JPS592226A - Magnetic recording medium - Google Patents

Abstract

PURPOSE:To obtain a magnetic recording medium of a thin metallic film type which is usable as a discoid recording body for rotation, by controlling min. and max. incident angles, the amt. of the oxygen to be introduced and the thickness of a magnetic layer in forming a laminated structure of a nonmagnetic material and a magnetic material by a continuous vacuum deposition method. CONSTITUTION:A vessel 25 contg. cobalt 24 and a vessel 23 contg. aluminum 22 are disposed in the lower part of a cooling can 17, and both materials are heated and evaporated by heating sources 26. Metallic atoms 18, 19 evaporate from the respective evaporating sources and stick on a substrate 27, thereby forming a thin metallic film layer. A partiton plate 16 prevents the atoms 18, 19 from sticking on unwinding and winding systems, and a limiting plate 21 prevents the intersection of the atoms of the aluminum and the cobalt and limits the incident angles of the atoms 18, 19 to the substrate 27. The min. and max. incident angles, the amt. of the oxygen to be introduced and the thickness of the magnetic layer are adequately controlled and the magnetic recording medium is formed by a continuous vacuum deposition method in such a way that the ratio MD/TD of the coercive force and residual magnetization thereon in the longitudinal direction MD of the polymer substrate and the direction TD at a right angle to said longitudinal direction attains within 0.9-1.2 in both coercive force and residual magnetization.

Description

【発明の詳細な説明】 本発明は、真空蒸着法により形成される金属薄膜型の磁
気記録媒体に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a metal thin film type magnetic recording medium formed by a vacuum evaporation method.

近年磁気記録分野は高密度記録化が進められている。こ
の高密度記録を行なうために、機器の開発と共に記録媒
体の改良も行なわれている。一般的に磁気記録媒体にお
いて高密度記録を行なうための記録媒体への要求には、
抗磁力（Ｈａ）を大きくすること、磁束密度を上げかつ
飽和磁束密度（Ｂｓ）と残留磁束密度（Ｂｒ）の比Ｂｒ
／Ｂ、　　（角形比）を１．０に近づけること、反磁場
の影響を少なくする磁性層とすることなどが云われてい
る。これらを実現するために塗布型の記録媒体において
は磁性粉の改良、磁性層中の充填率の向上や表面性の改
良などがなされている。また他の方法としては磁性層が
１００％磁性体である金属薄膜による磁気記録媒体の研
究や開発も行なわれている。In recent years, high-density recording has been progressing in the field of magnetic recording. In order to perform this high-density recording, not only equipment has been developed but also recording media have been improved. In general, requirements for recording media for high-density recording in magnetic recording media include:
Increasing coercive force (Ha), increasing magnetic flux density, and increasing the ratio Br of saturation magnetic flux density (Bs) and residual magnetic flux density (Br)
It is said that /B, (squareness ratio) should be made close to 1.0, and that the magnetic layer should be made to reduce the influence of demagnetizing fields. To achieve these goals, improvements have been made in coating type recording media, such as improving the magnetic powder, increasing the filling rate in the magnetic layer, and improving the surface properties. As another method, research and development are being carried out on magnetic recording media using metal thin films in which the magnetic layer is 100% magnetic.

この金属薄膜による記録媒体は現状では磁性層厚が塗布
型の１〜３ミクロンに比べて極めて薄く１、０６０５〜
１．０　ミクロン程度であるので反磁場の影響が少なく
、短波長記録に適した高密度記録媒体となりうる。At present, the magnetic layer thickness of this metal thin film recording medium is extremely thin compared to the coated type, which is 1 to 3 microns.
Since it is approximately 1.0 microns, it is less affected by the demagnetizing field and can be a high-density recording medium suitable for short wavelength recording.

従来、金属薄膜の形成゛方法としては、メ・ツキ法、ス
パッター法、イオンブレーティング法、真空蒸着法等が
知られている。これらのどの方法を用いても薄膜の形成
手法や条件によって金属薄膜型で高密度記録に適する媒
体を形成することが可能である。Conventionally, known methods for forming metal thin films include a plating method, a sputtering method, an ion blasting method, and a vacuum evaporation method. Regardless of which of these methods is used, it is possible to form a metal thin film type medium suitable for high-density recording, depending on the method and conditions for forming the thin film.

本発明は上述の金属薄膜の形成方法のうち真空蒸着法を
用い、特に真空槽内に長尺の高分子基板を巻出し、巻取
りなどを行なうための走行系と、蒸着用クーリングキャ
ン及び蒸着系を設け、長尺の高分子基板を連続的に走行
させながら高分子基板表面に金属を蒸着する連続式真空
蒸着法により金属簿膜型磁気記録媒体を形成したもので
あり、この連続式真空蒸着法による金属薄膜型磁気記録
媒体で高分子基板の長手方向（以下Ｍ、Ｄと称ずンと長
手方向に直角な方向（以下ＴＤと称す）の抗磁力（Ｈａ
）や残留磁化（Ｍｒ）などの緒特性のＭＤ／ＴＤ　　比
をほぼ１．０にした磁気記録媒体である。The present invention uses a vacuum evaporation method among the above-mentioned metal thin film forming methods, and in particular, unwinds a long polymer substrate into a vacuum chamber and includes a running system for winding it, a cooling can for evaporation, and a vacuum evaporation method for evaporation. A metal film type magnetic recording medium is formed by a continuous vacuum evaporation method in which a long polymer substrate is continuously moved and metal is deposited on the surface of the polymer substrate. Coercive force (Ha
) and residual magnetization (Mr), which have an MD/TD ratio of approximately 1.0.

従来から知られている真空蒸着法は減圧された料を設置
し、この蒸着材料を加熱、溶融して原子となし、これを
蒸発させて蒸発原子が基板上に付着する手法である。近
年真空蒸着法も改良がなされ、長尺の基板に連続して蒸
着することが行なわれるようになって来た。The conventionally known vacuum evaporation method is a technique in which a material under reduced pressure is installed, the evaporation material is heated and melted to form atoms, and the evaporated atoms are evaporated onto a substrate. Vacuum deposition methods have been improved in recent years, and continuous deposition on long substrates has become possible.

第１図に連続式真空蒸着の略図を示す。長尺の高分子基
板２（以下基板という）はクーリングキャン１の外周に
密着してクーリングキャン１と共に矢印入方向に走行さ
れる。このときクーリングキャン１の下部に設置された
蒸発源３から蒸発した原子群４が基板表面に刺着して蒸
着層を成す。FIG. 1 shows a schematic diagram of continuous vacuum deposition. A long polymer substrate 2 (hereinafter referred to as a substrate) is in close contact with the outer periphery of the cooling can 1 and is moved together with the cooling can 1 in the direction indicated by the arrow. At this time, the atomic group 4 evaporated from the evaporation source 3 installed at the bottom of the cooling can 1 sticks to the substrate surface to form a vapor deposition layer.

この蒸着層の断面形状は、鉄、ニッケル、コバルトなど
の場合第２図に示すように、基板２上に蒸着層６が形成
される。この鉄、ニッケル、コバルトなどの場合の蒸着
層形状は蒸着速度や蒸発原子４と基板２との入射角、蒸
発レートナどにより変化するが、基本的には第１図に示
す連続真空蒸着法では第２図に示すように成長する。鉄
、ニッケル、コバルトなどの単一もしくは合金のこのよ
うな結晶成長は、これらの磁性材料を用いて金属薄膜型
の磁気記録媒体を形成した場合、記録媒体の持つ磁気特
性に形状効果が影響することが知られている。連続式真
空蒸着法において、基板２に対する金属原子４の入射角
を最大θ１−＋９０°とし、最小入射角　θ２−−９０
°から約＋９０°寸で可変することにより形状効果によ
って磁気特性の抗磁力（Ｈｃ）や角形比を変えることが
できる。The cross-sectional shape of this vapor deposited layer is as shown in FIG. 2 in the case of iron, nickel, cobalt, etc., and a vapor deposited layer 6 is formed on the substrate 2. The shape of the evaporated layer in the case of iron, nickel, cobalt, etc. changes depending on the evaporation rate, the angle of incidence between the evaporated atoms 4 and the substrate 2, the evaporation rate, etc., but basically the continuous vacuum evaporation method shown in Figure 1 It grows as shown in Figure 2. Such crystal growth of single or alloy materials such as iron, nickel, and cobalt has a shape effect that affects the magnetic properties of the recording medium when a metal thin film type magnetic recording medium is formed using these magnetic materials. It is known. In the continuous vacuum evaporation method, the maximum incident angle of the metal atoms 4 with respect to the substrate 2 is θ1−+90°, and the minimum incident angle is θ2−−90°.
By varying the dimensions from 0.degree. to about +90.degree., the coercive force (Hc) and squareness ratio of the magnetic properties can be changed by the shape effect.

一方このような形状効果は基板２のＭＤとＴＤの特性差
を生じる結果となる。このＭＤとＴＤの特性差は記録媒
体全長尺のテープ状にして使用する場合は好ましいもの
であるが、記録媒体を円板状として回転使用する場合は
好１しくない。すなわち、円籾状にして回転使用する場
合、その円板の一回転に対してＭＤとＴＤが各２回検出
゛器部分を通過する毎に、入力及び出力特性が変化する
ことになり、この入出力特性の湯度の差は排除されなけ
れば円板状の回転用記録媒体としての使用は困難となる
。例えば、デジタルオーディオディスクやフロッピーデ
スクの記録媒体として使用する（Ａはトラック１個のう
ち最大出力を含む約２０００磁束反転の平均出力、Ｂは
同じく最小出力を含む平均出力うが小さい方が望ましい
。従って連続式真空蒸着法で形成された金属薄膜型磁気
記録媒体を円板状にして回転させて使用する場合には、
ＭＤとＴＤの特性をいかにしてＭＤ／ＴＤ　＝１．０に
近づけるかが課題であった。On the other hand, such a shape effect results in a difference in characteristics between the MD and TD of the substrate 2. This difference in characteristics between MD and TD is preferable when the recording medium is used in the form of a full-length tape, but is not preferable when the recording medium is used in the form of a disk and rotated. In other words, when the disk is rotated in a round shape, the input and output characteristics change each time MD and TD pass through the detector twice for one rotation of the disk. Unless the difference in temperature between input and output characteristics is eliminated, it will be difficult to use it as a disk-shaped rotating recording medium. For example, it is used as a recording medium for a digital audio disk or a floppy disk (A is the average output of about 2000 magnetic flux reversals including the maximum output in one track, and B is the average output including the minimum output, which is preferably smaller. Therefore, when a metal thin film magnetic recording medium formed by continuous vacuum evaporation is used in a rotating disk shape,
The challenge was how to bring the MD and TD characteristics closer to MD/TD = 1.0.

本発明は上述のような諸問題を解決することができる金
属薄膜型の磁気記録媒体を提供するものである。以下そ
の一実施例について説明する。The present invention provides a metal thin film type magnetic recording medium that can solve the above-mentioned problems. An example of this will be described below.

第３図に本発明に用いた連続式真空蒸着装置の構成図を
示す。真空槽１１は排気管１２により排気装置１３に接
続されている。前記真空槽１１内には長尺のポリエチレ
ンテレフタレ＝！・フィルム等からなる基板２７を巻い
た巻出軸１６及び巻取東１ｊ１４が設けられている。こ
の巻出２巻取軸は基板２７の走行方向によって巻取軸１
巻出軸が入れ変わる。基板２７は巻出軸１６からクーリ
ングキャン１７の外周に密着してこのクーリングキャン
１７と共に回転走行した後巻取軸１４に巻取られる。ク
ーリングキャン１７の下部にはコバルト２４を入れた容
器２６及びアルミニウム２２を入れた容器２３が配置さ
れ、これらは加熱源２６により加熱されて蒸発されるよ
うになっている。各々の蒸発餘から金属原子１８．１９
が蒸発して基板２７上に付着し、金属薄膜層を形成する
。１６は金属原子１８．１９が巻出２巻取系に付着する
のを防止するための仕切板、２１はアルミニウムとコバ
ルトの原子が交わらないようにするとともに基板２７へ
の金属原子１８．１９の入射角を制限する制限板であり
、２０はガス導入口である。FIG. 3 shows a configuration diagram of a continuous vacuum evaporation apparatus used in the present invention. The vacuum chamber 11 is connected to an exhaust device 13 via an exhaust pipe 12. Inside the vacuum chamber 11 is a long polyethylene terephthalate =! - An unwinding shaft 16 and a winding east 1j14 are provided on which a substrate 27 made of a film or the like is wound. This unwinding second winding shaft is connected to the winding shaft 1 depending on the running direction of the substrate 27.
The unwinding shaft is replaced. The substrate 27 is brought into close contact with the outer periphery of the cooling can 17 from the unwinding shaft 16, rotates together with the cooling can 17, and is then wound onto the winding shaft 14. At the bottom of the cooling can 17, a container 26 containing cobalt 24 and a container 23 containing aluminum 22 are arranged, and these are heated by the heat source 26 and evaporated. 18.19 metal atoms from each evaporator
is evaporated and deposited on the substrate 27 to form a metal thin film layer. 16 is a partition plate for preventing metal atoms 18 and 19 from adhering to the unwinding and winding system; 21 is a partition plate for preventing aluminum and cobalt atoms from intersecting and preventing metal atoms 18 and 19 from adhering to substrate 27; This is a restriction plate that limits the angle of incidence, and 20 is a gas inlet.

この蒸着系でθ９ｏはコバルト原子１９の基板２７への
最大入射角（９０°Ｊを示し、θはその最小入射角を示
す。この最大入射角は図示していない他の遮へい板によ
り、また最小入射角θは制限板２１あるいは容器２６を
左右に移動させること等により任意に角度を設定するこ
とができるようになっている。なおこの入射角調整のた
めの具体的な機構は省略する。In this vapor deposition system, θ9o indicates the maximum incident angle (90°J) of the cobalt atoms 19 onto the substrate 27, and θ indicates the minimum incident angle. The angle of incidence θ can be arbitrarily set by moving the limiting plate 21 or the container 26 left and right.The specific mechanism for adjusting the angle of incidence will be omitted.

第４〜７図に第３図の連続式真空蒸着装置により得られ
た一般的なコバルト原子体とした合金の金属薄膜型磁気
記録媒体の抗磁力（Ｈａ）特性を示し、これらにおいて
真空槽１１の真空Ｉｆを５×＝５ １０　　Ｔｏｒｒ　とした。第４図は導入ガス酸素（０
２）を０．３　ｅ　／　ｍｉ　ｎ、最大入射角＝９０°
として最小入射角を変えた場合のＭＤとＴＤの抗磁力（
Ｈａ）も太きくなるが、最小入射角に対する抗磁力（Ｈ
ｌｌ−）のＭＤ／ＴＤ比は約１゜５〜１．８であった。4 to 7 show the coercive force (Ha) characteristics of a metal thin film type magnetic recording medium made of a general cobalt atom alloy obtained by the continuous vacuum evaporation apparatus shown in FIG. The vacuum If was set to 5×=5 10 Torr. Figure 4 shows the introduced gas oxygen (0
2) at 0.3 e/min, maximum angle of incidence = 90°
The coercive force of MD and TD when the minimum incident angle is changed as (
Ha) also becomes thicker, but the coercive force (H
The MD/TD ratio of ll-) was approximately 1°5-1.8.

また第５図には導入ガｘ　０２＝＝０．３１７　ｍｉｎ
、最小入射角を一２０°として最大入射角を変化させた
場合で、磁性層厚が１０００八でのＭＤ、ＴＤの抗磁力
（Ｈｃ　）特性を示す。この第５図においては最大入射
角が小さい領域においては抗磁力（Ｈａ）のＭＤ／ＴＤ
比はほぼ１．０に近づくが抗磁力（Ｈｃ）は約２０００
ｅと小さい。Also, in Figure 5, the introduction gas x 02 = = 0.317 min
, the coercive force (Hc) characteristics of MD and TD with a magnetic layer thickness of 1000° are shown when the minimum incidence angle is -20° and the maximum incidence angle is varied. In this Figure 5, in the region where the maximum angle of incidence is small, the MD/TD of coercive force (Ha)
The ratio approaches 1.0, but the coercive force (Hc) is about 2000
e and small.

第６図は最小入射角を一２０°、最大入射角を９００と
した場合の酸素導入量と抗磁力（Ｈａ）との関係を示し
たもので、酸素導入量がＯ（１／　ｍｉｎにおいては抗
磁力のＭＤ／ＴＤ比はほぼ１．０であるが抗磁力（Ｈｃ
）は約２０００ｅと小さい。酸素導入ガス量によりＭＤ
　、ＴＤの抗磁力（Ｈａ）はともに大きくなるがこの場
合は抗磁力（Ｈａ）のＭＤ／ＴＤ比は１．○からずれる
。この場合の磁性層厚は酸素導入量にかかわらず１００
０八とした。Figure 6 shows the relationship between the amount of oxygen introduced and the coercive force (Ha) when the minimum incident angle is -20° and the maximum incident angle is 900 degrees. The MD/TD ratio of coercive force is approximately 1.0, but the coercive force (Hc
) is small at about 2000e. MD depending on the amount of oxygen introduced gas
Both the coercive force (Ha) of TD become large, but in this case, the MD/TD ratio of coercive force (Ha) is 1. It deviates from ○. In this case, the magnetic layer thickness is 100 mm regardless of the amount of oxygen introduced.
I made it 08.

第７図に入射角を一２０〜９０°とし、酸素導入量を０
．３ｅ／ｍｉｎとして磁性層の膜厚を変えた場合の抗磁
力（Ｈａ）％性を示す。なお磁性層厚は蒸発レートを一
定にして基板の走行速度を変えて膜厚を制限Ｉ：た。こ
の場合磁性層が薄い領域で抗磁力（Ｈａ）が犬きくかつ
ＭＤ／ＴＤ比が１．０に近づいている。In Figure 7, the incident angle is -20 to 90°, and the amount of oxygen introduced is 0.
．． The coercive force (Ha)% properties are shown when the film thickness of the magnetic layer is changed at 3e/min. The thickness of the magnetic layer was limited by keeping the evaporation rate constant and changing the traveling speed of the substrate. In this case, in the region where the magnetic layer is thin, the coercive force (Ha) is strong and the MD/TD ratio approaches 1.0.

なお、第４〜７図において最小入射角全一２０゜とした
が−６０°の場合でも一２０°の場合とほとんど同一の
特性であった。これらの結果から、最小、最大入射角、
導入酸素量、磁性層厚を適当に制御することにより第３
図に示した連続式真空蒸着法により抗磁力のＭＤ／Ｔ　
Ｄ比及び角形比のＭＤ／ＴＤがほぼ１．０に近い金属薄
膜型の磁気記録媒体の形成ができたものである。In FIGS. 4 to 7, the minimum incident angle was all 20 degrees, but the characteristics were almost the same in the case of -60 degrees as in the case of -20 degrees. From these results, the minimum and maximum angles of incidence,
By appropriately controlling the amount of oxygen introduced and the thickness of the magnetic layer, the third
MD/T of coercive force is obtained by continuous vacuum evaporation method shown in the figure.
A metal thin film type magnetic recording medium in which the D ratio and the squareness ratio MD/TD are close to 1.0 was successfully formed.

これまでの説明では各図とも基板上に磁性層を１層蒸着
した例を示したが、実用の記録媒体として使用する場合
は本説明中の１層厚では出方が低いため多層構造にする
。この場合１層当りの抗磁力（Ｈａ）は多層にすること
により減少するが使用上問題の範囲であった。In the explanations so far, each figure shows an example in which a single magnetic layer is deposited on the substrate, but when used as a practical recording medium, a multilayer structure is used because the thickness of one layer in this explanation is low. . In this case, the coercive force (Ha) per layer can be reduced by using multiple layers, but this is within the range of problems in use.

次に多層構造にした場合の例を示す。この場合の共通条
件は次のとおりである。Next, an example of a multilayer structure will be shown. The common conditions in this case are as follows.

連続式真空蒸着法：真空度５　Ｘ　１０−”　Ｔｏｒｒ
、最小入射角−６０°、最大入射角９ｏｏ、酸素導入量
０・５１　／　ｍｉｎ　、磁性材料：コバルト８０％、
ニッケル２０％の合金、非磁性材料ニアルミニウム９９
．９％、その他。、１％、蒸発レート：約１０００　Ａ
　／ｓｅｃ、加熱源：　電子ヒー　ム、基板：ボリエテ
レンテレフタレート、厚す：１０μｍ、長さ１０００．
ｒＬ。Continuous vacuum evaporation method: degree of vacuum 5 x 10-” Torr
, minimum incidence angle -60°, maximum incidence angle 9oo, oxygen introduction amount 0.51/min, magnetic material: 80% cobalt,
Alloy of 20% nickel, non-magnetic material Nialuminum 99
．． 9%, others. , 1%, evaporation rate: about 1000 A
/sec, heating source: electronic heat, substrate: polyethylene terephthalate, thickness: 10 μm, length 1000.
rL.

金属薄膜層二基板上に非磁性層と磁性層の交互積層。A non-magnetic layer and a magnetic layer are alternately laminated on two thin metal film substrates.

以下余白 この実施例における条件４のＢ−Ｈカーブを第８図に示
す。第８図（ａｌはＭＤのＢ−Ｈカーブであり、（ｂ）
はＴＤのＢ−Ｈカーブである。同様に条件５のＢ−Ｈカ
ーブを第９図に示し、゛第９図（ａ）はＭＤ、（ｂ）は
ＴＤのＢ−１（カーブケ示す。The following is a margin. The BH curve of condition 4 in this example is shown in FIG. Figure 8 (al is the MD B-H curve, (b)
is the BH curve of TD. Similarly, the B-H curve under condition 5 is shown in FIG. 9, where (a) shows the B-1 curve in MD and (b) shows TD.

上記表に示すように非磁性層と磁性層から成る積層構造
による金属薄膜型磁気記録媒体は、条件により磁気的、
電磁変換的、物理的に特性が変化する。従って本発明で
は磁性層の１層当りの厚さを約６００八以下とし非磁性
層の１層当りの厚さを１０００八以下で約８Ｑ〇八以下
とし２００八以上とすることで、円板状の記録媒体とし
て十分な緒特性を有した金属薄膜型磁気記録媒体が得ら
れる。As shown in the table above, metal thin film magnetic recording media with a laminated structure consisting of a non-magnetic layer and a magnetic layer can be magnetically or
Characteristics change electromagnetically and physically. Therefore, in the present invention, the thickness per layer of the magnetic layer is about 6008 or less, and the thickness per layer of the nonmagnetic layer is about 10008 or less, about 8Q08 or less, and 2008 or more. A metal thin film type magnetic recording medium having sufficient magnetic properties as a magnetic recording medium can be obtained.

以上の説明から明らかなように本発明によれば、（１）
連続式真空蒸着法により、金属薄膜型磁気記録媒体でほ
ぼ無配向の記録媒体が得られる。As is clear from the above description, according to the present invention, (1)
By continuous vacuum evaporation, a substantially non-oriented metal thin film magnetic recording medium can be obtained.

（２）　　フロッピーディスク等の回転して使用する記
録装置の高密度記録媒体として使用できる。(2) It can be used as a high-density recording medium for rotating recording devices such as floppy disks.

（本実施例の表中条件４ｉ／ｉ：示した金属薄膜型媒体
を５層インチに打抜き、５インチ型フロッピーディスク
の記録媒体として使用したところ、ｒ−Ｆｅ２０３磁性
体による塗布型の従来の６インチフロッピーディスク用
記録媒体に比べて磁束反転周波数が１２６匹及び２５０
　ｋｌ（ｚの場合とも出力が約１．５〜１．８倍と大き
かった。〕（３）モジュレーイション特性が１．０〜７
．０％と優れている。(Condition 4i/i in the table of this example: When the shown metal thin film type medium was punched into 5-layer inch pieces and used as a recording medium for a 5-inch type floppy disk, it was found that Compared to inch floppy disk recording media, the magnetic flux reversal frequency is 126 and 250
kl (In the case of z, the output was about 1.5 to 1.8 times larger.) (3) Modulation characteristics were 1.0 to 7.
．． It is excellent at 0%.

（４）工業性が高く量産効果が期待でき、安価な製品が
大量に供給できる。(4) High industrial efficiency, mass production effects can be expected, and inexpensive products can be supplied in large quantities.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は連続式真空蒸着法の概略図、第２図は蒸着層の
成長形状を示す図、第３は本発明に供する連続式真空蒸
着装置の概略構成図、第４図、第６図、第６図、第７図
は連続式真空蒸着法による金属薄膜型磁気記録媒体の抗
磁力特性を示す図、第８図（ａ）　、　（ｂｌおよび第
９図（ａ）　、　（ｂ）はそれぞれ本発明の実施例のＢ
−Ｈ特性を示す図である。 ２．２７−・・・・・基板、１８，１９・・・・・・金
属原子。 第１図 ＠　３　！Ａ 第４図　　　　第５図 政小入ｌＩＩ穎白　　　　　　　　　　辰入λ財ＴＡ（
°）第６図 第７図 月黄、８　（Ａ） 第８図 鱈Figure 1 is a schematic diagram of the continuous vacuum evaporation method, Figure 2 is a diagram showing the growth shape of the deposited layer, Figure 3 is a schematic diagram of the continuous vacuum evaporation apparatus used in the present invention, Figures 4 and 6. , Figures 6 and 7 are diagrams showing the coercive force characteristics of a metal thin film magnetic recording medium produced by continuous vacuum evaporation, Figures 8 (a) and (bl) and Figures 9 (a) and (b) are B of the embodiment of the present invention, respectively.
FIG. 3 is a diagram showing −H characteristics. 2.27-...substrate, 18,19...metal atom. Figure 1 @ 3! A Figure 4 Figure 5.
°) Fig. 6 Fig. 7 Gekiwang, 8 (A) Fig. 8 Cod

Claims (3)

【特許請求の範囲】[Claims] （１）真空槽内に長尺の高分子基板の巻取系、蒸着用ク
ーリングキャン等の蒸着系を設けた連続式真空蒸着法で
形成される金属薄膜型の磁気記録媒体であって、その金
属薄膜型の磁気記録媒体の抗磁ツバ残留磁化が高分子基
板の長手方向（ＭＤ）とその長手方向に直角方向（ＴＤ
）の比（ＭＤ／ＴＤ）が抗磁力、残留磁化ともに０．９
〜１．２以内としたことを特徴とする磁気記録媒体。(1) A thin metal film type magnetic recording medium formed by a continuous vacuum evaporation method in which a winding system for a long polymer substrate and a evaporation system such as a cooling can for evaporation are provided in a vacuum chamber. The residual magnetization of the antimagnetic flange of a metal thin film type magnetic recording medium is the same as that in the longitudinal direction (MD) of the polymer substrate and in the direction perpendicular to the longitudinal direction (TD).
) ratio (MD/TD) is 0.9 for both coercive force and residual magnetization.
A magnetic recording medium characterized in that it is within 1.2. （２）　　高分子基板上に磁性層と非磁性層を少なくと
も２層以上積層し、磁性層は１層当り６００八以下、非
磁性層は１層当９８００Ａ以下で２００Å以上としたこ
とを特徴とする特許請求の範囲第１項記載の磁気記録媒
体。(2) At least two or more magnetic layers and non-magnetic layers are laminated on a polymer substrate, and the magnetic layer is 600 Å or less per layer, and the non-magnetic layer is 200 Å or more and 9800 A or less per layer. A magnetic recording medium according to claim 1. （３）母性材料がコバルト・ニッケルの単一もしくは合
金からなり、非磁性層がアルミニウムを主体とした金属
であることを特徴とする特許請求の範囲第１項または第
２項記載の磁気記録媒体。(3) The magnetic recording medium according to claim 1 or 2, wherein the mother material is made of cobalt-nickel alone or an alloy, and the nonmagnetic layer is a metal mainly composed of aluminum. .