JPS60132829A - Linear-motor-type traveling table - Google Patents

Abstract

PURPOSE:To ease assembling and adjusting of a linear motor by contriving a metod of forming the lower core unit of a mover which travels along a stator that stretches in the direction of transfer, while keeping a suitable air space from the stator. CONSTITUTION:The captioned table consists of a stator 2 having stator magnetic pole tooth rows 2a and 2b arranged at an equal interval in the lengthwise direction and a mover 3 which is able to travel, while keeping a suitable air space over the stator 2 through roller bearings 12a, 12b, 13a, and 13b. In this case, the mover 3 consists of an upper core 4, permanent magnets 5a and 5b, driving coils 7X-7Z and a lower core unit 9. The lower core unit 9 holds a non-magnetic material 10 at a space between lower core materials 6a and 6b, while fastening members 18a and 18b are arranged outside the core materials 6a and 6b in order to integrate 6a, 6b, and 10 into one body. After this, surfaces, on the magnets 5a and 5b side, of the unit 9, mover fastening surface 118a and 118b, and mover magnet pole teeth 8X-8Z are machined up.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は直交座標系ロボットや産業用ＸＹテーブルなど
に応用できる磁極歯を有するリニアモータ式移動テーブ
ルに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a linear motor type moving table having magnetic pole teeth that can be applied to Cartesian coordinate system robots, industrial XY tables, and the like.

従来例の構成とその問題点 従来の磁極歯を有するリニアモータ式移動テーブルは第
１図にその具体構成を示すように１等ピ・ッチでかつ複
数列のステータ磁極歯列１Ｘ　、　１Ｙ。Conventional Structure and Problems The conventional linear motor moving table with magnetic pole teeth has a plurality of rows of stator magnetic teeth 1X and 1Y at equal pitch, as shown in FIG. 1.

１ｚを有するステータ２と１図示しないベアリング手段
によってステータ磁極歯列１Ｘ　、１Ｙ　。A stator 2 having a stator 1z and a stator pole tooth row 1X, 1Y by bearing means (not shown).

１ｚ上を適切な空隙を維持しつつステータ２の長手方向
（矢印入方向）へ走行可能に設けられたムーバ−３より
構成される。ムーバ−３は上部コア４、永久磁石６ａ　
、　５ｂ　、下部：＋７６１Ｌ　、６ｂ　。The mover 3 is configured to be able to run on the stator 1z in the longitudinal direction of the stator 2 (in the direction of the arrow) while maintaining an appropriate gap. The mover 3 has an upper core 4 and a permanent magnet 6a.
, 5b, bottom: +761L, 6b.

駆動：＋イル７Ｘ　、７Ｙ　、７Ｚ及び下部コアｅａ。Drive: +ile 7X, 7Y, 7Z and lower core ea.

６ｂに設けられかつステータ磁極歯列１Ｘ　、　１Ｙ。6b and stator magnetic pole tooth rows 1X and 1Y.

１ｚと対向したムーバ−磁極歯ｓａ、ｓｂよりなる。こ
のようなりニアモータの動作原理は一ステータ磁極歯列
１Ｘ、１Ｙ、１Ｚとムーバ−磁極歯ｓａ、’ｓｂ間に発
生する永久磁石ｓａ、６ｂと駆動コイル７Ｘ、７Ｙ、７
Ｚの合成磁束による磁気力を利用するものであシ、詳細
は特開昭６７−２５１５１号公報の通りである０ 第１図を各相ごとに断面で示したものが第２図であり、
この図により更に詳細にムーバ−磁極歯８１Ｌ　、　Ｂ
ｂトスｆ−夕磁極歯列１Ｘ、１Ｙ、１Ｚの相対位置関係
を説明する。ステータ磁極歯列ＩＸ、ＩＹ、１Ｚはそれ
ぞれステータ磁極歯ピッチＰに対し１１５Ｐだけずらせ
て配置し、一方ムーバー磁極歯９ａ、８ｂは８ａに対し
８ｂが１１２Ｐだけずらせである。すなわちステータ磁
極歯列１Ｘ。1z and opposing mover magnetic pole teeth sa and sb. As described above, the operating principle of the near motor is that the permanent magnets sa, 6b and the drive coils 7X, 7Y, 7 are generated between the stator magnetic pole teeth 1X, 1Y, 1Z and the mover magnetic pole teeth sa, 'sb.
It utilizes the magnetic force due to the composite magnetic flux of Z, and the details are as shown in Japanese Patent Application Laid-Open No. 67-25151.0 Figure 2 is a cross-sectional view of Figure 1 for each phase.
This figure shows the mover magnetic pole teeth 81L, B in more detail.
The relative positional relationship of the b-toss f-evening magnetic pole tooth rows 1X, 1Y, and 1Z will be explained. The stator pole tooth rows IX, IY, 1Z are each arranged offset by 115P with respect to the stator pole tooth pitch P, while the mover pole teeth 9a, 8b are offset by 112P with respect to 8a. That is, the stator magnetic pole tooth row 1X.

１Ｙ、１Ｚに対しムーバ−磁極歯ｓａ　、ｓｂの相対位
置関係は１／６Ｐずつずれた極が６群おることが容易に
わかる。駆動コイル７Ｘ、７Ｙ、、？Ｚは３相分しかな
いが、コイルに双方向の電流を流すいわゆる３相全□波
駆動方式とすることにより任意の方向へ駆動できる。It can be easily seen that the relative positional relationship between the mover magnetic pole teeth sa and sb with respect to 1Y and 1Z is that there are six groups of poles shifted by 1/6P. Drive coil 7X, 7Y...? Although Z has only three phases, it can be driven in any direction by using a so-called three-phase full □ wave drive system in which bidirectional current flows through the coil.

このような磁極歯を有するリニアモータ式移動テーブル
の性能向上を計る上からは、推方向上の為には磁極歯訃
ツチＰを小さくすることと空隙Ｃを小さくすることが有
効であり、更に位置決め性能向上の為ヒ鉦ステータ磁極
歯列１Ｘ、１Ｙ。In order to improve the performance of a linear motor type moving table having such magnetic pole teeth, it is effective to reduce the magnetic pole tooth profile P and the air gap C for the thrust direction. To improve positioning performance, the stator magnetic pole tooth rows are 1X and 1Y.

１；ｚとムーバ□−磁極歯ａａ、ｓｂとの相対位置精度
を向上させる方法が有効であることが広く知られている
。但し、空隙Ｃを小さくすることは推力を大きくす為反
面、コギング力を大きくし同時にム□−バーと哀テータ
間の吸引力も近似的に空□隙Ｃの２乗に反比例して大き
くなり位置決め精度やベアリング寿命に悪影響を与える
。この為空隙Ｃは設計上目標とする仕様に合せ最適値を
とるが、この空隙がねらい通りに確保できなければ出来
上ったリニアモータは充分な性能を発揮することができ
ないのである。ここで産業用として目標の性能を確保す
る１で前記ステー゛夕磁極歯列とムーバ−６ページ 磁極歯の相対位置精度は前記１／６Ｐの±６％（Ｐを１
．ａｍｍとすると±０．０１３ｍｍ）以下が望ましく、
父、空＠Ｃはねらい値に対し±１０μｍ以下を確保する
必要があることが実験的に確かめられている。It is widely known that a method of improving the relative positional accuracy between 1;z and the mover □-magnetic pole teeth aa, sb is effective. However, reducing the gap C increases the thrust force, but at the same time increases the cogging force, and at the same time, the suction force between the bar and the rotator also increases approximately in inverse proportion to the square of the gap C, which improves positioning. This will adversely affect accuracy and bearing life. For this reason, the air gap C is set to an optimum value in accordance with the target design specifications, but if this air gap cannot be secured as intended, the resulting linear motor will not be able to exhibit sufficient performance. Here, in order to ensure the target performance for industrial use, the relative position accuracy of the stage magnetic pole tooth row and the mover page 6 magnetic pole tooth is ±6% of the above 1/6P (P is 1
．． ±0.013 mm) or less is desirable,
It has been experimentally confirmed that the sky@C needs to be within ±10 μm of the target value.

しかしながら上記の様な構成ではムーバ−磁極歯ａａ、
ｓｂが別部品である為−８ａと８ｂの相対位置精度を前
記±０．０１３　ｍｍ以内で組立てることはかなシ困難
であり、多大の組立調整時間と測定時間を要し、更に８
ａと８ｂの厚さが累々る時は空隙Ｃの精度確保が不可能
となシ修正等の手間を要していた。この為、量産性が悪
くコスト高を招いており、又、保守の為に分解した時も
復帰が困難である等□の欠点を有していた。However, in the above configuration, the mover magnetic pole teeth aa,
Since sb is a separate part, it is difficult to assemble the relative position accuracy of -8a and 8b within the above ±0.013 mm, and it requires a lot of assembly adjustment time and measurement time.
When the thicknesses of a and 8b are extremely large, it is impossible to ensure the accuracy of the gap C, which requires time and effort for correction. For this reason, mass production is poor, leading to high costs, and when it is disassembled for maintenance, it is difficult to return to its original state.

次に第３図は当社よシ先願のりニアモータ式移動テーブ
ルのムーバ一部構成のみを示したもので。Next, Figure 3 shows only a part of the structure of the mover of our company's previously applied linear motor type moving table.

従来例の問題点を解決すべ〈発明されたものであるが、
以下に述べる理由によりリニアモータ式移動テーブルと
して組立る際に空隙Ｃの精度を確保、する上で欠点を有
していた。The problems of the conventional example should be solved (although it was invented,
For the reasons described below, there was a drawback in ensuring the accuracy of the gap C when assembling a linear motor type moving table.

′ベージ その構成を図面を参照しながら説明する。なお第１〜２
図と同機能部品には同一番号を付して説明する０ムーバ
−３は上部コア４と、永久磁石６ａ　、ｓｂと、下部コ
アユニット９及び駆動コイル７Ｘ　、７Ｙ　、７Ｚ（図
示せず）より構成される。The configuration of the page will be explained with reference to the drawings. Note that 1st and 2nd
The mover 3, which will be described with the same numbers assigned to the same functional parts as in the figure, includes an upper core 4, permanent magnets 6a, sb, a lower core unit 9, and drive coils 7X, 7Y, 7Z (not shown). configured.

下部コアユニットは下部コア素材（下部コア６ａ。The lower core unit is made of lower core material (lower core 6a).

６ｂより加工シロだけ大きめの素材）間に非磁性体より
なる部材１０をはさみ込み、溶接、ビンの絞め等により
一体的に構成した後下部コアユニット９の永久磁石ｓａ
、ｓｂ側の面及びムーバ−磁極歯ａａ　、ａｂを加工し
たものである。The permanent magnet sa of the rear lower core unit 9 is integrally constructed by sandwiching a member 10 made of a non-magnetic material between the material (which is larger than the material 6b by the processing margin) and welding, tightening a bottle, etc.
, sb side surface and mover magnetic pole teeth aa and ab are machined.

したがって、従来の下部コアａａ、ａｈが別部品のもの
に比べ非磁性部材１０を介して下部コアａａ、ａｂを一
体にしたことにより、ムーバ−磁極歯ｓａ、ａｂは一体
的に加工することができａａ　、ｓｂの相対位置精度及
び厚さ精度を精度良く加工することができる。Therefore, compared to the conventional lower cores aa and ah that are separate parts, by integrating the lower cores aa and ab through the non-magnetic member 10, the mover magnetic pole teeth sa and ab can be integrally machined. The relative position accuracy and thickness accuracy of aa and sb can be processed with high precision.

しかし・ながら上記・のような構成では、下部コアユニ
ット９単体では精度良く製作することができるが、実際
にロボットやＸＹテーブルの駆動手段として搭載する場
合、ムーバ−としての締結面が上部コア４の上面となる
為ベアリング手段を併なった移動ベースと固定ベースに
それぞれムーバ−３とステータ２を組込んだ時に前記空
隙Ｃの大きさに永久磁石ｅｓａ、ｓｂ及び上部コア４の
寸法が影響を与えることになり、すなわち空隙Ｃの寸法
精度をねらい通りに確保する為には永久磁石５ａ。However, with the above configuration, the lower core unit 9 alone can be manufactured with high precision, but when actually installed as a drive means for a robot or an XY table, the fastening surface as a mover is When the mover 3 and the stator 2 are installed in the movable base and the fixed base, which have bearing means, respectively, the size of the gap C is influenced by the dimensions of the permanent magnets esa, sb and the upper core 4. In other words, in order to ensure the dimensional accuracy of the air gap C as desired, the permanent magnet 5a is used.

６ｂ及び上部コア４の厚さ精度、上下面の平行度を精度
良く仕上る必要があり調整が困難でコスト高になるとい
う欠点を有していた。The thickness accuracy of the 6b and the upper core 4 and the parallelism of the upper and lower surfaces must be precisely finished, making adjustment difficult and resulting in high cost.

ここで更にリニアモータを搭載した移動テーブルについ
てベアリング手段を具体的にして従来例の構成とその問
題点を説明する。なお第１〜３図と同機能部品には同一
番号を付して説明する。又。Here, regarding a moving table equipped with a linear motor, the structure of a conventional example and its problems will be explained with specific bearing means. Components with the same functions as those in FIGS. 1 to 3 will be described with the same numbers. or.

第４図以下に図示するりニアモータ部は第１〜３図に図
示したりニアモータに比ベステータ磁極歯列を２列とし
てモータ幅をせばめている為、これに併ないムーバ−３
の方向とムーバ−磁極歯の方向を９０°変えているが駆
動原理及び主要構成は従来例と同じである０第４図はラ
ジアル形転がり９ページ ベアリング以下ベアリングと言う１２ａ、１２ｂ。The near motor section shown in Fig. 4 and below is compared to the near motor shown in Figs.
Although the direction of the mover and the direction of the mover magnetic pole teeth are changed by 90 degrees, the driving principle and main structure are the same as the conventional example.0 Figure 4 shows radial type rolling bearings 12a and 12b.

１ｓａ、１ｓｂによりムーバ−３がステータ２の磁極歯
列１上を適切な空隙を保って走行可能に構成したもので
あるが、ムーバ−磁極歯Ｂを下面に形成した下部コアａ
ａ、ｅｂは永久磁石５ａ。1sa and 1sb, the mover 3 is configured to be able to run on the magnetic pole tooth row 1 of the stator 2 while maintaining an appropriate gap.
a and eb are permanent magnets 5a.

６ｂ及び上部コア４を介してベアリング１２ａ。6b and the bearing 12a via the upper core 4.

１２ｂ、１３ａ、１３ｂを支持するケーシング１１に取
シ付けられる為、ムーバ−磁極歯８とステータ磁極歯列
１の空隙を精度良く組立ることは非常に困難であシ、設
計上でねらった通りの性能を引き出す為の精度（±１０
μｍ程度の管理が必要）を確保する上で一度組立た後、
空隙を測定し、誤差分だけ上部コア４を削ったり、スペ
ーサーをはさみ込んだりしなければならず多くの調整時
間を要し、コスト高になる等の欠点を有していた。12b, 13a, and 13b, it is very difficult to assemble the gap between the mover magnetic pole teeth 8 and the stator magnetic pole tooth row 1 with high precision, which was the aim in the design. Accuracy (±10) to bring out the performance of
Once assembled, in order to ensure that
It is necessary to measure the air gap and cut the upper core 4 or insert a spacer according to the error, which requires a lot of adjustment time and has disadvantages such as high cost.

又第６図は一ベアリング手段として無限直線運動をする
スライドベアリング（本例ではトラックレールとスライ
ドメンバーによる無限直線運動ベアリングの例を示す）
を２個平行に配置してムーバ−３がステータ２の磁極歯
列１上を適切な空隙１０、、−ジ を保って走行可能に構成したものであるが一ムーバー磁
極歯８を下面に形成した下部コアｓａ、ｅｂは永久磁石
ｓａ、ｓｂ及び上部コア４を介して移動ベース１７に取
付けられる為、第４図と同様にムーバ−磁極歯８とステ
ータ磁極歯列１の空隙を精度良く組立る為には上部コア
４及び永久磁石ｓａ、ｓｂを厚さ、平行度共に精度良く
加工しなければならず−ｎ度確保が困難であった。父、
移動限−ス１７と固定ベース１６の間にステータ２゜下
部コアｅａ、ｅｂ、永久磁石６ａ、ｓｂ及び上部コア４
が組込まれる為、移動テーブル全体が厚く重いものにな
り、直交ロボット及びＸＹテーブルとして利用する場合
、Ｙ軸テーブルがＸ軸テーブル上に積み重ねられるので
Ｘ軸ゲープルのりニアモータに対する負荷重量が大きく
なり加減速性能が著しく悪くなる等の欠点を有していた
。Also, Fig. 6 shows a slide bearing that performs infinite linear motion as one bearing means (this example shows an example of an infinite linear motion bearing using a track rail and a slide member).
are arranged in parallel so that the mover 3 can run over the magnetic pole tooth row 1 of the stator 2 while maintaining an appropriate gap 10, -.The mover magnetic pole teeth 8 are formed on the lower surface. Since the lower cores sa and eb are attached to the moving base 17 via the permanent magnets sa and sb and the upper core 4, the gap between the mover magnetic pole teeth 8 and the stator magnetic pole tooth row 1 is precisely assembled as shown in FIG. In order to achieve this, the upper core 4 and the permanent magnets sa and sb must be machined with high precision in both thickness and parallelism, and it has been difficult to ensure -n degrees. father,
The stator 2, the lower cores ea, eb, the permanent magnets 6a, sb, and the upper core 4 are placed between the movement limiter 17 and the fixed base 16.
is incorporated, making the entire moving table thick and heavy. When used as a Cartesian robot or an It had drawbacks such as significantly poor performance.

発明の目的　□ 本発明は上記欠点に鑑みなされたもので、リニアモータ
の組込み調整を容易にし、低コストでか゛つコンパクト
なリニアモータ式移動テーブルを提゛１１ページ 供するものである。Purpose of the Invention □ The present invention has been made in view of the above-mentioned drawbacks, and provides a linear motor-type moving table that facilitates installation and adjustment of a linear motor, is low cost, and is compact.

発明の構成 本発明は長手方向に等ピッチのステータ磁極歯列を有す
るステータと、ベアリング手段によって前記ステータ磁
極歯列上を適切な空隙を維持しつつ前記ステータの長手
方向へ走行可能に設けられたムーバ−よりなシ、前記ム
ーバ−は、永久磁石と一上部コアと一前記ステータ磁極
歯列対向面に前記ステータ磁極歯六回−ピッチのムーバ
−磁極歯を有する少なくとも１対の下部コアと、前記下
部コアにはさまれる非磁性部材と、駆動コイルと。Structure of the Invention The present invention is provided with a stator having a stator magnetic pole tooth row with equal pitches in the longitudinal direction, and a bearing means so that the stator can run in the longitudinal direction of the stator while maintaining an appropriate gap over the stator magnetic pole tooth row. The mover includes a permanent magnet, an upper core, and at least a pair of lower cores having mover magnetic pole teeth having a pitch of 6 times the stator magnetic pole teeth on a surface facing the stator magnetic pole tooth row; A non-magnetic member sandwiched between the lower core and a drive coil.

前部下部コアの外周部に配置した締結部材とで構成され
、前記下部コアと非磁性部材および締結部材を一体とし
て下部コアユニ、）とした後に、前記ムーバ−磁極歯と
前記締結部材の前、記入−バーー極歯と反対側の締結面
を加工するので、前記、ムーバ−磁極歯と前記、締−面
の関係精度が精度良く加工でき２組立調整を容易にし、
安価なリニアモータ式移動テ下プルを提供できるという
特有の効果を有する。　、 実施例の説明 以下本発明の第１の実施例について第６図〜第８図を参
照しながら説明する。なお第１〜６図と同機能部品には
同一番号を付して以下説明する。and a fastening member disposed on the outer periphery of the front lower core, and after the lower core, the non-magnetic member, and the fastening member are integrated to form a lower core unit, the mover magnetic pole teeth and the front of the fastening member, Since the fastening surface on the opposite side to the entry-bar pole teeth is machined, the relationship between the mover magnetic pole teeth and the fastening surface can be machined with high precision, and 2. Assembly adjustment is facilitated.
It has the unique effect of being able to provide an inexpensive linear motor type moving lower pull. , Description of Embodiments A first embodiment of the present invention will be described below with reference to FIGS. 6 to 8. Note that parts with the same functions as those in FIGS. 1 to 6 are given the same numbers and will be described below.

第６図は本発明の第１の実施例におけるリニアモータ部
、第７図はりニアモータ式移動テーブルで走行方向と直
角に断面したもの、第８図はリニアモータ式移動テーブ
ルの分解図である。図において、°ムーバー３は上部コ
ア４．永久８石５ａ、ｓｂ。FIG. 6 is a linear motor section according to the first embodiment of the present invention, FIG. 7 is a linear motor type moving table taken in cross section perpendicular to the traveling direction, and FIG. 8 is an exploded view of the linear motor type moving table. In the figure, the mover 3 is the upper core 4. Permanent 8 stones 5a, sb.

駆動コイル７Ｘ、７Ｙ、７Ｚ、下部コアユニット９よ多
構成される。下部コアユニット９は例えば２つの下部コ
ア素材（下部コアｅａ、ｅｂより加工シロだけ大きめの
素材）間に非磁性体よりなる部材１０をはさみ込みさら
にその外側に締結部材１８ａ、１８ｂを配して、溶接、
ピンの絞め等により一体的に構成した後下部コアユニッ
ト９の永久磁石ｓａ　、ｔｓｂ側の面及びムーバ−締結
部材１８ａ、１８ｂの締結面１１８ａ、１１８ｂ及びム
ーバ−磁極歯ｓｘ、ａｙ、ａｚ部を研削−ワイヤカット
等により加工したものである。・２はステ１３４−ジ ータ−１ａ、１ｂはステータ、、磁極歯列−１２＆。It is composed of drive coils 7X, 7Y, 7Z, and a lower core unit 9. The lower core unit 9 includes, for example, a member 10 made of a non-magnetic material sandwiched between two lower core materials (materials larger than the lower cores ea and eb by the processing margin), and furthermore, fastening members 18a and 18b are arranged outside of the member 10. ,welding,
The permanent magnet sa and tsb side surfaces of the rear lower core unit 9, the fastening surfaces 118a and 118b of the mover fastening members 18a and 18b, and the mover magnetic pole teeth sx, ay, and az portions are integrally formed by tightening pins, etc. It is processed by grinding, wire cutting, etc.・2 is the stator 134-jeta-1a, 1b is the stator, magnetic pole tooth row-12&.

１２ｂ　、１．３１Ｌ、、１３ｂはムーバ−３をステー
タ２の長手方向に沿って案内Ｊる転がりベアリング−１
１稈転がりベアリング１２ｉＬ、１２ｂ、１３ａ。12b, 1.31L, 13b are rolling bearings 1 that guide the mover 3 along the longitudinal direction of the stator 2.
1 culm rolling bearing 12iL, 12b, 13a.

１３ｂとムーバ−３を支持するケーシングである。13b and a casing that supports the mover 3.

以上のように構成亭些た゛１＝アゝ−一式移動テーブル
について、その動作原理は従来例と全く回りであるので
μ略するが１．、本、実蝉例によれば、下部コアユニッ
、ト９を！接、ピンの絞め等により一体的円構成した後
−下部コアユニット９の永久磁石ｓａ　、６ｂ側の面及
び締、結部材１８２Ｌ、１８ｂの締結面１．１８＆　、
　１１　ｓ、ｂ、及び↑−バー磁極歯８Ｘ、ＢＹ、ＢＺ
部を研削、ワイヤー力ｙ）等により加工するので下部コ
ア６ａに対する下部コア６粉のムーバ−＄極歯８Ｘ、８
Ｙ、８Ｚの関係は非常に精度良く確、保すること、がで
き、ムーバ−磁極歯８に、８Ｙ、８Ｚ、！：締結面１１
８ａ、１１８ｂの位置関係精度も確保できるので、移動
テーブルとして組立てる時、ムーバ−、磁極歯８Ｘ、８
Ｙ。As mentioned above, regarding the complete moving table, the operating principle is exactly the same as the conventional example, so μ will be omitted, but 1. , book, according to the example, the lower core unit, 9! After forming an integral circle by connecting, tightening pins, etc., the permanent magnet sa of the lower core unit 9, the surface on the 6b side and the fastening surfaces 1,18, of the fastening members 182L, 18b,
11 s, b, and ↑-bar magnetic pole teeth 8X, BY, BZ
Since the part is processed by grinding, wire force y), etc., the lower core 6 powder mover $ pole teeth 8X, 8
The relationship between Y and 8Z can be established and maintained with very high precision, and the relationship between the mover magnetic pole teeth 8 and 8Y, 8Z, ! : Fastening surface 11
8a and 118b, so when assembled as a moving table, the mover, magnetic pole teeth 8X, 8
Y.

８ｚとステータ磁極歯１ａ、１石間の空隙を容易１４ペ
ージ に作ることができ、なおかつ−上部コア４の上面より上
部コア４と永久磁石ｓａ、ｅｓｂの厚み分だけステータ
２に近づけた位置でケーシング１１と締結できるのでコ
ンパクトなりニアモータ式移動テーブルを提供すること
ができる。The gap between 8z and the stator magnetic pole teeth 1a and 1 stone can be easily made to 14 pages, and - at a position closer to the stator 2 than the upper surface of the upper core 4 by the thickness of the upper core 4 and the permanent magnets sa and esb. Since it can be fastened to the casing 11, a compact near-motor type moving table can be provided.

以下本発明の第２の実施例について第９図、第１０図を
参照しながら説明する。なお第１〜第８図と同機、能部
品については同一番号を付して以下説明する。第９図は
本発明の第２の実施例のリニアモータ式移動テーブルの
走行方向と直角な断面図を示し、第１１図はその斜視図
を示したものである。なおリニアモータ部（ムーバ−３
及びステータ２）は第１の実施例と同一であるのでムー
バ−及びステータの構成の説明は省略する。図において
、１４及び１６は無限直線運動をするスライドベアリン
グで１４？Ｌ、１６＆はそのスライドメ、ンバ−−１４
ｂ、１６ｂはそのトラックレールである。１６はトラッ
クレール１４ｂ、１６ｂを平行に固定し、同じくトラッ
クレールに平行にステータ２を固定した固定ベース−１
７は、スライドメ１６２．−ラ。A second embodiment of the present invention will be described below with reference to FIGS. 9 and 10. Note that the same functions and parts as in FIGS. 1 to 8 are designated by the same numbers and will be described below. FIG. 9 shows a sectional view perpendicular to the traveling direction of a linear motor type moving table according to a second embodiment of the present invention, and FIG. 11 shows a perspective view thereof. In addition, the linear motor part (mover-3
Since the mover and stator 2) are the same as those in the first embodiment, a description of the structure of the mover and stator will be omitted. In the figure, 14 and 16 are slide bearings that perform infinite linear motion. L, 16 & is the slide member, number 14
b, 16b is the track rail. 16 is a fixed base 1 on which the track rails 14b and 16b are fixed in parallel, and the stator 2 is also fixed in parallel to the track rails.
7 is slide me 162. -La.

ンバ−１４ａ、１５＆を固定し一体的に移動可能とした
移動ベースで一ステータ２に向き合う面にムーバ−の締
結部材１ｓａ、１ｓｂの締結面を合せて固定している。A movable base on which members 14a, 15& are fixed and movable integrally is fixed with the fastening surfaces of fastening members 1sa, 1sb of the mover aligned with the surface facing one stator 2.

移動ベース１７の概略中央部　。Roughly the center of the moving base 17.

にはムーバ−の永久磁石ｅｓ？Ｌ、ｓｂ及び上部コア４
がは寸り込む空間を形成している。１９は移動テーブル
の原点及び移動端を検出する為のセンサー部で１９＆は
その移動側センサー、１９ｂは固定側センサーである。Is there a permanent magnet in the mover? L, sb and upper core 4
It forms a space where you can squeeze in. 19 is a sensor section for detecting the origin and the moving end of the movable table, 19& is a sensor on the movable side thereof, and 19b is a sensor on the fixed side.

２Ｏはリニアモータ式移動テーブルをサーボ駆動する為
にステータ２の磁極歯を検出する検出・＼ラドである。2O is a detection/rad that detects the magnetic pole teeth of the stator 2 in order to servo drive the linear motor type moving table.

、以上のように構成されたりニアモー多式移動テーブル
について。, Regarding the near-motor multi-movement table configured as above.

その動作原理は従来例と□同様であるので詳しく述べる
ことはさｉるが、ムー・（−はスライドベアリング１４
．１６によってステータ磁極歯列上でわずかな空ｈｉ維
持してスライドすることができ一又一検出ヘッド２０に
よるステータ磁極歯の検出によって図示しない制御回路
によりサーボ駆動することができる。The operating principle is the same as that of the conventional example, so it will not be described in detail.
．． 16, it is possible to slide on the stator magnetic pole tooth row while maintaining a slight gap, and by detecting the stator magnetic pole teeth by the one-or-one detection head 20, it can be servo driven by a control circuit (not shown).

以上のように本実施例によれば−ムーノ（−３の下部コ
アユニット９を例えば２つの下部コア素材間に非磁性体
よりなる部材１０をはさみ込みさらにその外側に締結部
材１８ａ、１８ｂを配して。As described above, according to this embodiment, the lower core unit 9 of Muno (-3) is sandwiched between, for example, two lower core materials, and the member 10 made of a non-magnetic material is sandwiched, and the fastening members 18a and 18b are disposed outside of the member 10. do.

溶接等により一体的に構成した後下部コアユニクト９の
永久磁石６ａ　、ｓｂ側の面及び締結部材１８２Ｌ　、
１　ｓｂの締結面１１８ａ、１１８ｂ及びムーバ−磁極
歯ｓｘ、ｓｙ、ｓｚ部を研削、ワイヤー力ｙ）等により
加工するので下部コア６ａに対する下部コア６ｂのムー
バ−９極歯ｓＸ　、ｓＹ。Permanent magnet 6a, sb side surface and fastening member 182L of rear lower core unit 9 integrally constructed by welding or the like,
1 sb fastening surfaces 118a, 118b and the mover magnetic pole teeth sx, sy, sz are processed by grinding, wire force y), etc., so that the mover 9 pole teeth sX, sY of the lower core 6b relative to the lower core 6a.

８Ｚの関係は非常に精度良く確保することができ、ムー
バ−磁極歯８Ｘ＠８Ｙ、８Ｚと締結面１１８ａ。The relationship 8Z can be ensured with very high precision, and the relationship between the mover-magnetic pole teeth 8X@8Y, 8Z and the fastening surface 118a.

１１８ｂの位置関係精度も確保できるので移動テーブル
として組立る時−ムーバ−磁極歯ａｘ、ａｙ。118b can be secured, so when assembled as a moving table - mover - magnetic pole teeth ax, ay.

８ｚとステータ磁極歯１ａ、１ｂ間の空隙を容易に作る
ことができ、なおかつ−上部コア４の上面より上部コア
４と永久磁石ｓａ　、ｓｂの厚み分だけステータ２に近
づけた位置で移動ベース１７と締結し、上部コア４及び
永久磁石ｅｓａ、ｅｓｂを移動ベース１７の厚さの中に
吸収できるのでコンパクトなリニアモータ式移動テーブ
ルを提供するこ１７ページ とができる。なお、第１．第２の実施例において下部コ
アｅａ、ｓｂの永久磁石６ａ、６ｂ側の面とムーバ−締
結部材の締結面１１ｓａ、１１８ｂを同一面として図示
したが一段差が付いた構成であっても良い。8z and the stator magnetic pole teeth 1a, 1b, and the movable base 17 is positioned closer to the stator 2 by the thickness of the upper core 4 and the permanent magnets sa and sb than the upper surface of the upper core 4. Since the upper core 4 and the permanent magnets ESA and ESB can be absorbed into the thickness of the moving base 17, a compact linear motor type moving table can be provided. In addition, 1. In the second embodiment, the permanent magnet 6a, 6b side surfaces of the lower cores ea, sb and the fastening surfaces 11sa, 118b of the mover fastening member are shown as the same surface, but they may have a one-step difference.

又第１の実施例において転がりベアリングの転勤面をス
テータの磁極歯面及びその側面としたが転勤面の強度を
上げる為にステータを組付ける固定ベースを設け、固定
ベースの面上で転動するように構成しても良い。Furthermore, in the first embodiment, the rolling bearing surface was the magnetic pole tooth surface of the stator and its side surface, but in order to increase the strength of the rolling surface, a fixed base was provided on which the stator was assembled, and the rolling bearing rolled on the surface of the fixed base. It may be configured as follows.

父、第２の実施例においてベアリング手段はスライドベ
アリングとトラックレールとして説明したが、丸棒ガイ
ドシャフトを固定ベースに組付けこれと組合されるスラ
イドベアリングラ移動ペースに固定して移動テーブルを
構成しても良い。In the second embodiment, the bearing means was explained as a slide bearing and a track rail, but a moving table is constructed by assembling a round bar guide shaft to a fixed base and fixing the combined slide bearing to a moving pace. It's okay.

発明の効果 以上のように本発明はムーバ−の下部コアユニットを少
なくとも１対の下部コアと一下部コアにはさまれる非磁
性よりなる部材と、これらの外周部に配置した締結部材
を溶接、ピン絞め等の手段１８、−ジ により一体的に構成した後に−ムーバー磁極歯と締結部
材の締結面を加工するので、下部コア相互の相対位置精
度を確保できると共にムーバ−磁極歯と締結面の位置関
係精度（特に厚さ寸法）が精度良く確保できるので一直
交ロボットやＸＹテーブル用の移動テーブルとして組立
てる時１組立調整が容易になり低コストなりニアモータ
式移動テーブルを提供することができ、その実用的効果
は大なるものがある。Effects of the Invention As described above, the present invention provides a lower core unit of a mover by welding at least one pair of lower cores, a non-magnetic member sandwiched between the lower cores, and a fastening member disposed on the outer periphery of these members. Since the fastening surfaces of the mover magnetic pole teeth and the fastening member are machined after being integrally constructed using means 18, such as pin tightening, the fastening surfaces of the mover magnetic pole teeth and the fastening member can ensure the relative positional accuracy of the lower cores, and the relationship between the mover magnetic pole teeth and the fastening surfaces. Since the positional relationship accuracy (especially the thickness dimension) can be ensured with high accuracy, when assembling it as a moving table for a monocartesian robot or an XY table, it is easy to assemble and adjust it, and it is possible to provide a near-motor type moving table at low cost. The practical effects are significant.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の磁極歯を有するリニアモータ式移動テー
ブルの斜視図、第２図はステータ磁極歯列とムーバ−磁
極歯の相対位置関係を示す説明図。 第３図はリニアモータのムーバ一部の斜視図、第４図、
第６図は従来のリニアモータ式移動テーブルの移動方向
と直角に切断した断面図−第６図は本発明の第１の実施
例におけるリニアモータ部の斜視図−第７図は本発明の
第１の実施例におけるリニアモータ式移動テーブルの移
動方向と直角に切断した断面図、第８図は同分解斜視図
、第９図１９ページ は本発明の第２の実施例におけるリニアモータ式移動テ
ーブルの移動方向と直角に切断した断面図。 第１０図は同斜視図である。 １１Ｌ、１ｂ・・・・・・ステータ畠極歯列、２・・・
・・・ステータ、３・・・・・・ムーバ−１４・・・・
・・土部コア、５＆。 ６ｂ・・・山永久磁石、ｅａ、ｅｂ・・・・・・下部コ
ア。 ７Ｘ　、　７Ｙ　、　７　Ｚ−・−−−−駆動コイル−
８！　、　８Ｙ　。 ８ｚ・・・・・・ムーバ−磁［歯−９・・・・・・下部
コアユニット、１０・・・・・・非磁性部材、１１・・
・・・・ケーシング。 １２１Ｌ１１２ｂ、１３１Ｌ、１３ｂ・・・・・・ラジ
アル形転がりベアリング＋１４ａ、１＋ｂ、１ｓａ。 １６ｂ・・・・・・スライドベアリング、１６・・・・
・・固定ベース、１７・旧・・移動ベース。 、代理人の氏名　弁理士　中　尾　敏　男　ほか１名第
１１１ 卜・−一 範 ｕ　吋 円　綜 城 ２２３−FIG. 1 is a perspective view of a conventional linear motor type moving table having magnetic pole teeth, and FIG. 2 is an explanatory diagram showing the relative positional relationship between the stator magnetic pole teeth and the mover magnetic pole teeth. Figure 3 is a perspective view of a part of the mover of the linear motor; Figure 4;
FIG. 6 is a sectional view taken perpendicular to the moving direction of a conventional linear motor type moving table. FIG. 6 is a perspective view of a linear motor section in the first embodiment of the present invention. FIG. FIG. 8 is an exploded perspective view of the linear motor type moving table according to the first embodiment, and FIG. 9, page 19 shows the linear motor type moving table according to the second embodiment of the present invention. A cross-sectional view taken perpendicular to the direction of movement. FIG. 10 is a perspective view of the same. 11L, 1b... Stator pole tooth row, 2...
...Stator, 3...Mover-14...
...Tsuchibe Core, 5&. 6b... Mountain permanent magnet, ea, eb... Lower core. 7X, 7Y, 7Z-----Drive coil-
8! , 8Y. 8z...Mover magnet [teeth-9...Lower core unit, 10...Non-magnetic member, 11...
····casing. 121L112b, 131L, 13b... Radial rolling bearing +14a, 1+b, 1sa. 16b...Slide bearing, 16...
・・Fixed base, 17・Old ・・Moving base. , Name of agent: Patent attorney Toshio Nakao and 1 other person

Claims (3)

【特許請求の範囲】[Claims] （１）長手方向に等ピッチのステータ磁極歯列を有、、
するステータと、ベアリング手段によって前記テ、テー
タ、、磁極歯列上を適切な空隙を維持しつつ前記ス、テ
ータの長手方向へ走行可能に設けら、れたムーバ−よシ
なり、前記ムーバ−は、永久磁、石と一上部コアと、前
記ステータ磁極歯列対向、面に前記ステータ磁極歯と同
、−ピッチのムーバ−磁極歯を有する少なくとも１対の
下部コアと。 前、記下部コアにはさまれる非磁性部材と一駆動コイル
と、前記下部、コアの外周部に配置した締結部材と、で
構成声れ１−前記下部°アと非磁性部材及び締結部材を
一体として下部コアユニットとした後に、前記ムーバ−
磁極歯と前記締結部材の前記ムーバ−磁極歯と反対側の
締結面を加工したりニアモータ式移動テーブル。(1) Has a stator magnetic pole tooth row with equal pitch in the longitudinal direction,
a stator, and a mover, which is provided so as to be movable in the longitudinal direction of the stator while maintaining an appropriate gap over the tooth row of the stators and magnetic poles by bearing means, and the mover an upper core made of a permanent magnet, a stone, and at least one lower core having mover pole teeth having the same pitch as the stator pole teeth on faces opposite to the stator pole teeth. The first part consists of a non-magnetic member sandwiched between the lower core, a drive coil, and the lower part, a fastening member disposed on the outer periphery of the core. After forming the lower core unit as an integral unit, the mover
A near motor type moving table for machining the magnetic pole teeth and the fastening surface of the fastening member on the opposite side of the mover magnetic pole teeth. （２）ベアリング手段は、ラジアル形転がシのベア２、
、−’ リングとし、前記ステータ磁極歯と前記ムーバ−磁極歯
の適切な空隙を維持するように前記ステータの磁極面側
に少なくとも３個のベアリングを配し−さらに前記ムー
バ−を前記ステータの長手方向に沿って案内するよう前
記ステータの側面に少なくとも３個のベアリングを配し
。 これらのベアリングと前記、ムーバ−を一体的に組立て
る為、のクーシンクを用い一前記ケーシングのステータ
磁極面側の取付面に前記締結部材の締結面を合せて固定
した特許請求の範囲第１項記載のリニアモータ式移動テ
ーブル。(2) The bearing means is a radial roller bearing 2,
, -' rings, and at least three bearings are disposed on the magnetic pole face side of the stator so as to maintain an appropriate gap between the stator magnetic pole teeth and the mover magnetic pole teeth, and the mover is arranged along the longitudinal direction of the stator. At least three bearings are arranged on the sides of the stator to guide the stator along the direction. In order to integrally assemble these bearings and the mover, a cooling sink is used to align and fix the fastening surface of the fastening member to the mounting surface on the stator magnetic pole side of the casing. linear motorized moving table. （３）ベアリング、手段は、無限直線運動をするスライ
ドベてリングを少なくとも２個平行に配置し、前記ステ
ータと前記スライドベアリングと組合されるスライドレ
ールを平行支持する内定ベースと、前記スライドベアリ
ングと前記ムーバ−を一体的に組、立てる移動ベースと
で構成し、前記移゛動ベースと前記固定ベースの間でか
っ、前記２個のスライドベアリングの間に前記ムーバ−
”’ｔｍ込む空間を形成し、前記移動ベースの前−ペー
ジ 記空間側の面に前記ムーバ−の締結部材の締結面を合せ
て固定し、前記永久磁石と上部コアを前記移動ベースの
概略中央部に設けた四部にはまり込むようにした特許請
求の範囲第１項記載のりニアモータ式移動テーブル。(3) The bearing means includes a predetermined base in which at least two slide bearings that move in an infinite linear motion are arranged in parallel, and supports the stator and the slide rail combined with the slide bearing in parallel, and the slide bearing and the The mover is constructed by integrally assembling and erecting a movable base, and the mover is disposed between the movable base and the fixed base, and between the two slide bearings.
A fastening surface of the fastening member of the mover is aligned and fixed to the surface of the moving base on the front side of the space, and the permanent magnet and the upper core are fixed approximately in the center of the moving base. The linear motor type moving table according to claim 1, which is adapted to fit into four parts provided in the part.