JPS60142091A - Multi-stage gas-discharge type rotary vacuum pump - Google Patents

Abstract

PURPOSE:To aim at miniaturizing a multi-stage gas-discharge type rotary vacuum pump and at reducing the drive power thereof, by providing a communication passage connecting between the discharge port of a preceding stage operating chamber and the suction port of a next stage operating chamber so that multi-stage gas-discharge may be realized with only one set of a rotor and stator. CONSTITUTION:Both sides of a rotor 4 are made into contact with a cylinder chamber 3 along the minor diameter axis of the latter so that the cylinder chamber is equally divided into two operating chamber 6, 7 having an equal volume, on both sides of the major diameter axis with the discharge port 10 of the operating chamber 6 being communicated with the suction port 13 of the operating chamber 7 through a communication hole 14. With this arrangement, at first low pressure gas is sucked into the operating chamber 6 through the suction port 9 thereof in association with movement of a vane 5 accompanied with rotation of the rotor 3, and is discharged through a discharge valve which is opened. This discharged gas flows through the discharge port 1, a space 12 and the communication hole 14 and into the operating chamber 7 through the suction port 13, and is subjected to a gas-discharge process so that the discharged gas is released into the atmosphere. With this arrangement, multi-stage gas-discharge may be carried out only one set of a rotor 4 and a stator 2, thereby it is possible to miniaturize the multi-stage gas-discharge rotary vacuum pump and to reduce the drive power thereof.

Description

【発明の詳細な説明】 （産業上の利用分野） この発明は、１組のロータとステータで多段排気を行な
うようにした多段ＪＪ）気団回転真空ポンプに１３ＩＩ
する。Detailed Description of the Invention (Industrial Field of Application) This invention applies to a multi-stage JJ) air mass rotary vacuum pump that performs multi-stage exhaust using a set of rotor and stator.
do.

（従来技術） られるように、シリンダ室内に１個の作業室を形成する
のがほとんどである。(Prior Art) In most cases, one working chamber is formed within the cylinder chamber.

このような回転真空ポンプで高真空を１りＪ、うとする
場合には、従来は、複数の組ノロータどステータを共通
のロータ軸を介してタンデムに連結し、各ポンプの吐出
し口と吸込み口とを連結１゛ることで多段排気を行なう
ようにしていｌこ。When attempting to generate a high vacuum with such a rotary vacuum pump, conventionally, multiple sets of rotors and stators were connected in tandem via a common rotor shaft, and the discharge port and suction port of each pump were connected in tandem. By connecting the opening and the opening, multi-stage exhaust is performed.

しかし、このような構成では装置が大型、かつ複雑化し
、また駆！ＩＩ動力が１１１人づるという欠点があった
。However, with this configuration, the device becomes large and complicated, and it is difficult to drive! The disadvantage was that the II power required 111 people.

（発明の目的） この発明は、１　ＩＩのｌコークとステータで多段Ｊ刀
気することにより、装置の小型化並びに駆動動力の低減
を図ることを目的どＪ−る。(Object of the Invention) The object of the present invention is to miniaturize the device and reduce the driving power by performing multi-stage operation using a 1 II l coke and a stator.

（発明の構成） 上記目的を達成覆るために、この発明は、シリンダ室内
に回転自在に横架されるロータにＪ、って該シリンダ室
を複数の作業室に区画するどどムに、前段側作業室の吐
出し口と次段側作業室の吸込みｎ　、Ｌ−を卯涌寸乙上
ろｔ：（、ｔ、−；”’Ｐ６ｒＬ％Ｖｈ）−１１２，−
（実施例の説明） 添付図はこの発明の一実施例に係る２段排気形回転真空
ポンプを示す。(Structure of the Invention) In order to achieve the above object, the present invention provides a rotor that is rotatably suspended horizontally in a cylinder chamber. The discharge port of the work chamber and the suction n, L- of the next stage side work chamber are lowered by Uwaku dimension t: (,t,-;”'P6rL%Vh)-112,-
(Description of an Embodiment) The attached drawing shows a two-stage exhaust type rotary vacuum pump according to an embodiment of the present invention.

図にａ３いて、ケーシング１には内周略楕円筒形のステ
ータ２が収容されている。このステータ２の前後には図
示しないフロントサイドブロックおよびリアサイドブロ
ックが装着され、これによって形成される楕円筒状のシ
リンダ室３には複数のベーン・・・を径方向に進退可能
に装着したロータ４が回転自在に横架され、そのロータ
軸４ａを各サイドブロック１８に軸支させである。At a3 in the figure, the casing 1 accommodates a stator 2 whose inner circumference is approximately elliptical. A front side block and a rear side block (not shown) are attached to the front and rear of the stator 2, and an elliptical cylinder chamber 3 formed by these blocks has a rotor 4 in which a plurality of vanes are attached so as to be movable in the radial direction. is rotatably suspended horizontally, and its rotor shaft 4a is supported by each side block 18.

前記ロータ４はシリンダ室３の短軸側に両端を接し、こ
れにより、シリンダ室３は２等分され、長径方向両側に
等容積の三日月形作業室６．７が形成される。Both ends of the rotor 4 are in contact with the short axis side of the cylinder chamber 3, whereby the cylinder chamber 3 is divided into two equal parts, and crescent-shaped working chambers 6.7 of equal volume are formed on both sides in the longitudinal direction.

ステータ２には作業室６に連通ずる第１の吸込みボート
９．吐出しボート１０および作業室７に連通ずる第２の
吸込みボー１−１３　、吐出しボート１５が形成されて
いる。また、各吐出しボート１０．１５の外側部にはそ
れぞれ吐出し弁１１．１６が装着されている。The stator 2 has a first suction boat 9 communicating with the working chamber 6. A second suction boat 1-13 and a discharge boat 15 are formed which communicate with the discharge boat 10 and the working chamber 7. Each discharge boat 10.15 is also fitted with a discharge valve 11.16 on its outer side.

そして、吐出しボーｈ　１０はステータ２とケーシング
１間に形成された空間部１２に連通し、またこの空間部
１２は第２の吸込みボー１〜１３に直交して開設された
連絡孔１４を介して作業室７側に連通している。The discharge bow h 10 communicates with a space 12 formed between the stator 2 and the casing 1, and this space 12 has communication holes 14 opened orthogonally to the second suction bows 1 to 13. It communicates with the work room 7 side through.

更に、’１５１の吸込みボート９は、フロントリイドブ
ロック側に開口する吸込み口８を介して低圧気体側に連
通し、また吐出しボー１へ１５はステータ２とケーシン
グ１間に形成された空間部１８Ｊ３よびリアナイドブロ
ックに形成された１１１気Ｌ１を通じて外部に連通して
いる。Furthermore, the suction boat 9 of '151 communicates with the low pressure gas side via the suction port 8 that opens on the front reed block side, and the discharge boat 1 15 is connected to the space formed between the stator 2 and the casing 1. It communicates with the outside through 18J3 and 111L1 formed in the rear side block.

このような構成としたので、ロータ３が時ｎ１回り方向
に回転すると、ベーン５の先端がシリンダ室３の内壁面
に旧接し、作業室６，７で吸込みと排気が行なわれる。With this configuration, when the rotor 3 rotates in the direction of time n1, the tip of the vane 5 comes into contact with the inner wall surface of the cylinder chamber 3, and suction and exhaust are performed in the working chambers 6 and 7.

・　まず、作業室６では、ロータ３の回転に伴うベーン
５の移動により低圧側気体を吸込み口８おにび第１の吸
込みボート９を介して吸込み、吐出し弁１１を開いて排
気する。排気された気体（、未吐出しボート１０．空間
部１２および連絡孔１４を介して第２の吸込みボート１
３から作業室７側に入り更に１１気作用が行なわれ、そ
の結果、υ１気気体は吐出し弁１６を（Ｂｌいて吐出し
ボート１５から大気中に排出されるのである。- First, in the work chamber 6, low-pressure gas is sucked in through the suction port 8 and the first suction boat 9 by movement of the vane 5 as the rotor 3 rotates, and is exhausted by opening the discharge valve 11. The exhausted gas (undischarged boat 10, the second suction boat 1 through the space 12 and the communication hole
3 enters the working chamber 7 side and is further subjected to 11 gas operations, and as a result, υ1 gas passes through the discharge valve 16 (Bl) and is discharged from the discharge boat 15 into the atmosphere.

（発明の効果） この発明は、以上の如く構成したので、１組のロータと
ステータで多段排気が可能となり、装置の小型化並ひに
駆動動力の低減を図ることができる。(Effects of the Invention) Since the present invention is configured as described above, multi-stage exhaust is possible with one set of rotor and stator, and it is possible to miniaturize the device and reduce driving power.

【図面の簡単な説明】[Brief explanation of the drawing]

添付図はこの発明の一実施例に係る２段Ｊｌｌｌ気団回
転真空ポンプを示ず側面断面図である。 １・・・・・・・・・・・・ケーシング２・・・・・・
・・・・・・ステータ ３・・・・・・・・・・・・シリンダ室４・・・・・・
・・・・・・ロータ ５・・・・・・・・・・・・ベーン ６．７・・・・・・作業室 ９・・・・・・・・・・・・第１の吸込みボート１０、
’１５・・・吐出しボート １１．１６・・・吐出し弁 １３・・・・・・・・・・・・第２の吸込みボー１−１
４・・・・・・・・・・・・連絡孔 以上 出願人　セイコー精機株式会４ イは人　最　上　務The attached drawing is a side sectional view, not showing, of a two-stage Jllll air mass rotary vacuum pump according to an embodiment of the present invention. 1...Casing 2...
...Stator 3...Cylinder chamber 4...
......Rotor 5...Vane 6.7...Working chamber 9...First suction boat 10,
'15...Discharge boat 11.16...Discharge valve 13...Second suction boat 1-1
4・・・・・・・・・・・・Applicant from contact hole and above Seiko Seiki Co., Ltd. 4 A is person Mogami

Claims (1)

【特許請求の範囲】[Claims] （１〉シリンダ室内に回転自在に横架され、該シリンダ
室を複数の作業室に区画するロータと、このロータの径
方向に進退可能に配置された複数のベーンと、前段側作
業室の吐出し口と次段側作業室の吸込み口を結ぶ連通路
とを備えたことを特徴とする多段排気団回転真空ポンプ
。(1> A rotor that is rotatably suspended horizontally in a cylinder chamber and divides the cylinder chamber into a plurality of working chambers, a plurality of vanes that are arranged so as to be movable in the radial direction of this rotor, and a discharge outlet of the front side working chamber. A multi-stage exhaust group rotary vacuum pump characterized by having a communication passage connecting an intake port and a suction port of a next-stage working chamber.