JPS5922371B2 - Pattern defect inspection equipment - Google Patents
Pattern defect inspection equipmentInfo
- Publication number
- JPS5922371B2 JPS5922371B2 JP54011101A JP1110179A JPS5922371B2 JP S5922371 B2 JPS5922371 B2 JP S5922371B2 JP 54011101 A JP54011101 A JP 54011101A JP 1110179 A JP1110179 A JP 1110179A JP S5922371 B2 JPS5922371 B2 JP S5922371B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- pattern
- color
- television camera
- defect inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
【発明の詳細な説明】
本発明は、パターン等の被検査物の欠陥等を検査するパ
ターンの欠陥検査装置に関するものであ こる。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pattern defect inspection apparatus for inspecting defects in an object to be inspected such as a pattern.
半導体やプリント板等の製造に当つては、所定のパター
ンを有するホトマスクを使用する場合が多い。In manufacturing semiconductors, printed circuit boards, etc., photomasks having predetermined patterns are often used.
斯る際、ホトマスクのパターンに欠陥が在ると、製品に
不良が生じてしまうので、ホトマスクのパターンの欠陥
の検査は、大切な工程である。次に、従来提案されてい
るパターンの欠陥検査装置の一例を、第１、２及び３図
を参照して説明しよう。第１及び２図は、ホトマスクを
顕微鏡で拡大して見た部分の部分図で、同図に於て、１
及び１’はガラス等の透明材より成るホトマスクであり
、２２及び２’ぱホトマスク１及び１’上に、例えば金
属の蒸着により形成されたパターンを全体として示し、
３はホトマスク１及び１’の透明基板そのものである透
明部、４は蒸着材による不透明部を夫々示す。In such a case, if there is a defect in the photomask pattern, the product will be defective, so inspecting the photomask pattern for defects is an important process. Next, an example of a conventionally proposed pattern defect inspection apparatus will be explained with reference to FIGS. 1, 2, and 3. Figures 1 and 2 are partial views of the photomask enlarged with a microscope.
and 1' are photomasks made of a transparent material such as glass, and 22 and 2' show the overall pattern formed on the photomasks 1 and 1' by, for example, vapor deposition of metal;
Reference numeral 3 indicates a transparent portion which is the transparent substrate itself of the photomasks 1 and 1', and numeral 4 indicates an opaque portion made of a vapor deposition material.
第２図に於て、Ａ及びＢは蒸着材が不要に残存している
部分であわ、Ｃ及びＤは、必要であるべき蒸着材が欠け
ている部分である。従つて、第２図に示す如きパターン
ｚを有するホトマスクイは欠陥品である。一方、第１図
に示すホトマスク１は、正常なものである。初て、第１
及び第２図に示す如きホトマスク１又は１’を検査する
には、従来に於ては、例えば第３図に示す如く、例えば
透明な台５の所定位置に、完全なパターンを有する（例
えば第１図に示す如きパターン２を有する）基準マスク
６を配置し、検査されるべき、即ぢ被検査マスク７（例
えば第２図に示す如き欠陥マスク）を、台５の他の所定
位置に配置し、両者を双眼顕微鏡８で観察する。In FIG. 2, A and B are areas where unnecessary vapor deposition material remains, and C and D are areas where necessary vapor deposition material is missing. Therefore, a photomask die having a pattern z as shown in FIG. 2 is a defective product. On the other hand, the photomask 1 shown in FIG. 1 is normal. first time, first
In order to inspect a photomask 1 or 1' as shown in FIG. 2, conventionally, as shown in FIG. A reference mask 6 (having a pattern 2 as shown in FIG. 1) is placed, and a mask 7 to be inspected (for example, a defective mask as shown in FIG. 2) is placed at another predetermined position on the stand 5. Then, both are observed using a binocular microscope 8.
第３図に於て、９及び１０は基準マスク６及び被検査マ
スクＴ用の対物レンズ、１１及び１２は両マスク６及び
Ｔ用のミラー、同じく１３及び１４は両マスク６及び１
月の・・−フミラー、１５は共通の接眼レンズであり、
１６は基準マスク６を照射する、例えば赤色光の光源、
ＩＴは被検査マスクＴを照射する赤の補色である、例え
ば緑色光の光源である。従つて、光源１６及びＩＴから
出た光は、双眼顕微鏡８の台５、マスク６及びＴｌレン
ズ９及び１０、ミラー１１及び１２、ハーフミラー１３
及び１４、更にレンズ１５を通つて、観察眼１８に結像
してマスクの検査が可能となる。籾て、今、被検産マス
ク７が第２図に示す如き欠陥品であるとすると、部分Ａ
及びＢに就いては、光源１７よりの緑色光は、これ等部
分Ａ及びＢで遮断されるので、光源１６ようの赤色光の
みが観察眼１８に来るので、これ等部分Ａ及びＢは赤色
に見える。一方、部分Ｃ及びＤに就いては、光源１６よ
りの赤色光は遮断されるが、光源１７よりの緑色光は観
察眼１８に到達するので、これ等部分Ｃ及びＤは緑色に
見える。その他の部分、即ち透明部３に就いては、両光
源１６及び１７よりの赤及び緑色光が、同時に観察眼１
８に到達するので、略々白く見え、又、不透明部４に就
いては、赤及び緑色光の両者の通過が遮断されるので、
黒く見える。即ち、全べてが白又は黒く見える場合は、
被検査マスク７には欠陥が無く、少しでも赤又は緑色に
見える場合は、被検査マスク７には、欠陥があることに
なる。上述の従来のパターン検査装置は、被検査物が透
明である場合に限られる欠点があ板更に、検査を１個づ
つ、目で行つているので、この検査を自動的に行わんと
すれば、高価なカラーテレビカメラが必要となる。In FIG. 3, 9 and 10 are objective lenses for the reference mask 6 and the mask to be inspected T, 11 and 12 are mirrors for both the masks 6 and T, and 13 and 14 are for both the masks 6 and 1.
Moon...-Fumirar, 15 is a common eyepiece,
16 is a light source of red light, for example, which illuminates the reference mask 6;
IT is a light source of green light, for example, which is a complementary color to red and illuminates the mask T to be inspected. Therefore, the light emitted from the light source 16 and IT is transmitted to the stage 5 of the binocular microscope 8, the mask 6 and the Tl lenses 9 and 10, the mirrors 11 and 12, and the half mirror 13.
and 14, and further passes through the lens 15 to form an image on the observation eye 18, thereby making it possible to inspect the mask. Assuming that the mask 7 to be inspected is a defective product as shown in FIG.
and B, since the green light from the light source 17 is blocked by these parts A and B, only the red light from the light source 16 comes to the viewing eye 18, so these parts A and B are red. It looks like On the other hand, in parts C and D, the red light from the light source 16 is blocked, but the green light from the light source 17 reaches the viewing eye 18, so these parts C and D appear green. Regarding the other part, that is, the transparent part 3, the red and green lights from both light sources 16 and 17 are simultaneously transmitted to the viewing eye.
8, it looks almost white, and the opaque part 4 blocks both red and green light from passing through it.
Looks black. In other words, if everything looks white or black,
If there is no defect in the mask 7 to be inspected and it looks even slightly red or green, it means that the mask 7 to be inspected has a defect. The above-mentioned conventional pattern inspection apparatus has the disadvantage that it is limited to cases where the object to be inspected is transparent; , requiring an expensive color television camera.
従つて、本発明の主目的は、高価なカラーテレビカメラ
を使用せず、安価な白黒テレビカメラを用いて、被検査
物の「バｌ月、「ヒゲ」等の不要な剰余部分、即ち第２
図の例では、部分Ａ及びＢの如き欠陥の検査を自動的に
行い得るパターンの欠陥検査装置を提供せんとするにあ
る。Therefore, the main object of the present invention is to detect unnecessary surplus parts such as ``bars'' and ``whiskers'' of the inspected object by using an inexpensive black-and-white television camera instead of using an expensive color television camera. 2
In the illustrated example, it is intended to provide a pattern defect inspection apparatus that can automatically inspect defects such as those in portions A and B.
本発明によるパターンの欠陥検査装置の特徴とするとこ
ろは、素材上にこれと異る色の不透明材より成るパター
ンが形成された被検査物と、透明基板上に上記被検査物
のパターンと同一の基準となる不透明材より成る基準パ
ターンを形成した基準物とを、テレビカメラの光軸土に
上記両パターンが一致するように配列し、該テレピカメ
ラで上記被検査物及び基準物を撮像して上記被検査物の
欠陥の検査をするパターンの欠陥検査装置に於て、上記
基準物を上記被検査物に対し上記テレビカメラ側に配置
すると共に、上記基準パターンを形成する不透明材の色
を上記被検査物の素材の色と同一に選び上記被検査物の
パターン以外の不要な部分の存否を検査するようになし
たことにある。The pattern defect inspection apparatus according to the present invention is characterized by an object to be inspected on which a pattern made of an opaque material of a different color is formed on a material, and a pattern identical to the pattern of the object to be inspected on a transparent substrate. A reference object on which a reference pattern made of an opaque material is formed as a reference is arranged on the optical axis of a television camera so that both patterns coincide with each other, and the television camera images the object to be inspected and the reference object. In the pattern defect inspection apparatus for inspecting defects in the object to be inspected, the reference object is placed on the television camera side with respect to the object to be inspected, and the color of the opaque material forming the reference pattern is set to the The object is selected to have the same color as the material of the object to be inspected, and the presence or absence of unnecessary parts other than the pattern of the object to be inspected is inspected.
以下、第４図を参照して上述の特徴を有する本発明の一
例を説明しよう。第４図に於て、２１は例えばプリント
板の如き被検査物で、これは、素材２０上に、例えば、
金属が蒸着されて、被検査パターン２２が形成されたも
のである。Hereinafter, an example of the present invention having the above-mentioned characteristics will be explained with reference to FIG. In FIG. 4, 21 is an object to be inspected, such as a printed board, which is placed on the material 20, for example.
A pattern 22 to be inspected is formed by depositing metal.
又、２３は被検査物２０に対する基準物で、これは、例
えばガラスの如き透明基板２４上に、例えば金属の如き
材料の蒸着等によジ、基準パターン２５を形成したもの
である。この場合、素材２１の土面の色は、透明基板２
４上のパターン２５を形成する材料の色と同色であるも
、素材２１上のパターン２２を形成する材料の色とは、
異ることが必要である。次に、被検査物２０の素材２１
が不透明である場合の被検査物２０の余分な「バ１月、
「ヒゲ」等の欠陥の検査に就いて説明する。Reference numeral 23 is a reference object for the object to be inspected 20, which is a reference pattern 25 formed by vapor deposition of a material such as metal on a transparent substrate 24 such as glass. In this case, the color of the clay surface of the material 21 is the same as that of the transparent substrate 2.
The color of the material forming the pattern 25 on the material 21 is the same color as the material forming the pattern 25 on the material 21, but the color of the material forming the pattern 22 on the material 21 is
It is necessary to be different. Next, the material 21 of the object to be inspected 20
If the object to be inspected 20 is opaque,
Inspection for defects such as "whiskers" will be explained.
先づ、上述の如く、被検査物２０の素材２１上の被検査
パターン２２と基準物２３の透明基板２４上のパターン
２５とを、両パターン２２及び２５が、テレビカメラ３
０の光軸上に、例えば図示の順序に配置され、光源４０
を図示の如く配設し、これにより、基準物２３をテレビ
カメラ３０側よ勺照射する如くなし、テレビカメラ３０
で撮像する。First, as described above, the pattern to be inspected 22 on the material 21 of the object to be inspected 20 and the pattern 25 on the transparent substrate 24 of the reference object 23 are detected by the television camera 3.
For example, the light sources 40 are arranged on the optical axis of
are arranged as shown in the figure, so that the reference object 23 is irradiated directly to the television camera 30 side, and the television camera 30
Take an image with
今、被検査物２０のパターン２２が完全品とすると、テ
レビカメラ３０に入る光は、基準物２３の透明基板２４
の不透明材の蒸着されていない部分を通過し、素材２１
の被検査パターン２２のない部分上で反射され、再び透
明板２４の上述した部分を通過した光源４０よりの光と
、パターン２５を形成する部材上で反射された光源４０
よりの光のみである（第４図では被検査物２０と基準物
２３とが、テレビカメラ３０の光軸上に於て、互に離間
して示してあるが、実際は、両者を殆んど接触して配置
する）。従つて、テレビカメラ３０に入る光は、略々同
一色の光のみであるので、その出力は、全面に亘り一様
な信号となる。即ち、テレビカメラ３０ようの出力が、
全体に亘わ一様ならば、被検査物２０は、完全品である
ことになる。所が、今、被検査物２０の素材２１上のパ
ターン２２を形成する部分に、余分な「バリ」や「ヒゲ
」等の欠陥があると、光源４０よりの光は、素材２１の
上面で反射されるものの外に、この欠陥部分でも反射さ
れて、テレビカメラ３０に入ることになる。Now, assuming that the pattern 22 of the inspected object 20 is a perfect product, the light entering the television camera 30 will be transmitted to the transparent substrate 22 of the reference object 23.
The material 21 passes through the part where the opaque material is not deposited.
The light from the light source 40 is reflected on the part of the transparent plate 24 that does not have the pattern 22 to be inspected and passes through the above-mentioned part of the transparent plate 24 again, and the light source 40 is reflected on the member forming the pattern 25.
(Although the inspection object 20 and the reference object 23 are shown spaced apart from each other on the optical axis of the television camera 30 in FIG. (place in contact). Therefore, since the light that enters the television camera 30 is substantially the same color, its output becomes a uniform signal over the entire surface. That is, the output of the television camera 30 is
If it is uniform throughout, the object to be inspected 20 is a perfect product. However, if there is a defect such as an extra "burr" or "whisker" on the part where the pattern 22 is formed on the material 21 of the object 20 to be inspected, the light from the light source 40 will not illuminate the upper surface of the material 21. In addition to what is reflected, the light is also reflected from this defective portion and enters the television camera 30.
上述の如く、素材２１の土面のパターン２２を形成する
部材の色は、素材２１の上面及びパターン２５の部材の
色と違つているので、被検査パターン２２に「バＩ月、
「ヒゲ」等の欠陥があると、テレビカメラ３０よりの出
力信号が一様でなくなＤ、欠陥に対応する部分で、信号
のレベルに変化が生ずる。即ち、テレビカメラ３０の出
力信号にレベル変化がある場合は、被検査物２０は欠陥
品と言うことになる。従つて、テレビカメラ３０よりの
出力信号を、検査装置５０に供給し、これにより、被検
査物の良・否を識別することができる。As mentioned above, the color of the members forming the pattern 22 on the soil surface of the material 21 is different from the color of the members forming the upper surface of the material 21 and the pattern 25, so the pattern 22 to be inspected is
If there is a defect such as a "whisker", the output signal from the television camera 30 will not be uniform (D), and the signal level will change at the portion corresponding to the defect. That is, if there is a level change in the output signal of the television camera 30, the inspected object 20 is said to be defective. Therefore, the output signal from the television camera 30 is supplied to the inspection device 50, thereby making it possible to identify whether the inspected object is good or not.
周、図に於て６０は、テレビカメラ３０の前面に設けた
フイルタ一で、欠陥部が、周囲の部分と一層明瞭に識別
できるように作用するものである。Reference numeral 60 in the figure is a filter provided on the front surface of the television camera 30, which serves to make the defective part more clearly distinguishable from the surrounding parts.
閏、被検査物２０の素材２１が透明である場合は、パタ
ーン２５の部材の色と同一であるが、パターン２２の部
材の色とは異る色の反射板７０を、被検査物２０の素材
２１の、図に於て下方に配置し（図示の例では素材２１
とは離して配置してあるが、実際は略々密着させる）す
れば、上述と同様に、テレビカメラ３０を用いて被検査
物２０の欠陥の検査ができる。又、この場合、反射板７
０を設ける代ｖに、光源４０を、被検査物２０の図に於
て下方に配置しても、同様の検査が行い得るものである
。When the material 21 of the object 20 to be inspected is transparent, a reflective plate 70 of a color that is the same as the color of the member in the pattern 25 but different from the color of the member in the pattern 22 is attached to the object 20 to be inspected. Placed below the material 21 in the figure (in the illustrated example, the material 21
(Although they are placed apart from each other, in reality, they are in close contact with each other), then the object to be inspected 20 can be inspected for defects using the television camera 30 in the same way as described above. Also, in this case, the reflector 7
Even if the light source 40 is placed below the object 20 to be inspected in the drawing, the same inspection can be performed in the range v where 0 is provided.
向、図示せずも、被検査物２０及び基準物２３等を所定
位置に保持し、必要に応じて駆動する手段が設けてある
ことは勿論である。Of course, there is also a means (not shown) for holding the object to be inspected 20, the reference object 23, etc. in predetermined positions and driving them as necessary.
向、上述は本発明の→りに就いての説明であるが、本発
明の精神を逸脱しないで、当該業者により、多くの変化
・変更が可能なことは、明らかであろう。Although the foregoing is a detailed description of the present invention, it will be apparent that many changes and modifications can be made by those skilled in the art without departing from the spirit of the invention.
例えば、上述に於ては、素材２１の上面の色は、透明基
板２４上のパターン２５を形成する部材の色と同一なる
も、素材２１土のパターン２２を形成する部材の色とは
異つているが、それ等の色の同一又は相違に限らず、そ
れ等は光学的性質、例えば光の反射の態様、吸収の態様
等が同一又は相違していれば良い。For example, in the above description, the color of the upper surface of the material 21 is the same as the color of the member forming the pattern 25 on the transparent substrate 24, but is different from the color of the member forming the pattern 22 of the material 21. However, they are not limited to being the same or different in color, but only as long as they are the same or different in optical properties, such as the manner of reflection and absorption of light.
第１，２及び３図は夫々従来のパターンの欠陥検査方法
の説明に供する路線図、第４図は本発明の一例を示す路
線的プロツク線図である。1, 2 and 3 are route diagrams for explaining the conventional pattern defect inspection method, respectively, and FIG. 4 is a route block diagram showing an example of the present invention.
Claims (1)
が形成された被検査物と、透明基板上に上記被検査物の
パターンと同一の基準となる不透明材より成る基準パタ
ーンを形成した基準物とを、テレビカメラの光軸上に上
記両パターンが一致するように配列し、該テレビカメラ
で上記被検査物及び基準物を撮像して上記被検査物の欠
陥の検査をするパターンの欠陥検査装置に於て、上記基
準物を上記被検査物に対し上記テレビカメラ側に配置す
ると共に、上記基準パターンを形成する不透明材の色を
上記被検査物の素材の色と同一に選び上記被検査物のパ
ターン以外の不要な部分の存否を検査するようになした
ことを特徴とするパターンの欠陥検査装置。1 An object to be inspected on which a pattern made of an opaque material of a different color is formed on a material, and a standard in which a reference pattern made of an opaque material, which is the same reference as the pattern of the object to be inspected, is formed on a transparent substrate. Objects are arranged on the optical axis of a television camera so that both patterns coincide, and the television camera images the object and the reference object to inspect the object for defects. In the inspection device, the reference object is placed on the television camera side with respect to the object to be inspected, and the color of the opaque material forming the reference pattern is selected to be the same as the color of the material of the object to be inspected. A pattern defect inspection device characterized by inspecting the presence or absence of unnecessary parts other than the pattern of an object to be inspected.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54011101A JPS5922371B2 (en) | 1979-02-01 | 1979-02-01 | Pattern defect inspection equipment |
| DE19803003133 DE3003133A1 (en) | 1979-02-01 | 1980-01-29 | DEVICE FOR EXAMINING DEFECTS ON PATTERNS |
| US06/116,450 US4330712A (en) | 1979-02-01 | 1980-01-29 | Inspection apparatus for defects on patterns |
| FR8002005A FR2448147A1 (en) | 1979-02-01 | 1980-01-30 | APPARATUS FOR DETECTING PATTERN FAULTS |
| GB8003055A GB2043884B (en) | 1979-02-01 | 1980-01-30 | Inspection apparatus for detecting pattern defects |
| CA344,801A CA1126854A (en) | 1979-02-01 | 1980-01-31 | Inspection apparatus for defects on patterns |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54011101A JPS5922371B2 (en) | 1979-02-01 | 1979-02-01 | Pattern defect inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55103725A JPS55103725A (en) | 1980-08-08 |
| JPS5922371B2 true JPS5922371B2 (en) | 1984-05-26 |
Family
ID=11768610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54011101A Expired JPS5922371B2 (en) | 1979-02-01 | 1979-02-01 | Pattern defect inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5922371B2 (en) |
-
1979
- 1979-02-01 JP JP54011101A patent/JPS5922371B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55103725A (en) | 1980-08-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6184976B1 (en) | Apparatus and method for measuring an aerial image using transmitted light and reflected light | |
| US6346966B1 (en) | Image acquisition system for machine vision applications | |
| US3972616A (en) | Apparatus for detecting the defects of the mask pattern using spatial filtering | |
| US4718767A (en) | Method of inspecting the pattern on a photographic mask | |
| JPH05118994A (en) | Method and device for inspecting defect of surface having repeating pattern | |
| JPH0875661A (en) | Defect detecting equipment | |
| JPS6321855B2 (en) | ||
| JPH04328549A (en) | Method and device for inspecting photomask | |
| US4330712A (en) | Inspection apparatus for defects on patterns | |
| US4277802A (en) | Defect inspection system | |
| JPH04321047A (en) | Device and method for inspecting photomask | |
| US6018392A (en) | Apparatus and method for inspecting phase shifting masks | |
| JPS5922371B2 (en) | Pattern defect inspection equipment | |
| JPH08247957A (en) | Defect detection method and apparatus for inspecting appearance of liquid crystal substrate or ic wafer | |
| JP3314253B2 (en) | Inspection device for color filters for viewfinder | |
| JP2653853B2 (en) | Inspection method of periodic pattern | |
| JPS6048683B2 (en) | Object surface condition inspection method and inspection device | |
| JP4664463B2 (en) | Board inspection equipment | |
| JP3068636B2 (en) | Pattern inspection method and apparatus | |
| JPH04318550A (en) | Defect inspecting device | |
| JPH07151703A (en) | Inspection device for color filter for viewfinder | |
| JPS60244029A (en) | Device for inspection | |
| JPH06229933A (en) | Observation method | |
| JPS60253822A (en) | Inspection apparatus | |
| JPS6355513A (en) | Optical device |