JPS5978793A - Laser working device - Google Patents

Laser working device

Info

Publication number
JPS5978793A
JPS5978793A JP57187564A JP18756482A JPS5978793A JP S5978793 A JPS5978793 A JP S5978793A JP 57187564 A JP57187564 A JP 57187564A JP 18756482 A JP18756482 A JP 18756482A JP S5978793 A JPS5978793 A JP S5978793A
Authority
JP
Japan
Prior art keywords
work
workpiece
laser light
moving
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57187564A
Other languages
Japanese (ja)
Inventor
Koji Kuwabara
桑原 皓二
Akira Wada
和田 昭
Sei Takemori
竹森 聖
Hiroharu Sasaki
弘治 佐々木
Hiroyuki Sugawara
宏之 菅原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57187564A priority Critical patent/JPS5978793A/en
Publication of JPS5978793A publication Critical patent/JPS5978793A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt

Abstract

PURPOSE:To enable punching operation by plural pulses and to punch a thick material at a high speed by controlling the moving speed of laser light on a work and the moving speed of the work at the same speed. CONSTITUTION:The laser light 2 from a laser light generator 1 is reflected by an oscillating plane mirror 3, and is condensed by a condenser lens 4 so as to be irradiated to the working point 8 on a work 5. Since the mirror 3 is rotated in an arrow direction 7 around a fulcrum 6, the point 8 moves in an arrow direction 9. On the other hand, the work 5 on a moving table 10 is likewise moved in the arrow direction 9 by a driving device 11. If the moving speed of the point 8 is made to coincide with the moving speed of a moving carriage 10, the laser light 2 is irradiated to the same spot on the work 5. A punching operation for one hole is thus made possible by plural pulses without stopping the work 5.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、レーザ光による加工装置に係υ、符に、尚速
度で多数の穴あけを行なうに好適な穿孔装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a processing device using a laser beam, and particularly to a drilling device suitable for drilling a large number of holes at high speed.

〔従来技術〕[Prior art]

レーザビームを被加工物上を走査して、加工する方法と
して、第1図に示す構成のものか提案されている。(実
開昭53−11786)図において、レーザ発振器1か
らのレーザ光2は、回転ミラー3で反射され集光レンズ
4で集光され、被加工物5上に至る。回転ミ2−3の回
転によって、被加工物5上の加工点6が移動し、被加工
物を移動する事無く、高速度で加工が行なわれ、レーザ
発振器lをパルス発振させると、穿孔加工が連続的に行
なわれることになる。しかし、この方法では、 ■ 走査距離が大きくなると、集光レンズ4での焦点位
置の補正が困難になる。
As a method of scanning a workpiece with a laser beam for processing, a structure shown in FIG. 1 has been proposed. In the figure, a laser beam 2 from a laser oscillator 1 is reflected by a rotating mirror 3, condensed by a condensing lens 4, and reaches a workpiece 5. The machining point 6 on the workpiece 5 is moved by the rotation of the rotary machine 2-3, and machining is performed at high speed without moving the workpiece. When the laser oscillator l is pulsed, drilling is performed. will be performed continuously. However, with this method, (1) When the scanning distance becomes large, it becomes difficult to correct the focal position of the condenser lens 4;

■ 被加工物の板厚が厚くなると、穿孔に必要なエネル
ギーも大となるので、lパルスでの穿孔は難しく、複数
パルスでの穿孔作業となるが、回転ミラー3は回転、停
止を伴うため、多数の穿孔には適さない。
■ As the thickness of the workpiece increases, the energy required for drilling increases, so it is difficult to drill with one pulse, and the drilling work must be done with multiple pulses. However, since the rotating mirror 3 involves rotation and stopping, , not suitable for large number of holes.

などの問題がおった。There were problems such as:

〔発明の目的〕[Purpose of the invention]

本発明の目的は、複数・くルスによる穿孔作業を高速度
で処理できる穿孔装置を提供するにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a drilling device that can perform drilling operations using multiple holes at high speed.

〔発明の概要〕[Summary of the invention]

本発明の要点は被加工物を一定速度で移動している状態
で、レーザビームを限られfc、範囲で走査し、両者の
移動速度、方向を一致させて、被加工物を停止させる事
無く、複数パルスによる穿孔作業ができるようにしたこ
とにある。
The main point of the present invention is to scan the laser beam over a limited fc range while the workpiece is moving at a constant speed, and to match the moving speed and direction of both, without stopping the workpiece. , the ability to perform drilling operations using multiple pulses.

実施例 以下、本発明の一実施例を第2図にょシ説明する。Example An embodiment of the present invention will be described below with reference to FIG.

レーザ光発生装置1からパルス的に発振されるレーザ光
2は、振動平面鏡3にょシ反射され、集光レンズ7によ
フ集光されて、被加工物5上の加工点8へ照射される。
A laser beam 2 emitted in a pulsed manner from a laser beam generator 1 is reflected by a vibrating plane mirror 3, focused by a condensing lens 7, and irradiated onto a processing point 8 on a workpiece 5. .

振動平面fi1.aは、支点6を中心として、図示しな
い振動装置により矢印7の方向へ回転されるため、加工
点8は矢印9の方向へ移動する。一方、被加工物5は移
動台車lo上に載ぜられておシ、駆動装[11にょジや
はシ矢印9方向に一定速度で移動する。加工点8の移動
速度と、移動台車の移動速度を一致させておくと、レー
デ光2は、被加工物5上の同一点に照射される事になシ
、被加工物5を停止することなく複数個のパルスによム
ー個の穴あけ作業が可能となる。−個の穿孔作業が完了
すると、振動平面鏡3は、スタート点にもどり、次の穿
孔作業が始まる。
Vibration plane fi1. Since a is rotated in the direction of arrow 7 about the fulcrum 6 by a vibration device (not shown), the processing point 8 moves in the direction of arrow 9. On the other hand, the workpiece 5 is placed on a moving carriage lo and is moved at a constant speed in the direction of arrow 9 by a drive unit 11. If the moving speed of the processing point 8 and the moving speed of the moving cart are made to match, the Radical light 2 will not be irradiated to the same point on the workpiece 5, and the workpiece 5 will be stopped. It is possible to drill multiple holes using multiple pulses. - When the drilling operation is completed, the vibrating plane mirror 3 returns to the starting point and the next drilling operation begins.

振動平面鏡3の移動方法の一実施例金弟3図ないし第5
図に示す。
One embodiment of the method of moving the vibrating plane mirror 3 Figures 3 to 5
As shown in the figure.

一部に突起をもつ回転体12は、支点13を中心として
、矢印14の方向に回転している。(第3図) そして、只起の頂点を迎える′まで、レーザビームは、
振動平面鏡3の回転と共に右方向へ移動される。(第4
図)。突起の頂点を過ぎると、(第5図)振動平面鏡3
はスタート点にもどる。レーザ光2はパルス的に発振し
ているが、発振状態と、振動モ面鏡3の位置関係を第6
図に示す。(3パルス(2A、2B(図示せず)、2C
)孔をあける作業の場合) 第6図では、パルス休止時間T、と、振動平面鏡3がス
タート点にもどるための時間T!はT。
A rotating body 12 having a protrusion partially rotates about a fulcrum 13 in the direction of an arrow 14. (Fig. 3) The laser beam then reaches its peak,
As the vibrating plane mirror 3 rotates, it is moved to the right. (4th
figure). After passing the top of the protrusion (Fig. 5), the vibrating plane mirror 3
returns to the starting point. The laser beam 2 oscillates in a pulsed manner, and the oscillation state and the positional relationship of the vibrating movable mirror 3 are
As shown in the figure. (3 pulses (2A, 2B (not shown), 2C
) In the case of drilling a hole) In Fig. 6, the pulse pause time T and the time T for the vibrating plane mirror 3 to return to the starting point are shown. is T.

くT、となっているが、回転体12の突起の数を増す事
によりT、=T、とすることも可能である。
However, by increasing the number of protrusions on the rotating body 12, it is also possible to set T,=T.

なお、上述の実施例では、振動モ面−3の振動方法とし
て、一部に突起をもった回転体12を使用する場合につ
いて述べたが、本方法に駆足されるものではない。
In addition, in the above-mentioned embodiment, as a method of vibrating the vibrating surface 3, a case has been described in which the rotary body 12 having a projection on a part is used, but this method is not required.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、被加工物を停止する挙なく、複数個の
パルスによる穿孔作業が可能となるため、厚物材を、^
速贋で穿孔することができる。
According to the present invention, it is possible to perform drilling using multiple pulses without stopping the workpiece, so thick materials can be
It can be perforated by fast counterfeiting.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の側面図、第2図は本発明の一実施例の側
面図、第3図ないし第5図は振動平面鏡の振動状況の説
明図、第6図は、振動平面鏡とレーザ出力の関係説明図
である。 1・・・レーザ光発生装置、2・・・レーザ光、3・・
・振動平面鏡、5・・・被加工物。 第5品 峙問
Fig. 1 is a side view of the conventional device, Fig. 2 is a side view of an embodiment of the present invention, Figs. 3 to 5 are explanatory diagrams of the vibration status of the vibrating plane mirror, and Fig. 6 is the vibrating plane mirror and laser output. FIG. 1... Laser light generator, 2... Laser light, 3...
- Vibrating plane mirror, 5... Workpiece. Fifth item question

Claims (1)

【特許請求の範囲】[Claims] 1、レーザ光発生装置からパルス的に発射されるレーザ
光を、レーザ光走査装置、集光装置を経て被加工物上へ
照射するものくおいて、前記被加工物上のレーザ光移動
速度と、前記被加工物の移動速度を同一となして、前記
被加工物を停止することなく複数パルスにより穿孔する
ように構成した事を特徴とするレーザ加工装置。
1. When a laser beam emitted in pulses from a laser beam generator is irradiated onto a workpiece through a laser beam scanning device and a condensing device, the speed of laser beam movement on the workpiece and . A laser processing apparatus, characterized in that the workpiece is moved at the same speed and is configured to drill holes with a plurality of pulses without stopping the workpiece.
JP57187564A 1982-10-27 1982-10-27 Laser working device Pending JPS5978793A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57187564A JPS5978793A (en) 1982-10-27 1982-10-27 Laser working device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57187564A JPS5978793A (en) 1982-10-27 1982-10-27 Laser working device

Publications (1)

Publication Number Publication Date
JPS5978793A true JPS5978793A (en) 1984-05-07

Family

ID=16208287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57187564A Pending JPS5978793A (en) 1982-10-27 1982-10-27 Laser working device

Country Status (1)

Country Link
JP (1) JPS5978793A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120687A (en) * 1984-07-10 1986-01-29 Japan Tobacco Inc Laser drilling device
JPH07193374A (en) * 1993-12-27 1995-07-28 Taiyo Yuden Co Ltd Method of processing ceramic green sheet
US6894250B2 (en) * 2000-09-27 2005-05-17 Eberhard Kertscher Method for continuous manufacture of drip irrigation tubes utilizing a laser beam
USRE44886E1 (en) * 2001-05-17 2014-05-13 Preco, Inc. Method and apparatus for improving laser hole resolution
WO2023048109A1 (en) * 2021-09-22 2023-03-30 川崎重工業株式会社 Laser processing method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120687A (en) * 1984-07-10 1986-01-29 Japan Tobacco Inc Laser drilling device
JPH07193374A (en) * 1993-12-27 1995-07-28 Taiyo Yuden Co Ltd Method of processing ceramic green sheet
US6894250B2 (en) * 2000-09-27 2005-05-17 Eberhard Kertscher Method for continuous manufacture of drip irrigation tubes utilizing a laser beam
USRE44886E1 (en) * 2001-05-17 2014-05-13 Preco, Inc. Method and apparatus for improving laser hole resolution
WO2023048109A1 (en) * 2021-09-22 2023-03-30 川崎重工業株式会社 Laser processing method
TWI833362B (en) * 2021-09-22 2024-02-21 日商川崎重工業股份有限公司 Laser processing method

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