JPS59180519A - Vapor-phase film forming device of coherence reduced laser - Google Patents
Vapor-phase film forming device of coherence reduced laserInfo
- Publication number
- JPS59180519A JPS59180519A JP5382983A JP5382983A JPS59180519A JP S59180519 A JPS59180519 A JP S59180519A JP 5382983 A JP5382983 A JP 5382983A JP 5382983 A JP5382983 A JP 5382983A JP S59180519 A JPS59180519 A JP S59180519A
- Authority
- JP
- Japan
- Prior art keywords
- coherence
- laser
- reducing
- laser light
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0994—Fibers, light pipes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、レーザ光を用いて被処理物の表面に成膜を施
す装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an apparatus for forming a film on the surface of a workpiece using laser light.
第１図は従来のレーザ気層成膜装置の原理的な説明図で
ある。FIG. 1 is an explanatory diagram of the principle of a conventional laser vapor deposition apparatus.
ｌｉｄレーザ発振器で、エマキシレーザ又はアルゴンレ
ーザが用いられ、紫外レーザ光２を発する。The lid laser oscillator uses an emxi laser or an argon laser to emit ultraviolet laser light 2.
その波長は、１９３ ｎｍ 、 ２４９ ｎｍ 、 ２
５７ ｎｍである。The wavelengths are 193 nm, 249 nm, 2
57 nm.
上記の紫外レーザ光２は石英レンズ３で集光されてセル
４の中に置かれた被処理物（例えば半導体基板）５に照
射される。The above-mentioned ultraviolet laser beam 2 is focused by a quartz lens 3 and irradiated onto an object to be processed (for example, a semiconductor substrate) 5 placed in a cell 4 .
上記のセル４はステンレス製で、紫外レーザ光２が入射
し得るように石英板を嵌めこんだ窓６が設けられて反応
室を形成している。８はガスボンベ、７はガス導入管で
ある。The cell 4 described above is made of stainless steel, and has a window 6 fitted with a quartz plate so that the ultraviolet laser beam 2 can enter, forming a reaction chamber. 8 is a gas cylinder, and 7 is a gas introduction pipe.
セル４内のガスは排気管９、及びガス処理装置１０ヲ介
して排気装置１１で吸引される。Gas in the cell 4 is sucked in by an exhaust device 11 via an exhaust pipe 9 and a gas treatment device 10.
前Ｓ己のガスとしては、ジメチルカドミュウムｃｄ（Ｃ
Ｈ３） ２や、トリメチルブルミニュウムＡｚ（ＣＨ５
）５が用いられる。As the gas for the previous S, dimethyl cadmium cd (C
H3) 2, trimethylbluminium Az (CH5
)5 is used.
被処理物（基板）５のレーザ照射を受けた部分にｃｄ又
はＡｔが薄膜状に析出する。CD or At is deposited in a thin film on the portion of the object (substrate) 5 that has been irradiated with the laser.
石英レンズ３でレーザ光を微細に絞ることができるので
、ｃｄ又はＡｔの微細なパターンを形成することが可能
である。Since the laser beam can be finely focused by the quartz lens 3, it is possible to form a fine CD or At pattern.
しかし、レーザ光は可干渉性が非常に高いため、一様な
成膜処理を施したい場合にも干渉パターンが生じるとい
う不具合がある。However, since laser light has very high coherence, there is a problem in that an interference pattern occurs even when uniform film formation processing is desired.
本発明は上述の事情に鑑みて為され、干渉パターンを生
じることなく一様な成膜処理を行ない得るレーザ気層成
膜装置を提供することを目的とする。The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide a laser vapor layer deposition apparatus that can perform uniform film deposition without producing an interference pattern.
本発明の基本的原理は、レーザ光束の揃った位相を乱し
、レーザ光が有している可干渉性を低減させて干渉パタ
ーンの発生を防止するものである。The basic principle of the present invention is to disturb the aligned phase of the laser beam and reduce the coherence of the laser beam, thereby preventing the generation of an interference pattern.
上記の原理に基づいて前記の目的全達成するため、本発
明は、レーザ光源と反応室との間のレーザ光路中に、レ
ーザ光の可干渉性を低減せしめる手段を設けたことを特
徴とする。In order to achieve all of the above objects based on the above principle, the present invention is characterized in that means for reducing the coherence of laser light is provided in the laser light path between the laser light source and the reaction chamber. .
次に、本発明の１実施例を第２図および第３図について
説明する。Next, one embodiment of the present invention will be described with reference to FIGS. 2 and 3.
第２図は本発明装置の原理的説明図である。第１図に示
した従来装置に比して異なるところは、紫外レーザ光２
の経路中にレーザ光の可干渉性低減手段１２を設けたこ
とである。FIG. 2 is a diagram illustrating the principle of the apparatus of the present invention. The difference from the conventional device shown in Figure 1 is that the ultraviolet laser beam
This is because a laser beam coherence reducing means 12 is provided in the path of the laser beam.
レーザ発信器１から出たレーザ光２は可干渉性低減手段
１２において位相を乱された後に石英レンズ３で集光さ
れ、セル４内の被処理物（基板）５の表面に薄膜を析出
せしめる。レーザ光は被処理物（基板）５に到達したと
きに位相が揃っていないので干渉パターンを生じない。The laser beam 2 emitted from the laser transmitter 1 has its phase disturbed by the coherence reducing means 12 and is then focused by the quartz lens 3 to deposit a thin film on the surface of the object (substrate) 5 in the cell 4. . When the laser beams reach the object to be processed (substrate) 5, the phases are not aligned, so no interference pattern is generated.
従って一様な薄膜を付着させることができる。Therefore, a uniform thin film can be deposited.
第３図は、前記の可干渉性低減手段１２の具体的な構成
の１例を示す。FIG. 3 shows an example of a specific configuration of the coherence reducing means 12 described above.
レーザ発振器（図示せず）から矢印Ａ方向に送られたレ
ーザ光２をマツチングレンズ１３で集光して石英製の光
ファイバ１４に導入するように構成してあり、本例にお
いては上記の光ファイバ１４を螺旋状に巻いである。こ
の光ファイバ１４から出た光ｔｉコ’Ｊメ−）レンズ１
５によシ平行化され、矢印Ｂのごとく石英レンズ（図示
せず）に向けて導かれる。レーザ光２は光フアイバ１４
内で何度も不規則に反射を繰返えすので、次第に位相が
不揃いになって可干渉性を失う。The laser beam 2 sent from a laser oscillator (not shown) in the direction of arrow A is condensed by a matching lens 13 and introduced into an optical fiber 14 made of quartz. The optical fiber 14 is spirally wound. The light emitted from this optical fiber 14 is reflected by the lens 1.
5 and guided toward a quartz lens (not shown) as shown by arrow B. Laser light 2 is transmitted through optical fiber 14
As the light repeats irregular reflections over and over again, the phases gradually become misaligned and coherence is lost.
本例のように光ファイバを用いて可干渉性低減手段を構
成すると、簡単な構成で良好な可干渉性低減効果が得ら
れる。When the coherence reduction means is configured using an optical fiber as in this example, a good coherence reduction effect can be obtained with a simple configuration.
第４図は上記と異なる可干渉性低減手段の１例である。FIG. 4 shows an example of a coherence reducing means different from the above.
前例（第３図）と異なるところは、容器１６の中に光フ
ァイバ１４と比重の等しい液体１７を満たし、光ファイ
バ１４を上記の液体１７の中に、乱雑な形にして浸すと
ともに、該液体１７ヲ攪葎する手段１８を設けたことで
ある。The difference from the previous example (FIG. 3) is that a container 16 is filled with a liquid 17 that has the same specific gravity as the optical fiber 14, and the optical fiber 14 is immersed in the liquid 17 in a random manner, and the liquid is The reason is that a means 18 for stirring the seeds 17 is provided.
本例のように構成すると、光ファイツク１４が常に漂い
揺れている状態となるため、この中を通過するレーザ光
の光路が絶えず不規則に変化し、可干渉性の低減効果が
いっそう良くなる。With the configuration of this example, the optical fiber 14 is constantly floating and shaking, so the optical path of the laser beam passing through it changes constantly and irregularly, making the coherence reduction effect even better.
本発明者の実験によれば、上記の液体１７として不活性
なシリコーン油を用いて好結果が得られた。According to experiments conducted by the present inventor, good results were obtained using inert silicone oil as the liquid 17.
第５図は、更に異なる可干渉性低減手段の１例である。FIG. 5 is an example of a further different coherence reducing means.
矢印人のごとく導入したレーザ光２を拡散する凹レンズ
１９ヲ設け、凸レンズ加で集光し、凹レンズ１９′で平
行化して矢印Ｂのごとく送シ出す。上記の凹レンズ１９
と凸レンズ２０との間にスリガラス２１を設置しである
。本例におけるスリガラス２１のように散乱面を有する
板状部材を光路中に設置するとレーザ光が不規則に散乱
される。散乱したレーザ光は再び凸レンズ加で集光され
、コリメート用の凹レンズ１９′で平行光束になるが、
スリガラス２１から凹レンズ１９′まで不規則な光路に
散乱している間に位相の揃い方が乱れて可干渉性を失う
。本例のごとく、散乱面を有する板状部材で可干渉性低
減手段を構成すると製造コストが安価で済み、可干渉性
低減手段を小形、軽量にすることができ、その上、高パ
ワーのレーザ光を処理し得る。A concave lens 19 is provided to diffuse the introduced laser beam 2 as shown by the arrow B, the laser beam 2 is condensed by a convex lens, collimated by a concave lens 19', and sent out as shown by an arrow B. Concave lens 19 above
A ground glass 21 is installed between the lens and the convex lens 20. If a plate member having a scattering surface, such as the ground glass 21 in this example, is placed in the optical path, the laser light will be scattered irregularly. The scattered laser beam is again focused by the convex lens and becomes a parallel beam by the concave collimating lens 19'.
While being scattered along an irregular optical path from the ground glass 21 to the concave lens 19', the alignment of the phases is disturbed and coherence is lost. As in this example, if the coherence reducing means is constructed of a plate-like member having a scattering surface, the manufacturing cost is low, the coherence reducing means can be made small and lightweight, and moreover, it is possible to make the coherence reducing means small and lightweight. Can process light.
第６図は、第５図に示したスリガラスによる可干渉性低
減手段を改良した１例である。本例においてはスリガラ
スによって回転円板２２’ｉ構成し、この回転円板状ス
リガラス２２ヲ凸レンズ％の焦点Ｆｌ付近に設置する。FIG. 6 is an example of an improved coherence reducing means using ground glass shown in FIG. 5. In this example, a rotating disk 22'i is made of ground glass, and the rotating disk-shaped ground glass 22 is installed near the focal point Fl of the convex lens.
乙は駆動用のモータ、冴は伝動用のベルト、δは回転軸
である。B is the driving motor, Sae is the transmission belt, and δ is the rotating shaft.
本例のごとく、散乱面を有する板状部材を運動せしめる
ように構成すると、散乱面によるレーザーザ光路の変化
とが重なるため、前例（第５図）に比して可干渉性低減
効果が更に向上し、しかも前例と同様に高いパワーのレ
ーザ光全処理するに適している。As in this example, when the plate-like member having the scattering surface is configured to move, the change in the laser beam path due to the scattering surface overlaps, so the coherence reduction effect is even greater than in the previous example (Figure 5). Moreover, like the previous example, it is suitable for all processing with high power laser light.
第７図は前記（第６図）の実施例全史に改良し、凸レン
ズ２０を２段に設置するとともに、前記の回転円板２２
を２個設け、その１個を凸レンズ扉の焦点Ｆ１に、他の
１個を凸レンズ加の焦点Ｆ２に、それぞれ設置しである
。このように、散乱面を有する板状部材を２段に重ねて
用いるとレーザ光の可干渉性がいっそう低減されるが、
上記２個の回転円板四の回転方向を逆にすると更に可干
渉性を低減し得る。FIG. 7 shows an improvement over the entire embodiment shown in FIG.
One of them is installed at the focal point F1 of the convex lens door, and the other one is installed at the focal point F2 of the convex lens door. In this way, when plate-like members having scattering surfaces are stacked in two stages, the coherence of laser light is further reduced.
If the rotation directions of the two rotating disks 4 are reversed, the coherence can be further reduced.
第８図囚、 （Ｂ） ｌ （Ｃ）は、前記と更に異なる
可干渉性低減手段を示す。FIG. 8 (B) l (C) shows a coherence reduction means that is different from the above.
容器ｎの、対向する２面にそれぞれ石英ガラス四によシ
レーザ光の入射窓、出射窓を設け、この容器ｎ内に、例
えば煙草の煙のごとく空中に、こ濁し得る微粒子を入゛
れる。An entrance window and an exit window for laser light are provided on two opposing sides of the container n, respectively, using quartz glass 4, and fine particles that can become cloudy in the air, such as cigarette smoke, are introduced into the container n.
第８図体のように容器ｒの中に懸濁微粒子２９￥ｉｌ−
封入しておくと、該微粒子はブラウン運動を行ないつつ
浮遊し、これにレーザ光が尚たってト°ツフ゛ラーシフ
トを受け、周波数範囲が広〃する。この六めレーザ光の
可干渉性が低減する。このようなシフトは非常に高速な
ノくルスにも起こるため、本陳施例は高速パルスレーザ
光の可干渉性低減に好涜である。As shown in Figure 8, 29 yen of fine particles are suspended in container r.
When encapsulated, the fine particles float while performing Brownian motion, and the laser light is further subjected to a turf shift, widening the frequency range. The coherence of this sixth laser beam is reduced. Since such a shift occurs even in a very fast laser beam, the present embodiment is not suitable for reducing the coherence of high-speed pulsed laser light.
また、第８図（Ｂ）に示すように、微粒子２９を懸栖さ
せた粒体を矢印りのように循環させると、懸８微粒子の
沈降が妨けられるのて長時間にわたつ１可干渉性低減機
能が維持される。In addition, as shown in FIG. 8(B), if the granules with suspended fine particles 29 are circulated in the direction of the arrow, sedimentation of the suspended fine particles 29 will be prevented, so Coherence reduction functionality is maintained.
更に、第８口切に示すように微粒子の補給源２を備えて
おくと一層長時間の機能保持が可能にνる、
〔発明の効果〕
以上詳述したように、本１発明のレーザ気層成バ装置は
干渉パターンの発生を防止して一様な成月処理を行ない
得る。Furthermore, if a supply source 2 of fine particles is provided as shown in the eighth section, it is possible to maintain the function for an even longer period of time. [Effects of the Invention] As detailed above, the laser gas of the first invention The stratification device can prevent the occurrence of interference patterns and perform uniform maturation processing.
第１図は従来のレーザ気層成膜装置の説明図、第２図は
本発明のレーザ気層成膜装置の説明図である。第３図乃
至第８図体）、ω）、Ｃ）はそれぞれ本発明における可
干渉性低減９段の１実施例の説明図でおる。
； １・・・レーザ発振器、２・・・紫外レーザ
光、３・・・石ｉ 英レンズ、４・・・セル、５・・
・被処理物としての基板、１２・・・可干渉性低減手段
、１３・・・マツチングレンズ、ｔｌ １４・・・
光ファイバ、１５・・・コリメートレンズ、１７・・・
液８ 体、１８・・・攪拌手段、１９．１９’・・・
凹レンズ、加・・・凸レンズ、２１・・・散乱面全盲す
る板状部材としてのスリガラス、乙・・・回転円板状の
スリガラス、が・・・凸し９ ンズ。
！
集 代理人 弁理士 秋 本 正 実莫
第３図
第４図
第５図
第６図
第８図（Ａ）FIG. 1 is an explanatory diagram of a conventional laser vapor layer deposition apparatus, and FIG. 2 is an explanatory diagram of a laser vapor deposition apparatus of the present invention. Figures 3 to 8 (body), ω), and C) are explanatory diagrams of one embodiment of nine stages of coherence reduction in the present invention, respectively. 1... Laser oscillator, 2... Ultraviolet laser light, 3... Quartz lens, 4... Cell, 5...
- Substrate as a processing object, 12... Coherence reducing means, 13... Matching lens, tl 14...
Optical fiber, 15...Collimating lens, 17...
Liquid 8 body, 18... stirring means, 19.19'...
Concave lens, addition... convex lens, 21... ground glass as a plate-like member with a completely blind scattering surface, B... ground glass in the shape of a rotating disk, but... convex 9 lenses. ! Collection Agent Patent Attorney Tadashi Akimoto Mimo Figure 3 Figure 4 Figure 5 Figure 6 Figure 8 (A)
Claims (1)
レーザ気層成膜装置において、レーザ光源と反応室との
間のレーザ光路中に、レーザ光の可干渉性を低減せしめ
る手段を設けたことを特徴とする可干渉性低減レーザ気
層成膜装置。 ２、 前記の可干渉性を低減せしめる手段は、光ファイ
バを用いたものであることを特徴とする特許請求の範囲
第１項に記載の可干渉性低減レーザ気層成膜装置。 ３、前記の光ファイバは、液体中に浸したものであシ、
かつ、該液体を攪拌する手段を備えたことを特徴とする
特許請求の範囲第２項に記載の可干渉性低減レーザ気層
成膜装置。 ４、 前記の可干渉性を低減せしめる手段は、散乱面を
有する板状部材であることを特徴とする特許請求の範囲
第１項に記載の可干渉性低減レーザ気層成膜装置。 ５、前記の板状部材は、これを運動せしめるように構成
したものであることを特徴とする特許請求の範囲第４項
に記載の可干渉性低減レーザ気層成膜装置。 ６、 前記の板状部材は、複数個設けたものであること
を特徴とする特許請求の範囲第５項に記載の可干渉性低
減レーザ気層成膜装置。 ７、前記の可干渉性を低減せしめる手段は、微粒子を懸
濁した流体を用いたものであることを特徴とする特許請
求の範囲第１項に記載の可干渉性低減レーザ気層成膜装
置。[Claims] 1. In a laser vapor layer deposition apparatus consisting of a laser light source, a reaction chamber, and a gas supply section, the laser beam has coherence in the laser light path between the laser light source and the reaction chamber. 1. A laser vapor deposition apparatus for reducing coherence, characterized in that it is provided with means for reducing. 2. The coherence-reducing laser vapor deposition apparatus according to claim 1, wherein the means for reducing the coherence uses an optical fiber. 3. The optical fiber is immersed in a liquid;
The coherence-reducing laser vapor deposition apparatus according to claim 2, further comprising means for stirring the liquid. 4. The coherence-reducing laser vapor layer deposition apparatus according to claim 1, wherein the means for reducing the coherence is a plate-like member having a scattering surface. 5. The coherency-reducing laser vapor layer deposition apparatus according to claim 4, wherein the plate member is configured to move. 6. The coherence-reducing laser vapor layer deposition apparatus according to claim 5, wherein a plurality of the plate-like members are provided. 7. The coherency-reducing laser vapor deposition apparatus according to claim 1, wherein the means for reducing the coherence uses a fluid in which fine particles are suspended. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5382983A JPS59180519A (en) | 1983-03-31 | 1983-03-31 | Vapor-phase film forming device of coherence reduced laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5382983A JPS59180519A (en) | 1983-03-31 | 1983-03-31 | Vapor-phase film forming device of coherence reduced laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59180519A true JPS59180519A (en) | 1984-10-13 |
| JPH0377275B2 JPH0377275B2 (en) | 1991-12-10 |
Family
ID=12953677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5382983A Granted JPS59180519A (en) | 1983-03-31 | 1983-03-31 | Vapor-phase film forming device of coherence reduced laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59180519A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0997762A3 (en) * | 1998-10-30 | 2000-09-27 | Kabushiki Kaisha Toshiba | Laser transmission system |
| WO2002000963A1 (en) * | 2000-06-23 | 2002-01-03 | Steven John Ouderkirk | Selective beam deposition |
| JP2004341299A (en) * | 2003-05-16 | 2004-12-02 | Ishikawajima Harima Heavy Ind Co Ltd | Device and method to reduce strength of laser beam interference pattern |
| WO2005057271A1 (en) * | 2003-12-10 | 2005-06-23 | Matsushita Electric Industrial Co., Ltd. | Optical element, laser beam source, and 2-d image forming device |
| US7763231B2 (en) | 2003-06-05 | 2010-07-27 | Lockheed Martin Corporation | System and method of synthesizing carbon nanotubes |
| US20130028274A1 (en) * | 2011-07-29 | 2013-01-31 | Ipg Photonics Corporation | Method for Assembling High Power Fiber Laser System and Module Realizing the Method |
-
1983
- 1983-03-31 JP JP5382983A patent/JPS59180519A/en active Granted
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0997762A3 (en) * | 1998-10-30 | 2000-09-27 | Kabushiki Kaisha Toshiba | Laser transmission system |
| WO2002000963A1 (en) * | 2000-06-23 | 2002-01-03 | Steven John Ouderkirk | Selective beam deposition |
| JP2004341299A (en) * | 2003-05-16 | 2004-12-02 | Ishikawajima Harima Heavy Ind Co Ltd | Device and method to reduce strength of laser beam interference pattern |
| US7763231B2 (en) | 2003-06-05 | 2010-07-27 | Lockheed Martin Corporation | System and method of synthesizing carbon nanotubes |
| WO2005057271A1 (en) * | 2003-12-10 | 2005-06-23 | Matsushita Electric Industrial Co., Ltd. | Optical element, laser beam source, and 2-d image forming device |
| JPWO2005057271A1 (en) * | 2003-12-10 | 2007-12-13 | 松下電器産業株式会社 | Optical element, laser light source, and two-dimensional image forming apparatus |
| US7522792B2 (en) | 2003-12-10 | 2009-04-21 | Panasonic Corporation | Optical element, laser light source, and two-dimensional image forming apparatus |
| US20130028274A1 (en) * | 2011-07-29 | 2013-01-31 | Ipg Photonics Corporation | Method for Assembling High Power Fiber Laser System and Module Realizing the Method |
| US8682126B2 (en) * | 2011-07-29 | 2014-03-25 | Ipg Photonics Corporation | Method for assembling high power fiber laser system and module realizing the method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0377275B2 (en) | 1991-12-10 |
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