の方向の寸法等を測定する多
次元測定機に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a multidimensional measuring machine that measures the dimensions of an object to be measured in various directions.

［背景技術］ 各種分野における高精度化の請求に伴ない、各種部品類
等も益々多種多用化しており、これら多用な部品類の検
査に際しては、１次元的検査（測定）から２次元、更に
は３次元へと多次元的検査に重点が移行されつつある。[Background technology] With the demand for higher precision in various fields, various types of parts are being used more and more, and when inspecting these widely used parts, it is necessary to move from one-dimensional inspection (measurement) to two-dimensional and even more. The focus is now shifting to three-dimensional and multidimensional examinations.

このような・多次元的検査の要請に応するため、タッチ
信号プａ−ブや光学的センサ等の被測定物を検知する検
知体を多次元的に移動させ、その際の移動変位にを機械
的、電気的、或いは光学的等の各種の変位検出器で検出
し、これにより被測定物の所望の寸法等を得ることので
きる多次元測定機が従来より知られている。In order to meet the demands for such multidimensional inspection, we move the sensing object that detects the object to be measured, such as a touch signal probe or an optical sensor, multidimensionally, and take into account the displacement at that time. 2. Description of the Related Art Multidimensional measuring machines that can detect desired dimensions of an object to be measured using various types of displacement detectors, such as mechanical, electrical, or optical, have been known.

ところで、第１図には従来の多次元測定機としての３次
元測定機の最も一般的な構造が示されている。この図に
おいて、検知体ｌは２軸スピンドル２に２軸方向に沿っ
て移動自弁に支持され、２軸スピンドル２はＸ軸レール
３にＸ軸方向に沿って移動自在に支持され、このＸ軸レ
ール３はその両端側においてｙ軸レール４にｙＭ力方向
沿って移動自在に支持され、これにより、検知体１は互
いに直交する３軸方向に沿って移動自在に支持され恒い
る。また、ｙ軸レール４は４木のコラム５により支持さ
れるとともに、これら４本のコラム５により基台６の周
囲が取り囲まれ、基台６上には被測定物７が載置される
支持台（定盤）８が支持されている。しかしながら、こ
のような従来構造にあっては次のような問題点が指摘さ
れる場合。By the way, FIG. 1 shows the most general structure of a three-dimensional measuring machine as a conventional multidimensional measuring machine. In this figure, the sensing body 1 is supported by a self-valve movable along two axes on a two-axis spindle 2, and the two-axis spindle 2 is supported on an X-axis rail 3 so as to be movable along the X-axis direction. The rail 3 is supported at both ends by the y-axis rail 4 so as to be movable along the yM force direction, so that the sensing body 1 is supported movably along three axial directions orthogonal to each other. In addition, the y-axis rail 4 is supported by four wooden columns 5, and a base 6 is surrounded by these four columns 5, and a support on which an object to be measured 7 is placed is placed on the base 6. A stand (surface plate) 8 is supported. However, in such a conventional structure, the following problems may be pointed out.

があった。was there.

１）支持台８上に被測定物７を水平に載置させるととも
に被測定物７の四方にコラム５が被測定物７を取り囲む
ようにして配置された構造であるため、被測定物７の大
ぎさに対して装置全体が過大となり、別言すれば、装置
全体の大きさの割には小さな被測定物７しか測定できな
い。1) The object to be measured 7 is placed horizontally on the support stand 8, and the columns 5 are arranged on all sides of the object to be measured 7 so as to surround the object to be measured. In other words, the entire device becomes too large compared to the size of the device, and in other words, only the object 7 to be measured can be measured, which is small compared to the size of the entire device.

（≧）被測定物７がコラム５により取り囲まれ、更に、
被測定物７の上方にはＸ軸レール３やｙ゛　軸レール４
が覆い被さるような構成であるため、被測定物７の支持
台８への取り付けや取り外し、更には、測定姿勢等にも
大きな制約を受けるなど、使用に際しての不利不便が生
ずる場合がある。(≧) The object to be measured 7 is surrounded by the column 5, and further,
Above the object to be measured 7 are the X-axis rail 3 and the y-axis rail 4.
Since the structure is such that the object to be measured 7 is covered, there may be disadvantages and inconveniences during use, such as severe restrictions on attachment and removal of the object to be measured 7 from the support base 8, as well as on the measurement posture.

■被測定物７を水平にして支持台８上に載置するもので
あるため、また、前述のように被測ｉ物７に対して測定
者が必ずしも自由側と近づいて自由な角度から測定を行
なうことが；きない□場合があるため、測定箇所の目視
確認等に劣る。■Since the object to be measured 7 is placed horizontally on the support stand 8, as mentioned above, the measurer does not necessarily approach the object to be measured 7 from the free side and measure from a free angle. This method is inferior to visual confirmation of the measurement location because it may not be possible to do so.

（船、測定精度を確保するためにＸ軸レール３、ｙ軸レ
ール４、コラム５等を堅牢なものとしなければならず、
高価であり、大型化し易く、経済的・或いは設置場所の
確保上不利である。(In order to ensure measurement accuracy on ships, the X-axis rail 3, y-axis rail 4, column 5, etc. must be made robust,
It is expensive, tends to be large-sized, and is disadvantageous in terms of economy and securing a space for installation.

従って、被測定物７が板金製品、プリント基板等の偏平
で比較的面積の広いものである場合には、極めて大きな
問題であった。Therefore, this is a very serious problem when the object 7 to be measured is a flat object having a relatively large area, such as a sheet metal product or a printed circuit board.

し発明の目的］ 本発明の（」的は、被測定物の大きさに対して装置゛全
体が過大とならず、構造が簡単であり、測定姿勢や設置
場所等についての大きな制約を受けることか少なく、特
に、板金等の偏平で比較的面積の広い被測定物の測定に
好適な多次元測定機を提供することにある。　□　・　
□ ［発明の構成］ ゛そのため、本発明は、水平基台と、被測定物を検知す
る検知体を萌配水平基台の上部側において３次元方向に
移動可能に支持する移動機構と、検知体の移動変位量を
検出′する。変位検出器と、被測定物を支持する垂直な
支持面を有・するとともに、前記移動機構（ｉ対向配設
された被測定物支持台と、前記支持面に被測定物を固定
する被測定物固定手段と、を備えさせ、板金等の偏平で
比較的面積の広い形状等の被測定物を前記被測定物固定
手段を介して前記支持面上に垂直に固定させた状態で、
前記移動機構により検知体を移動させながら被測定物の
適宜位置に当接させる等して被測定物の所望の寸法を得
ることを可゛能に′して前記目的を達成しようとするも
のである。OBJECT OF THE INVENTION] The object of the present invention is that the entire device does not become too large for the size of the object to be measured, that the structure is simple, and that there are no major restrictions on measurement posture, installation location, etc. The object of the present invention is to provide a multidimensional measuring machine suitable for measuring objects with a relatively large surface area, such as sheet metal, which are flat and relatively large in area.
□ [Structure of the Invention] ゛Therefore, the present invention comprises a horizontal base, a moving mechanism that supports a sensing body that detects an object to be measured so that it can move in three dimensions on the upper side of the horizontal base; The amount of displacement of the body is detected. It has a displacement detector, a vertical support surface for supporting the object to be measured, and the moving mechanism (i) includes an object support stand arranged opposite to the object to be measured, and a object to be measured for fixing the object to the support surface. an object fixing means, and a measured object such as a flat and relatively large-area sheet metal object is vertically fixed onto the support surface via the measured object fixing means,
The object is to be achieved by making it possible to obtain the desired dimensions of the object to be measured by moving the sensing body using the moving mechanism and bringing it into contact with an appropriate position of the object to be measured. be.

［実施例の説明］ 以下、本発明の実施例を図面に基づいて説明する。[Explanation of Examples] Embodiments of the present invention will be described below based on the drawings.

第２図には本発明に係る多次元測定機の一実施例が示さ
れ、図中、水平基台１１の上部側には移動機構１２を介
して検知体１３が３次元方向に移動可能に支持されてい
る。FIG. 2 shows an embodiment of the multidimensional measuring machine according to the present invention, and in the figure, a sensing body 13 is mounted on the upper side of a horizontal base 11 via a moving mechanism 12 so as to be movable in three-dimensional directions. Supported.

前記移動機構１２はＸ軸レール１４を有し、こ　゛のＸ
軸レール１４は水平基台ｌｌ上にＸ軸方向に沿って配置
されている。Ｘ軸レール１４は互いに千１テな２本の丸
軸材等よりなり、これら丸軸材は固定ブロフク１５を介
して水平基台１１の上端面に固定されている。　−−−
− これらＸ軸レール１４にはＸ軸スライダ１６が移動自在
に支持されるとともに、Ｘ軸レール１４を構成する一方
の丸軸材には送りラックが刻設され、また、Ｘ軸スライ
ダ１６にはこの送りラックに噛合するピニオン（図示せ
ず）が回転自在に内蔵され、送り／＼ントル１７を操作
して１１ｊ記ピニオンを回転させることによりＸ軸スラ
イタＩ６をＸも１１シール１４に“沿つ゛て移動させ得
るよう１こなっている。また、Ｘ輔スライタ１６にはＸ
軸変位検出器１８か内蔵され、このＸ軸変位検出器１８
ｊこよりＸ輔スライタ１６の移動変位量が検出されるよ
うになっている。このＸ軸変位検出器ｌＢｌ±、例えは
ロータリ式の光１に型、磁気型等のエンコータであり、
前記他力の丸軸材に刻設された検出器用う、りに噛合す
るロータリ用ピニオンにより前記エンコータが駆動され
てＸ軸スライグ１６の移動変位端が高精度検出され得る
ようになってむ）る。The moving mechanism 12 has an X-axis rail 14, and this
The shaft rail 14 is placed on the horizontal base 11 along the X-axis direction. The X-axis rail 14 is made up of two round shaft members, etc., which are 1,100 degrees apart from each other, and these round shaft members are fixed to the upper end surface of the horizontal base 11 via a fixed block 15. ---
- An X-axis slider 16 is movably supported on these X-axis rails 14, and a feed rack is carved on one of the round shafts constituting the X-axis rail 14, and the X-axis slider 16 is A pinion (not shown) that meshes with this feed rack is rotatably built in, and by operating the feed/\\torque 17 and rotating the pinion 11j, the X-axis slider I6 is moved along the X-axis seal 14. In addition, the X slider 16 has an
An axis displacement detector 18 is built-in, and this X-axis displacement detector 18
The amount of displacement of the X-slider 16 is detected from this point. This X-axis displacement detector lBl± is, for example, a rotary optical type encoder, a magnetic type encoder, etc.
The encoder is driven by a rotary pinion that meshes with a detector groove carved on the externally-powered round shaft material, so that the displacement end of the X-axis slig 16 can be detected with high precision.) Ru.

Ｘ輔スライグ１６には鉛直台２１か立設固定され、鉛直
台２１の両端にはＹ軸シール２２かＹ軸方向に沿って支
持されている。このＹ軸シール２２は、Ｉｊ−いに平行
な２木の丸軸材より構成され、これら丸軸材にはＹ軸ス
ライタ２３かＹ軸方同に沿って移動Ｂｆ能に支持されて
いる。このＹ軸スラ・イタ２３は、前記Ｘ軸スライグ１
６と同様に、送りハンドル２４の操作により移動変位さ
れるとともに、−その移動変位量がＹ軸変位検出器２５
ｉこより高精度検出され得るよう構成されている。A vertical stand 21 is erected and fixed on the X slig 16, and Y-axis seals 22 are supported at both ends of the vertical stand 21 along the Y-axis direction. This Y-axis seal 22 is composed of two round shaft members parallel to Ij, and a Y-axis slider 23 is supported on these round shaft members so as to be movable along the Y-axis direction. This Y-axis sliver 23 is connected to the X-axis sliver 1.
6, the feed handle 24 is moved and displaced by the operation of the feed handle 24, and the amount of the movement is detected by the Y-axis displacement detector 25.
It is configured so that it can be detected with higher accuracy than i.

Ｙ輔スライタ２３にはＺ軸シール３１かＺ軸方向に向け
られて装着され、このＺ輔し−ル３１１−ｉな−いに平
行な一２本の丸軸材等よりなり、これら丸軸材の両端部
は連結部材３２．３３により！Ｌいに連結されている。A Z-axis seal 31 is attached to the Y-slider 23 so as to face in the Z-axis direction. Both ends of the material are connected by connecting members 32 and 33! It is connected to L.

一方の連結部材３２には、前記検知体１３が取伺けられ
るとともに、Ｙ軸スライグ２３に取伺けられた送り／＼
ンドル３４の操作によりＺ軸シール３１が移動されて前
記検知体１３がＺ軸方向に移動されるようになっている
。この際のＺ軸方向の移動量はＹ軸スライグ２３ｊこ内
蔵されたＸ軸変位検出器３５により検出されるよう。One of the connecting members 32 has the sensing body 13 attached thereto, and the Y-axis slig 23 has the feed/\\
By operating the handle 34, the Z-axis seal 31 is moved, and the sensing body 13 is moved in the Z-axis direction. The amount of movement in the Z-axis direction at this time is detected by the X-axis displacement detector 35 built into the Y-axis sligh 23j.

になっている。また、各変位検出器１Ｂ、’２５゜３５
により検出された検知体１３の３次元方向（Ｘ、Ｙ、Ｚ
軸方向）の検出信号はコート３７を介してデータ処理装
置３８に送られ、このデータ処理装置３８において測定
値が表示されるようになっている。It has become. In addition, each displacement detector 1B, '25°35
The three-dimensional direction (X, Y, Z
The detection signal (in the axial direction) is sent to the data processing device 38 via the coat 37, and the measured value is displayed on the data processing device 38.

前記移動機構１２の検知体１３が向けられた側には、垂
面な支持面４１を有する被測定物支持台４２か移動機構
１２と夕、ｊ向配設されている。前記支持面４１は垂直
（鉛直）方向に向けられ［１一つＸＹ方向の中面とされ
、更に、平坦に研磨什」−げされている。また、前記被
測定物支持台４２は比較的ｒｂい線状に形成されるとと
もに、その背面側には補強用のリブ４３が形成されてい
る。On the side of the moving mechanism 12 toward which the detection body 13 is directed, an object support stand 42 having a vertical support surface 41 is arranged in the direction opposite to the moving mechanism 12. The support surface 41 is oriented in the vertical direction and serves as the middle surface in the X and Y directions, and is further polished flat. Further, the object-to-be-measured support base 42 is formed into a relatively thick linear shape, and a reinforcing rib 43 is formed on the back side thereof.

また、被測定物支持台４２は磁性材料より形成され、そ
の支持面４１には、電磁石による或いは一水久唇イ・に
よする、またはこれらの組合わせによる磁力作用−を有
するａｌ“１わゆるマグネットタイプの被測定物固定手
段４４が適宜な配置状ｆミ；で複数磁力国定（磁力吸着
）されている。The support base 42 for the object to be measured is made of a magnetic material, and its support surface 41 is equipped with an aluminum plate having a magnetic force effected by an electromagnet, by a single droplet, or by a combination thereof. A plurality of measuring object fixing means 44 of a loose magnet type are magnetically fixed (magnetically attracted) in an appropriate arrangement.

これら被Ａ１１ｌ定物固定手段４４は、Ｉｊいに高さの
等しい例えば円柱体形状等であるとともに、−これら被
測定物固定手段４４には偏平で薄肉な板金等の磁性月料
よりなる被４１１１定物４５か磁力固定され？するよう
になっている。各被測定物固定手段４４は、支持面４１
１−１にｉｌｉに磁力により固定されているだけであり
、その配置位置は自由に選択される。なお、被測定物固
定手段４４の磁力作用は、支持面４１と被測定物固定手
段４４Ｊの間においては強く、月つ、、被測定物固定手
段４，４と被測定物４５との間においては比較的弱くさ
れており、従って、被測定物４５を支持面４１１：から
取り外すに際しては、被測定物４５を引張れば被測定物
４５は被ｆｆ１ｌｌ定物固定手段４４あ）ら取り外され
るが、各被測定物固定手段４４は支持面４１に磁力吸着
したまま支持面４１」二に残されるようになっているこ
七が望ましい。These fixed object fixing means 44 have the same height as Ij, and have a cylindrical shape, for example. Fixed item 45 or magnetically fixed? It is supposed to be done. Each measured object fixing means 44 has a support surface 41
1-1 is simply fixed to ili by magnetic force, and the arrangement position thereof can be freely selected. The magnetic force of the object fixing means 44 is strong between the support surface 41 and the object fixing means 44J, and is strong between the object fixing means 4, 4 and the object 45. is made relatively weak, and therefore, when removing the object to be measured 45 from the support surface 411, by pulling the object to be measured 45, the object to be measured 45 can be removed from the fixed object fixing means 44a). Preferably, each object-to-be-measured fixing means 44 is left on the support surface 41 while being magnetically attracted to the support surface 41.

前記被測定物４５の適宜位置には、例えば被測定箇所と
しての丸穴４６が形成されており、この丸穴４６内に前
記検知体１３の先端の接触子４７が接触され得るように
なっている。For example, a round hole 46 is formed at an appropriate position on the object 45 to be measured, and a contact 47 at the tip of the sensing body 13 can be brought into contact with the round hole 46. There is.

また、被４１１１定物４５の一側縁および下端縁には夫
々複数の位置基準突起部材５１が当接されている。位置
基準突起部材５１は、被４１１定物４５の一側縁および
下端縁の夫々に沿って複数所定間隔を隔てて並べられ、
且つ、支持面４１Ｊ−にＺ軸方向に沿って突設固定され
た段付きの円柱体よりなリ　これら段イ＋ｊきの円柱体
は、前記被測定物固定手段４４と等しい高さに形成され
たノ′（さ部５１Ａと、この大径部５１Ａより突設され
た小径部５１Ｂと、からなっている。これら位置基準突
起部材５１の段部りに被測定物４５が載置されるととも
に、小径部５１Ｂの側面に被測定物４５の一側縁および
ド端縁が夫々当接されて被測定物４５の支持面４１Ｆに
おける配置位置が規制されるようになっている。Further, a plurality of position reference protrusions 51 are abutted on one side edge and the lower edge of the fixed object 45 of the cover 4111, respectively. A plurality of position reference protruding members 51 are arranged at predetermined intervals along each of one side edge and lower edge of the object 411 fixed object 45,
In addition, the stepped cylindrical body is fixed to the supporting surface 41J- in a protruding manner along the Z-axis direction. It consists of a ridge portion 51A and a small diameter portion 51B protruding from the large diameter portion 51A.The object to be measured 45 is placed on the stepped portion of the position reference projection member 51. , one side edge and one end edge of the object to be measured 45 are brought into contact with the side surface of the small diameter portion 51B, respectively, so that the arrangement position of the object to be measured 45 on the support surface 41F is regulated.

この際　前記被斂の位置基準突起部材５１はその一部に
ついては取付ねし５２により中・し軸部において支持面
４１に固定され、他の一部については中・Ｄ軸位置から
偏在した偏心位置において取付ねし５２を介して支持面
４１上に固定され、この偏心位置において固定された位
置基準突起部材５１を回転調整すれば被測定物４５の基
準位置が（微）調整され得るように構成されている。At this time, a part of the position reference protrusion member 51 to be deflected is fixed to the support surface 41 at the center/distance shaft part by a mounting screw 52, and the other part is fixed to the support surface 41 at the middle/D axis position. The reference position of the object to be measured 45 can be (finely) adjusted by rotating and adjusting the position reference projection member 51 which is fixed on the support surface 41 via the mounting screw 52 at this eccentric position. It is configured.

このような本実施例によれば、垂直方向（ＸＹ方向）に
向けられた支持面４１上に被測定物４５を垂直に固定し
て測定するものであり、また、支持面４１や被測定物４
５を取り囲むコラム等がなく、且つ被測定物４５に上方
側から覆い被さるような構造体もないため、全体−とじ
て構造が簡単であり、被測定物４５に対して装置全体が
過大となることもなく、更には前記コラム等に邪魔され
て作業姿勢が制約されることもなく、測定箇所である丸
穴４６等も容易に目視確認できるという効果がある。According to this embodiment, the object to be measured 45 is vertically fixed on the support surface 41 oriented in the vertical direction (XY direction) and measured. 4
Since there is no column surrounding the device 5, and there is no structure that covers the object to be measured 45 from above, the overall structure is simple, and the entire device is too large for the object to be measured 45. Furthermore, the working posture is not restricted by the column or the like, and the round hole 46, etc., which is the measurement location, can be easily visually confirmed.

また、被測定物４５が板金等の偏平で比較的面積の広い
場合の測定に特に好適である。In addition, it is particularly suitable for measurement when the object to be measured 45 is flat and has a relatively large area, such as a sheet metal.

更に、被測定物固定手段４４を磁力作用を有するよう構
成したため、被測定物固定手段４４の配置位置を適宜自
由に変更し得るとともに、被測定物４５の着脱作業も容
易であり、しがも、被測定物固定手段４４により被測定
物４５の移動機構１２側、即ち検知体１３が配置された
側の全体が露出されるため、検知体１３による測定箇所
が制約されないとともに、この点からも被測定物４５の
全体（測定箇所）を目視確認し易い。Furthermore, since the device to be measured 44 is configured to have a magnetic effect, the arrangement position of the device to be measured 44 can be changed freely, and the work to attach and detach the device to be measured 45 is easy. Since the entirety of the moving mechanism 12 side of the measuring object 45, that is, the side on which the sensing body 13 is arranged, is exposed by the measuring object fixing means 44, the measurement location by the sensing body 13 is not restricted, and from this point of view, It is easy to visually confirm the entire object to be measured 45 (measurement location).

また、位置基準突起部材５１により支持面４１」−にお
ける被測定物４５の位置合わせを正確に行なうことかで
き、その隙１位置基準突起部材５１をその偏心位置に取
付けられた数句ねし５２を中心として所定角度回転させ
ることにより基準位置の微調整をも容易に行なうこ□と
ができる。Furthermore, the position reference protrusion member 51 allows accurate positioning of the object 45 on the support surface 41''. By rotating the reference position by a predetermined angle around , the reference position can be easily finely adjusted.

更に、被ａｌｌ定物固定手段４４により被測定物４５を
所定間隔だけ支持面４１から離隔した状態で支持面４１
上に固定しているため、例えば、丸穴４６の内周面に接
触子４７を当接−させて丸穴４６の面角度を４１１１定
しようとする場合等にあっても、接触子４７か支持面４
１に邪魔されて接触子４７の側部（ＩＩｓ！部）を充分
丸穴４６に当接させることができなくなる等の恐れがな
い。Further, the object to be measured 45 is fixed to the support surface 41 with the object to be measured 45 separated from the support surface 41 by a predetermined distance by the all object fixing means 44.
Because it is fixed at the top, for example, when trying to fix the surface angle of the round hole 46 by bringing the contact 47 into contact with the inner peripheral surface of the round hole 46, the contact 47 will Support surface 4
There is no fear that the side part (IIs! part) of the contactor 47 cannot be brought into sufficient contact with the round hole 46 due to obstruction by the contactor 47.

次に、前記以外の実施例につき説明するが、前記実施例
と同−若しくは近似する部分は同一符号を用い説明を省
略若しくは簡略にする。Next, embodiments other than those described above will be described, and the same reference numerals will be used for parts that are the same as or similar to those of the embodiments described above, and the explanation will be omitted or simplified.

第２図には前記以外の実施例が示され１図中、鉛直台２
１は回転基台６１を介□・してＸ軸スライダ１６に回転
ｄｆ能（Ｙ軸方向に沿った回転軸を有する回転）に支持
されるとともに、Ｘ軸シール１４全体が、移動レール６
２に沿ってＺ軸方向に沿って移動可能に水平基台１１上
に支持されている。Fig. 2 shows an embodiment other than the above.
1 is rotatably supported by the X-axis slider 16 via a rotary base 61 (rotation with a rotation axis along the Y-axis direction), and the entire X-axis seal 14 is mounted on the moving rail 6.
2 and is supported on a horizontal base 11 so as to be movable along the Z-axis direction.

また、支持台４２は、ＸＹ千曲面方向けでなく、ＹＺ平
面方向にも設けられている。Further, the support stand 42 is provided not only in the direction of the XY thousand curved plane but also in the direction of the YZ plane.

この第２図に示される実施例によれば、一方の支持台４
２上の被測定物４５の測定作業中に、他方の支持台上に
被測定物４５を着脱する作業を行うことができ、大量測
定を行う場合に効率的である。According to the embodiment shown in FIG.
While measuring the object to be measured 45 on the second support base, the object to be measured 45 can be attached to and removed from the other support base, which is efficient when performing large-volume measurements.

なお、実施にあたり、支持台４２の数やヴいの向きは前
述の場合に限られず種々のものであってもよく、更に、
支持台４２が種々の方向や向きに移動可能であってもよ
い、また、前記検知体１３は謂わゆるタッチ信号プロー
ブ等のように被測定物４５に直接当接して検知信号を生
ずるものに限らず、レーザ光線の投射および反射波の受
信により４被測定物４５を検知する非接触型のものであ
っても↓い。In addition, in implementation, the number of support stands 42 and the orientation of the supports are not limited to the above-mentioned cases, and may be various.
The support base 42 may be movable in various directions and orientations, and the detection body 13 is limited to one that directly contacts the object to be measured 45 and generates a detection signal, such as a so-called touch signal probe. First, it may be a non-contact type that detects the four objects to be measured 45 by projecting a laser beam and receiving reflected waves.

また、各レール１４，２２．３１は夫々互いに平行な２
本の丸軸材等よりなり、送りハンドルｌ７．２４　、３
４の操作により検知体１３を３次元方向に手動により送
るものとしたか、各レール１４．２２．３１は必すしも
前述のような丸軸材に限られず、また、送り用の駆動モ
ータを用いで自動送りするものであってもよい。（ｊ−
４Ｌ、１１ｊ記実施例によれば構造簡易にして安価に提
供できるといｅう効果がある。Moreover, each rail 14, 22.31 has two rails parallel to each other.
Made of round shaft material etc., feed handle l7.24, 3
The detection body 13 is manually fed in a three-dimensional direction by the operation in step 4, and each rail 14, 22, 31 is not necessarily limited to a round shaft material as described above, and a drive motor for feeding may be used. It may also be one that automatically feeds the paper depending on the use. (j-
According to the embodiments 4L and 11j, the structure can be simplified and provided at low cost.

また、各変位検出器１８，２５．３５はロータリ式のエ
ンコータに限らず、直線状のメインスケールとインデッ
クススケールとを含んで構成される直線型のスライド式
のエンコータ等であってもよいし、更には、各スライダ
１６．２３に夫々ｘ、ｙ、ｚ軸方向の夫々の移動量を表
示するタイヤノＬ＝　、デジタル表示器等の表示装置か
格別に設けられる等していてもよい。Further, each displacement detector 18, 25.35 is not limited to a rotary encoder, but may be a linear sliding encoder that includes a linear main scale and an index scale, or the like. Furthermore, each slider 16.23 may be specially provided with a display device such as a digital display for displaying the amount of movement in the x-, y-, and z-axis directions, respectively.

更に　支持面４１の表面は必ずしも平坦に形成されてい
なくともよく１例えば、被測定物の形状に応した凹凸形
状とされていてもよい。また、リブ４３も必ずしも必要
でないが、リブ４３が設けられていれば被測定物支持台
４２自体を薄く形成しても全体として充分な強度を持た
せることができる。また、支持面４１をＸ軸方向に変位
可能に構成して、プラスチック等の軽量ケ体物（厚物）
の３次元測定に容易に適用できるようにしてもよく、こ
のように被測定物支持台４２自体をＺ軸方向に移動させ
ることにより、リブ４３の着脱作業も一層容易なものと
させることができる。Further, the surface of the support surface 41 does not necessarily have to be flat; for example, it may have an uneven shape corresponding to the shape of the object to be measured. Further, although the ribs 43 are not necessarily required, if the ribs 43 are provided, the object supporting base 42 itself can be made to be thin and have sufficient strength as a whole. In addition, the support surface 41 is configured to be able to be displaced in the X-axis direction, so that it can be
By moving the object support stand 42 itself in the Z-axis direction in this way, the work of attaching and detaching the rib 43 can be made easier. .

更にまた。被測定物４５は非磁性体であってもよく、非
磁性体である場合には被測定物固定手段４４と支持面４
１との間に被測定物４５を挟持固定してもよいし、或い
はまた、被測定物固定手段４４と、被測定物固定手段４
４とは別個に容易された磁石と、の間に非磁性体の被測
定物４５を挟持させて被測定物固定手段４４上に被測定
物４５を固定することとしてもよい。また、被測定物支
持台４２は必ずしも磁性体である必要はなく、被測定物
支持台４２が非磁性体であり、この非磁性体の被測定物
支持台４２に磁力作用を有する被測定物固定手段４４を
ボルト止め固定して用いてもよいし、更には、被測定物
固定手段４４自体も磁力作用奪有しないものであり、適
宜把持手段を或いはクランクねし止め手段とを用いる等
して磁性体或いは被磁性体の被測定物４５を支持面４１
上に固定してもよい。Yet again. The object to be measured 45 may be a non-magnetic material, and if it is a non-magnetic material, the object to be measured 45 is fixed to the object fixing means 44 and the support surface 4.
1, or alternatively, the object to be measured 45 may be clamped and fixed between the object to be measured 45 and the object to be measured 45.
The object to be measured 45 may be fixed on the object-to-be-measured fixing means 44 by sandwiching the object to be measured 45 made of a non-magnetic material between a magnet prepared separately from the object-to-be-measured. Further, the object to be measured support 42 does not necessarily have to be made of a magnetic material, and the object to be measured 42 is made of a non-magnetic material, and the object to be measured 42 which is made of a non-magnetic material has a magnetic force. The fixing means 44 may be fixed with bolts, and furthermore, the object to be measured fixing means 44 itself does not take away the magnetic force, so it may be possible to use a gripping means or a crank fastening means as appropriate. The object to be measured 45, which is a magnetic material or a magnetic material, is placed on the support surface 41.
It may be fixed on top.

また、位置基準突起部材５１にあっても前述のように一
部か取付ねし５２により偏心位置にてねし止めされた円
柱体状のものに限らず、例えば、断面り字型の長尺なレ
ール材がＸ軸方向に沿って配置されている等してもよい
。更に、位置基準突起部材５１は被測定物４５の少なく
とも下端縁側に配置されていればよく、段付き円柱体に
限られない。Furthermore, the position reference protrusion member 51 is not limited to a cylindrical body that is partly screwed at an eccentric position by the mounting screws 52 as described above; For example, rail materials may be arranged along the X-axis direction. Further, the position reference protrusion member 51 only needs to be disposed at least on the lower edge side of the object to be measured 45, and is not limited to a stepped cylindrical body.

また、Ｚ軸シール３１かＹ軸スライダ２３に固戻的に取
千１けられた構造に相当する構造であってもよい。この
場合、検知体１３の部分等だけを比較的短いストローク
範囲だけＺ軸方向に移動変位し得るようにすればよい。Alternatively, a structure corresponding to a structure in which the Z-axis seal 31 or the Y-axis slider 23 is fixedly attached may be used. In this case, it is sufficient to allow only a portion of the sensing body 13 to be moved in the Z-axis direction by a relatively short stroke range.

［発明の効果コ 」、述のように本発明によれば、被測定物の大きさにタ
イして装置全体が過大とならず、構造が簡単であり、測
定姿勢や設置場所等についての大きな制約を受けること
が少なく、特に、板金等の偏平で比較的面積の広い被測
定物の測定に好適な多次元測定機を提供することができ
る′。[Effects of the Invention] As mentioned above, according to the present invention, the entire device does not become oversized due to the size of the object to be measured, the structure is simple, and there are no major problems with measurement posture, installation location, etc. It is possible to provide a multidimensional measuring machine that is less subject to restrictions and is particularly suitable for measuring flat and relatively large objects such as sheet metals.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の多次元測定機の一般的構成を示す斜視図
、第２図および第３図は夫々本発明に係る多次元測定機
の互いに異なる実施例の全体構成を示す刺視図である。 １１・・・水平基台、１２・・・移動機構、１３・・・
検知体、１４，２２．３１・・・レール、１６．２３・
・・スライダ、１８，２５．３５・・・変位検出器、３
８・・・データ処理装置、４１・・・支持面、４２・・
・被測定物支持台、４３・・リブ、４４・・・被測定物
固定手段、４５・・・被測定物、４７・・・接触子、４
５・・・位置基準突起部材、５２・・・取付ねし。FIG. 1 is a perspective view showing the general configuration of a conventional multidimensional measuring machine, and FIGS. 2 and 3 are perspective views showing the overall configuration of different embodiments of the multidimensional measuring machine according to the present invention. be. 11...Horizontal base, 12...Movement mechanism, 13...
Sensing object, 14, 22.31...Rail, 16.23.
...Slider, 18, 25.35...Displacement detector, 3
8... Data processing device, 41... Support surface, 42...
・Measurement object support stand, 43...Rib, 44...Measurement object fixing means, 45...Measurement object, 47...Contactor, 4
5...Position reference projection member, 52...Mounting screw.

Claims (1)

【特許請求の範囲】 （１）水−１２基台と、被１１１１１疋物を検知する検
−知体を前記水平基台のヒ部側において三次元方向に移
動１’ｆ　＊　４″、支持する移動機構と、検知体の移
動変位量を検出する変位検出器と、被測定物を支持する
垂直な支持面を有するとともに前記移動機構に対向配設
された被測定物支持台と、前記支持面に被測定物を固定
する被測定物固定手段と、か備えられていることを特徴
とする多次元測定機。 （２、特許請求の範囲第１項において、前記支持面には
被測定物の少なくとも下端縁側に当接して被測定物の支
持面１−における位置を規制する位置基準突起部材が突
設されていることを特徴とする多次元測定機。 （３）特許請求の範ｇ＠１項または第２項において、ｉ
；ノ記固定手段は磁力作用を有するよう構成されている
ことを特徴とするや次元測定機。[Claims] (1) A water base 12 and a detection body for detecting objects 11111 are supported by moving 1'f*4'' in a three-dimensional direction on the side of the horizontal base. a moving mechanism, a displacement detector that detects the amount of displacement of the sensing body, a workpiece support stand having a vertical support surface for supporting the workpiece and disposed opposite to the movement mechanism, and the support surface. A multidimensional measuring machine, characterized in that the support surface is provided with a measuring object fixing means for fixing the measuring object. A multi-dimensional measuring machine characterized by a position reference protruding member protruding from at least the lower edge of the object to regulate the position of the object to be measured on the support surface 1-. (3) Claim g@1 In the term or the second term, i
;Note: A dimension measuring machine, characterized in that the fixing means is configured to have a magnetic effect.