JPS5976878A - Etching machine - Google Patents
Etching machineInfo
- Publication number
- JPS5976878A JPS5976878A JP18768582A JP18768582A JPS5976878A JP S5976878 A JPS5976878 A JP S5976878A JP 18768582 A JP18768582 A JP 18768582A JP 18768582 A JP18768582 A JP 18768582A JP S5976878 A JPS5976878 A JP S5976878A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- objects
- etched
- rate
- etching liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/068—Apparatus for etching printed circuits
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
Description
【発明の詳細な説明】
本発明rJエツチングマシンs %にプリント回路板#
造用エツチングマシンに蘭する。[Detailed description of the invention] The present invention rJ etching machine s% printed circuit board #
Added to the etching machine.
プリント配#板(/J製造収於て、例えは、制水り槓1
% 仮wエツチングレジストを塗布しエツチングして必
要な回路を形敢丁^寺で、エツチングマシンが広く使用
さrtてい4)〇
一般にプリント回路板製造用エツチングマシン口、エツ
チングチャンバーと、そり中に取り付けら1′L1乙エ
ツチング卸1噴出ノズルと、チャンバー内′t″級エッ
ーツーング物に林町杯−ヒろ倣栴から柄敢す11る0こ
(lJ柚のエツチングマシンばおいてに1エツナンク町
(/J調整ケエッチング剤1貝出釦又は41zエツチン
グ物(/J移判速度r没えゐことで行なっていゐ0しか
し、心安とするエツチング川が@繁に裳化す小様l場合
VND、そりたひことに1エツチングチヤンバー内から
?ルエッナ/グ物が出路ゐの奮待って、エッナンク旬q
、Ji、17il贅を行なわlけ1r、Idlらなかっ
1ζ。こり椋l装置自でeJエツチング損′に笈λゐこ
とば、望運転とl6時間か発生するため、効率が悪いは
かりでなく、短刀などt64費丁^という欠点があっ1
ζC本発明は仁のような点Vc茜みてなさt’L fc
もので、エツチングチャンバーと、そり9番(取りつけ
らtした複数個のエツチング剤1ハ出ノズルと。Printed number board (/J manufacturing center, for example, water control ram 1
% Etching machines are widely used to apply a temporary etching resist and etch the necessary circuits. 4) Generally used for manufacturing printed circuit boards, in the etching machine mouth, etching chamber, and inside the sled. Attachment 1'L1 etching wholesale 1 spout nozzle, Hayashimachi cup to 'T'' class etching thing in the chamber - 11 Ru0ko (lJ Yuzu's etching machine put 1 etching machine) Town (/J Adjustment Etching Agent 1 shell button or 41z Etching object (/J Transfer speed R is decreased) 0 However, if the Etching River is a small size that is often exposed, VND , from inside the 1st etching chamber to the sledder, I waited patiently for the thing to come out.
, Ji, 17il 1r, Idl not 1ζ. Since the device itself takes about 6 hours of etching loss and manual operation, it has the drawback of not only being a low-efficiency scale, but also costing 64 hours for tools such as short swords.
ζC The present invention is like a point Vc Akane t'L fc
It consists of an etching chamber and a number 9 sled (with multiple etching agent single-discharge nozzles attached).
チャンバー内で被エツチング物音移動させ^機構を備え
たエツチング剤シyにおいて、前記エツチング剤噴出ノ
ズ/L−k ?A数組の集団に分り。In the etching agent system equipped with a mechanism for moving the object to be etched in the chamber, the etching agent jet nozzle /Lk? Divided into several groups.
各集団ととれエツチング剤(/、l l!A出翅會制御
すること〒特徴とするものである。It is characterized by controlling each population and the etching agent (/, l l! A).
すなわち本発明に、エツチングチャンバー円げ収けた抜
(友のエツチングS+I噴出ノズルケ2組以上のMシ団
げ分けて、エツチング剤り噴出釦tも集団ごとに制御す
るようkしたものである6俵エツチング物かエツチング
剤唄出ノイルり近傍ケ通過する除V(、エツチング物必
をと丁ゐ被エツチング物の近傍にあるノズル集団からり
与エツチング剤が嘱出し、必賛のないノズル集団からr
Jエッテンク剤が噴出しなく1−すか又a噴出量が少な
くな6様に卸」御すゐ。That is, in the present invention, the etching chamber is rounded, the etching chamber is rounded, the etching agent is divided into two or more sets of M, and the etching agent ejecting button is also controlled for each group. When the etching material passes through the vicinity of the etching agent, the etching agent ejects from the nozzle group near the etching object, and the etching agent ejects from the nozzle group that does not have the etching object.
J Ettenque agent does not spout out 1- Sukamata A The amount of jetting out is small.
第1図rJ不発明の一実施9111: 示1−1tll
+fu 図テ、lo−1r−ッテングテヤンバー、2
1Jエツテンク剤バイフ、5にエツチング剤唄出ノス′
ル54ttl被エツチング切s5t:hローラーコンベ
アーである。Figure 1 rJ non-inventive implementation 9111: Show 1-1tll
+fu figte, lo-1r-ttengute yanbar, 2
1J etching agent bifu, 5 etching agent protrusion nosu'
Roll 54ttl Etched cut s5t:h Roller conveyor.
M1図に於てrJエッチングナヤンバ−1内りエツチン
グ剤哄出ノズル3を被エツチング物進入$111 +/
J上、−ト、進出側υ上、Jす4巣団V(分V]噴出t
L量奮集団ごとに制御した。In Figure M1, the etching agent dispensing nozzle 3 in the rJ etching number 1 enters the object to be etched.
J top, -t, advance side υ top, Jsu 4 nest group V (minute V) eruption t
The L amount was controlled for each population.
たとえは被エツチング物進入側上、下りエツチング物I
J +IJ41Jj、>sをI夕「ンビり値と17、進
出細土、下のエッテンクハリ噴出毎ケ笈化ちゼー々こと
で、進出側上、下り11個のノズル出用’f’+3たり
僚エッ5−ング物(/J投大人間隔作小ことでエツチン
グ1斜&J没史がDJ能′T:あゐ0
!7!:、第2図に本発明り他のり4施例孕示ツーもの
で、第1凶に示すもU、Jより多く、1oケ(/J集団
ば分り1こ場合でろ小。For example, the upper side of the object to be etched and the downwardly etched object I
J + IJ41Jj,>s is set to 17, the advancing fine soil, and the lower Ettenkhari erupting every time it turns into a fire. Etching thing (/J throwing adult interval production small) Etching 1 diagonal & J death history is DJ function'T: Ai 0! 7!: Figure 2 shows the present invention and other 4 examples of pregnancy. However, there are more than U and J in the first place, and 10 cases (/J group has 1 case).
こV、)場合に、被エツチング物(/J投大人間隔級エ
ツチング物長さ”−’ /10 以TKしても被エツ
チング物個々リエッチング量に必賛w応じて変えなこと
ができな。In this case, the length of the object to be etched (/Length of the object to be etched at intervals of 10 to 10 years) cannot be changed according to the amount of retching for each object to be etched, even if TK is used. .
以上脱明し1こよりVc本発ψ]リエッチングマシンに
於てa、多敷り扱エツチング9勿1連続してエツチング
しながら、被エツチング物のエッテンク糧1笈jr−に
とができ^0From the above explanation, the etching material of the object to be etched can be made into 1 liter jr- while etching continuously in the etching machine.
第1図、第2図rJ木発明りエツチングマシンの一実施
?llを示”j−1411111j図でめ^0ィ;1号
り祝明
1−r−ップッグナヤンパ−2エツチング剤ノくイノ6
エッチンクハIll!R出ノズル 4 被エツチン
グ物5 ローラーコンベアーFigures 1 and 2: Implementation of rJ wood-invented etching machine? ll is shown in the diagram.
Etching ha Ill! R output nozzle 4 Object to be etched 5 Roller conveyor
Claims (1)
17ζ傍数個のエツチングハリ噴出ノズルと。 チャンバー内′C被エツチング物奮林動させ小截a l
: itλ1ζエツチングマシンにおいてs MIJ記
エツチング剤噴出ノズルを被数組(/J果団に分り、谷
集団ことにエツチング剤り臓出豫に制御″Tゐ0と1特
徴とするエツチングマシン0[Claims] 1. An etching chamber and a device 7 installed therein.
17ζ and several etched hari jet nozzles. Move the object to be etched inside the chamber and make a small cut.
: In the etching machine, the etching agent jetting nozzles described in MIJ are divided into a number of groups (/J), and the etching agent is controlled to emit the etching agent in the valley group.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18768582A JPS5976878A (en) | 1982-10-26 | 1982-10-26 | Etching machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18768582A JPS5976878A (en) | 1982-10-26 | 1982-10-26 | Etching machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5976878A true JPS5976878A (en) | 1984-05-02 |
Family
ID=16210347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18768582A Pending JPS5976878A (en) | 1982-10-26 | 1982-10-26 | Etching machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5976878A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5290384A (en) * | 1991-11-07 | 1994-03-01 | Chemcut Corporation | Apparatus for controlled spray etching |
EP0599039A1 (en) * | 1992-11-09 | 1994-06-01 | Bmc Industries, Inc. | Etch control system |
US5435885A (en) * | 1994-01-25 | 1995-07-25 | International Business Machines Corporation | Apparatus and method for fluid processing of electronic packaging with flow pattern change |
US6344106B1 (en) | 2000-06-12 | 2002-02-05 | International Business Machines Corporation | Apparatus, and corresponding method, for chemically etching substrates |
-
1982
- 1982-10-26 JP JP18768582A patent/JPS5976878A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5290384A (en) * | 1991-11-07 | 1994-03-01 | Chemcut Corporation | Apparatus for controlled spray etching |
EP0599039A1 (en) * | 1992-11-09 | 1994-06-01 | Bmc Industries, Inc. | Etch control system |
US5435885A (en) * | 1994-01-25 | 1995-07-25 | International Business Machines Corporation | Apparatus and method for fluid processing of electronic packaging with flow pattern change |
US6344106B1 (en) | 2000-06-12 | 2002-02-05 | International Business Machines Corporation | Apparatus, and corresponding method, for chemically etching substrates |
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