JPS5920840A - Defect checking device - Google Patents
Defect checking deviceInfo
- Publication number
- JPS5920840A JPS5920840A JP13179882A JP13179882A JPS5920840A JP S5920840 A JPS5920840 A JP S5920840A JP 13179882 A JP13179882 A JP 13179882A JP 13179882 A JP13179882 A JP 13179882A JP S5920840 A JPS5920840 A JP S5920840A
- Authority
- JP
- Japan
- Prior art keywords
- light
- defect
- inspected
- photodetector
- checked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
（１）１発明の技術分野
本発明は被検査試料の不透光性検青部に生じることのあ
る欠陥を検知する手段を改良した欠陥検査、装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION (1) 1. Technical Field of the Invention The present invention relates to a defect inspection and apparatus with improved means for detecting defects that may occur in the opaque inspection area of a sample to be inspected.
（２）、技術の背景
電子計算機等各行装置に用いられるプリント基板には多
藪のスルーホールが形成畑れ、そのスルーホールには導
電手段を与えるメッキが施工されている。これらのメッ
キは必ずしも良好な状態で形成されているとは限らず、
その検査をする必要性がある。その従来の検を手段には
夫ｈ１固有の欠点を有し、それら欠点全解決しうる技術
的手段の開発が要望されている。(2) Background of the Technology Printed circuit boards used in various devices such as electronic computers have many through holes formed therein, and the through holes are plated to provide conductive means. These platings are not necessarily formed in good condition,
There is a need to conduct that inspection. The conventional detection means have drawbacks inherent to the husband h1, and there is a demand for the development of technical means that can overcome all of these drawbacks.
（３）、従来技術と問題点
υＬ来の検査手段は次のような２つの手段がある。その
１つは人手による目視検をであるが、これはスルーホー
ルの径が数百μｎ１程襄に極細になって来たυ、基板の
厚さがスルーポール径の２０〜３０倍の厚さになって来
ると、その検をが困雛になってし甘うという検介上好ま
しくない欠点を有する。又、他の１つはスルーホールの
メッキ部に通電してその導通を検査する如きものである
。この手段はメッキ部の一部に不良部分があってもその
欠陥を検出しイＲず、又時間もか＼υ、装置がコスト高
になるという欠点を冷する。(3) Prior art and problems υL There are two types of conventional inspection means as follows. One of them is manual visual inspection, which shows that the diameter of the through-hole has become extremely thin, approximately several hundred microns, and the thickness of the board is 20 to 30 times the diameter of the through-hole. When the time comes, the examiner has the disadvantage of becoming complacent and complacent. Another method is to apply electricity to the plated portion of the through hole to check its continuity. This method eliminates the drawbacks that even if there is a defective part in a part of the plated part, the defect cannot be detected, and the time and cost of the apparatus are high.
（４）０発明の目的
本発明は上述したような従来手段の欠点に鑑みて創案さ
れたもので、その１つの目的は被検１部に部分的な欠陥
があってもこれを即時的に、しかも安価に検出しうる欠
陥検査装置を提供することにあυ、そのもう１つの目的
はそのような欠陥検査装ぼをずべての不透）゛０性被検
査部の自動的検査をなしうるように構成した欠陥部を装
置、を提供することにちる。(4) Purpose of the Invention The present invention was devised in view of the shortcomings of the conventional means as described above, and one of its purposes is to immediately correct even if there is a partial defect in a part to be inspected. Another purpose is to provide a defect inspection device that can detect defects at a low cost.Another purpose is to use such a defect inspection device to automatically inspect all opaque parts to be inspected. An object of the present invention is to provide an apparatus configured to remove defective parts.
（５）１発明の構成
そして、その１つの目的は透）Ｌ性欠陥部が生ずるおそ
れのある不透光性被検査部を有する被検査試料の不透光
性被検査部に対し一側に光注入器を、又その他側に光検
知器を設置して該光検知器の出力へ欠陥表示装置全接続
して構成することによυ、又そのもう１つの目的はこの
ように構成された装置の被検彎試別を移動ステージで移
動させるように構成することによって達成される。(5) 1 Structure of the Invention And one of the purposes is to By configuring the optical injector and installing a photodetector on the other side and connecting all the defect display devices to the output of the photodetector, another purpose is to configure it in this way. This is accomplished by configuring the device to move the test curvature with a moving stage.
（６）１発明の実施例
以下、添付図面を参照しながら、本発明の実施例を駅、
明する。(6) 1 Embodiment of the Invention Hereinafter, embodiments of the present invention will be described with reference to the attached drawings.
I will clarify.
第１図は本発明の一実施例を示す図である。FIG. 1 is a diagram showing an embodiment of the present invention.
１は欠陥検査装置で、これは被検を試料２のスルーポー
ル９に対し一側の導光部３に光注入器、例えば）を源４
が設置１され、その他側の導光部５に光検知器６が設置
され、そして光検知器６の出力へ欠陥表示手段７が接続
されて構成されている。いづれの導光部も試料２への、
又はそこから光検知器６への導光性をもって構成される
が、後述の移動ステージ１５と糾合わされて導光性を有
してもよい。Reference numeral 1 denotes a defect inspection device, which inserts a light injector (for example) into a light guide section 3 on one side of a through pole 9 of a sample 2 to be inspected.
is installed 1, a photodetector 6 is installed in the light guide section 5 on the other side, and a defect display means 7 is connected to the output of the photodetector 6. Both light guiding parts are connected to sample 2.
Alternatively, it is configured to have light guiding properties from there to the photodetector 6, but it may also be combined with a moving stage 15, which will be described later, to have light guiding properties.
被検歪試別２は例えばプリント板で、以下これについて
説明する。プリント板２は透光性欠陥部８が生ずるおそ
れのある、ｆ１ｍｌメッキされたスルーポール（不透光
性被検査部）９を有し、スルーポール９の一側面まで導
光部、例えば絶縁板３が形成されておシ、スルーホール
の他側面まではスルーホール９の中穿４５１（即ち導光
部５が形成されている。The strain test type 2 to be tested is, for example, a printed board, which will be explained below. The printed board 2 has a through pole (non-transparent inspection area) 9 plated with f1ml, which may cause a translucent defective part 8, and has a light guiding part, such as an insulating plate, up to one side of the through pole 9. 3 is formed, and a hollow 451 of the through hole 9 (that is, a light guide portion 5) is formed up to the other side of the through hole.
そして、光検知器６はピストン１０によυ上下動可能に
構成され、又つＹＳ検知器６がスルーホール９上の所定
の位俗に位Ｉ′ｉ♂′伺けられたとき光検知器６が外来
光を検知しないように光シール、例えばゴムパツキン１
１がスルーホール９と光検知器６との間に遮光可能に配
置される。The photodetector 6 is configured to be movable up and down by the piston 10, and when the YS detector 6 is placed in a predetermined position on the through hole 9, the photodetector 6 A light seal, such as a rubber gasket 1, prevents 6 from detecting external light.
1 is arranged between the through hole 9 and the photodetector 6 so as to be able to block light.
欠陥表示手段７は光検知器６の出力へ接続された２値化
回路１２及び欠陥表示装置１３とから成る。The defect display means 7 comprises a binarization circuit 12 connected to the output of the photodetector 6 and a defect display device 13.
又、８夾に応じて、プリント板２（よこれを載置する出
色ゴムシート１４を上部に有するＸ−Ｙ ’ｆＪ ＱＪ
ステージ１５上に載置される。In addition, according to
It is placed on the stage 15.
次に、」二連の構成に成る本発明装置の動作を説明する
。Next, the operation of the apparatus of the present invention having a dual configuration will be explained.
プリント板２がＸ−Ｙ移動ステージ１５上に載置され、
ステージ１５の移動により、＃８脣しようとするプリン
ト板２のスルレーン１ニー ／し９７５； −＞’（。The printed board 2 is placed on the X-Y moving stage 15,
Due to the movement of the stage 15, the through lane 1 knee of the printed board 2 which is about to move #8 is /975; ->'(.
検知器６の真下に位僅決めされる。そして、そのスルー
ポール９に対して、ピストン１０の働きを介して光検知
器６が所定の位僧寸で降下される。これにより、光検知
器６−、スルーづ；−ル９と外部とが冗全に遮光される
。It is placed just below the detector 6. Then, the photodetector 6 is lowered to the through pole 9 by a predetermined distance through the action of the piston 10. As a result, the photodetector 6-, the through hole 9, and the outside are completely shielded from light.
この状態にあるプリント４板２の絶縁板３内へ光注入器
４かも光が注入される。注入された光は絶縁板３内を図
示の如く伝播してスルーホール９のメッキ部９ａに至る
。The light injector 4 also injects light into the insulating plate 3 of the printed circuit board 2 in this state. The injected light propagates within the insulating plate 3 as shown in the figure and reaches the plated portion 9a of the through hole 9.
もしメッキ部９ｍに８で示す如きメツキネ良箇所があれ
ば、メッキ部９ａへ伝播して来た光は８を通過してヌル
−ホールの中空部５を経て光検知器６にて捕捉され、そ
の光♀が２値化回路１２のスレッシュホールドよシ多い
すＩｚｉ、ｆソの旨が出力されてその表示が欠陥表示装
置１３に表示される。即ち、このスルーホール９にはメ
ツキネ良箇所があるという表示をなすことｔ玉出来る。If the plated part 9m has a good spot as shown by 8, the light propagating to the plated part 9a passes through 8, passes through the hollow part 5 of the null hole, and is captured by the photodetector 6. A message indicating that the light ♀ exceeds the threshold of the binarization circuit 12 is outputted, and the indication is displayed on the defect display device 13. That is, it is possible to make an indication that there is a good connection point in this through hole 9.
この表示はメツキネ良箇所が完全に切れている場合ばか
りでなく、部分的な不良例えば一部分の欠落についても
なしうる。その表示は炉時間のうちになしうる。これら
の効果を奏する装置は安価に＋１・′１成しうる。This display can be made not only when a good fit is completely cut off, but also when there is a partial defect, for example, a part is missing. The display can be made during oven time. A device that achieves these effects can be manufactured at a cost of +1·'1.
第２図は第１図実施例の光注入器４と光検知器６とを入
れ替えて構成されている点に主たる構成上の相違がある
ことを除いて、画者は同じ構成なのでその同−構成撰集
には同一番号を付してその説明を省略する。2 has the same construction as the one shown in FIG. 1, except that the light injector 4 and photodetector 6 of the embodiment shown in FIG. 1 are replaced. The constituent collections will be given the same numbers and their explanations will be omitted.
又、その作用効果もその構成上から来る差違を除いて同
性である。Also, their effects are the same, except for differences due to their composition.
上記実施例における光という用語の範囲は通常の光だけ
でなく、本発明の意図するところを実現しうるもの、例
えば赤外線であれば、これをも含むものと解釈されたい
。The scope of the term light in the above embodiments should be interpreted to include not only ordinary light but also any light that can realize the intent of the present invention, such as infrared light.
（７）１発明の効果
す、上述べたように、本発明によれば、部分的な欠陥を
も検食しうるから、林検査部の品質の向上のほか、機械
的強度の検育にも役立ち得、結」として信頼性の向上に
もなる。又その検蕾に吸する時間も短詩ｍ１となり、装
置コストも安価となる等の効果が得られる。(7) Effects of the 1 invention: As mentioned above, according to the present invention, even partial defects can be inspected, which not only improves the quality of the Hayashi inspection department but also improves mechanical strength inspection. As a result, it can also improve reliability. In addition, the time required for sucking on the buds is shortened to m1, and the cost of the device is also reduced.
第１図は本発明の１つの実施例を示す図、第２図は本発
明の他の実施例を示す図である。
図中、１は欠陥検査装置、２は被検査試別、８は透光性
欠陥部、９は不透光性被検査部、３．５け導光部、４は
光注入器、６は光検知器、７は欠陥表示手段、１５は移
動テーブルである。
７１￥ ｉｙｉ田順人 富士通株式会社１．１−’、ｉ
−’ 、ｉFIG. 1 is a diagram showing one embodiment of the invention, and FIG. 2 is a diagram showing another embodiment of the invention. In the figure, 1 is a defect inspection device, 2 is a sample to be inspected, 8 is a transparent defective part, 9 is a non-transparent part to be inspected, 3.5 light guide parts, 4 is a light injector, and 6 is a A photodetector, 7 a defect display means, and 15 a moving table. ¥71 Junto iyida Fujitsu Ltd. 1.1-', i
-',i
Claims (1)
部を有する被検査試料の不透光性被検査部に対し一側に
設置される光注入器と、上記被検査試料の不透光性被検
査部に対し他側に設置される光検知器と、該光検知器の
出力へ接続されＺ）欠陥表示装置とを具備して成る欠陥
検査装置。 ２）透光性欠陥部が牛するおそれのある不透光性被検査
部を有する被検査試料の不透光性被検査部に対し一側に
設置される光注入器と、上記被検査試料の不透光性被検
査部に対し他側に投信される光検知器と、該光検知器の
出力へ接続される欠陥表示装置と、上記被検査試料を載
置する面を不透光性にした移動ステージとを具備して成
る欠陥表示装置。[Claims] 1) An optical injector installed on one side of a sample to be inspected that has a non-transparent inspected area where a translucent defect may occur. a photodetector installed on the other side of the non-light-transparent inspected portion of the sample to be inspected; and a defect display device connected to the output of the photodetector. . 2) A light injector installed on one side of the non-transparent inspection part of a sample to be inspected that has an opaque inspection area where a translucent defective part may be affected, and the above-mentioned sample to be inspected. A photodetector that transmits light to the other side of the non-transparent inspection area, a defect display device connected to the output of the photodetector, and a surface on which the sample to be inspected is placed is non-transparent. A defect display device comprising a moving stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13179882A JPS5920840A (en) | 1982-07-28 | 1982-07-28 | Defect checking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13179882A JPS5920840A (en) | 1982-07-28 | 1982-07-28 | Defect checking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5920840A true JPS5920840A (en) | 1984-02-02 |
| JPH0447782B2 JPH0447782B2 (en) | 1992-08-04 |
Family
ID=15066359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13179882A Granted JPS5920840A (en) | 1982-07-28 | 1982-07-28 | Defect checking device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5920840A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5999364A (en) * | 1982-11-30 | 1984-06-08 | Fujitsu Ltd | Through hole inspector |
| JPS59150329A (en) * | 1983-01-28 | 1984-08-28 | Fujitsu Ltd | Through-hole inspecting apparatus |
| JPS62297750A (en) * | 1986-06-17 | 1987-12-24 | Matsushita Electric Ind Co Ltd | Inspecting device for soldering |
| JPS62299747A (en) * | 1986-06-19 | 1987-12-26 | Fujitsu Ltd | Inspecting instrument for through-hole |
| JPH0455991U (en) * | 1990-09-19 | 1992-05-13 | ||
| US5548400A (en) * | 1994-02-16 | 1996-08-20 | Sochata | Method and apparatus for inspecting honeycomb structures using optical fibres |
| EP0997722A1 (en) * | 1998-10-29 | 2000-05-03 | Societe Nationale D'etude Et De Construction De Moteurs D'aviation "Snecma" | Procedure and instrument for controlling the connection of the bars in honeycomb panel cells |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53143384A (en) * | 1977-05-20 | 1978-12-13 | Yaskawa Denki Seisakusho Kk | Pinhole detector |
| JPS5444769A (en) * | 1977-09-14 | 1979-04-09 | Matsushita Electric Ind Co Ltd | Device for inspecting displacement of chipplike parts |
| JPS54141661A (en) * | 1978-04-27 | 1979-11-05 | Fujitsu Ltd | Assignment system of inspection area |
-
1982
- 1982-07-28 JP JP13179882A patent/JPS5920840A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53143384A (en) * | 1977-05-20 | 1978-12-13 | Yaskawa Denki Seisakusho Kk | Pinhole detector |
| JPS5444769A (en) * | 1977-09-14 | 1979-04-09 | Matsushita Electric Ind Co Ltd | Device for inspecting displacement of chipplike parts |
| JPS54141661A (en) * | 1978-04-27 | 1979-11-05 | Fujitsu Ltd | Assignment system of inspection area |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5999364A (en) * | 1982-11-30 | 1984-06-08 | Fujitsu Ltd | Through hole inspector |
| JPH0332730B2 (en) * | 1982-11-30 | 1991-05-14 | Fujitsu Ltd | |
| JPS59150329A (en) * | 1983-01-28 | 1984-08-28 | Fujitsu Ltd | Through-hole inspecting apparatus |
| JPH0332732B2 (en) * | 1983-01-28 | 1991-05-14 | Fujitsu Ltd | |
| JPS62297750A (en) * | 1986-06-17 | 1987-12-24 | Matsushita Electric Ind Co Ltd | Inspecting device for soldering |
| JPS62299747A (en) * | 1986-06-19 | 1987-12-26 | Fujitsu Ltd | Inspecting instrument for through-hole |
| JPH0455991U (en) * | 1990-09-19 | 1992-05-13 | ||
| US5548400A (en) * | 1994-02-16 | 1996-08-20 | Sochata | Method and apparatus for inspecting honeycomb structures using optical fibres |
| EP0997722A1 (en) * | 1998-10-29 | 2000-05-03 | Societe Nationale D'etude Et De Construction De Moteurs D'aviation "Snecma" | Procedure and instrument for controlling the connection of the bars in honeycomb panel cells |
| FR2785388A1 (en) * | 1998-10-29 | 2000-05-05 | Snecma | METHOD AND INSTRUMENT FOR CONTROLLING THE CONNECTION OF THE ALVEOLED SOUL OF A HONEYCOMB ON A SKIN |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0447782B2 (en) | 1992-08-04 |
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