JPS59180828A - Magnetic disk and its manufacture - Google Patents
Magnetic disk and its manufactureInfo
- Publication number
- JPS59180828A JPS59180828A JP58055405A JP5540583A JPS59180828A JP S59180828 A JPS59180828 A JP S59180828A JP 58055405 A JP58055405 A JP 58055405A JP 5540583 A JP5540583 A JP 5540583A JP S59180828 A JPS59180828 A JP S59180828A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- disk
- magnetic disk
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
囚 発明の技術分野
本発明は、磁気ディスク、特にディスク表面の帯電を防
止できる磁気ディスクに関するものである。さらに、本
発明はこのような磁気ディスクの製造方法に関するもの
で６ Ｚ 。DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a magnetic disk, and particularly to a magnetic disk that can prevent the surface of the disk from being charged. Furthermore, the present invention relates to a method of manufacturing such a magnetic disk.
ω）技術の背景と問題点
ディスク装置において、磁気ディスクの表面は、高速回
転中、空気との摩擦により帯電することは良く知られて
いる。磁気ディスクの表面が帯電すると、ディスク表面
の電位が上昇し、ディスク表面に最も近い位置にある読
み出し／書き込み用の磁気ヘッドとの間で放電を生じる
。この放電は、磁気ヘッドの出力信号中にノイズを発生
させエラーの原因となシ得る。ω) Technical Background and Problems It is well known that in a disk device, the surface of a magnetic disk becomes electrically charged due to friction with air during high-speed rotation. When the surface of the magnetic disk is charged, the potential on the disk surface increases, causing a discharge between the disk and the read/write magnetic head located closest to the disk surface. This discharge can generate noise in the output signal of the magnetic head and cause errors.
したがって、ディスク装置においては、ディスク表面に
電荷が帯電するのを防止するために、第１図に示すよう
に、磁気ディスク１０表面に帯電した電荷を、磁気ディ
スクを内側で固定している金属スペーサ２を経て回転軸
３に逃がし、この回転軸の先端部に接触している板バネ
４を経て、アースされた定盤５に放電している。なお、
図中６は磁気ヘッド、７はへッドキャリツ・ゾ、８ 、
８’はプーリー、９はベルト、１０はモータをそれぞれ
示している。Therefore, in a disk drive, in order to prevent charges from being accumulated on the disk surface, as shown in FIG. 2 to a rotating shaft 3, and is discharged to a grounded surface plate 5 via a leaf spring 4 that is in contact with the tip of the rotating shaft. In addition,
In the figure, 6 is a magnetic head, 7 is a head carrier, 8,
8' indicates a pulley, 9 indicates a belt, and 10 indicates a motor.
従来の磁気ディスクは、基板材料として良導体のアルミ
ニウムが用いられておυ、ディスク表面、即ち磁性薄膜
上に帯電した電荷はアルミニウムを経て前述したように
ディスク装置の回転軸３、板バネ４等の放電路を経て大
地に放電されている。Conventional magnetic disks use aluminum, which is a good conductor, as a substrate material, and the electric charge on the disk surface, that is, on the magnetic thin film, passes through the aluminum and is transferred to the rotating shaft 3, leaf spring 4, etc. of the disk device as described above. It is discharged to the ground via a discharge path.
しかし、アルミニウムは硬度が低いため非常にキズが付
きやすく、ディスクの回転中にこのようなキズが原因で
ヘッドクラッシュに到ることは良く知られている。However, due to its low hardness, aluminum is extremely susceptible to scratches, and it is well known that such scratches can lead to head crashes while the disk is rotating.
また、最近では磁気ディスクの基板材料として電気絶縁
性材料、例えばガラス、セラミック、グラスチック等が
用いられてきているが、絶縁材料のため前述のように磁
性薄膜上に帯電した電荷が逃げることができない。この
だめ、このような磁気ディスクにおいては磁気ヘッドと
の間の放電によるノイズのためエラー発生率が上昇する
こととなる。In addition, recently, electrically insulating materials such as glass, ceramic, and plastic have been used as substrate materials for magnetic disks, but because of the insulating materials, charges on the magnetic thin film cannot escape as described above. Can not. Unfortunately, in such a magnetic disk, the error rate increases due to noise caused by discharge between the disk and the magnetic head.
本発明の目的は、前述のような問題点を解決するため、
基板材料として硬度の高い材料を用いる一方、ディスク
表面に帯電した電荷が放電し得る磁気ディスクを提供す
ることにある。The purpose of the present invention is to solve the above-mentioned problems.
The object of the present invention is to provide a magnetic disk in which a material with high hardness is used as a substrate material, and in which charges accumulated on the surface of the disk can be discharged.
また、本発明の他の目的は、このような磁気ディスクを
製造する方法を提供することにある。Another object of the present invention is to provide a method for manufacturing such a magnetic disk.
■ 発明の実施例
本発明磁気ディスクによれば、基板材料としてアルミニ
ウムに比べて非常に硬度の高い電気絶縁性の無機材料、
例えばガラス、セラミック等を用いる。基板材料は絶縁
材料であるため、この基板上に磁性薄膜を設けた従来の
構造では前述のように磁性薄膜表面に帯電した電荷は逃
げることができない。したがって本発明によれは、第２
図に示すように電気絶縁性の無機質基板１１と酸化鉄磁
性薄膜１２との間に金属等の導電性薄膜１３を介在せし
めている。磁性薄膜上に帯電した電荷は、この導電性薄
膜１３を経て、ディスク装置の前述のような放電路を介
して大地に放電することができる。■ Embodiments of the Invention According to the magnetic disk of the present invention, the substrate material is an electrically insulating inorganic material that is much harder than aluminum;
For example, glass, ceramic, etc. are used. Since the substrate material is an insulating material, in the conventional structure in which a magnetic thin film is provided on this substrate, the electric charge charged on the surface of the magnetic thin film cannot escape as described above. Therefore, according to the present invention, the second
As shown in the figure, a conductive thin film 13 made of metal or the like is interposed between an electrically insulating inorganic substrate 11 and an iron oxide magnetic thin film 12. The charges charged on the magnetic thin film can be discharged to the ground through the conductive thin film 13 through the above-mentioned discharge path of the disk device.
導電性薄膜１３の材料としては、密着性の点でクロム（
Ｃｒ）、チタン（Ｔｊ）等のような酸化し易い金属材料
が望ましい。The material for the conductive thin film 13 is chromium (
Metal materials that are easily oxidized such as Cr), titanium (Tj), etc. are desirable.
また、酸化鉄磁性薄膜１２の材料としては、γ型三酸化
二鉄（γ−Ｆｇ２０ｓ、）が高密度磁気記録に非常に適
していることが良く知られているから（例えば、特許第
１０２３３３９号明細書参照）、本発明磁気ディスクに
おいても、γ−ＦＨＯｓを用いるものとする。Furthermore, as a material for the iron oxide magnetic thin film 12, it is well known that γ-type diiron trioxide (γ-Fg20s) is very suitable for high-density magnetic recording (for example, Japanese Patent No. 1023339 (see specification), γ-FHOs are also used in the magnetic disk of the present invention.
以上のような構成の本発明磁気ディスクによれば、磁気
ディスク表面に帯電した電荷は、磁気ディスクの導電性
薄膜１３、ディスク装置の放電路を経て大地に放電され
るから、前記電荷が磁気ヘッドに放電されそのため磁気
ヘッドの出力信号中にノイズが発生ずるようなことはな
い。また、基板の材料として硬度の高い電気絶縁性無機
材料を用いるので、アルミニウムの場合のようにヘッド
クラッシュに到ることはない。さらには磁気記録層、即
ち磁性薄膜の材料としてγ−Ｆｓ２０３を用いているの
で高密度磁気記録が可能である。According to the magnetic disk of the present invention having the above-described structure, the electric charge charged on the surface of the magnetic disk is discharged to the ground through the conductive thin film 13 of the magnetic disk and the discharge path of the disk device, so that the electric charge is discharged to the ground by the magnetic head. Therefore, no noise is generated in the output signal of the magnetic head. Furthermore, since an electrically insulating inorganic material with high hardness is used as the material of the substrate, head crushing does not occur as in the case of aluminum. Furthermore, since γ-Fs203 is used as the material for the magnetic recording layer, that is, the magnetic thin film, high-density magnetic recording is possible.
次に、以上のような本発明磁気ディスクの製造方法につ
いて説明する。Next, a method of manufacturing the magnetic disk of the present invention as described above will be explained.
本発明磁気ディスクの製造方法は、電気絶縁性無機材料
から成る基板上に、スパッタによυ導電性薄膜を形成し
、この導電性薄膜上に反応スパッタによりα型三酸化二
鉄の薄膜を形成し、このα型三酸化二鉄の薄膜を還元し
て四酸化三鉄の薄膜にした後、酸化によってγ型三酸化
二鉄にすることを特徴とするものである。The method for manufacturing a magnetic disk of the present invention involves forming a υ conductive thin film by sputtering on a substrate made of an electrically insulating inorganic material, and forming an α-type diiron trioxide thin film by reactive sputtering on this conductive thin film. The method is characterized in that this thin film of α-type diiron trioxide is reduced to a thin film of triiron tetroxide, and then oxidized to form γ-type diiron trioxide.
本発明方法の一実施例を以下に説明する０実施例：
表面をポリッシュしたドーナツ状ガラス基板上にＣｒ膜
をスパッタ法によｊＱｏ、０５μｍの厚さに形成し、さ
らにＣｏを１％含む鉄合金ターゲットを用い、純酸素中
で反応スパッタを行い、上記Ｃｒ膜上に。An embodiment of the method of the present invention will be described below.Example 0: A Cr film was formed on a donut-shaped glass substrate with a polished surface to a thickness of jQo, 05 μm by sputtering, and an iron film containing 1% Co was further formed. Using an alloy target, reactive sputtering was performed in pure oxygen onto the Cr film.
α−ＦＨＯｓ膜を０．２μｍの厚さに形成し、これを３
００℃の湿潤性Ｈ２中で還元熱処理し、上記α−Ｆ ｅ
ｔ ＯｓをＦ ｇ ｓ ０４膜とした後、３００℃の
空気中で酸化熱処理を行い上記Ｆ ｅ ｓ ０４膜をγ
−Ｆｅｔｕｓ膜とした０このようにして、ガラス基板上
に導電性薄膜としてＣｒ膜を、さらにこのＣｒ膜上にγ
−Ｆ ｅ ２０３ 磁性膜を有する磁気ディスクを得た
。α-FHOs film was formed to a thickness of 0.2 μm, and this was
The above α-F e
After converting t Os into F g s 04 film, oxidation heat treatment was performed in air at 300°C to convert the above F e s 04 film into γ
In this way, a Cr film was formed as a conductive thin film on a glass substrate, and a γ
A magnetic disk having a -Fe203 magnetic film was obtained.
この磁気ディスクは、保持カフ０００ｅ 、角形比０．
８を有し、高密度磁気記録に対して好適な結果が得られ
た。This magnetic disk has a holding cuff of 000e and a squareness ratio of 0.
8, and results suitable for high-density magnetic recording were obtained.
（ト） 発明の詳細
な説明した如く、本発明によれば、磁気ディスク上の帯
電電荷をアースに逃がすことが可能となり、放電に伴う
エラー発生が防止される。(G) As described in detail, according to the present invention, it is possible to release the electrical charge on the magnetic disk to the ground, thereby preventing the occurrence of errors due to discharge.
第１図はディスク装置の断面を示す図、第２図は本発明
磁気ディスクの一部の断面を示す図であるＯ
図中、１は磁気ディスク、２は金属スペーサ、３は回転
軸、４は板バネ、５は定盤、６は磁気ヘッド、１１は基
板、１２は磁性薄膜、１３は導電性薄膜をそれぞれ示す
。
特許出願人 富士通株式会社FIG. 1 is a diagram showing a cross section of a disk device, and FIG. 2 is a diagram showing a cross section of a part of the magnetic disk of the present invention. In the figure, 1 is a magnetic disk, 2 is a metal spacer, 3 is a rotating shaft, and 4 5 is a plate spring, 5 is a surface plate, 6 is a magnetic head, 11 is a substrate, 12 is a magnetic thin film, and 13 is a conductive thin film. Patent applicant Fujitsu Limited
Claims (2)
二鉄から成る磁性薄膜とを有する磁気ディスクにおいて
、前記基板と前記磁性薄膜との間に、導電性薄膜を介在
させたことを特徴とする磁気ディスク。(1) In a magnetic disk having a substrate made of an electrically insulating inorganic material and a magnetic thin film made of γ-type diiron trioxide, a conductive thin film is interposed between the substrate and the magnetic thin film. Features a magnetic disk.
タによシ導電性薄膜を形成し２、この導電性薄膜上に反
応ス・母ツタによシα型三酸化二鉄の薄膜を形成し、と
のα型三酸化二鉄の薄膜を還元して四酸化三鉄の薄膜に
した後、酸化によってγ型三酸化二鉄にすることを特徴
とする磁気ディスクの製造方法。(2) A conductive thin film is formed on a substrate made of an electrically insulating inorganic material, and α-type diiron trioxide is deposited on this conductive thin film. A method for manufacturing a magnetic disk, comprising forming a thin film, reducing a thin film of α-type diiron trioxide to a thin film of triiron tetroxide, and then converting the thin film to γ-type diiron trioxide by oxidation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58055405A JPS59180828A (en) | 1983-03-31 | 1983-03-31 | Magnetic disk and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58055405A JPS59180828A (en) | 1983-03-31 | 1983-03-31 | Magnetic disk and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59180828A true JPS59180828A (en) | 1984-10-15 |
Family
ID=12997627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58055405A Pending JPS59180828A (en) | 1983-03-31 | 1983-03-31 | Magnetic disk and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59180828A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61137221A (en) * | 1984-12-06 | 1986-06-24 | Mitsubishi Electric Corp | Magnetic disk |
| JPS61148667A (en) * | 1984-12-20 | 1986-07-07 | Fujitsu Ltd | Attaching structure of magnetic disc |
-
1983
- 1983-03-31 JP JP58055405A patent/JPS59180828A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61137221A (en) * | 1984-12-06 | 1986-06-24 | Mitsubishi Electric Corp | Magnetic disk |
| JPS61148667A (en) * | 1984-12-20 | 1986-07-07 | Fujitsu Ltd | Attaching structure of magnetic disc |
| JPH0580745B2 (en) * | 1984-12-20 | 1993-11-10 | Fujitsu Ltd |
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