JPS59115139A - Movable table apparatus - Google Patents

Movable table apparatus

Info

Publication number
JPS59115139A
JPS59115139A JP57221898A JP22189882A JPS59115139A JP S59115139 A JPS59115139 A JP S59115139A JP 57221898 A JP57221898 A JP 57221898A JP 22189882 A JP22189882 A JP 22189882A JP S59115139 A JPS59115139 A JP S59115139A
Authority
JP
Japan
Prior art keywords
air
air coupling
feed screw
nut
movable table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57221898A
Other languages
Japanese (ja)
Inventor
Kohei Hori
堀　光平
Akira Kudo
工藤　章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57221898A priority Critical patent/JPS59115139A/en
Publication of JPS59115139A publication Critical patent/JPS59115139A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
    • B23Q5/408—Nut bearings therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)

Abstract

PURPOSE:To permit the stable transfer of a table and obtain an apparatus for fine work with high accuracy and practicality by installing an air coupling into the connection part between the table and a table driving mechanism. CONSTITUTION:The driving force of a motor 1 which is driving-controlled revolves a feed screw 5 through gears 2 and 3, and a nut 6 for feed screw is transferred. An air coupling 8 is installed between a connecting rod 7 connected with the nut 6 and a movable table 9. The air coupling 8 has gaps in the radial and the thrust directions between a floating shaft 11 and between a housing 12, and the compressed air is supplied from an air compressor 15 through a pipe 16.

Description

【発明の詳細な説明】 〔発明の属する技術分野〕 本発明は、ビデオディスク、超ＬＳＩ等の微細加工装置
の試料台として組込むに好適なテーブルの位置精度が高
く、且つ簡単な構成で実用性の高い移動テーブル装置に
関する。[Detailed description of the invention] [Technical field to which the invention pertains] The present invention provides a table suitable for incorporating as a sample stage in microfabrication equipment for video discs, ultra-LSIs, etc., which has high positional accuracy, and has a simple configuration and is practical. This invention relates to a highly movable table device.

〔従来技術とその問題点〕[Prior art and its problems]

ビデオディスク、超ＬＳＩ等の微細加工装置に組込まれ
る移動デープル装置では、一般に試料を載置したテーブ
ルを横方向に一定速度で移動させながら、あるいは定位
置に位Ｕ決めして試料に微細加工している。この場合、
上記テーブルの移動は、円滑に且つ高精度に行なわれな
ければ試料の加工精度の大幅な劣化を招く問題がある。A moving table device that is incorporated into microfabrication equipment such as video disks and VLSIs generally microfabricates a sample by moving a table on which the sample is placed horizontally at a constant speed or by positioning it at a fixed position. ing. in this case,
If the movement of the table is not carried out smoothly and with high precision, there is a problem in that the processing accuracy of the sample will be significantly degraded.

しかしながら従来構造の移動テーブル装置にあっては、
以下に示す問題があった。However, in the conventional movable table device,
There was a problem shown below.

たとえば、従来からこのような目的に使用される移動テ
ーブル装置として多くの場合、モータの回転力を送シね
じとナツトとの組合せで、直線運動に変換し、移動テー
ブルに直接的に連結または接触形の力、プリングを介し
て駆動している。For example, in many cases, moving table devices conventionally used for this purpose convert the rotational force of a motor into linear motion using a combination of a feed screw and nut, which is directly connected to or in contact with the moving table. The force of the shape is driven through the pull.

この場合特に伝達部品である歯車、軸受、送シねじ、ナ
ツト等の機械部品の構造または加工、組立の精度によっ
て、振動発生の要因となる。従来、このような駆動機構
を移動テーブルと直接的に連結していたため、移動テー
ブルの動作が、駆動機構からの振動等の影響を大きく受
けて、０．１μｍ程度の精度が要求される微細加工に大
きな障害となっていた。In this case, vibrations may be caused by the structure, processing, or assembly precision of mechanical parts such as transmission parts such as gears, bearings, feed screws, and nuts. Conventionally, such a drive mechanism was directly connected to the movable table, so the movement of the movable table was greatly affected by vibrations from the drive mechanism. This was a major hindrance.

〔発明の目的〕[Purpose of the invention]

本発明は、上記事情を考慮して、これらの欠点を解決す
べくなされたもので、その目的とするところは、テーブ
ルの移動精度を安定よくたもち、且つ小型簡素化全図９
得る微細加工装置に組込むに好適な実用性の高り高精度
の移動テーブル装置を提供するにある。The present invention has been made in consideration of the above-mentioned circumstances to solve these drawbacks, and its purpose is to stably maintain the movement accuracy of the table, and to reduce the size and simplify the entire figure 9.
The object of the present invention is to provide a highly practical and highly accurate moving table device that is suitable for being incorporated into a microfabrication device.

〔発明の概要〕[Summary of the invention]

本発明は移動方向の案内機構によって移動可能に支持さ
れたテーブルと、このテーブルを駆動するテーブル駆動
機構と、このテーブル駆動機構と前記テーブルとの連結
するエアーカップリングとを具備してなる移動テーブル
装置である。The present invention provides a moving table comprising: a table movably supported by a guide mechanism in a moving direction; a table driving mechanism for driving the table; and an air coupling connecting the table driving mechanism to the table. It is a device.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、テーブルとテーブル駆動機構との連結
部にエアーカップリングを設けて構成することによって
、安定したテーブル移動が可能となｐ１且つ簡単な構成
で実用性の高い高精度のビデオディスク、超ＬＳＩ等の
微細加工装置を構成できる。According to the present invention, by providing an air coupling in the connecting portion between the table and the table drive mechanism, stable table movement is possible, and a high-precision video disc with a simple configuration and high practicality is produced. , microfabrication devices such as ultra-LSI can be constructed.

〔発明の実施例〕[Embodiments of the invention]

以下本発明の一実施例について詳細に説明する。 An embodiment of the present invention will be described in detail below.

本発明のターンテーブル装置は、第１図に示すように、
回転制御されたモータ１の駆動力を歯車２．３を介して
送りねじ５を回転させることにより送りねじ用ナツト６
が移動する。上記ナツト６に接続されている４結棒７と
移動テーブル９との間にエアーカップリング８を装着す
ることにより０．１μｍ程度の微細加工精度が要求され
、る移動テーブルにおいて、上記駆動機構からの微少振
動を非接触形構造のエアーカップリングを用いる事によ
ｐ、取り除くことができる高精度な移動テーブル装置で
ある。As shown in FIG. 1, the turntable device of the present invention has the following features:
By rotating the feed screw 5 through the gear 2.3 with the driving force of the rotationally controlled motor 1, the feed screw nut 6 is rotated.
moves. By installing an air coupling 8 between the four-joint rod 7 connected to the nut 6 and the moving table 9, a fine machining accuracy of about 0.1 μm is required. This is a highly accurate moving table device that can eliminate minute vibrations by using an air coupling with a non-contact structure.

第２図は、エアーカップリング８の詳細を示す要部断面
図で、浮上軸１１とノ・ウジング１２との間に各々ラジ
アル方向にギャップ−几、スラスト方向にギヤ、プ＝ｓ
＝１設けることにより、圧縮空気１３をラジアル及びス
ラスト方向に各々数１１Ｍ　ｆｒａいている給気口１４
より吹出すことにより、非接触状態のカラプリングラ構
成している。なお、この圧縮　。FIG. 2 is a cross-sectional view of the main part showing details of the air coupling 8, in which there is a gap in the radial direction, a gear in the thrust direction, and a gap in the thrust direction between the floating shaft 11 and the nozzle 12.
By providing = 1, the air supply port 14 which carries the compressed air 13 in the radial and thrust directions by several 11M fra each.
By blowing out more air, it creates a non-contact colored collar. Note that this compression.

空気は空気圧縮装置１５からノくイブ１６全通して送ら
れてくる。Air is sent from the air compressor 15 through the nozzle 16.

尚、本発明は上記実施例にのみ限定されるものではなく
、たとえば駆動機構の構成部品を他の部品に置き侯え、
または重々変形しても、本発明の効果は変わらない。It should be noted that the present invention is not limited to the above-mentioned embodiments. For example, the component parts of the drive mechanism may be placed in other parts,
Or even if it is heavily deformed, the effects of the present invention do not change.

更には本装置ｔビデオティスク、超ＬＳＩ以外の機器［
狙込むことも可能である。要す／）ＶＣ本発明はその要
旨を逸脱しない範囲で１重々変形して実施することが可
能である。Furthermore, this device is not compatible with video screens or devices other than VLSI [
It is also possible to aim. /) VC The present invention can be implemented with multiple modifications without departing from the gist thereof.

以上詳述したように本発明によれば、従来装置の欠点を
解消し、安定したテーブル移動が可能で、且つ簡単な構
成で実用性の高い尚精度移動テーブル移動ｔここに提供
することができる。As described in detail above, according to the present invention, it is possible to eliminate the drawbacks of conventional devices, to enable stable table movement, and to provide a high-precision movement table movement with a simple configuration and high practicality. .

【図面の簡単な説明】[Brief explanation of drawings]

第１図は移動テーブル装置の概略構成図、第２図はエア
ーカップリングの詳細を示す断面図である。 １・・・・モータ　　　　２，３．、、歯車　　　　４
．、、、ベアリング５、、、、送りねじ　　６　、、、
、す、）　　　　７．、、、連結棒８、、、、エアーカ
ップリング　　９　、、、、移動テーブル　　１０．、
、、案内１１、、、、浮上軸　　１２．、、、ハウジン
グ　　１３．、、、圧縮空気１４、、、、給気口 代理人弁理士　則近憲佑（ほか１名）FIG. 1 is a schematic configuration diagram of a moving table device, and FIG. 2 is a sectional view showing details of an air coupling. 1...Motor 2,3. ,,gear 4
．． ,,,Bearing 5,,,Feed screw 6,,,
, Su,) 7. , , , Connecting rod 8 , , Air coupling 9 , , Moving table 10. ,
,,Guide 11,,,levitation axis 12. ,,,Housing 13. ,,,Compressed air 14,,,Air supply port attorney Kensuke Norichika (and 1 other person)

Claims (1)

【特許請求の範囲】[Claims] 移動方向の案内機構によって移動可能に支持されたテー
ブルと、このテーブルを駆動スるテーブル駆動機構と、
このテーブル駆動機構と前記テーブルとを連結するエア
ーカップリングとを具備してなる仁とを特徴とする移動
テーブル装置。a table movably supported by a guide mechanism in the movement direction; a table drive mechanism that drives the table;
A movable table device comprising: an air coupling that connects the table drive mechanism and the table.
JP57221898A 1982-12-20 1982-12-20 Movable table apparatus Pending JPS59115139A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57221898A JPS59115139A (en) 1982-12-20 1982-12-20 Movable table apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57221898A JPS59115139A (en) 1982-12-20 1982-12-20 Movable table apparatus

Publications (1)

Publication Number Publication Date
JPS59115139A true JPS59115139A (en) 1984-07-03

Family

ID=16773890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57221898A Pending JPS59115139A (en) 1982-12-20 1982-12-20 Movable table apparatus

Country Status (1)

Country Link
JP (1) JPS59115139A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0493139A (en) * 1990-08-08 1992-03-25 Sumitomo Rubber Ind Ltd Connecting structure of table and drive portion
KR20040006903A (en) * 2002-07-16 2004-01-24 현대모비스 주식회사 Suspension for vehicles
CN105922020A (en) * 2016-06-07 2016-09-07 汪涛 Floating type worktable equipment with safety instructions
CN105945590A (en) * 2016-06-07 2016-09-21 汪涛 Floating workbench structure for machining
CN106002316A (en) * 2016-06-07 2016-10-12 汪涛 Floating type worktable device capable of regulating double shafts

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0493139A (en) * 1990-08-08 1992-03-25 Sumitomo Rubber Ind Ltd Connecting structure of table and drive portion
KR20040006903A (en) * 2002-07-16 2004-01-24 현대모비스 주식회사 Suspension for vehicles
CN105922020A (en) * 2016-06-07 2016-09-07 汪涛 Floating type worktable equipment with safety instructions
CN105945590A (en) * 2016-06-07 2016-09-21 汪涛 Floating workbench structure for machining
CN106002316A (en) * 2016-06-07 2016-10-12 汪涛 Floating type worktable device capable of regulating double shafts

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