JPS5970928A - Multi-wavelength spectrophotometer - Google Patents

Multi-wavelength spectrophotometer

Info

Publication number
JPS5970928A
JPS5970928A JP17975182A JP17975182A JPS5970928A JP S5970928 A JPS5970928 A JP S5970928A JP 17975182 A JP17975182 A JP 17975182A JP 17975182 A JP17975182 A JP 17975182A JP S5970928 A JPS5970928 A JP S5970928A
Authority
JP
Japan
Prior art keywords
diffraction grating
photodiode array
concave
normal
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17975182A
Other languages
Japanese (ja)
Inventor
Takehiko Onuma
武彦 大沼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17975182A priority Critical patent/JPS5970928A/en
Publication of JPS5970928A publication Critical patent/JPS5970928A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

PURPOSE:To perform accurate analysis, by arranging a diffraction grating and a photodiode array in a relatively oblique state to prevent multiple reflection due to both of them. CONSTITUTION:Monochromatic lights spectrally diffracted by a diffraction grating formed by providing a plurality of linear marks to a concave reflection surface by etching are received by a photodiode array 10 having a plurality of light receiving elements arranged to the same flat surface thereof. The diffraction grating 12 and the photodiode array 10 are arranged so as to cross the normal A of the concave surface at the concave surface center theta of the diffraction rating 12 and the normal B of the photodiode array 10. Even if monochromatic lights spectrally diffracted by the diffraction grating 12 are partially reflected at the surface of the transparent protective member of the photodiode array 10, multiple reflection is effectively prevented. By this method, inaccurate spectroscopic analysis due to stray light is prevented.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、回折格子と7オトダイオードアレイとを備
えた多波長分光光度計に関する。
TECHNICAL FIELD OF THE INVENTION This invention relates to a multiwavelength spectrophotometer with a diffraction grating and a seven-otodiode array.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

従来、第1図に示すように、多波長分光光度計4は凹面
回折格子2とこnに対向配置さnると共に複数の受光素
子を同一平面上に配列してなるフォトダイオードアレイ
1とを備え、入射スリット6を通過して来た白色ビーム
光を凹面回折格子2で分光し、得らnる単色:)t、1
フオトダイオードに照射するように信成さnていた。
Conventionally, as shown in FIG. 1, a multi-wavelength spectrophotometer 4 includes a concave diffraction grating 2 and a photodiode array 1 disposed opposite thereto, and a photodiode array 1 having a plurality of light receiving elements arranged on the same plane. , the white beam light that has passed through the entrance slit 6 is separated by the concave diffraction grating 2, and the monochromatic light obtained is n:)t,1
Nobunari was trying to irradiate the photodiode.

しかしながら、前記構成の多波長分光光度計には次のよ
うな問題点がある。すなわち、フォトダイオードアレイ
1中の特定の受光素子に照射さrしるべき単色光の一部
が、その受光素子の前面に配置さnた透明保護部材の表
面で反射して凹面回折格子2に戻り、そして、回折格子
2で反射した後前記フォトダイオードアレイ1中の他の
受光素子に到達するという、所謂多重反射が起こる。こ
の多重反射は、フォトダイオードアレイ1における迷光
の原因となり、フォトダイオードアレイ1による正確な
分光分析が阻害さ11ていた。
However, the multi-wavelength spectrophotometer having the above configuration has the following problems. That is, a part of the monochromatic light that should be irradiated onto a specific light receiving element in the photodiode array 1 is reflected by the surface of the transparent protective member placed in front of the light receiving element and is reflected onto the concave diffraction grating 2. Then, after being reflected by the diffraction grating 2, the light reaches another light receiving element in the photodiode array 1, which is a so-called multiple reflection. This multiple reflection causes stray light in the photodiode array 1, which obstructs accurate spectral analysis by the photodiode array 111.

〔発明の目的〕[Purpose of the invention]

この発明は前記事情に鑑みてなさnたものであり、多重
反射を防止して正確に分光分析することのできる多波長
分光光度計を提供することを目的とするものである。
The present invention was made in view of the above circumstances, and an object of the present invention is to provide a multi-wavelength spectrophotometer that can prevent multiple reflections and perform accurate spectroscopic analysis.

〔発明の概要〕[Summary of the invention]

前記目的全達成するためのこの発明の概要は、回折格子
と、前記回折格子で分光さnた単色光を受光する複数の
受光素子を配列したフォトダイオードアレイとを備えた
多波要分i元度計において、回折格子とンオトダイオー
ドアレイと全相対的に傾斜して配置i/jしs r7i
J記回折格子と前記フォトダイオードアレイとによる多
重反it防止したことを特徴とするものである。
The outline of the present invention for achieving all of the above objects is to provide a multi-wave element i-element comprising a diffraction grating and a photodiode array in which a plurality of light-receiving elements are arranged to receive monochromatic light separated by the diffraction grating. In a diode meter, the diffraction grating and the photodiode array are arranged at an angle relative to each other.
The present invention is characterized in that multiple reflections are prevented by the J diffraction grating and the photodiode array.

〔発明の実施例〕[Embodiments of the invention]

第2図はこの発明の一実施例を示す説明図である。 FIG. 2 is an explanatory diagram showing an embodiment of the present invention.

同図に示すように、この発明の一実施例である多波長分
光光度itは、凹状反則面に多数の線条痕全刻設してな
る回折格子12と前記回折格子12で分光さ1tた単色
′yt、′f:受光する複数の受光素子を同一平面に配
列したフォトダイオードアレイ10とを具備し、回折格
子12の凹面中心Oにおける凹面の法?8Aとフォトダ
イオードアレイ10の法線Bとを所定角度0で交差する
ように前記回折格子12とフォトダイオードアレイ10
とを配置して構成さnる。前記構成においては、ある基
準勝CK対して回折格子12の凹面中心Oにおける法線
Aが平行となるように回折格子12を配置し、次いで前
記法線Aと法線Bとが交差するようにフォトダイオード
アレイ1off:傾斜させて配置するものである。才た
、前記角度θは、凹面回折格子12で分光さtした単色
光が7オトダイオードアレイ10の透明保護部材の表面
で一部反射したとしても、その一部反射光が前記回折格
子12の凹面金外1しるように設定さ几る。mI記角度
θは、回折格子120種類、性能により適宜実験的に決
定することができる。
As shown in the figure, the multi-wavelength spectrophotometer IT, which is an embodiment of the present invention, uses a diffraction grating 12 formed by engraving a large number of line marks on a concave irregular surface and the diffraction grating 12. Monochromatic 'yt,'f: comprises a photodiode array 10 in which a plurality of light-receiving elements are arranged on the same plane, and the concave center ? 8A and the normal line B of the photodiode array 10 intersect at a predetermined angle of 0.
It is configured by arranging and. In the above configuration, the diffraction grating 12 is arranged so that the normal A at the center O of the concave surface of the diffraction grating 12 is parallel to a certain reference value CK, and then the normal A and the normal B intersect with each other. Photodiode array 1off: Arranged at an angle. The angle θ is such that even if the monochromatic light separated by the concave diffraction grating 12 is partially reflected by the surface of the transparent protective member of the seven-dimensional diode array 10, the partially reflected light is reflected by the diffraction grating 12. It is set so that the concave metal outside is 1. The mI angle θ can be appropriately determined experimentally depending on the 120 types of diffraction gratings and their performance.

以上構成を有−i−る多波長分光光度計は、凹面回折格
子12で分光さ几た単色光がフォトダイオードアレイ1
0の透明保護部材の表面で一部反射したとしても、その
一部反荊元が前記回折格子12の凹面に到遅しないので
、多重反射を有効に防止することができ、迷光による不
正確な分yC分析をしなくて済む。
In the multi-wavelength spectrophotometer having the above configuration, monochromatic light separated by a concave diffraction grating 12 is transmitted to a photodiode array 1.
Even if a portion of the light is reflected by the surface of the transparent protective member 12, the source of the reflection does not reach the concave surface of the diffraction grating 12, so multiple reflections can be effectively prevented and inaccurate light caused by stray light can be prevented. There is no need to perform a minute yC analysis.

以上、この発明の一実施例について説明したが。An embodiment of the present invention has been described above.

この発明は前記実施例に限定さnるものではなく、この
発明の要旨を変更しない範囲内で適宜に変形して実施す
ることができるのはいうまでもない。
It goes without saying that this invention is not limited to the embodiments described above, and can be implemented with appropriate modifications within the scope of the gist of the invention.

変形例として、たとえば第6図に示すように、ある基準
線Cに対してフォトダイオードアレイ100法mBが平
行となるように7オトダイオードアレイ10を配置し、
次いで前記法線Bと凹面回折格子12の凹面中心Oにお
ける法gAとが所定角度θで交差するように、凹面回折
格子12を傾斜させて配置してなる多波長分光i度計が
挙げら几る。
As a modification, for example, as shown in FIG. 6, seven photodiode arrays 10 are arranged so that the photodiode array 100 mB is parallel to a certain reference line C,
Next, a multi-wavelength spectrometer is mentioned in which the concave diffraction grating 12 is arranged at an angle so that the normal B and the normal gA at the concave center O of the concave diffraction grating 12 intersect at a predetermined angle θ. Ru.

〔発明の効果〕〔Effect of the invention〕

この発明によると、回折格子で分光さ7″した単色光が
7オトダイオードアレイの受光素子前面に装着さ′f′
した透明保護部材の表面で一部反射゛したとしても、有
効に多重反射を防止して、正確な分光分析可能な多波長
分光光度計全提供することができる。
According to this invention, monochromatic light separated by 7" by a diffraction grating is attached to the front surface of a light-receiving element of a 7-otodiode array 'f'
Even if some reflection occurs on the surface of the transparent protective member, multiple reflections can be effectively prevented and a multi-wavelength spectrophotometer capable of accurate spectroscopic analysis can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

i11図は従来の多波長分光光度計を示す説明図、第2
図はこの発明の一実施例を示す説5明図および第6崗は
この発明の他の実施例を示′1″説明図である。 10・−フォトダイオードアレイ、  12・・・回折
格子。
Figure i11 is an explanatory diagram showing a conventional multi-wavelength spectrophotometer.
Figure 5 is an explanatory diagram showing one embodiment of the present invention, and Figure 6 is an explanatory diagram showing another embodiment of the invention. 10.-Photodiode array, 12.. Diffraction grating.

Claims (1)

【特許請求の範囲】[Claims] 回折格子と、前記回折格子で分光さnた単色光を受光す
る複数の受光素子を配列したフォトダイオードアレイと
を備えた多波長分光光度計において、回折格子とフォト
ダイオードアレイとを相対的に傾斜して配置し、前記回
折格子と前記フォトダイオードアレイとによる多重反射
を防止したことを特徴とする多波長分光光度計。
In a multi-wavelength spectrophotometer comprising a diffraction grating and a photodiode array in which a plurality of light receiving elements are arranged to receive monochromatic light separated by the diffraction grating, the diffraction grating and the photodiode array are relatively tilted. A multi-wavelength spectrophotometer, characterized in that the diffraction grating and the photodiode array are arranged to prevent multiple reflections from occurring.
JP17975182A 1982-10-15 1982-10-15 Multi-wavelength spectrophotometer Pending JPS5970928A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17975182A JPS5970928A (en) 1982-10-15 1982-10-15 Multi-wavelength spectrophotometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17975182A JPS5970928A (en) 1982-10-15 1982-10-15 Multi-wavelength spectrophotometer

Publications (1)

Publication Number Publication Date
JPS5970928A true JPS5970928A (en) 1984-04-21

Family

ID=16071233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17975182A Pending JPS5970928A (en) 1982-10-15 1982-10-15 Multi-wavelength spectrophotometer

Country Status (1)

Country Link
JP (1) JPS5970928A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6140520A (en) * 1984-06-13 1986-02-26 アボツト ラボラトリ−ズ Spectrophotometer
JPS6237727U (en) * 1985-08-26 1987-03-06
JP2008051822A (en) * 2007-10-09 2008-03-06 Toshiba Corp Chemical analyzer
JP2008175311A (en) * 2007-01-19 2008-07-31 Jtekt Corp Retainer for rolling bearing
JP2008309259A (en) * 2007-06-15 2008-12-25 Nsk Ltd Rolling bearing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036369A (en) * 1973-06-19 1975-04-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036369A (en) * 1973-06-19 1975-04-05

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6140520A (en) * 1984-06-13 1986-02-26 アボツト ラボラトリ−ズ Spectrophotometer
JPS6237727U (en) * 1985-08-26 1987-03-06
JP2008175311A (en) * 2007-01-19 2008-07-31 Jtekt Corp Retainer for rolling bearing
JP2008309259A (en) * 2007-06-15 2008-12-25 Nsk Ltd Rolling bearing
JP2008051822A (en) * 2007-10-09 2008-03-06 Toshiba Corp Chemical analyzer

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