JPS5974730U - Sample measuring device - Google Patents
Sample measuring deviceInfo
- Publication number
- JPS5974730U JPS5974730U JP17078682U JP17078682U JPS5974730U JP S5974730 U JPS5974730 U JP S5974730U JP 17078682 U JP17078682 U JP 17078682U JP 17078682 U JP17078682 U JP 17078682U JP S5974730 U JPS5974730 U JP S5974730U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- measuring device
- utility
- model registration
- sample measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図乃び第２図は本考案の一実施態様を説明するため
の試料測定装置の要部拡大断面図である。
１・・・試料台、２・・・熱電対、３・・・試料、４・
・・ロータリポンプ、５・・・熱交換部、６・・・ガス
加熱器、７・・・低温液体温、８，９．１１・・・パイ
プ、１０・・・ガスコンデンサ、１２・・・シールドキ
ャップ、１３゜１５．１６・・・開放弁、１７・・・フ
ィン。1 and 2 are enlarged sectional views of essential parts of a sample measuring device for explaining one embodiment of the present invention. 1... Sample stand, 2... Thermocouple, 3... Sample, 4...
...Rotary pump, 5...Heat exchange section, 6...Gas heater, 7...Low temperature liquid temperature, 8,9.11...Pipe, 10...Gas condenser, 12... Shield cap, 13°15.16...Release valve, 17...Fin.
Claims (1)
に加熱乃至冷却しつつ測定することを特徴とする試料測
定装置。 ２ 試料をキャリアガスで完全に被いつつ測定を行なう
ことを特徴とする実用新案登録請求の範囲第１項記載の
試料測定装置。 ３ 気体の加熱乃至冷却源を試料台から離れた個所に設
けたことを特徴とする実用新案登録請求の範囲第１項記
載の試料測定装置。 ４ 試料台に熱交換部を設けたことを特徴とする実用新
案登録請求の範囲第１項記載の試料測定装置。[Claims for Utility Model Registration] 1. A sample measuring device characterized by measuring a sample placed on a sample stage while being heated or cooled to a desired temperature with gas. 2. The sample measuring device according to claim 1 of the utility model registration, characterized in that the sample is measured while completely covering the sample with a carrier gas. 3. The sample measuring device according to claim 1 of the utility model registration, characterized in that the gas heating or cooling source is provided at a location remote from the sample stage. 4. The sample measuring device according to claim 1 of the utility model registration, characterized in that the sample stage is provided with a heat exchange section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17078682U JPS5974730U (en) | 1982-11-10 | 1982-11-10 | Sample measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17078682U JPS5974730U (en) | 1982-11-10 | 1982-11-10 | Sample measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5974730U true JPS5974730U (en) | 1984-05-21 |
Family
ID=30372739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17078682U Pending JPS5974730U (en) | 1982-11-10 | 1982-11-10 | Sample measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5974730U (en) |
-
1982
- 1982-11-10 JP JP17078682U patent/JPS5974730U/en active Pending
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