JPS6132077U - Tray for transporting semiconductor wafers - Google Patents
Tray for transporting semiconductor wafersInfo
- Publication number
- JPS6132077U JPS6132077U JP11731184U JP11731184U JPS6132077U JP S6132077 U JPS6132077 U JP S6132077U JP 11731184 U JP11731184 U JP 11731184U JP 11731184 U JP11731184 U JP 11731184U JP S6132077 U JPS6132077 U JP S6132077U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- semiconductor wafers
- transporting semiconductor
- transporting
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は本考案の一実施例によるトレイ及びこのトレイ
に載せられたキャリアを示す断面側面図、第2図はウエ
ハーを保持したキャリアの姿勢を示す図、第3図は従来
のトレイ上に乗せられたキャリアを示す断面側面図であ
る。
1・・・トレイ、2・・・キャリア、3・・・トレイ用
キャリアホルター、4・・・ウエハー保持用キャリア湾
、5・・・ウェハー。FIG. 1 is a cross-sectional side view showing a tray according to an embodiment of the present invention and a carrier placed on this tray, FIG. 2 is a view showing the attitude of the carrier holding a wafer, and FIG. It is a sectional side view showing a carrier placed on it. 1... Tray, 2... Carrier, 3... Carrier halter for tray, 4... Carrier bay for holding wafer, 5... Wafer.
Claims (1)
姿勢に保持するキャリアホルダーを設けたことを特徴と
する半導体ウエハーの運搬用トレイ。A tray for transporting semiconductor wafers, characterized in that a carrier holder for holding the carrier in an inclined position is provided at the bottom of the tray for transporting semiconductor wafers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11731184U JPS6132077U (en) | 1984-07-31 | 1984-07-31 | Tray for transporting semiconductor wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11731184U JPS6132077U (en) | 1984-07-31 | 1984-07-31 | Tray for transporting semiconductor wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6132077U true JPS6132077U (en) | 1986-02-26 |
Family
ID=30676225
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11731184U Pending JPS6132077U (en) | 1984-07-31 | 1984-07-31 | Tray for transporting semiconductor wafers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6132077U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0650344U (en) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | Wafer container tilt table |
-
1984
- 1984-07-31 JP JP11731184U patent/JPS6132077U/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0650344U (en) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | Wafer container tilt table |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS58138340U (en) | Carrier for cleaning and etching wafers | |
JPS6132077U (en) | Tray for transporting semiconductor wafers | |
JPS5984843U (en) | Carrier hanger for semiconductor manufacturing | |
JPS6117742U (en) | semiconductor manufacturing equipment | |
JPS59109147U (en) | wafer storage case | |
JPS59173333U (en) | wafer carrier | |
JPS5916141U (en) | carrier case | |
JPS5996836U (en) | semiconductor wafer cassette | |
JPS5823809U (en) | Semiconductor wafer transport chute | |
JPS6037239U (en) | semiconductor wafer | |
JPS60136142U (en) | Semiconductor substrate storage box | |
JPS5974732U (en) | Carrier for semiconductor wafers | |
JPS6076098U (en) | Conductive tray for storing semiconductor integrated circuit devices | |
JPS5974727U (en) | Semiconductor device tray | |
JPS60180206U (en) | Wafer transfer device | |
JPS60169900U (en) | Tray for transporting semiconductor equipment | |
JPS60101737U (en) | IC container tray | |
JPS6033444U (en) | Semiconductor wafer transport container | |
JPS5821987U (en) | LSI socket for leadless package | |
JPS5916140U (en) | Carrier for semiconductor wafers | |
JPS58120643U (en) | Wafer processing basket | |
JPS58124952U (en) | Storage jig for semiconductor wafers | |
JPS60117857U (en) | Wafer holder for vapor deposition machine | |
JPS59176823U (en) | Conveyance device | |
JPS6135748U (en) | Tweezers for semiconductor wafers |