JPS60108244A - Driving device - Google Patents

Driving device

Info

Publication number
JPS60108244A
JPS60108244A JP21837483A JP21837483A JPS60108244A JP S60108244 A JPS60108244 A JP S60108244A JP 21837483 A JP21837483 A JP 21837483A JP 21837483 A JP21837483 A JP 21837483A JP S60108244 A JPS60108244 A JP S60108244A
Authority
JP
Japan
Prior art keywords
magnetic
guide part
moving table
permanent magnet
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21837483A
Other languages
Japanese (ja)
Other versions
JPS639939B2 (en
Inventor
Toru Okuda
徹 奥田
Hajime Onda
恩田　一
Masanori Kaneko
正紀 金子
Koichi Okada
浩一 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Sharp Corp
Original Assignee
Sharp Corp
NTN Toyo Bearing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp, NTN Toyo Bearing Co Ltd filed Critical Sharp Corp
Priority to JP21837483A priority Critical patent/JPS60108244A/en
Publication of JPS60108244A publication Critical patent/JPS60108244A/en
Publication of JPS639939B2 publication Critical patent/JPS639939B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/035—DC motors; Unipolar motors
    • H02K41/0352—Unipolar motors
    • H02K41/0354—Lorentz force motors, e.g. voice coil motors
    • H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/40—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using ball, roller or wheel arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/58—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Machine Tool Units (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Moving Of Heads (AREA)

Abstract

PURPOSE:To miniaturize a driving device and make it light in weight by movably mounting a moving table including a movable coil fixed thereon wound at a right angle to magnetic force lines from a permanent magnet on a bench having the permanent magnet fixed thereon via a guide part. CONSTITUTION:When a DC current is conducted through a movable coil 20 fixed on the lower surface of a moving table 21, thrusting force is generated between permanent magnets 19, 19 disposed on the inside surface of magnetic levers 14, 16 on the bench 13 along a magnetic lever 15 provided at a center of the bench 13, and thereby the coil 20 is moved. In addition, the moving table 21 is moved along orbitals 18, 18 of the magnetic levers 14, 16 located on both sides of the bench 13. If the current is reversed, the moving table 21 can be moved in the opposite direction.

Description

【発明の詳細な説明】 イ、産業上の利用分野 この発明は、比較的小ストロークの直線運動で超精密な
加工及び位置決めを必要とする分野、例えば半導体製造
、情報機器等に利用して好適な駆動装置に関する。DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Use This invention is suitable for use in fields that require ultra-precise processing and positioning with relatively small stroke linear motion, such as semiconductor manufacturing and information equipment. The present invention relates to a driving device.

口、従来技術 第１図は概に公知（特開昭５６−１４１４５３号公報等
）の工作機械等に用いられる直線運動装置の最も一般的
な構造を例示するものであって、（１）は下部にナンド
（２）が固定された可動部、（３）は前記可動部（１）
を直線状に摺動自在に案内する案内部、（４）は前記案
内部（３）と平行に配置され、前記ナンド（２）と螺合
する精密ボールネジ、（５）は前記精密ボールネジ（４
）を回転駆動させる回転型モータである。この装置に於
いて、回転型モータ（５）で精密ボールネジ（４）を回
転させると、その回転運動はナンド（２）によって直線
運動に変換され、可動部（１）はす・ノド（２）を介し
て案内部（３）上を直線状に移動する。この装置の位置
決め精度は、案内部（３）以上にす・ノド（２）及び精
密ポールネジ（４）の加工精度、取イ・」精度及びバン
クラッシュの大小に影響される。ところで、近年超精密
加工分野等に於いて、小ストロークでサブミクロン精度
の位置決めが可能な直線運動装置の需要が高まっ一ζい
る。1. Prior Art FIG. 1 generally illustrates the most common structure of a linear motion device used in a machine tool, etc., which is known (Japanese Patent Laid-Open No. 56-141453, etc.), and (1) A movable part with a nand (2) fixed to the lower part, (3) is the movable part (1)
(4) is a precision ball screw arranged parallel to the guide part (3) and screwed into the NAND (2); (5) is the precision ball screw (4)
) is a rotary motor that rotates the motor. In this device, when the precision ball screw (4) is rotated by the rotary motor (5), the rotational motion is converted into linear motion by the NAND (2), and the movable part (1) It moves linearly on the guide part (3) via the guide part (3). The positioning accuracy of this device is affected by the machining accuracy of the guide part (3), the groove (2) and the precision pole screw (4), the precision of the guide part (3), the precision of the groove, and the size of the bank lash. Incidentally, in recent years, in the field of ultra-precision machining, etc., there has been an increasing demand for linear motion devices capable of positioning with submicron accuracy with small strokes.

しかし、前述の構造の装置で位置決め精度を向上させ、
ハックラッシュをなくす為の予圧機構を設りなければな
らず、装置が複雑で高価なものになる。また、前述の構
造では可動部（１）、案内部（３）、ナンド（２）、精
密ホールネジ（４）及び回転型モータ（５）等を組合せ
る為、装置全体が大型になると云う欠点があった。However, the device with the above structure improves the positioning accuracy,
A preload mechanism must be provided to eliminate hacklash, making the device complicated and expensive. In addition, the above structure has the disadvantage that the entire device becomes large because it combines the movable part (1), the guide part (3), the NAND (2), the precision hole screw (4), the rotary motor (5), etc. there were.

そこで、最近では、例えば光ディスクの再生プレーヤ等
に於いては、第２図に示す如きリニアモータ（６）と直
線案内部（７）を組合せた即応性、精度の良い直線運動
装置を採用するようになってきた。しかし、これもリニ
アモータ（６）と直線案内部（７）のそれぞれ独立した
ユニットを組合せたもので、装置として大きなものにな
り、これを組み込んだ装置全体としても大型にならざる
を得なかった。尚、第２図中、（８）は光ディスク、（
９）はディスク駆動モータ、（１０）は光ヘッド、（１
１）は半導体レーザを夫々示す。Therefore, recently, for example, in optical disc playback players, etc., a linear motion device with high responsiveness and precision that combines a linear motor (6) and a linear guide section (7) as shown in Fig. 2 has been adopted. It has become. However, this was also a combination of independent units of the linear motor (6) and the linear guide section (7), making it a large device, and the entire device incorporating it had to be large as well. . In Fig. 2, (8) is an optical disc, (
9) is a disk drive motor, (10) is an optical head, (1
1) respectively indicate semiconductor lasers.

ハ０発明の目的 この発明は、直線運動部と可動コイル形リニアモータを
一体に構成して、小型、軽量、コンパクト化し、これを
組み込んで装置全体の小型化に大いに寄与する駆動装置
を提供せんとするものである。Object of the Invention The present invention provides a drive device that integrates a linear motion part and a moving coil linear motor to make it smaller, lighter, and more compact, and incorporates this to greatly contribute to the miniaturization of the entire device. That is.

二５発明の構成 この発明は、直線案内部と可動コイル形リニアモータか
らなる駆動装置に於いて、所定の間隔で平行配置した３
本の磁性柱とその両端部を夫々磁性体で連結して日の字
状に形成し、その両側の磁性柱の外側に軌道を一体に突
出形成すると共に、内側に中央の磁性柱に磁力線が直角
に流入するように永久磁石を固設した基台と、１本のロ
ットに嵌挿された１対の転がり軸受で上記基台の軌道を
挾持し、更に、スプリングによりその挟持力をｊＪｌａ
整自在にした案内部と、下面に前記案内部のロットを垂
設すると共に、所定のスキマを持って前記基台の中央の
磁性柱が貫通し、かつ前記永久磁石の磁力線を直交する
ように巻回された可動コイルを固着した移動テーブルと
で構成され、該移動テーブルを前記基台上に上記案内部
を介して移動自在に装架して駆動装置を小型、軽量化が
可能なように構成したものである。25 Structure of the Invention This invention provides a drive device consisting of a linear guide section and a moving coil type linear motor, in which three motors are arranged in parallel at a predetermined interval.
The magnetic pillars of the book and their respective ends are connected with magnetic material to form a Japanese character shape, and tracks are integrally formed on the outside of the magnetic pillars on both sides, and lines of magnetic force are formed inside the central magnetic pillar. A base on which a permanent magnet is fixed so that the flow flows at right angles, and a pair of rolling bearings fitted into one lot clamp the track of the base, and a spring applies the clamping force to
A freely adjustable guide part and a rod of the guide part are provided vertically on the lower surface, and a magnetic column at the center of the base passes through with a predetermined gap and is perpendicular to the lines of magnetic force of the permanent magnet. and a moving table to which a wound moving coil is fixed, and the moving table is movably mounted on the base via the guide part, so that the drive device can be made smaller and lighter. It is composed of

ホ、実施例 第３図乃至第７図は、この発明に係る駆動装置の一実施
例を示すもので、（１３）は所定の間隔で平行配置した
３本の磁性柱（１４）　（１５）（１６）の両端部を２
本の磁性体の連結杆（１７）（１７）で連結して形成し
た基台で、その両側の磁性柱（１４）　（ｉ６）は外側
面に夫々軌道（１８）（１８）を一体に突出形成してい
ると共に、内側面に中央の磁性柱（１５）に直角に磁力
線が流入するように配置して永久磁石（１９）　（１９
）を固着している。（２０）は基台（１３）上に移動可
能に装架した移動テーブル（２１）の下面にその上部を
固着した可動コイルで、前記永久磁石（１９）（１９）
の磁力線と直交するように巻線したもので、内部に所定
のスキマを持って前記基台（１３）の中央の磁性柱（１
５）が貫通されて移動テーブル（２１）の移動に伴って
中央の磁性柱（１５）と永久に１石（１９）　（１９）
のスキマを移動する。移動テーブル（２１）は例えば片
方に２個、もう一方に１個の配置で設けた合計３個の案
内用軸受ユニット（２２）を介して基台（１３）の両側
の磁性柱（１４）　（１６）の軌道（１Ｂ）　（１Ｂ）
に保持されている。案内用軸受ユニット（２２）は移動
テーブル（２１）の下面に垂設した下端に鍔部（２３’
　）を有するロット（２３）に２個の転がり軸受例えば
玉軸受（２４）　（２４）と支持体（２５）を嵌挿し、
２個の玉軸受（２４＞　（２４）の間に軌道（１８）（
１８）を挾み、ロット（２３）の鍔（２３”）と支特休
（２５）との間に圧縮間在したスプリング（２６）によ
り弾性的に挾持している。スプリング（２６）は移動テ
ーブル（２１）に外部から受ける（ｉｉ　＠や軌道（１
８）　（１８）の加工バラツキを吸収し、移動テーブル
（２１）の安定でスムーズな移動を保証−する。また、
このスプリング（２６）の圧力調整により、コイル電流
を久方とし変位を出力としたシステムの伝達特性も任意
に変化でき、応用方法に応じた特性の調整が可能である
。E. Embodiment FIGS. 3 to 7 show an embodiment of the drive device according to the present invention, in which (13) indicates three magnetic columns (14) (15) arranged in parallel at a predetermined interval. (16) both ends 2
A base formed by connecting book magnetic material connecting rods (17) (17), and the magnetic columns (14) (i6) on both sides integrally project tracks (18) (18) on the outer surface respectively. At the same time, permanent magnets (19) (19
) is fixed. (20) is a movable coil whose upper part is fixed to the lower surface of a movable table (21) movably mounted on a base (13), and the permanent magnet (19) (19)
The magnetic column (1) is wound at right angles to the lines of magnetic force of
5) is penetrated and permanently attached to the central magnetic column (15) as the moving table (21) moves.
Move the gap. The moving table (21) is connected to the magnetic columns (14) on both sides of the base (13) via a total of three guide bearing units (22), two on one side and one on the other. 16) Orbit (1B) (1B)
is maintained. The guide bearing unit (22) has a flange (23') at the lower end that is vertically disposed on the lower surface of the moving table (21).
), insert two rolling bearings, for example, a ball bearing (24) and a support (25) into the rod (23),
A raceway (18) (between two ball bearings (24) (24)
18) and is elastically held by a spring (26) compressed between the tsuba (23'') of the lot (23) and the support (25).The spring (26) is movable. The table (21) receives from the outside (ii @ and the orbit (1
8) Absorbs the processing variations in (18) and guarantees stable and smooth movement of the moving table (21). Also,
By adjusting the pressure of the spring (26), the transmission characteristics of the system in which the coil current is used as a coil current and the displacement is used as an output can be arbitrarily changed, and the characteristics can be adjusted according to the application method.

上記構成に於いて、コイル（２ｏ）に直流電流を流せば
、永久磁石（１９）　（１９）との間に中央の磁性杆（
１５）に沿って推力が発生し、これにヨリコイル（２ｏ
）が移動して移動テーブル（２１）を基台（１３）両側
の磁性杆（１４）　（４６）の軌道（１８）　（１Ｂ）
に沿って移動さゼることができる。勿論、電流の向きを
逆にすれば、移動テーブル（２Ｉ）を逆方向に移動する
ことができる。In the above configuration, if a DC current is passed through the coil (2o), the central magnetic rod (
15), a thrust is generated along the coil (2o
) moves to move the moving table (21) to the base (13) and the orbits (18) (1B) of the magnetic rods (14) (46) on both sides.
can be moved along. Of course, if the direction of the current is reversed, the moving table (2I) can be moved in the opposite direction.

尚、基台（１３）の軌道（１Ｂ）と案内用軸受ユニソ）
　（２２）の玉軸受（２４）との接触面の形状としでは
、種々なものが考えられる。例えば第８図は軌道（１８
）の面を成る角度を有する平面とし、玉軸受（２４）の
方を円弧として点接触するもの、第９図は軌道（１８）
と玉軸受（２４）の両方ともを成る角度を有する平面と
して線接触するもの、第１０図は軌道（１８）を円弧と
し、玉軸受（２４）の方を成る角度を有する平面として
点接触するものである。これらは−例でその他種々のも
のが考えられる。In addition, the track (1B) of the base (13) and the guide bearing (Uniso)
Various shapes can be considered as the shape of the contact surface of (22) with the ball bearing (24). For example, Figure 8 shows the orbit (18
) is a plane with an angle, and the ball bearing (24) is in point contact with the ball bearing (24) as an arc. Figure 9 shows the raceway (18).
In Figure 10, the orbit (18) is an arc, and the ball bearing (24) is in point contact as a plane with an angle. It is something. These are just examples, and various others are possible.

へ９発明の効果 この発明は、基台（１３）の磁性杆（１４）　（１５）
（工６）がリニアモータのヨークと移動テーブル（２Ｉ
）のガイドを兼ねる為、装置が小型、軽量な構造となり
、特に小型化を要求されるシステムへの対応が容易であ
る。また、一般の転がり軸受は、精度及び剛性を向上す
る為に軸受に予圧を与えるが、この発明の駆動装置に於
いては、移動テーブル（２１）の自重及び案内用軸受ユ
ニット（２２）のスプリング（２６）によって軸受に予
圧が加わる為、他に複雑な予圧機構を設ける必要かない
。更に、このスプリングは下記の効果を有する。即ち、
この種の駆動装置に於いては、Ｉ」の字形のヨークにコ
イルを組込んで転がり案内部を組込む為、両側の軌道面
の平行度、水平度等の精度管理が難しく、これを達成す
る為には、高梢度な加工積度、組立精度が要求されるが
、このスプリングはこれらの精度不良を吸収し、少々の
精度不良があってもシステム全体としては所定の精度を
維持し得る。なお、従来方式の１法による予圧方法では
これらの精度不良を吸収することは不可能であり、本方
式の効果が発揮されない。9 Effects of the Invention This invention provides magnetic rods (14) (15) of the base (13).
(Step 6) is the linear motor yoke and moving table (2I).
), the device has a compact and lightweight structure, making it particularly easy to adapt to systems that require miniaturization. Further, in general rolling bearings, a preload is applied to the bearing in order to improve accuracy and rigidity, but in the drive device of the present invention, the self-weight of the moving table (21) and the spring of the guide bearing unit (22) are applied. Since preload is applied to the bearing by (26), there is no need to provide any other complicated preload mechanism. Furthermore, this spring has the following effects. That is,
In this type of drive device, since the coil is built into the I-shaped yoke and the rolling guide is built in, it is difficult to control the accuracy of the parallelism and horizontality of the raceway surfaces on both sides, so it is difficult to achieve this. This requires a high level of machining and assembly precision, but this spring absorbs these precision defects and allows the system as a whole to maintain the specified accuracy even if there is a slight precision defect. . It should be noted that it is impossible to absorb these precision defects with the conventional single preloading method, and the effect of the present method is not exhibited.

【図面の簡単な説明】 第１図は公知の直線運動装置を例示する概略図、第２図
は従来のりニアモータと直線案内部を組合せた駆動装置
を用いた光ディスクの再生プレーヤの斜面図、第３図乃
至第７図はこの発明に係る駆動装置の一実施例を示すも
ので、第３図は正面図、第４図は平面図、第５図は側面
図、第６図は底面図、第７図は第４図Ａ−Ａ線に於ける
断面図である。第８図乃至第１０図は基台の軌道と案内
用軸受ユニ・ノドの転がり軸受との接触面の形状例を示
す要部図面である。 （１３）−基台、（１４）　（１５）　（１６）−磁性
杆、（１８）　（１８Ｌ−軌道、（１９）　（１９）−
永久磁石、（２０）−コイル、（２１）−移動テーブル
、（２２）−−一案内用軸受ユニット、（２４）　（２
４）−玉軸受、（２６）　−スプリング。 第８図　第９図 第１０図[Brief Description of the Drawings] Fig. 1 is a schematic diagram illustrating a known linear motion device, Fig. 2 is a perspective view of an optical disk reproducing player using a drive device that combines a conventional linear motor and a linear guide, and Fig. 3 to 7 show an embodiment of the drive device according to the present invention, in which FIG. 3 is a front view, FIG. 4 is a plan view, FIG. 5 is a side view, and FIG. 6 is a bottom view. FIG. 7 is a sectional view taken along line A-A in FIG. 4. FIGS. 8 to 10 are principal part drawings showing examples of the shape of the contact surface between the track of the base and the rolling bearing of the guide bearing uni-nod. (13) - Base, (14) (15) (16) - Magnetic rod, (18) (18L - Track, (19) (19) -
Permanent magnet, (20) - coil, (21) - moving table, (22) - guide bearing unit, (24) (2
4) - ball bearing, (26) - spring. Figure 8 Figure 9 Figure 10

Claims (1)

【特許請求の範囲】[Claims] ＋１１　直線案内部と可動コイル形リニアモータからな
る駆動装置に於いて、所定の間隔で平行配置した３本の
磁性杆とその両端部を夫々磁性体で連結して日の字状に
形成し、その両側の磁性杆の外側に軌道を一体に突出形
成すると共に、内側に中央の磁性杆に磁力線が直角に流
入するように永久磁石を固設した基台と、１本のロンド
に嵌挿された１対の転がり軸受で上記基台の軌道を挾持
し、更に、スプリングによりその挾持力を調整自在にし
た案内部と、下面に前記案内部のロンドを垂設すると共
に、所定のスキマを持って前記載台の中央の磁性杆が貫
通し、かつ前記永久磁石の磁力線を直交するように巻回
された可動コイルを固着した移動テーブルとで構成され
、該移動テーブルを前記基台上に上記案内部を諭して移
動自在に装架したことを特徴とする駆動装置。+11 In a drive device consisting of a linear guide part and a moving coil type linear motor, three magnetic rods arranged in parallel at a predetermined interval and their respective ends are connected with a magnetic material to form a Japanese character shape, A track is integrally formed on the outside of the magnetic rods on both sides, and a permanent magnet is fixed on the inside so that the lines of magnetic force flow into the central magnetic rod at right angles. The track of the base is clamped by a pair of rolling bearings, the clamping force of which can be adjusted freely by a spring, and a guide part is provided with a rond of the guide part hanging down on the lower surface, with a predetermined clearance. and a movable table having a moving coil fixed thereto, which is wound so as to be perpendicular to the lines of magnetic force of the permanent magnet, through which a magnetic rod at the center of the above-mentioned base passes, and the movable table is mounted on the base. A drive device characterized in that a guide part is mounted so as to be movable.
JP21837483A 1983-11-18 1983-11-18 Driving device Granted JPS60108244A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21837483A JPS60108244A (en) 1983-11-18 1983-11-18 Driving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21837483A JPS60108244A (en) 1983-11-18 1983-11-18 Driving device

Publications (2)

Publication Number Publication Date
JPS60108244A true JPS60108244A (en) 1985-06-13
JPS639939B2 JPS639939B2 (en) 1988-03-03

Family

ID=16718891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21837483A Granted JPS60108244A (en) 1983-11-18 1983-11-18 Driving device

Country Status (1)

Country Link
JP (1) JPS60108244A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61278913A (en) * 1985-06-04 1986-12-09 Ntn Toyo Bearing Co Ltd Magnetic floating-type positioning device
JPS6242931U (en) * 1985-09-03 1987-03-14
JPS6288532A (en) * 1985-10-14 1987-04-23 Amada Co Ltd Table drive linear motor for machine tool
CN102985711A (en) * 2010-07-08 2013-03-20 日立金属株式会社 Guide mechanism and linear motor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271779A (en) * 1975-12-12 1977-06-15 Fanuc Ltd Feeding mechanism

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271779A (en) * 1975-12-12 1977-06-15 Fanuc Ltd Feeding mechanism

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61278913A (en) * 1985-06-04 1986-12-09 Ntn Toyo Bearing Co Ltd Magnetic floating-type positioning device
JPS6242931U (en) * 1985-09-03 1987-03-14
JPS6288532A (en) * 1985-10-14 1987-04-23 Amada Co Ltd Table drive linear motor for machine tool
CN102985711A (en) * 2010-07-08 2013-03-20 日立金属株式会社 Guide mechanism and linear motor
CN102985711B (en) * 2010-07-08 2015-07-01 日立金属株式会社 Guide mechanism and linear motor

Also Published As

Publication number Publication date
JPS639939B2 (en) 1988-03-03

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