JPS6355513A - Optical device - Google Patents
Optical deviceInfo
- Publication number
- JPS6355513A JPS6355513A JP19880486A JP19880486A JPS6355513A JP S6355513 A JPS6355513 A JP S6355513A JP 19880486 A JP19880486 A JP 19880486A JP 19880486 A JP19880486 A JP 19880486A JP S6355513 A JPS6355513 A JP S6355513A
- Authority
- JP
- Japan
- Prior art keywords
- light
- illuminated
- specific shape
- illumination
- polarizing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 14
- 238000005286 illumination Methods 0.000 claims description 35
- 230000010287 polarization Effects 0.000 claims 1
- 230000004907 flux Effects 0.000 abstract description 3
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000004973 liquid crystal related substance Substances 0.000 description 8
- 230000000295 complement effect Effects 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000003086 colorant Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は光学装置、例えばプリント基板等の外観検査装
置、顕微鏡等に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to optical devices, such as visual inspection devices for printed circuit boards, microscopes, and the like.
従来より被検出物上に特定のパターンを投影し特定の形
状を検出する方法が自動外観検査装置に用いられている
が、この場合特定パターン像を検出するため周囲を暗く
する必要があり、作業性が著しく低下する欠点があった
。また、従来より顕微鏡等で明視野照明法があり検出面
のみを照明する技術が確立している。なお、半溝体ウェ
ハ等の外観異物検査装置は例えば特公昭５９−４８５４
０号公報で知られている。Conventionally, automatic visual inspection equipment has used a method of projecting a specific pattern onto the object to be detected and detecting a specific shape, but in this case, it is necessary to darken the surrounding area to detect the specific pattern image, making the work The disadvantage was that the performance was significantly reduced. Furthermore, there has been a bright field illumination method for microscopes and the like, and a technology for illuminating only the detection surface has been established. Note that an apparatus for inspecting external foreign substances such as semi-grooved wafers is disclosed in Japanese Patent Publication No. 59-4854, for example.
It is known from Publication No. 0.
本発明の目的は、特定部分の検出を行ないつつ周囲作業
面を明るく照明し、作業環境を向上するに最適な照明光
学装置を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide an illumination optical device that is optimal for brightly illuminating a surrounding work surface while detecting a specific portion and improving the work environment.
本発明の実施例による照明装置は、照明光学系において
投影レンズの焦点面上に特定形状（パターン）遮光板を
配し、この形状を被照明面上に投影し特定部分照明を行
なうことと、外部の周囲−般照明に水平偏光板を配し水
平偏光光にて照明しかつ像検出光学系に垂直偏光板を配
し外部の水平偏光照明光を除去することと（この場合、
水平偏光光は互いに９０°位相の異なった偏光光を意味
する）、この両者を組合せることにより、外部の周囲作
業面を明るく照明し、同時に特定形状のみを照明および
検出することを特徴とする。An illumination device according to an embodiment of the present invention includes disposing a light-shielding plate with a specific shape (pattern) on the focal plane of the projection lens in the illumination optical system, and projecting this shape onto a surface to be illuminated to perform specific partial illumination. A horizontal polarizing plate is arranged in the external ambient general illumination to illuminate with horizontally polarized light, and a vertical polarizing plate is arranged in the image detection optical system to remove the external horizontally polarized illumination light (in this case,
(Horizontally polarized light refers to polarized light that is 90 degrees out of phase with each other), and by combining the two, it is possible to brightly illuminate the external surrounding work surface, and at the same time illuminate and detect only a specific shape. .
上記のような構成によれば、特定形状の遮光板（照明マ
スク）によって、被検査物、被ａｍ物等の対象物の特定
部分が照明される。従って、対象物の特定範囲にある像
を暗視野背景で接眼レンズで観察したり、或はビデオカ
メラを使用してモニタテレビ等に写し出すことができる
。一方対象物を左右上下に走査するような場合、作業面
或は対象物の広い範囲を明るくする照明光は接眼レンズ
や撮像装置に到達しない光学系とされているので、投影
面は暗視野、対象物面は広範囲の照明が可能となった。According to the above configuration, a specific portion of an object such as an inspection object or an am object is illuminated by a light shielding plate (illumination mask) having a specific shape. Therefore, an image in a specific range of the object can be observed with an eyepiece against a dark field background, or it can be displayed on a monitor television or the like using a video camera. On the other hand, when scanning an object horizontally, vertically, and horizontally, the illumination light that illuminates a wide area of the work surface or object is an optical system that does not reach the eyepiece or imaging device, so the projection surface is a dark field, It is now possible to illuminate a wide range of object surfaces.
このように暗視野と広範囲の照明という相矛盾する要求
を本発明では満足させることができた。In this way, the present invention was able to satisfy the contradictory demands of dark field and wide range illumination.
以下本発明の詳細を図面を参照して説明する。 The details of the present invention will be explained below with reference to the drawings.
第１図は本発明を応用した、特定形状検出照明装置の全
体構成図を示す。FIG. 1 shows an overall configuration diagram of a specific shape detection illumination device to which the present invention is applied.
ここでは特定形状投影照明に明視野照明装置を用いてい
るが、この照明系は別に設けてもさしつかえない。明視
野照明用光源１より出た光束は鏡筒内部の４５″′ハー
フミラ−２により９０°屈折しレンズ３により被照明面
４に送られ、同一の光学経路を戻り再びレンズ３を通過
し、今度は４５°ハーフミラ−２を通過し撮像装置５上
で結像する。この場合撮像装置５は目視投像の接眼レン
ズ等でもさしつかえない、この照明系において、レンズ
３の焦点面は撮像装置５の面上の他に、４５０ハーフミ
ラ−２にて９０°屈折した光路上にも存在する。いま、
この光路上の焦点面に特定形状の遮光板６を配すると、
この特定形状が被照明面４に結像（投影）シ、結果的に
特定形状部のみの照明を行なう。Here, a bright field illumination device is used for specific shape projection illumination, but this illumination system may be provided separately. The light beam emitted from the light source 1 for bright field illumination is refracted by 90 degrees by the 45'' half mirror 2 inside the lens barrel, sent to the illuminated surface 4 by the lens 3, returns along the same optical path, passes through the lens 3 again, This time, the image passes through the 45° half mirror 2 and is formed on the imaging device 5. In this case, the imaging device 5 may be an eyepiece for visual projection, etc. In this illumination system, the focal plane of the lens 3 is the same as that of the imaging device 5. In addition to being on the plane of
When a light shielding plate 6 of a specific shape is placed on the focal plane on this optical path,
This specific shape is imaged (projected) onto the illuminated surface 4, and as a result, only the specific shape portion is illuminated.
以上の照明装置に加え、外部照明用光源７よりの光束を
水平偏光板８を通過させ水平偏光光として被照明面４を
照明し、この反射光が撮像装置５に到達しないように撮
像光路上に垂直偏光（水平偏光と９０°の位相差を有す
）板を配し遮光するようにする。In addition to the above-mentioned illumination device, the light flux from the external illumination light source 7 is passed through a horizontal polarizing plate 8 to illuminate the illuminated surface 4 as horizontally polarized light. A vertically polarized light plate (having a phase difference of 90° from the horizontally polarized light) is arranged to block light.
このような照明装置を用いると、撮像（投像）した結果
は第２図−（ａ）のように特定形状部分のみを検出する
ことができ、かつ被照明面上は第２図（ｂ）に示すよう
に−様な均一照明を得ることができる。このためローカ
ルウィンドやスリット光照明等の特定形状照明において
周囲を暗くすることなく特定形状検出を行なうことがで
きるため、作業性が向上しかつ周辺画像を他の光学装置
を用いて検出し別の情報として処理できる等の利点があ
る。When such an illumination device is used, the imaged (projected) result can detect only a specific shaped part as shown in Figure 2-(a), and the illuminated surface can be detected as shown in Figure 2-(b). It is possible to obtain uniform illumination as shown in the figure. For this reason, it is possible to detect a specific shape without darkening the surrounding area when using specific shape illumination such as local window or slit light illumination, improving work efficiency and detecting surrounding images using other optical devices. It has the advantage of being able to be processed as information.
以下、本発明装置の応用例を２例、第３図および第４図
を用いて説明する。Hereinafter, two examples of application of the device of the present invention will be explained using FIGS. 3 and 4.
第３図に透過形の液晶装置を用い、特定形状遮光板のパ
ターンを可変とする応用例を示す。FIG. 3 shows an application example in which a transmissive liquid crystal device is used and the pattern of a light-shielding plate of a specific shape is variable.
第３図において光源１１とハーフミラ−１４は、それぞ
れ第１図における明視野照明用光源１と４５°ハーフミ
ラ−１２に対応し、また透過層液晶１３は第１図の特定
形状遮光板６の位置にその代替として配される。ここで
、光源１１より送り出された光束は、透過層液晶１２を
通過しハーフミラ−１４により被照明面へ照射される。In FIG. 3, the light source 11 and the half mirror 14 correspond to the bright field illumination light source 1 and the 45° half mirror 12 in FIG. will be placed as an alternative. Here, the light beam sent out from the light source 11 passes through the transparent layer liquid crystal 12 and is irradiated onto the illuminated surface by the half mirror 14.
いま液晶点燈装置１３により透過層液晶１２の点燈パタ
ーンをコントロールすれば遮光形状が変化し、特定形状
照明パターンが可変できる。Now, if the lighting pattern of the transparent layer liquid crystal 12 is controlled by the liquid crystal lighting device 13, the light shielding shape changes, and the specific shape illumination pattern can be varied.
なお、この場合透過形液晶を通過した光束はそれ自体が
偏光しているため、外部照明に用いる偏光板はこの液晶
透過光束と９０°位相のずれたものを用いる。In this case, since the light beam passing through the transmissive liquid crystal is itself polarized, the polarizing plate used for external illumination is 90° out of phase with the light beam transmitted through the liquid crystal.
第４図に本発明の９０°偏光光の代りとして補色の関係
を有する光束を用いた例を示す、この例では被照明面を
補色光にて照明するため周囲照明における作業性は低下
するものの、投像自体が高コントラストにて得られる。Figure 4 shows an example in which a light beam having a complementary color relationship is used instead of the 90° polarized light of the present invention. In this example, the surface to be illuminated is illuminated with complementary color light, although the workability in ambient illumination is reduced. , the projection itself can be obtained with high contrast.
第４図は特に背景色の選択反射を考慮した照明方法であ
る。FIG. 4 shows an illumination method that takes into consideration selective reflection of the background color.
第４図において、反射面２１、低波長カットフィルタ２
３および長波長カットフィルタ２５はそれぞれ第１図の
被照明面４、水平偏光板８および垂直偏光板９の位置に
それぞれ配する。反射面２１はある種の着色が施してあ
り、その表面が反射面選択反射特性２２（波長−反射率
特性）のような特性とする。いまこの選択反射光と互い
に補色の関係にある波長成分で照明および投像すれば、
反射面２１上は明度が落ち、この面上に他の選択反射特
性の異物等が存在した時、高コントラストの投像が検出
できる６本例では低波長カットフィルタ２３にて低波長
カットフィルタ特性２４（波長−透過率特性）の光束で
周囲を照明し、投像光学系に長波長カットフィルタ２５
を配し長波長カットフィルタ透過特性２６（波長−透過
率特性）で投像するものである。ここで明視野照明系は
第１図同様に配し、また補色の関係はこの限りでない。In FIG. 4, a reflective surface 21, a low wavelength cut filter 2
3 and the long wavelength cut filter 25 are arranged at the positions of the illuminated surface 4, the horizontal polarizing plate 8, and the vertical polarizing plate 9, respectively, in FIG. The reflective surface 21 is colored in a certain manner, and its surface has characteristics such as reflective surface selective reflection characteristics 22 (wavelength-reflectance characteristics). Now, if we illuminate and project with wavelength components that are complementary colors to this selectively reflected light,
The brightness decreases on the reflective surface 21, and when there is a foreign object with other selective reflection characteristics on this surface, a high contrast projection can be detected.6 In this example, the low wavelength cut filter 23 has low wavelength cut filter characteristics. 24 (wavelength-transmittance characteristic) to illuminate the surrounding area, and a long wavelength cut filter 25 is installed in the projection optical system.
An image is projected using a long wavelength cut filter transmission characteristic 26 (wavelength-transmittance characteristic). Here, the bright field illumination system is arranged as in FIG. 1, and the relationship of complementary colors is not limited to this.
第５図には第４図を実現するための背景色の原理を示す
、レンズ３１を用いて集光した光束を選択透過フィルタ
３２を通して結偉させる（このフィルタはレンズ３１の
前面でもさしつかえない。FIG. 5 shows the principle of the background color for realizing FIG. 4, in which a light beam condensed using a lens 31 is passed through a selective transmission filter 32 (this filter may also be placed in front of the lens 31).
ここで背景３４の選択反射特性が第５図（ｄ）（波長−
反射率特性）、異物３３の選択反射特性が第５図（Ｃ）
（波長−反射率特性）とすれば、選択透過フィルタ３２
の選択透過特性を第５図（ｂ）（波長−反射率特性）と
することにより、異物３３を高コントラストにて検出で
きる。Here, the selective reflection characteristics of the background 34 are shown in FIG. 5(d) (wavelength -
Figure 5 (C) shows the selective reflection characteristics of the foreign object 33.
(wavelength-reflectance characteristic), selective transmission filter 32
By setting the selective transmission characteristic as shown in FIG. 5(b) (wavelength-reflectance characteristic), the foreign matter 33 can be detected with high contrast.
本発明によれば、特定形状照明を行なうと同時に周囲作
業面を高明度に保っておけるため、作業性および安全性
等の向上が実現できる。According to the present invention, since the surrounding work surface can be kept at high brightness while illuminating a specific shape, work efficiency, safety, etc. can be improved.
第１図は本発明を用いた照明装置の全体構成を示す図、
第２図は第１図の装置による照明効果を示す図、第３図
は本発明に透過形液晶を利用した応用例を示す図、第４
図は９０°偏光光の代わりに補色関係にある光束を用い
た本発明の他の実施例を示す図、第５図は本発明による
背景色の原理を示す図である。
１・・・明視野照明用光源、２・・・４５°ハーフミラ
−１３・・・レンズ、４・・・被照明物（被検査物）、
５・・・撮像装置、６・・・照明マスク、７・・・照明
装置、８・・・水平偏光板、７・・・外部照明用光源
８・・・水平偏光板
９・・・圭直偏光板
第３図
１１・・・光源
１２・・・透過形液晶
１３・・・液晶点燈装置
１４・・・ハーフミラ−
ｃ ｄFIG. 1 is a diagram showing the overall configuration of a lighting device using the present invention,
2 is a diagram showing the illumination effect of the device shown in FIG.
The figure shows another embodiment of the present invention in which light beams having complementary colors are used instead of 90° polarized light, and FIG. 5 is a diagram showing the principle of background color according to the present invention. 1... Light source for bright field illumination, 2... 45° half mirror 13... Lens, 4... Object to be illuminated (object to be inspected),
5... Imaging device, 6... Illumination mask, 7... Illumination device, 8... Horizontal polarizing plate, 7... Light source for external illumination 8... Horizontal polarizing plate 9... Keinao Polarizing plate Fig. 3 11... Light source 12... Transmissive liquid crystal 13... Liquid crystal lighting device 14... Half mirror c d
Claims (1)
、上記対象物を第１の偏光板を介して照明する第２の照
明系と、上記第１の偏光板とは偏光軸をずらして配置し
た第２の偏光板を介して上記対象物を投影する投影系と
を具備して成ることを特徴とする光学装置。1. A first illumination system that illuminates the object in a specific shape range, a second illumination system that illuminates the object through a first polarizing plate, and the first polarizing plate has a polarization axis. An optical device comprising: a projection system for projecting the object through a second polarizing plate that is arranged in a shifted manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19880486A JPH07107578B2 (en) | 1986-08-27 | 1986-08-27 | Optical device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19880486A JPH07107578B2 (en) | 1986-08-27 | 1986-08-27 | Optical device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6355513A true JPS6355513A (en) | 1988-03-10 |
| JPH07107578B2 JPH07107578B2 (en) | 1995-11-15 |
Family
ID=16397189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19880486A Expired - Lifetime JPH07107578B2 (en) | 1986-08-27 | 1986-08-27 | Optical device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07107578B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01314220A (en) * | 1988-06-15 | 1989-12-19 | Mitsuhiko Yamada | Optical microscope making common use of vertical light and diagonal light |
| JPH04125609A (en) * | 1990-09-18 | 1992-04-27 | Satoshi Kawada | Optical microscope |
| JP2002196258A (en) * | 2000-12-27 | 2002-07-12 | Asahi Optical Co Ltd | Video type microscope |
-
1986
- 1986-08-27 JP JP19880486A patent/JPH07107578B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01314220A (en) * | 1988-06-15 | 1989-12-19 | Mitsuhiko Yamada | Optical microscope making common use of vertical light and diagonal light |
| JPH04125609A (en) * | 1990-09-18 | 1992-04-27 | Satoshi Kawada | Optical microscope |
| JP2002196258A (en) * | 2000-12-27 | 2002-07-12 | Asahi Optical Co Ltd | Video type microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07107578B2 (en) | 1995-11-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |