JPS5933629A - Manufacture of vertical magnetic recording medium - Google Patents

Abstract

PURPOSE:To obtain a magnetic recording medium superior in recording and reproducing characteristics, by applying a magnetic field in the direction vertical to the directions of movement and thickness of a substrate in forming a ''Permalloy'' thin film on the substrate being moved, and vapor depositing a vertically magnetized film. CONSTITUTION:A substrate film 1 is being moved from an unwinding roll 4 along a can 2 to a winding roll 5, and a magnetic field is applied vertically to the directions of movement and thickness of the substrate 1 using an electromagnet 7 or a permanent magnet, and in this state, the Permalloy film is vapor deposited through the slit of a mask from an evaporation source 6 to the substrate 1. The magnetic field is applied by regulating the distance between the central axis of the magnetic field and the substrate 1 to <= about 1/2 of the distance beween said axis to the source 3. As a result, magnetic permeability of the Permalloy film in the direction in parallel to that of movement of the substrate 1, and the recording and reproducing characteristics of the vertical magnetic recording medium is enhanced.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は２層膜構造を有し垂直磁気記録に適した記録媒
体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a recording medium having a two-layer film structure and suitable for perpendicular magnetic recording.

従来例の構成とその問題点 記録波長の短い磁気記録を行なう際には、垂直磁気記録
が４１効である。垂直磁気記録用記録媒体としては、磁
化容易方向が媒体膜面に垂直となる様な記録媒体がある
。この様な特性をもつ記録り１、体の一つとして磁化膜
がＧｏとＣｒを主成分としだ記録媒体が用いられる。Conventional configuration and its problems When performing magnetic recording with a short recording wavelength, perpendicular magnetic recording is 41 effective. As a recording medium for perpendicular magnetic recording, there is a recording medium in which the direction of easy magnetization is perpendicular to the surface of the medium film. As one of the recording materials having such characteristics, a recording medium whose magnetized film is mainly composed of Go and Cr is used.

ＣＯとＯｒを主成分とした記録媒体を重置記録に用いる
場合、まず基板上にパーマロイ膜を形成し、その−にに
Ｃｏ　−Ｏｒ記録媒体を形成すると記録再生時に閉磁路
が形成されて記録再生特性が向上することが分っている
　（以−１この媒体を２層膜媒体と呼ぶ）。この場合パ
ーマロイ膜の特性が記録再生特性を大きく左イ１する。When using a recording medium containing CO and Or as main components for overlapping recording, first a permalloy film is formed on the substrate, and then a Co-Or recording medium is formed on top of the permalloy film, and a closed magnetic path is formed during recording and reproduction. It has been found that the reproduction characteristics are improved (hereinafter, this medium will be referred to as a two-layer film medium). In this case, the characteristics of the permalloy film greatly affect the recording and reproducing characteristics.

すなわち記録再生時の記録媒体移動方向に平ｆ７’　方
向のパーマロイ膜の透磁率が高い稈、記録再生時Ｖ１が
向」二することが実験の結果間らかになっている。That is, as a result of experiments, it has been found that when the magnetic permeability of the permalloy film in the plane f7' direction is high in the direction of movement of the recording medium during recording and reproduction, V1 is oriented in the direction of V1 during recording and reproduction.

２層膜媒体はスパックリンシ゛法、真空蒸着法のいずれ
の方法によっても作製できる。特に後者の方法では、例
えば第１図の様な構成で析出速用が、数１０００人／秒
という優れた生産性でもって、安定に長尺の垂直磁気記
録媒体を作製することができる。すなわち第１図に示す
ように、υ１気糸１３によ−・て高真空に排気された真
空槽１２中においで、巻出系４から巻出されたノ、１板
１は、キャン２に渚って移動し、マスク６の開［１部で
′市イ銃１０から電イビーム１１を入射されている蒸発
ｊ１５ｉ　３によって真空蒸着を施された後、巻取系に
巻ＪＩＭられる。The two-layer film medium can be produced by either the spuck rinsing method or the vacuum evaporation method. In particular, with the latter method, a long perpendicular magnetic recording medium can be stably produced with a deposition rate of several thousand persons/second, for example, with a configuration as shown in FIG. That is, as shown in FIG. 1, the plate 1 is placed in a vacuum chamber 12 evacuated to a high vacuum by the υ1 air thread 13, and unwound from the unwinding system 4. When the mask 6 is opened, the film is vacuum-deposited by the evaporator 15i 3 into which the electric beam 11 is incident from the commercial gun 10, and then wound onto the winding system.

しかし、パーマロイ層を形成する際に、中にパーマ１１
イを蒸着するだけでは、パーマロイ膜の透磁率は膜面内
でほぼ等方的となるため、２層膜媒体の利点が１−分に
生かされているとは言えなかった。However, when forming the permalloy layer, the permalloy layer is
If only the permalloy film is vapor-deposited, the magnetic permeability of the permalloy film becomes almost isotropic within the film plane, so it cannot be said that the advantages of the two-layer film medium are fully utilized.

発明の［１的 本発明は２層膜を構成するパーマロイ膜の磁気記録肉牛
におけるＡパ１方向にネ１する透磁率を大きくし、これ
により特１イ］、のすぐれた垂直記録用の２層ｊ摸媒体
が容易に得られるようにすることを目的とする。[1] The present invention increases the magnetic permeability in the A/P direction in magnetic recording beef cattle of a permalloy film constituting a two-layer film, thereby providing an excellent perpendicular recording device of [1]. The purpose of this invention is to make it easy to obtain a layer-j imitation medium.

発明の構成 本発明は移動中の基板上に蒸盾法によりパーマ方向に列
し平曲方向に磁界を印加するものである。Structure of the Invention The present invention applies a magnetic field to a moving substrate in the perm direction and in the flat curve direction using the steam shield method.

なおここでパーマロイ膜を形成する際に基板の走行方向
と厚み方向に苅し垂直方向に磁界を印加すると、パーマ
ロイ膜の磁１ヒ容易方向が磁界と５１′行方向となり、
磁化困芳（方向は基板の走イ１方向とＩＪＩ行となる。Note that when forming a permalloy film here, if a magnetic field is applied perpendicularly to the running direction and thickness direction of the substrate, the magnetic field of the permalloy film is in the direction of the magnetic field and the 51' row direction.
The direction of magnetization is the A1 direction of the substrate and the IJI direction.

従って磁界を印加しない場合と比べて姑板の走行方向と
平行方向の透磁率が上列するのである。Therefore, the magnetic permeability in the direction parallel to the running direction of the second plate is higher than that in the case where no magnetic field is applied.

実施例の説明 第２図は連続巻取真空蒸着において、コイルに電流を流
して磁界を発生し磁気記録媒体を製造する場合を７）く
ず。DESCRIPTION OF EMBODIMENTS FIG. 2 shows a case in which a magnetic recording medium is manufactured by passing a current through a coil to generate a magnetic field in continuous winding vacuum evaporation. 7) Waste.

図に示すように、巻出系４から巻出さ′１１た基板１は
キャン２に渚って移動し、マスク６の開１１部でコイル
了によって発生し７た磁界のもどて、蒸発源３によって
パーマロイ膜を真空蒸着されて巻取糸６に巻取られる。As shown in the figure, the substrate 1 unwound from the unwinding system 4 is moved to the can 2, and the magnetic field generated by the coil at the opening 11 of the mask 6 is returned to the evaporation source 3. A permalloy film is vacuum-deposited and wound onto a winding thread 6.

こねによって基板走行方向に平行方向に高い透磁率を１
−１１″つだパーマロイ膜が作製できる。By kneading, the high magnetic permeability is increased by 1 in the direction parallel to the board running direction.
-11" permalloy membrane can be produced.

第３図は［）１１記実施例におけるコイルの代わりに永
久磁オｊを用いて磁界を発生させた場合の実施例で、永
久磁イ１８によって磁力線９が発生ずる様子を示す。FIG. 3 shows an example in which a magnetic field is generated using a permanent magnetic field instead of the coil in Example 11, and shows how magnetic lines of force 9 are generated by the permanent magnetic field 18.

なお磁界を印加した効果を出すだめには、基板上の膜が
析出する部分における磁界の強さか、少なくとも２００
部以上は必要である。。In order to produce the effect of applying a magnetic field, the strength of the magnetic field at the part where the film is deposited on the substrate must be at least 200
More than 100 students are required. .

まだ、コイルの中心を結んだ１Ｆ）線寸だｄ：磁石の＋
：ｌｌ＋９を結んだ直線（これらを磁界中・Ｕ軸と呼ぶ
）とノＮ板との距ヌ（［がいずれの場合にも基板と蒸発
源との路間トを約Ａ以下でなければ磁界を印加した効果
が充分に得られないことがある。It is still the 1F) linear dimension connecting the centers of the coils d: + of the magnet
: The distance between the straight line connecting ll + 9 (these are called the magnetic field/U axis) and the No. The effect of applying may not be obtained sufficiently.

以上の髄にして」、（板の走行力向と）３．Ｊみノｊ向
に７・１１〜垂直方向に磁界を印加することにより、パ
ーマロイ膜の基板の走行方向に平イー１力向の透磁率ｄ
磁界を印加しない場合の約１００に比べて９倍程度の約
９０６に増加した。まだ、ポリイミド皓根上にパーマ１
１イ膜を２０００人の庁、さに蒸着した−１−にＣｏ　
−Ｃｒ膜を２０００人の厚さに蒸着した場合、５０ＫＦ
ＲＰＩ　（１インチ当たり５００００回の磁化反転のあ
るディジタル信号の記録密度）の信号を公知の６１１助
磁極励磁形ヘツドで記録し、かつ再ヰすると、パーマロ
イ形１１ν１時に磁界を印加しない場合と比べて記録１
・８度ケ：１、ｌ：１４６ｄＢ増加し、７Ｔｉ：　／、
１出力は約３ｄＢ増加した。(With the direction of the running force of the board) 3. By applying a magnetic field in the perpendicular direction in the J-mino-j direction, the magnetic permeability d in the permalloy film substrate travel direction
Compared to about 100 when no magnetic field is applied, it increased to about 906, which is about 9 times. Still perm 1 on polyimide hair roots
A Co film was deposited on 2,000 people's offices.
-If Cr film is deposited to a thickness of 2000, 50KF
When a signal of RPI (digital signal recording density with 50,000 magnetization reversals per inch) is recorded with a known 611 auxiliary pole excitation type head and rewritten, the result is as follows: Record 1
・8th degree: 1, l: increased by 146dB, 7Ti: /,
1 output increased by about 3 dB.

発明の効果 以上のように本発明によると記録２丙午特性のすぐれた
垂直磁気記録媒体を容易に得ることかできる。Effects of the Invention As described above, according to the present invention, a perpendicular magnetic recording medium with excellent recording properties can be easily obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の垂直磁気記録媒体の製造方法をＮ’ｒ（
’、明する／こめの図、第２図、第３図はそれぞれ本発
明による磁気記録媒体の製造方法を説明する／ζめの図
である。 １・　・・・基板、２・・・・・キャン、３・・・・・
蒸発椋、４・・・・巻出系、５・・・・・・巻取系、６
・・・・・マスク、７・・・・コイル、８・・・・・永
久磁イｉ、９・・・・・・磁力線、１０−・・・・電−
ｒ銃、１１・・・・・市：了ビー１．．１２・・・・Ｌ
′（空槽、１３・・・・・排気系、。 代即人の氏名　弁理ト　中　尾　敏　男　ほか１名第１
図 第２図Figure 1 shows the conventional manufacturing method of perpendicular magnetic recording media N'r(
Figures 2 and 3 are respectively illustrative diagrams illustrating the method of manufacturing a magnetic recording medium according to the present invention. 1. ...board, 2...can, 3...
Evaporator, 4... Unwinding system, 5... Winding system, 6
...Mask, 7...Coil, 8...Permanent magnet i, 9...Magnetic field lines, 10-...Electrical
R gun, 11... City: Ryobi 1. ．． 12...L
(Empty tank, 13...exhaust system, etc.) Name of attorney: Satoshi Nakao and 1 other person No. 1
Figure 2

Claims (2)

【特許請求の範囲】[Claims] （１）移動中の基板上に蒸着法によりパーマロイ膜と乎
直磁直磁化膜を順次形成するとともに、前記パーマロイ
膜の形成に際しては前記基板の移動力向と厚み方向に列
し垂直方向に磁界を印加することを特徴とする垂直磁気
記録媒体の製造方法。(1) A permalloy film and a direct magnetization film are sequentially formed on a moving substrate by vapor deposition, and when forming the permalloy film, a magnetic field is applied in a perpendicular direction to the moving force direction and the thickness direction of the substrate. 1. A method of manufacturing a perpendicular magnetic recording medium, the method comprising: applying . （２）磁界中心軸から基ｔｆｉまでの距離を、磁界中心
軸から蒸発源までの距離の約棒以下にすることを特徴と
する特許請求の範囲第１項に記載の垂直磁気記録媒体の
製造方法。(2) Manufacturing a perpendicular magnetic recording medium according to claim 1, wherein the distance from the central axis of the magnetic field to the base tfi is approximately less than the distance from the central axis of the magnetic field to the evaporation source. Method.