JPS60142091A - Multi-stage gas-discharge type rotary vacuum pump - Google Patents
Multi-stage gas-discharge type rotary vacuum pumpInfo
- Publication number
- JPS60142091A JPS60142091A JP25103383A JP25103383A JPS60142091A JP S60142091 A JPS60142091 A JP S60142091A JP 25103383 A JP25103383 A JP 25103383A JP 25103383 A JP25103383 A JP 25103383A JP S60142091 A JPS60142091 A JP S60142091A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- rotor
- gas
- operating chamber
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明は、1組のロータとステータで多段排気を行な
うようにした多段JJ)気団回転真空ポンプに13II
する。Detailed Description of the Invention (Industrial Field of Application) This invention applies to a multi-stage JJ) air mass rotary vacuum pump that performs multi-stage exhaust using a set of rotor and stator.
do.
(従来技術)
られるように、シリンダ室内に1個の作業室を形成する
のがほとんどである。(Prior Art) In most cases, one working chamber is formed within the cylinder chamber.
このような回転真空ポンプで高真空を1りJ、うとする
場合には、従来は、複数の組ノロータどステータを共通
のロータ軸を介してタンデムに連結し、各ポンプの吐出
し口と吸込み口とを連結1゛ることで多段排気を行なう
ようにしていlこ。When attempting to generate a high vacuum with such a rotary vacuum pump, conventionally, multiple sets of rotors and stators were connected in tandem via a common rotor shaft, and the discharge port and suction port of each pump were connected in tandem. By connecting the opening and the opening, multi-stage exhaust is performed.
しかし、このような構成では装置が大型、かつ複雑化し
、また駆!II動力が111人づるという欠点があった
。However, with this configuration, the device becomes large and complicated, and it is difficult to drive! The disadvantage was that the II power required 111 people.
(発明の目的)
この発明は、1 IIのlコークとステータで多段J刀
気することにより、装置の小型化並びに駆動動力の低減
を図ることを目的どJ−る。(Object of the Invention) The object of the present invention is to miniaturize the device and reduce the driving power by performing multi-stage operation using a 1 II l coke and a stator.
(発明の構成)
上記目的を達成覆るために、この発明は、シリンダ室内
に回転自在に横架されるロータにJ、って該シリンダ室
を複数の作業室に区画するどどムに、前段側作業室の吐
出し口と次段側作業室の吸込みn 、L−を卯涌寸乙上
ろt:(、t、−;”’P6rL%Vh)−112,−
(実施例の説明)
添付図はこの発明の一実施例に係る2段排気形回転真空
ポンプを示す。(Structure of the Invention) In order to achieve the above object, the present invention provides a rotor that is rotatably suspended horizontally in a cylinder chamber. The discharge port of the work chamber and the suction n, L- of the next stage side work chamber are lowered by Uwaku dimension t: (,t,-;”'P6rL%Vh)-112,-
(Description of an Embodiment) The attached drawing shows a two-stage exhaust type rotary vacuum pump according to an embodiment of the present invention.
図にa3いて、ケーシング1には内周略楕円筒形のステ
ータ2が収容されている。このステータ2の前後には図
示しないフロントサイドブロックおよびリアサイドブロ
ックが装着され、これによって形成される楕円筒状のシ
リンダ室3には複数のベーン・・・を径方向に進退可能
に装着したロータ4が回転自在に横架され、そのロータ
軸4aを各サイドブロック18に軸支させである。At a3 in the figure, the casing 1 accommodates a stator 2 whose inner circumference is approximately elliptical. A front side block and a rear side block (not shown) are attached to the front and rear of the stator 2, and an elliptical cylinder chamber 3 formed by these blocks has a rotor 4 in which a plurality of vanes are attached so as to be movable in the radial direction. is rotatably suspended horizontally, and its rotor shaft 4a is supported by each side block 18.
前記ロータ4はシリンダ室3の短軸側に両端を接し、こ
れにより、シリンダ室3は2等分され、長径方向両側に
等容積の三日月形作業室6.7が形成される。Both ends of the rotor 4 are in contact with the short axis side of the cylinder chamber 3, whereby the cylinder chamber 3 is divided into two equal parts, and crescent-shaped working chambers 6.7 of equal volume are formed on both sides in the longitudinal direction.
ステータ2には作業室6に連通ずる第1の吸込みボート
9.吐出しボート10および作業室7に連通ずる第2の
吸込みボー1−13 、吐出しボート15が形成されて
いる。また、各吐出しボート10.15の外側部にはそ
れぞれ吐出し弁11.16が装着されている。The stator 2 has a first suction boat 9 communicating with the working chamber 6. A second suction boat 1-13 and a discharge boat 15 are formed which communicate with the discharge boat 10 and the working chamber 7. Each discharge boat 10.15 is also fitted with a discharge valve 11.16 on its outer side.
そして、吐出しボーh 10はステータ2とケーシング
1間に形成された空間部12に連通し、またこの空間部
12は第2の吸込みボー1〜13に直交して開設された
連絡孔14を介して作業室7側に連通している。The discharge bow h 10 communicates with a space 12 formed between the stator 2 and the casing 1, and this space 12 has communication holes 14 opened orthogonally to the second suction bows 1 to 13. It communicates with the work room 7 side through.
更に、’151の吸込みボート9は、フロントリイドブ
ロック側に開口する吸込み口8を介して低圧気体側に連
通し、また吐出しボー1へ15はステータ2とケーシン
グ1間に形成された空間部18J3よびリアナイドブロ
ックに形成された111気L1を通じて外部に連通して
いる。Furthermore, the suction boat 9 of '151 communicates with the low pressure gas side via the suction port 8 that opens on the front reed block side, and the discharge boat 1 15 is connected to the space formed between the stator 2 and the casing 1. It communicates with the outside through 18J3 and 111L1 formed in the rear side block.
このような構成としたので、ロータ3が時n1回り方向
に回転すると、ベーン5の先端がシリンダ室3の内壁面
に旧接し、作業室6,7で吸込みと排気が行なわれる。With this configuration, when the rotor 3 rotates in the direction of time n1, the tip of the vane 5 comes into contact with the inner wall surface of the cylinder chamber 3, and suction and exhaust are performed in the working chambers 6 and 7.
・ まず、作業室6では、ロータ3の回転に伴うベーン
5の移動により低圧側気体を吸込み口8おにび第1の吸
込みボート9を介して吸込み、吐出し弁11を開いて排
気する。排気された気体(、未吐出しボート10.空間
部12および連絡孔14を介して第2の吸込みボート1
3から作業室7側に入り更に11気作用が行なわれ、そ
の結果、υ1気気体は吐出し弁16を(Blいて吐出し
ボート15から大気中に排出されるのである。- First, in the work chamber 6, low-pressure gas is sucked in through the suction port 8 and the first suction boat 9 by movement of the vane 5 as the rotor 3 rotates, and is exhausted by opening the discharge valve 11. The exhausted gas (undischarged boat 10, the second suction boat 1 through the space 12 and the communication hole
3 enters the working chamber 7 side and is further subjected to 11 gas operations, and as a result, υ1 gas passes through the discharge valve 16 (Bl) and is discharged from the discharge boat 15 into the atmosphere.
(発明の効果)
この発明は、以上の如く構成したので、1組のロータと
ステータで多段排気が可能となり、装置の小型化並ひに
駆動動力の低減を図ることができる。(Effects of the Invention) Since the present invention is configured as described above, multi-stage exhaust is possible with one set of rotor and stator, and it is possible to miniaturize the device and reduce driving power.
添付図はこの発明の一実施例に係る2段Jlll気団回
転真空ポンプを示ず側面断面図である。
1・・・・・・・・・・・・ケーシング2・・・・・・
・・・・・・ステータ
3・・・・・・・・・・・・シリンダ室4・・・・・・
・・・・・・ロータ
5・・・・・・・・・・・・ベーン
6.7・・・・・・作業室
9・・・・・・・・・・・・第1の吸込みボート10、
’15・・・吐出しボート
11.16・・・吐出し弁
13・・・・・・・・・・・・第2の吸込みボー1−1
4・・・・・・・・・・・・連絡孔
以上
出願人 セイコー精機株式会4
イは人 最 上 務The attached drawing is a side sectional view, not showing, of a two-stage Jllll air mass rotary vacuum pump according to an embodiment of the present invention. 1...Casing 2...
...Stator 3...Cylinder chamber 4...
......Rotor 5...Vane 6.7...Working chamber 9...First suction boat 10,
'15...Discharge boat 11.16...Discharge valve 13...Second suction boat 1-1
4・・・・・・・・・・・・Applicant from contact hole and above Seiko Seiki Co., Ltd. 4 A is person Mogami
Claims (1)
室を複数の作業室に区画するロータと、このロータの径
方向に進退可能に配置された複数のベーンと、前段側作
業室の吐出し口と次段側作業室の吸込み口を結ぶ連通路
とを備えたことを特徴とする多段排気団回転真空ポンプ
。(1> A rotor that is rotatably suspended horizontally in a cylinder chamber and divides the cylinder chamber into a plurality of working chambers, a plurality of vanes that are arranged so as to be movable in the radial direction of this rotor, and a discharge outlet of the front side working chamber. A multi-stage exhaust group rotary vacuum pump characterized by having a communication passage connecting an intake port and a suction port of a next-stage working chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25103383A JPS60142091A (en) | 1983-12-28 | 1983-12-28 | Multi-stage gas-discharge type rotary vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25103383A JPS60142091A (en) | 1983-12-28 | 1983-12-28 | Multi-stage gas-discharge type rotary vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60142091A true JPS60142091A (en) | 1985-07-27 |
Family
ID=17216611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25103383A Pending JPS60142091A (en) | 1983-12-28 | 1983-12-28 | Multi-stage gas-discharge type rotary vacuum pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60142091A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5245717A (en) * | 1975-10-07 | 1977-04-11 | Laurel Bank Mach Co Ltd | Vacuum pump |
-
1983
- 1983-12-28 JP JP25103383A patent/JPS60142091A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5245717A (en) * | 1975-10-07 | 1977-04-11 | Laurel Bank Mach Co Ltd | Vacuum pump |
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