JPS59130111U - Temperature control device for materials in charged particle beam exposure equipment, etc. - Google Patents

Temperature control device for materials in charged particle beam exposure equipment, etc.

Info

Publication number
JPS59130111U
JPS59130111U JP2259283U JP2259283U JPS59130111U JP S59130111 U JPS59130111 U JP S59130111U JP 2259283 U JP2259283 U JP 2259283U JP 2259283 U JP2259283 U JP 2259283U JP S59130111 U JPS59130111 U JP S59130111U
Authority
JP
Japan
Prior art keywords
temperature
control device
charged particle
particle beam
temperature control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2259283U
Other languages
Japanese (ja)
Inventor
中川　泰俊
信男 後藤
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP2259283U priority Critical patent/JPS59130111U/en
Publication of JPS59130111U publication Critical patent/JPS59130111U/en
Pending legal-status Critical Current

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  • Control Of Temperature (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

添付図面は本考案の一実施例を示す概略図である。 １：電子コラム、６．　６ａ：露光材料、１０：露光室
、１１：材料ステージ、１２：材料交換室、１５：冷却
パイプ、１６：恒温槽、１７．１９：温度センサー、１
８．２０：温度測定回路、２１：温度差測定回路、２２
：温度制御部。The accompanying drawings are schematic diagrams showing one embodiment of the present invention. 1: Electronic column, 6. 6a: Exposure material, 10: Exposure chamber, 11: Material stage, 12: Material exchange chamber, 15: Cooling pipe, 16: Constant temperature bath, 17.19: Temperature sensor, 1
8.20: Temperature measurement circuit, 21: Temperature difference measurement circuit, 22
: Temperature control section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 露光室内に移動可能に配置され露光すべき材料を保持し
且つ温度制御されたステージ、該ステージの温度を検出
する第１の温度センサー、前記露光室に連接して設けら
れ未露光材料が収納された材料交換室、該交換室の温度
を検出する第２の温度センサー、前記第１の温度センサ
ーの信号強度に対する第２の温度センサーの信号強度の
差を検出する回路及び該回路の出力信号により前記材料
交換室の温度を前記ステージの温度に等しくするように
制御する手段からなる荷電粒子線露光装置等における材
料の温度制御装置。A temperature-controlled stage that is movably arranged in an exposure chamber and holds the material to be exposed, a first temperature sensor that detects the temperature of the stage, and a stage that is connected to the exposure chamber and stores the unexposed material. a material exchange chamber, a second temperature sensor that detects the temperature of the exchange chamber, a circuit that detects the difference in signal intensity of the second temperature sensor with respect to the signal intensity of the first temperature sensor, and an output signal of the circuit. A material temperature control device in a charged particle beam exposure apparatus or the like, comprising means for controlling the temperature of the material exchange chamber to be equal to the temperature of the stage.
JP2259283U 1983-02-18 1983-02-18 Temperature control device for materials in charged particle beam exposure equipment, etc. Pending JPS59130111U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2259283U JPS59130111U (en) 1983-02-18 1983-02-18 Temperature control device for materials in charged particle beam exposure equipment, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2259283U JPS59130111U (en) 1983-02-18 1983-02-18 Temperature control device for materials in charged particle beam exposure equipment, etc.

Publications (1)

Publication Number Publication Date
JPS59130111U true JPS59130111U (en) 1984-09-01

Family

ID=30153685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2259283U Pending JPS59130111U (en) 1983-02-18 1983-02-18 Temperature control device for materials in charged particle beam exposure equipment, etc.

Country Status (1)

Country Link
JP (1) JPS59130111U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022095201A (en) * 2020-12-16 2022-06-28 日本電子株式会社 Charged particle beam device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630725A (en) * 1979-08-22 1981-03-27 Fujitsu Ltd Electronic exposing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630725A (en) * 1979-08-22 1981-03-27 Fujitsu Ltd Electronic exposing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022095201A (en) * 2020-12-16 2022-06-28 日本電子株式会社 Charged particle beam device

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