JPS59171031A - Magnetic disk - Google Patents

Abstract

PURPOSE:To obtain a magnetic disk for high density recording having magnetic characteristics easy to control only in a sputtering or vapor deposition stage by forming a thin magnetic layer of a Co-Pt alloy on a disk of a metal, glass, a synthetic resin or the like. CONSTITUTION:A thin magnetic layer of a Co-Pt alloy is formed on a disk of a metal such as Al, Ti or Zr, quartz glass, polyester or the like only by a physical method such as sputtering or vapor deposition. Pt is incorporated in the Co-Pt alloy by 5-40% in respect of residual magnetic flux density and coercive force. A magnetic disk for high density recording of 20-40 KBPI is easily obtd. without requiring a complex stage such as a stage for forming a magnetic layer of gamma-Fe2O3 or the like by a coating method.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は磁気ディスク記憶装置に用いられる磁気ディス
クに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a magnetic disk used in a magnetic disk storage device.

〔従来技術〕[Prior art]

磁気ディスク記憶装置、各種磁気テープ記録装置に於て
は、情報処理の増大とともに益々記録の１０’ＢＰＩ以
上となると、磁性体粒子の均一な塗布、ディスク表面の
平坦性などが悪くなり、高密度化することが極めて難か
しくなる。また、めっきディスクでは電解溶液を用いる
ため、磁性合金層の被着の制御やめつき特有の湿式１程
が複雑で工程が複雑で磁気特性の制御が離かしい。In magnetic disk storage devices and various magnetic tape recording devices, as information processing increases and recording speeds exceed 10' BPI, uniform coating of magnetic particles and flatness of the disk surface deteriorate, resulting in high-density becomes extremely difficult to change. Furthermore, since an electrolytic solution is used in the plating disk, the control of the adhesion of the magnetic alloy layer and the wet method peculiar to plating are complicated, the process is complicated, and the control of the magnetic properties is difficult.

〔発明の目的〕[Purpose of the invention]

本発明は磁気ディスク記憶装置に用いられる磁気ディス
クに関わるもので、従来のγ・Ｆｅ２Ｏ３粉を塗布した
塗布型磁気ディスク、Ｃｏ−Ｎｉ　−Ｐ合金全電気めっ
きしためっきディスク等に代る作製が容易で記録特性の
良い合金薄膜型ディスクを提供するものである。The present invention relates to a magnetic disk used in a magnetic disk storage device, and can be easily manufactured as an alternative to conventional coated magnetic disks coated with γ/Fe2O3 powder, plated disks coated entirely with Co-Ni-P alloy electroplating, etc. The present invention provides an alloy thin film type disc with good recording characteristics.

〔発明の概要〕[Summary of the invention]

本発明による磁気ディスクはＡｔ、Ｔｉ、Ｚｒ等の軽敞
の金属円板、ガラス円板、ポリエステルことｅ％９とす
る磁気ディスクである。The magnetic disk according to the present invention is a magnetic disk made of a light metal disk made of At, Ti, Zr, etc., a glass disk, or polyester (e%9).

本発明の磁気ディスクはスパッタあるいけ蒸着でＣｏ−
ｐｔ合金薄膜を形成するたけてあシ、工程が極めて容易
で磁気特性の制御も容易で、しがも３　Ｘ　１０’〜５
Ｘ１０　　ＢＰＨの記録密度を有する磁気ディスクであ
り、上記従来技術の磁気ディスクに比較して、記録特性
、作製工程の簡略化、特性の制御等で著しい改善効果が
ある。The magnetic disk of the present invention can be produced by sputtering or vapor deposition.
The process of forming a PT alloy thin film is extremely easy, the magnetic properties are easy to control, and the size is 3 x 10'~5.
This magnetic disk has a recording density of X10 BPH, and has significant improvements in recording characteristics, simplification of the manufacturing process, control of characteristics, etc. compared to the magnetic disks of the prior art described above.

〔発明の実施例〕[Embodiments of the invention]

以下に発明の詳細を実施例により説明する。 The details of the invention will be explained below using examples.

実施例１ 円板状石英ガラス基板上にスパッタ法でＣｏ−２０％ｐ
ｔ合金薄膜を５００〜２０００人被着した磁気ディスク
の代表的な記録特性を第１図に示す。Example 1 Co-20%p was deposited on a disc-shaped quartz glass substrate by sputtering.
FIG. 1 shows typical recording characteristics of a magnetic disk coated with 500 to 2,000 t-alloy thin films.

第１図のヘッド出力と記録密度の関係から明らかなよう
に、記録密度が３０ｋＢＰＩまではほぼ一定のヘッド出
力が得られ、これ以上の記録密度ではヘッド出力の低下
が生ずる。磁気ディスクの実用上の目安であるヘッド出
力が５０％に低減する記録密度は約４０ｋＢＰＩである
。したがって、磁気ディスクとして４０ｋＢＰＩまでの
記録が可能である。ｐｔ−ｉ５〜４０％含むｃｏ−ｐｔ
膜全全形成た磁気ディスクでも同様の特性が得られた。As is clear from the relationship between head output and recording density in FIG. 1, a nearly constant head output is obtained up to a recording density of 30 kBPI, and a decrease in head output occurs at a recording density higher than this. The recording density at which the head output, which is a practical standard for magnetic disks, is reduced by 50% is about 40 kBPI. Therefore, it is possible to record up to 40 kBPI as a magnetic disk. co-pt containing 5-40% pt-i
Similar characteristics were obtained with a magnetic disk in which the entire film was formed.

なお、Ｃｏ−Ｐｔ合金膜の形成にはスパッタの他、蒸着
法等の物理的被着法を用いることができる。In addition to sputtering, physical deposition methods such as vapor deposition can be used to form the Co--Pt alloy film.

実施例２ 円板状のＡ、を合金基板上に実施例１と同様にｃｏ　−
Ｐ　を合金薄膜を５００〜２０００人被着した磁気ディ
スク全作製し、記録特性を調べた結果、第１図で示す磁
気ディスクと同様の特性金有するものが得られた。Example 2 Disc-shaped A was deposited on an alloy substrate in the same manner as in Example 1.
All magnetic disks having 500 to 2,000 P alloy thin films deposited thereon were fabricated and their recording characteristics were investigated. As a result, magnetic disks having characteristics similar to those of the magnetic disk shown in FIG. 1 were obtained.

実施例３ 実施例１，２と同様にして、スパッタ法でポリエステル
基板上にＣｏ−Ｐｔ合金薄膜全形成した磁気ディスクの
記録特性も第１図に示したものと同様であった。Example 3 Similar to Examples 1 and 2, the recording characteristics of a magnetic disk in which a Co--Pt alloy thin film was entirely formed on a polyester substrate by sputtering were also similar to those shown in FIG.

〔発明の効果〕〔Effect of the invention〕

実施例から明らかなように、ガラス、Ａ、ｔ、ポリエス
テル、Ｔｉ、Ｚｒ等の基板上にスパッタ法で作製したＣ
ｏ−Ｐｔ薄膜の磁気的特性はＣｏ−ｐｔＯ糸負成などに
よシ若干異なり、スパッタの−ままで磁気ディスクとし
ての特性を持たせるためには、残留磁束密度、保磁力の
面からみて、Ｐｔを５〜４０％含むことが必要である。As is clear from the examples, C produced by sputtering on a substrate such as glass, A, t, polyester, Ti, Zr, etc.
The magnetic properties of the o-Pt thin film differ slightly depending on the Co-ptO yarn formation, etc., and in order to have the properties as a magnetic disk even after sputtering, from the viewpoint of residual magnetic flux density and coercive force, It is necessary to contain 5 to 40% of Pt.

当該磁気ディスクは従来の塗布型ディスクのような複雑
な塗布工程力なく、γｐｅ、ｏ、　　スノくツタディス
クのような反応性スパッタ、酸化還元などの工程も必要
なく、工程が非常に容易であり、２０〜４０に’ＢＰＩ
の磁気記録ディスクとして非礼に有効である。This magnetic disk does not require the complicated coating process required for conventional coating type disks, nor does it require reactive sputtering or oxidation-reduction processes required for γPE, O, and Snow Ivy disks, and is extremely easy to process. , 20-40'BPI
It is extremely effective as a magnetic recording disk.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本発明の一実施例における、磁気媒体１ｃｏ
−Ｐｔスパッタ膜とした磁気ディスクの記第　　１　　
　図 Ｒ１４２Δ　才　７’ｊ、（ＡＢＦＬ）第１頁の続き （７■発　明　者　吉田和悦 国分寺市東恋ケ窪１丁目２８０番 地株式会社日立製作所中央研究 所内FIG. 1 shows a magnetic medium 1co in one embodiment of the present invention.
-Description of magnetic disk with Pt sputtered film Part 1
Figure R142Δ 7'j, (ABFL) Continued from page 1 (7 ■ Inventor Kazue Yoshida, Hitachi, Ltd. Central Research Laboratory, 1-280 Higashikoigakubo, Kokubunji City)

Claims (1)

【特許請求の範囲】[Claims] １、　　Ａ　ｔ、　Ｔ　Ｉ’　、　Ｚ　ｒ　、等の金属
円板、カラス円板、ポリエステルなどの合成樹脂円板上
にＣｏ−ｐｔ金合金らなる薄膜磁性体層を形成した構造
を特徴とする磁気ディスク。1. It is characterized by a structure in which a thin film magnetic layer made of Co-pt gold alloy is formed on a metal disk such as At, TI', Zr, etc., a glass disk, or a synthetic resin disk such as polyester. magnetic disk.