JPS59115138A - Rotary movable table apparatus - Google Patents

Rotary movable table apparatus

Info

Publication number
JPS59115138A
JPS59115138A JP22189982A JP22189982A JPS59115138A JP S59115138 A JPS59115138 A JP S59115138A JP 22189982 A JP22189982 A JP 22189982A JP 22189982 A JP22189982 A JP 22189982A JP S59115138 A JPS59115138 A JP S59115138A
Authority
JP
Japan
Prior art keywords
turntable
motor
rotating
movement
nut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22189982A
Other languages
Japanese (ja)
Inventor
Kohei Hori
堀　光平
Akira Kudo
工藤　章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22189982A priority Critical patent/JPS59115138A/en
Publication of JPS59115138A publication Critical patent/JPS59115138A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
    • B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
    • B23Q5/408—Nut bearings therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4804—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)

Abstract

PURPOSE:To maintain the stabilized accuracy in rotation and transfer of a turntable by installing a motor for rotating the turntable onto a rack and connecting the motor shaft and the main shaft of the turntable by means of a flexible coupling. CONSTITUTION:A motor 16 which is rotation-controlled drives a feed screw 12 through gears 14 and 15, and thereby a nut 11 is transferred in the axial direction. The transfer of an upper transfer table 3 supported by a guide 4 is controlled by the movement of the nut 11 through a connecting rod 10. A turntable 2 is fixed onto the table 3. A motor 8 for rotating an original disc is fixed onto the bracket 19 of a lower transfer table 20 supported by a guide 21 and rotates an original disc 1 set on the turntable 2 through a coupling 7. The revolution of the motor 16 is transmitted to a pulley 27, and the movement of a feed screw 25 and a nut 24 is connected to the table 20 through a connecting rod 23.

Description

【発明の詳細な説明】 ［発明の属する技術分野〕 本発明はオーディオ及びビデオディスク等の微細加工装
置の試料台として組込むに好適な高精度な回転移動テー
ブル装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field to Which the Invention Pertains] The present invention relates to a high-precision rotating table device suitable for being incorporated as a sample stage in a microfabrication device for audio and video discs, etc.

〔従来技術とその問題点〕[Prior art and its problems]

オーディオ及びビデオディスク等の微細加工装置に組込
まれる回転、移動テーブル装置では、一般に試料を載置
したターンテーブルを回転させて、更に半径方向に移動
させながら試料上に加工用のレーザービームを照射して
約１μｍの微細パターンを加工している。形成されるパ
ターンの高密度化を達成させるため（二その位置精度は
０．１μｍ以下が要求されている。レーザービームの半
径方向の位置制御は無いから、加工の位置精度はターン
テーブルの回転精度と移動精度の大きな影響を受けてい
る。そして、従来構造の回転移動テーブル装置にあって
は以下に示す問題点があった。Rotating and moving table devices incorporated in microprocessing equipment for audio and video disks, etc. generally rotate a turntable on which a sample is placed, and irradiate the sample with a laser beam for processing while moving the turntable in the radial direction. A fine pattern of approximately 1 μm is processed. In order to achieve high density of the pattern formed (second, the positional accuracy is required to be 0.1 μm or less. Since there is no radial position control of the laser beam, the positional accuracy of the processing depends on the rotational accuracy of the turntable. This has a large effect on movement accuracy.The rotary movement table device of the conventional structure has the following problems.

例えば従来からこのような目的に使用される回転移動テ
ーブル装置として多くの場合第１図に示すように回転制
御されたモータ１６を歯車１４．１５を介して、ハウジ
ング１３両端のベアリングで支持されている送りねじ１
２を回転させることによリ、ナラ）１１が軸方向に移動
する。このナツト１１の動きを連結棒１０を介して案内
４によって支持されている移動テーブル３を移動制御し
ている。この移動テーブル３上にターンテーブル２を固
定している。モータ８は移動テーブル３の一端からブラ
ケッ）１９で支持されていてカップリング７を介して原
盤ｌを回転している。それと、上記送り及び回転駆動機
構を載置している基台６は、架台１８の±に防振材９を
介して固定されていて図示していないが、微細加工用部
品は、基台６の上に固定されている。For example, in many cases, as shown in FIG. 1, a rotary table device conventionally used for such purposes has a rotationally controlled motor 16 supported by bearings at both ends of the housing 13 via gears 14 and 15. Lead screw 1
By rotating 2, the oak 11 moves in the axial direction. The movement of this nut 11 is controlled via the connecting rod 10 to move the movable table 3 supported by the guide 4. A turntable 2 is fixed on this moving table 3. The motor 8 is supported by a bracket 19 from one end of the movable table 3, and rotates the master l via a coupling 7. In addition, the base 6 on which the above-mentioned feed and rotation drive mechanism is mounted is fixed to the ± of the pedestal 18 via a vibration isolator 9, and is not shown, but the parts for micromachining are mounted on the base 6. is fixed on top.

この場合、移動テーブルの送り駆動系で、いくら精度よ
く制御されていたとしても、第１図に示すようにターン
テーブル回転用モータが移動テーブルに直接取付けてい
る構造だと、モータがら発生する振動の影響を直に受け
る状態になり、０．１μｍ程度の精度が要求される微細
加工（ご大きな障害となっていた。In this case, no matter how precisely controlled the feed drive system of the moving table is, if the turntable rotation motor is directly attached to the moving table as shown in Figure 1, vibrations generated by the motor will cause vibrations. Microfabrication, which requires precision of around 0.1 μm, has become a major hindrance.

〔発明の目的〕[Purpose of the invention]

この発明は上述した従来装置の欠点を改良したもので、
その目的とするところはターンテーブルの回転精度、移
動精度を安定して保ち、０１μｍ程度のパターン位置精
度を達成できる微細加工装置に組込むに好適な実用性の
病い高精度な回転移動テーブル装置を提供するにある。This invention improves the drawbacks of the conventional device mentioned above.
The purpose is to maintain stable rotational accuracy and movement accuracy of the turntable, and to create a highly accurate rotary movement table device that is suitable for incorporating into microfabrication equipment that can achieve pattern position accuracy of about 0.1 μm. It is on offer.

し発明の概要〕 従来技術の問題点は前述したように、ターンチー７’ル
回転用モータをターンテーブル用の移動テーブルにブラ
ケットを介して直接に取付けていたことにある。振動の
発生源である同モータは振動的に基台に直結されている
ことは、この装置（二とって有害である。この発明は、
同モータが基台あるいは基台にある機構に直接取付けら
れることを避け、基台を防振材で支えている架台上に取
付けて、しかも同モータを上部の移動テーブルの動きに
追従・移動させる下部移動テーブルに取付けられている
回転移動テーブル装置である。SUMMARY OF THE INVENTION As described above, the problem with the prior art is that the motor for rotating the turntable 7' is directly attached to the turntable moving table via a bracket. The fact that the motor, which is the source of vibration, is directly connected to the base in a vibrational manner is harmful to this device.
Avoid attaching the motor directly to the base or a mechanism on the base, instead install it on a pedestal that supports the base with anti-vibration material, and move the motor to follow the movement of the moving table above. This is a rotary moving table device attached to a lower moving table.

〔発明の効果〕〔Effect of the invention〕

この発明によれば、振動の発生源であるターンテーブル
回転用モータは架台上に取付けられているため（二、モ
ータから発生した振動は架台には伝わるが、上部基台へ
は防振材があるために伝わらない。また、モータ軸とタ
ーンテーブル主軸はフレキシブルカップリングで連結さ
れているので、ここからの振動は絶縁されることはいう
までもない。そして、モータは上部移動テーブルの動作
に追従移動可能な移動テーブルを設置しているので、試
料の半径方向どの位置でも同一条件で微細加工が行われ
ることになる。According to this invention, since the motor for rotating the turntable, which is the source of vibration, is installed on the pedestal (2. The vibration generated from the motor is transmitted to the pedestal, but there is no vibration isolating material on the upper base. Also, since the motor shaft and the turntable main shaft are connected by a flexible coupling, it goes without saying that vibrations from there are insulated. Since a moving table capable of following movement is installed, microfabrication can be performed under the same conditions at any position in the radial direction of the sample.

このようにして、振動の発生源であるターンテーブル回
転用モータを基台部と分離して設置することによって、
その振動の影響を極小にしてパターンの位置精度をｏ、
１μｍ以下の高精度の微細加工を達成することができた
。In this way, by installing the turntable rotation motor, which is the source of vibration, separately from the base,
The influence of the vibration is minimized to improve the positional accuracy of the pattern.
We were able to achieve highly accurate microfabrication of 1 μm or less.

し発明の実施例〕 以下、図面を参照して本発明の一実施例について説明す
る。Embodiment of the Invention] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

第２図に概略の装置構成を示す。回転制御されたモータ
１６を歯車１４．１５を介して、ハウジング１３両端の
ベアリングで支持されている送りねじ１２を回転させる
ことにより、ナツト１１が軸方向ｄ二移動する。このナ
ツト１１の動きを連結棒１０を介して案内４によって支
持されている上部移動テーブル３を移動制御している。FIG. 2 shows a schematic configuration of the device. The nut 11 is moved in the axial direction d2 by rotating the feed screw 12 supported by bearings at both ends of the housing 13 using a rotationally controlled motor 16 via gears 14.15. The movement of this nut 11 is controlled via the connecting rod 10 to move the upper moving table 3 supported by the guide 4.

この上部移動テーブル３上にターンテーブル２を固定し
ている。A turntable 2 is fixed on this upper movable table 3.

原盤回転用モータ８は案内２Ｌによって支持されている
下部移動テーブル２０上のプラケツ）１９に固定されて
いてカップリング７を介してターンテーブル２にセット
している原盤ｌを回転している。下部移動テーブル２０
は、モータ１６より歯車１４．１５．プーリ２９及び防
振材９が伸縮しても一定の張力で伝達できるようベルト
２８の一部に図示はしていないが例えばバネ等の弾性体
で調整できる機構を設けていてそして下部のプーリ２７
鑑二伝達している。それからハウジング２６両端のベア
リングで支持されている送りねじ２５を回転させること
６二より、ナツト２４が軸方向に移動する。このナツト
２４の動きを連結棒２３を介して下部テーブル２０に連
結している。A master rotation motor 8 is fixed to a bracket 19 on a lower moving table 20 supported by a guide 2L, and rotates a master l set on a turntable 2 via a coupling 7. Lower moving table 20
The gears 14, 15, . A part of the belt 28 is provided with a mechanism (not shown) that can be adjusted using an elastic body such as a spring, so that the tension can be transmitted at a constant level even when the pulley 29 and the vibration isolator 9 expand and contract, and the lower pulley 27
Kanji is being transmitted. Then, by rotating the feed screw 25 supported by bearings at both ends of the housing 26, the nut 24 is moved in the axial direction. The movement of this nut 24 is connected to the lower table 20 via a connecting rod 23.

この発明は上記実施例にのみ限定されるものではなく、
例えば、駆動機等の構成部品を他の部品に置き換えても
、まだ種々変形しても、本発明の効果は変わらない。史
には本装置をオーディオ及びビデオディスク以外の機器
に組込むことも可能である。要するに本発明はその要旨
を逸脱しない範囲で種々変形しても実施することが可能
である。This invention is not limited only to the above embodiments,
For example, even if the components such as the drive machine are replaced with other parts, or even if various modifications are made, the effects of the present invention will not change. It is also possible to incorporate the device into equipment other than audio and video discs. In short, the present invention can be implemented with various modifications without departing from the gist thereof.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の回転・移動テーブル装置の側面図、第２
図は本発明の一実施例の高精度な回転移動テーブル装置
の構造を示す側面図である。Figure 1 is a side view of a conventional rotating/moving table device;
The figure is a side view showing the structure of a highly accurate rotary table device according to an embodiment of the present invention.

Claims (1)

【特許請求の範囲】[Claims] 試料を回転させながら半径方向に移動させて試料上に微
細加工を行なうために、試料を載置するターンテーブル
と、ターンテーブルを半径方向に移動させる高精度移動
テーブルと、同テーブル用の駆動機構及び送りモータ等
を基台上に配置して、更に基台が架台上に防振材を介し
て取付られている回転移動テーブル製置において、前記
ターンテーブルの下方の架台に、ターンテーブル回転用
のモータと、このモータをターンテーブルの移動に追従
して移動させるだめの追従移動テーブルと、このテーブ
ルの駆動機構と、上部と下部のそれぞれの駆動機構を同
期して動作させる伝達機構を具備したことを特徴とする
回転移動テーブル装置。In order to perform microfabrication on the sample by moving the sample in the radial direction while rotating, a turntable on which the sample is placed, a high-precision moving table that moves the turntable in the radial direction, and a drive mechanism for the table. In the manufacture of a rotary table in which a feed motor, etc. are arranged on a base, and the base is further attached to a pedestal via a vibration isolating material, a pedestal below the turntable is provided with a drive motor for rotating the turntable. The turntable is equipped with a motor, a follow-up movement table for moving the motor in accordance with the movement of the turntable, a drive mechanism for the table, and a transmission mechanism for operating the upper and lower drive mechanisms in synchronization. A rotary moving table device characterized by:
JP22189982A 1982-12-20 1982-12-20 Rotary movable table apparatus Pending JPS59115138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22189982A JPS59115138A (en) 1982-12-20 1982-12-20 Rotary movable table apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22189982A JPS59115138A (en) 1982-12-20 1982-12-20 Rotary movable table apparatus

Publications (1)

Publication Number Publication Date
JPS59115138A true JPS59115138A (en) 1984-07-03

Family

ID=16773904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22189982A Pending JPS59115138A (en) 1982-12-20 1982-12-20 Rotary movable table apparatus

Country Status (1)

Country Link
JP (1) JPS59115138A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6271833A (en) * 1985-09-26 1987-04-02 Hitachi Electronics Eng Co Ltd Inspecting instrument for wafer foreign matter
JPH0577126A (en) * 1991-09-18 1993-03-30 Canon Inc Movable stage device and driving method thereof
JPH09117839A (en) * 1996-10-07 1997-05-06 Canon Inc Movable stage device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6271833A (en) * 1985-09-26 1987-04-02 Hitachi Electronics Eng Co Ltd Inspecting instrument for wafer foreign matter
JPH0577126A (en) * 1991-09-18 1993-03-30 Canon Inc Movable stage device and driving method thereof
US6072183A (en) * 1991-09-18 2000-06-06 Canon Kabushiki Kaisha Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device
US6504160B2 (en) 1991-09-18 2003-01-07 Canon Kabushiki Kaisha Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device
JPH09117839A (en) * 1996-10-07 1997-05-06 Canon Inc Movable stage device

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