JPS5945408A - Production of optical filter - Google Patents

Abstract

PURPOSE:To attain a filter easily and efficiently, by forming an optical thin film on a substrate so that this optical thin film has a gradient of thickness in the transverse direction and cutting this substrate in the transverse direction or the like to attain each stripe-shaped filter. CONSTITUTION:A substrate 1 is stretched between a pair of reels 3 and 3 in a vacuum treatment chamber 2 and is run freely through a driving roll 4, and the steam of an evaporation source 6 is allowed to act upon the substrate to attain the optical thin film on the substrate 1. This thin film has such gradient of thickness that the thickness is changed gradually in the transverse direction orthogonal to the lengthwise direction of the substrate 1. A shutter 5 is provided with an aperture 5a whose opening is changed gradually in the transverse direction. The thin film is attained on the substrate 1 with a gradient of thickness in the transverse direction, and this substrate is cut in the transverse direction or the oblique transverse direction to attain each stripe-shaped filter. Thus, the filter is attained easily and efficiently.

Description

【発明の詳細な説明】 本発明ｉｔ　ニュートラルデンシティフィルタ、単色干
渉フィルタ、イ１１ｆ城フィルタその他の光学フィルタ
の製に＋１）１法３右関−する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the manufacture of neutral density filters, monochromatic interference filters, A11F filters, and other optical filters.

本願出回１人４Ｊ先にこのセ１（フィルタとして一、透
明プラスザックのロールフィルムその他の長Ｒの基板−
１−に・光学的薄膜を・その長さ方向Ｋｍ次肉ｊＶが痩
化する肉厚勾配にｄシけ、かくてフィルタ特性が長さ方
向に漸次変化するようにした式のものを４４１１案し、
史にその製造方法として該基板を走行させつ＼これに蒸
発源の蒸気を作用させて該薄膜を作るようにし、この際
該基板の走行速度或は該基板と該蒸発源との間に介入さ
れるシャッタの開度を加減して前記した肉１’３’！勾
配を得るようにした式のものを提案したが、か＼るもの
では該走行速度或は該シャッタの開度を加減すべくその
制御を必要とし、これは比較的面倒となり勝ちである不
都合を伴う。This application was distributed 4J to 1 person (1 as a filter, a transparent plus bag roll film and other long R substrates)
In 1-, the optical thin film is made to have a thickness gradient in which the Km-th thickness jV in the length direction becomes thinner, so that the filter characteristics gradually change in the length direction. death,
Historically, the manufacturing method was to create the thin film by running the substrate and applying vapor from an evaporation source to it, and at this time, changing the running speed of the substrate or intervening between the substrate and the evaporation source. Adjust the opening degree of the shutter to achieve the above 1'3'! A formula for obtaining the slope has been proposed, but such a method requires control to adjust the traveling speed or the opening degree of the shutter, which tends to be relatively troublesome. Accompany.

不発明はか−る不都合のない方法を提供することをその
目的としたもので、Ｔ’Ｓ明プラプラスチックールフィ
ルム或は金属のロール箔その他の長尺の）、に板上に、
光学的薄膜を、横方向に漸次肉ｊｖが変化する肉Ｊｖ勾
配に形成させた後、これを４ｉ？ｊ方向或は斜横方向に
裁断して各條片状の製品をｆ（するようにして成る。The object of the invention is to provide a method free from such inconveniences, in which T'S bright plastic roll film or metal roll foil or other elongated sheets are coated on a plate.
After forming an optical thin film with a thickness Jv gradient in which the thickness Jv gradually changes in the lateral direction, this is 4i? The product is cut in the j direction or diagonally horizontal direction so that each bar-like product is cut into f().

本発明の実施例を別紙図面にイλＩ説明する。Embodiments of the present invention will be explained with reference to the attached drawings.

図面で＋１１はｉカラプラスチックのロールフィルム、
その他の長尺の基板を示し、該２（板（１）を真空処理
室（２）内の１対の巻枠（３１＋３）間に張設してこれ
をその中間の駆動ロー！’−（／１１により一方或は他
方に走行自在とし、更にその下側にシャッタ（５）を介
して蒸発源（６）を備え、かくて該基板（１）を走行さ
すつ＼これに該蒸発源（６）の蒸気を作用させることに
より、族基＆　（１１−Ｊｔにはこれに沿ってのびる光
学的薄膜（７）が得られるようにした。図面で（８）は
投光器（８ａ）と受光器（８ｂ）とから成る膜ｊ９モニ
タを示す。+11 in the drawing is i-color plastic roll film,
Another long substrate is shown in which the plate 2 (1) is stretched between a pair of winding frames (31+3) in the vacuum processing chamber (2), and the drive row !'-( /11, so that it can run freely in one direction or the other, and furthermore, an evaporation source (6) is provided below it via a shutter (5), so that while the substrate (1) is running, the evaporation source ( By applying the vapor of 6), an optical thin film (7) extending along the group group & (11-Jt) was obtained. In the drawing, (8) is the emitter (8a) and the receiver. (8b) shows a membrane j9 monitor consisting of.

以上は先に４￥８１案したものと特に異らないが、本拠
明によれば、該薄膜（刀は該基板（１）の長さ方向と論
文する横方向に肉厚が漸次変化する肉厚勾配とされるも
ので、か−る勾配を得る手段としては、例えば第１図示
の通りであり、即ち、前ｄ「ニジたシャッタ（５）は横
方向に漸次開度が変化する開１−１（５ａ）を備える型
式とする。更に詳細には、旧聞ＩＩ（ｂａ）は例えばＰ
８２図或は第３図示の通りであり、こｔｌによれは、該
肉厚勾配は例えば、第４図或は第５図示のように得られ
るようにした。The above is not particularly different from the 4 yen 81 proposal earlier, but according to Akira Motomoto, the thin film (sword) is a thin film whose thickness gradually changes in the length direction of the substrate (1) and the lateral direction as described in the paper. The thickness gradient can be obtained by means of obtaining such a gradient, for example, as shown in FIG. -1 (5a).More specifically, the old book II (ba) is, for example, P
The thickness gradient is as shown in FIG. 82 or 3, and the thickness gradient is obtained, for example, as shown in FIG. 4 or 5.

かくして得られる製品は例えば第６図示の通りであり、
曲基板ｔ１１．．ｌに該薄膜（７）が横方向の肉厚勾配
に得られるもので、本発明によれば次でこれを横方向或
は斜横方向に裁断して各條片状の製品フィルタ（９）を
得るようにした。史に詳細には、第６図及び第７図に８
；！λ又は線すで示すような横方向或は斜横方向の切断
線を相平行する複数條に施し、かくで第８図示のような
鋒片状の製品フィルタ（９）を作るもので、該フィルタ
（９）は基板（１ａ）上に光学的薄膜（７ａ）を長さ方
向の肉厚勾配に備えた型式に得られる。The product thus obtained is, for example, as shown in Figure 6,
Curved board t11. ．． According to the present invention, the thin film (7) is obtained with a thickness gradient in the lateral direction, and then this is cut in the lateral or diagonal lateral direction to obtain product filters (9) in the form of individual rods. I tried to get . For details, see Figures 6 and 7.
;! λ or a horizontal or diagonal horizontal cutting line as shown above is applied to a plurality of parallel columns, thus producing a piece-shaped product filter (9) as shown in Figure 8. The filter (9) is obtained in the form of a substrate (1a) on which an optical thin film (7a) is provided with a thickness gradient in the longitudinal direction.

第１図示のものでは該蒸発源（６）の２個を（ｉｆ＃え
、これらを適宜切換えて作動′自在とするが、これに限
ることなく、例えば全体を第９図示のように構成して該
蒸発源（６）の多数個を備えることも可能であり、この
場合該シャッタ（５）の形状は例えば第１０図示の通り
である。In the one shown in Figure 1, two of the evaporation sources (6) are used (if#) and can be operated by switching between them as appropriate, but the invention is not limited to this. It is also possible to provide a plurality of evaporation sources (6), in which case the shape of the shutter (5) is as shown in FIG. 10, for example.

このように本発明によるときは、基板上に光学的薄膜を
横力向の肉Ｊワ勾り己に形成さ−１またものを、次で横
方向或は斜横方向に裁断して各條片状の製品フィルタを
得るもので、先に提案した式のものにおける走行速度、
シャッタ開度等の制御を不要とし、かくて作業を簡単且
容易にし、優れた製品を廉価に得られる効果を有する。In this way, according to the present invention, an optical thin film is formed on the substrate in the direction of the lateral force, and then the film is cut in the lateral or diagonal lateral direction to determine each condition. The traveling speed in the formula proposed earlier, which obtains a flaky product filter, is
This eliminates the need to control the shutter opening, etc., thus making work simple and easy, and has the effect of producing excellent products at low cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明方法の１例の光学的薄膜を形成する段階
の説明線図、第２図及び＠５図のシャツタ開口の形状の
説明線図、第４図及ｒメ第５図はそれにより得られる肉
厚勾配の縮図、第６図は得られる製品の斜面図、第７図
はその平面図、第８図は製品フィルタの１例の斜面図、
第９図は第１図の変形例の説明線図、第１０図（・−１
ぞのシャッタの１例の説明線図であるｎ（１）・・・基
板 （刀・・・光学的薄膜 九、ｂ・・・裁断線 （９）・・・製品フィルタ 外２名 第１図 ７ ］ 第２図　　　　　第４０ 竺３　ｉ”ｊ“１　　　　竺５「罰］ 第６日 第７図 竺８図 第９図 第１０図Figure 1 is an explanatory diagram of the step of forming an optical thin film in one example of the method of the present invention, Figures 2 and 5 are explanatory diagrams of the shape of the shutter opening, and Figures 4 and 5 are A microcosm of the wall thickness gradient obtained thereby, Fig. 6 is a slope view of the obtained product, Fig. 7 is a plan view thereof, Fig. 8 is a slope view of an example of the product filter,
Fig. 9 is an explanatory diagram of a modification of Fig. 1, and Fig. 10 (・-1
This is an explanatory diagram of one example of the shutter. 7] Fig. 2 Fig. 40 Jiku 3 i”j“1 Jiji 5 “Punishment” Day 6 Fig. 7 Fig. 8 Fig. 9 Fig. 10

Claims (1)

【特許請求の範囲】[Claims] ｊＭ　ＦすＩプラスチックのロールフィルム或は金属の
ロール箔その他の長尺の基板［−に、光学的薄膜を横方
向に漸次肉厚が変化する肉厚勾配に形成さゼた後、これ
を４１Ｍ方向或は斜横方向に裁断して各條ハ状のル・１
品を得るようにして成る光学フィルタの製４１／方法。After forming an optical thin film on a plastic roll film, metal roll foil, or other long substrate [-] with a thickness gradient that gradually changes in thickness in the lateral direction, this is Cut in the diagonal or diagonal horizontal direction to make each square shape.
41/Method for manufacturing an optical filter by obtaining an optical filter.