JPS6132077U - Tray for transporting semiconductor wafers - Google Patents

Tray for transporting semiconductor wafers

Info

Publication number
JPS6132077U
JPS6132077U JP11731184U JP11731184U JPS6132077U JP S6132077 U JPS6132077 U JP S6132077U JP 11731184 U JP11731184 U JP 11731184U JP 11731184 U JP11731184 U JP 11731184U JP S6132077 U JPS6132077 U JP S6132077U
Authority
JP
Japan
Prior art keywords
tray
semiconductor wafers
transporting semiconductor
transporting
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11731184U
Other languages
Japanese (ja)
Inventor
圭一郎 東内
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP11731184U priority Critical patent/JPS6132077U/en
Publication of JPS6132077U publication Critical patent/JPS6132077U/en
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例によるトレイ及びこのトレイ
に載せられたキャリアを示す断面側面図、第２図はウエ
ハーを保持したキャリアの姿勢を示す図、第３図は従来
のトレイ上に乗せられたキャリアを示す断面側面図であ
る。 １・・・トレイ、２・・・キャリア、３・・・トレイ用
キャリアホルター、４・・・ウエハー保持用キャリア湾
、５・・・ウェハー。FIG. 1 is a cross-sectional side view showing a tray according to an embodiment of the present invention and a carrier placed on this tray, FIG. 2 is a view showing the attitude of the carrier holding a wafer, and FIG. It is a sectional side view showing a carrier placed on it. 1... Tray, 2... Carrier, 3... Carrier halter for tray, 4... Carrier bay for holding wafer, 5... Wafer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体ウエハー運搬用トレイの底部に、キャリアを傾斜
姿勢に保持するキャリアホルダーを設けたことを特徴と
する半導体ウエハーの運搬用トレイ。A tray for transporting semiconductor wafers, characterized in that a carrier holder for holding the carrier in an inclined position is provided at the bottom of the tray for transporting semiconductor wafers.
JP11731184U 1984-07-31 1984-07-31 Tray for transporting semiconductor wafers Pending JPS6132077U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11731184U JPS6132077U (en) 1984-07-31 1984-07-31 Tray for transporting semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11731184U JPS6132077U (en) 1984-07-31 1984-07-31 Tray for transporting semiconductor wafers

Publications (1)

Publication Number Publication Date
JPS6132077U true JPS6132077U (en) 1986-02-26

Family

ID=30676225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11731184U Pending JPS6132077U (en) 1984-07-31 1984-07-31 Tray for transporting semiconductor wafers

Country Status (1)

Country Link
JP (1) JPS6132077U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650344U (en) * 1991-02-07 1994-07-08 コマツ電子金属株式会社 Wafer container tilt table

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650344U (en) * 1991-02-07 1994-07-08 コマツ電子金属株式会社 Wafer container tilt table

Similar Documents

Publication Publication Date Title
JPS58138340U (en) Carrier for cleaning and etching wafers
JPS6132077U (en) Tray for transporting semiconductor wafers
JPS5984843U (en) Carrier hanger for semiconductor manufacturing
JPS6117742U (en) semiconductor manufacturing equipment
JPS59109147U (en) wafer storage case
JPS59173333U (en) wafer carrier
JPS5916141U (en) carrier case
JPS5996836U (en) semiconductor wafer cassette
JPS5823809U (en) Semiconductor wafer transport chute
JPS6037239U (en) semiconductor wafer
JPS60136142U (en) Semiconductor substrate storage box
JPS5974732U (en) Carrier for semiconductor wafers
JPS6076098U (en) Conductive tray for storing semiconductor integrated circuit devices
JPS5974727U (en) Semiconductor device tray
JPS60180206U (en) Wafer transfer device
JPS60169900U (en) Tray for transporting semiconductor equipment
JPS60101737U (en) IC container tray
JPS6033444U (en) Semiconductor wafer transport container
JPS5821987U (en) LSI socket for leadless package
JPS5916140U (en) Carrier for semiconductor wafers
JPS58120643U (en) Wafer processing basket
JPS58124952U (en) Storage jig for semiconductor wafers
JPS60117857U (en) Wafer holder for vapor deposition machine
JPS59176823U (en) Conveyance device
JPS6135748U (en) Tweezers for semiconductor wafers