JPS5894745A - Multipole lens - Google Patents
Multipole lensInfo
- Publication number
- JPS5894745A JPS5894745A JP56192463A JP19246381A JPS5894745A JP S5894745 A JPS5894745 A JP S5894745A JP 56192463 A JP56192463 A JP 56192463A JP 19246381 A JP19246381 A JP 19246381A JP S5894745 A JPS5894745 A JP S5894745A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- insulators
- electrodes
- magnetic
- magnetic poles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
Description
【発明の詳細な説明】
この尭−は四極子、六礁子、八極子等の鉗１ビーム用多
重他レンズの構造ＩＣ−する。DETAILED DESCRIPTION OF THE INVENTION This lens has a structure IC of multiple lenses for one beam of a quadrupole, hexagonal, octupole, etc.
四憔子、六憾子、へ礁子等はそれらを構成する１極ある
いは磁極に印加する磁圧または電流の極性およびその強
度を制御することによって＃亀ビーム用の集束レンズ、
偏向ａ、非点収値レンズとして利用する（とができる。Four condensers, six condensers, and condensers can be used to create focusing lenses for #tortoise beams by controlling the polarity and intensity of the magnetic pressure or current applied to one pole or magnetic pole constituting them.
It can be used as a deflection a and astigmatism lens.
この嘴Ｍ書ではｊ：紀の作用を行う多を悌レンズと四憔
子質童分析滲用の四極子も含め、多重極レンズとよぶ０
＆！Ｍ４ａ子、八他子等の多重極レンズは逓１１萄鴫ビ
ーム装置で使用されているｔｇｉ転対称形の磁界レンズ
、円筒レンズ、三枚ｇ他しンズ等に比べ多くの％倣をも
っている◎例えば、四極子レンズはＩｌ？１転対称形の
レンズに比べ比較的−い＊起で迩集束レンズ作用が得ら
れること。八極子レンズまたは開口ａｍと組み縫わせる
こと（特公昭５３−３０６２８号公報、特公昭５５−２
８１７９号公報参照）によって回転対称レンズでは不０
７１＠な三次の収差の補正が可能である。八極子や八極
子は非点補正系として利用されている。また八極子は従
来の平行平板臘に比べ、偏向収差の小さい偏向系として
１子ビーム塵光装＃を等では有効である。In this Beak M book, the lens that performs the action of J: is called a multipole lens, including the lens that performs the action of J: and the quadrupole for analysis of the
&! Multipole lenses such as M4a and Yatoshi have a larger number of mirrors than the TGI rotationally symmetrical magnetic field lenses, cylindrical lenses, and three-element lenses used in the 11-piece beam device.◎ For example, a quadrupole lens is Il? It is possible to obtain a converging lens action with relatively less force than a one-fold symmetrical lens. Combining and sewing with an octupole lens or aperture AM (Japanese Patent Publication No. 53-30628, Japanese Patent Publication No. 55-2
(see Publication No. 8179), rotationally symmetric lenses
It is possible to correct third-order aberrations such as 71@. Octopoles and octupole elements are used as astigmatism correction systems. In addition, the octupole is effective as a deflection system with smaller deflection aberration than the conventional parallel plate type in a single-beam optical system.
しかし、このような多重極レンズはＩｌｌ造との峙１４
性から＾確度化をはかることか回転対称形のレンズに比
べて一シく、従来、その利用ｌ！囲が限られていた。However, such multipole lenses face problems with Ill construction14.
Due to its nature, its use has traditionally been improved compared to rotationally symmetrical lenses due to its increased accuracy. The area was limited.
このような多を憔レンズにおける高Ｉ＃度化を組むもの
は亀憔、ａｔ極等の配置関係を正確番ζ３次元でｔｔｍ
、電通することが峻しい−ことである。In order to increase the I# power in such a multi-layer lens, it is necessary to accurately calculate the positional relationship of the at-poles, etc. in three dimensions.
, it is difficult to conduct electricity.
帛１図〜Ｉｍ３図は四極子レンズとへ憾子レンズの従来
丙を示すものである〇
第１図は靜区型四他子レンズ本体、第２図はレンズを礁
を１ライメントするための治具である。Figures 1 to 3 show the conventional quadrupole lens and helenoid lens. Figure 1 shows the main body of the quadrupole lens, and Figure 2 shows the main body of the quadrupole lens, and Figure 2 shows the structure of the quadrupole lens. It is a jig.
図中の１．２，６．４は電極、１１．ｌｊ、１６゜１４
は颯憔を固定するための絶縁物、９は固定用ベースであ
る。ｄ４２−の２１は第１図の電極１゜２．６．４の位
置を颯制するものであり、２２はνの固定ベースに対す
るｔ極配暖を決めるためのピンである。この場合、磁極
の位置決めをする冶具の加工−おいて、正ｉＩｔ位ｌｉ
ｔ決めテーブルを舊するジグポーラ−彎を利用しでも、
穴の／Ｓ：Ｈれを小さくすることが離しい０また電離を
治Ａｌこよって位＃１決めを行い固定した後で、治具と
レンズを分＊ｔ６ため、冶具とｔ憔との嵌縫部の隙間６
ζよってズレを生じることが多い。1.2, 6.4 in the figure are electrodes, 11. lj, 16°14
9 is an insulator for fixing the suspension, and 9 is a fixing base. 21 of d42- controls the position of the electrode 1°2.6.4 in FIG. 1, and 22 is a pin for determining the heating distribution of t with respect to the fixed base of ν. In this case, when machining the jig for positioning the magnetic poles,
Even if you use a jig polar curve to open the T-determining table,
It is important to reduce /S:H of the hole0.Also, after fixing and fixing the position #1 by using Al to cure ionization, the jig and lens are fixed for a minute * t6, so that the jig and the t-hole fit together. Sewing gap 6
Misalignment often occurs due to ζ.
第３図はｍ具を使用しない構造の静ｌＥｍへ極子レンズ
の従来−りである。この場合、１憔６１，６２゜６６．
６４，６）、６６．６７．６１１はジグポーラ−尋「こ
よって加工された絶縁−６９１こ直接固定されるため第
１図に比べで、鯖差を小さくすることが可能であるｏし
かし、位＊ｍｍをｌＯμｍ以下ｔ以下上うとすると、ジ
グポーラ壷こよる加工および研磨性１げ＃！に正確に一
測定する手段がなり１ことや、亀惚径と絶縁物の亀礁固
定面とのズレ會こよって位置種度の低下をきたすことが
避けられなし１ｏ また、四極子レンズのように多投レ
ンズ系を組み立でる場合では、Ｌ下の四極子間における
１ライメント、すなわらレンズ中心の変位がナク、かつ
１ｇ１転方向のズレ（アジマスエラー）を小さくするこ
とか大変感しｖｌことである〇
この発明はと紀のような問題点を薩去し、円柱または球
形の形状を組み縫わせること壷こよって尚摺度な憂を憶
レンズを夷埃するものである。現在、蚊も藺い摺度の侍
られる加工は円嫡杉や球形といった丸物である０これら
の加工は旋鉦、研削、研＃告の技術の発達ＩＣ伴ってサ
ブミクロン台の摺度を借ることが可峨である。また真円
度、真球度はαＯ１μｍ台の分Ｉｓ能で固定可能である
〇以下・こ、本＠鴫の＊ ＃ｌＩ＋ Ｈｒこよって一顧
醗こ説明する０第４１１ｇは静を臘四礁子レンズの場合
の一夷織岡を示したものである。図中の４１．４２，４
６．４４は屯−、ｂｌ、＝２．ｂｈ、ｓ＜、ｂｓ、ｂｂ
、ｂｚ、ｈａは絶縁物、５ν、６０，６１．６２ｉ［１
ｆｆｉ絶縁物と同じ径−旬用外崎である０
５−子レニＩズの１＃Ａまたは磁極の理想形状≦；各２
°。FIG. 3 shows a conventional static lEm polar lens with a structure that does not use m tools. In this case, 1 degree 61, 62 degrees 66.
64, 6), 66, 67, and 611 are directly fixed to the Jig Polar Insulator 691, compared to Fig. 1, so it is possible to reduce the difference in position. *If you try to increase the mm to less than 10 μm or less, the machining and abrasiveness of the Jig Polar pot will be difficult, and there will be no way to accurately measure it. Also, there will be a difference between the diameter of the jig and the surface of the insulator on which the tortoise is fixed. In addition, when assembling a multi-throw lens system such as a quadrupole lens, one alignment between the quadrupoles under L, that is, the center of the lens, is unavoidable. It is very impressive that the displacement is negligible and the deviation in the direction of 1 g 1 rotation (azimuth error) is reduced. This invention eliminates the problems of the previous generation and can be used to stitch cylindrical or spherical shapes. This means that the lenses are not as durable as they should be.Currently, the types of machining that can be achieved even by mosquitoes are round objects such as round cedar and spherical objects. With the development of gong, grinding, and polishing technologies, it is now possible to borrow the submicron level of sliding properties.Furthermore, the roundness and sphericity can be fixed at αO of 1 μm level. Below, I will explain this at a glance in this book @ Kazu's * #lI + Hr 0 No. 411g shows Ichiyoshi Orioka in the case of the Shizuka Shizuka lens. 41.42 in the figure ,4
6.44 is tun-,bl,=2. bh, s<, bs, bb
, bz, ha are insulators, 5ν, 60, 61.62i [1
The same diameter as the ffi insulator - 0 5-child Reni I's 1 #A or the ideal shape of the magnetic pole ≦; each 2
°.
−−１：
１做形状であるが、実用約６ζはレンズの開口径１−（
−ボア）のＬ１４５〜Ｌｌｉ陪の径を有する円として近
似することが出来る０いま、レンズのボア半径を息、電
極又は砿瀦の半径をＲ５レンズ固定用外筒の内調の半径
を几、これ暴こ内接するよう奢こ配喧する絶縁物または
非磁性材料の個数をｏｌその半径をＦＬｏ、！−１４と
≠水呑ル、ＲＬ、ＲＤ ト（Ｄｒｋ１６＋ｃｓｌｌｌよ
うな関係が成り立つ。--1: Although it has a 1-inch shape, the practical approx. 6ζ has a lens aperture diameter of 1-(
- Boa) can be approximated as a circle with a diameter of L145 to Lli. Now, the bore radius of the lens is R5, the radius of the electrode or wire is R5, and the radius of the inner diameter of the outer cylinder for fixing the lens is R5. The number of insulators or non-magnetic materials arranged so as to be inscribed here is ol, and its radius is FLo,! -14 and ≠ Mizunuru, RL, RD (Drk16+cslll).
ａｏ＝ｔａｎ＃ （Ｒｔ、（ｔａｎ（１＋１ ）＋ｍ＋
ＫＬ” （ｔａｎ ＃＋１ ） ＋２ＲＬａ ｔａ
ｎθ ） −−−−−１１）但し、ｅ＝に７口
几＝恥”” ＊ｉａａ ） ・・・ｅ１
２）１ｇ４図においてＲｔ、＝Ｌ１４６３ｍ＋ことり、
鴫惚半径Ｒｔ、を６ｍａ＋とすると５１〜６２の絶縁−
反びロッドの半径ＲＤを＆７５７ｍｍ、レンズ固定用外
藺の半径Ｒを２８ ｍｍ ｌｃすればよいことがわかる
。ao=tan# (Rt, (tan(1+1)+m+
KL” (tan #+1) +2RLa ta
nθ ) ------11) However, e = 7 口几 = shame"" *iaa ) ... e1
2) In the 1g4 diagram, Rt, = L1463m + Kotori,
If the radius Rt is 6ma+, then the insulation of 51 to 62 -
It can be seen that the radius RD of the warping rod should be &757 mm, and the radius R of the lens fixing shell should be 28 mm lc.
このように本発１１によれば１ＩＩＣ極や磁極、絶縁物
や非磁性材料等の真円度とその直径を正確に決め、それ
に会わせてレンズ固定用外−の内径を決めることによっ
て、多重極レンズにおける＃Ｌ惚やａ礁の位置決めが高
精度にできるわけである〇縞４崗の５９〜６２は多段レ
ンズ系におけるアジマスエラーを抑えるための％段間の
′通しロツ°ドの役目をはたしているが、これを非磁性
金属で作ること鹸こよって、亀甑間に絶縁物がのぞくこ
とをｔ＜シ、絞り尋による反射ビームや迷いビームによ
るｌＩ！！縁物のチャージアップＩＣよるレンス唾界の
みだれを小さくすることができる。ここでは絶縁物と通
しロッドの１２本がレンズ固定用外１１に内誉するよつ
に配１１＃ニジたが、絶縁物を遡しロッドの役目もはた
させること−こすれば、レンズ固定用外筒身こ内接させ
るようｔこ配置ｔするのは絶域１８本だけＱ ｂ ”Ｊ
ｈａ ｃあることは明らかである０この１合、―込の
よう奢こ反射ビーム、迷いビーム等着こよるチャージγ
ノブの一影響を小さくするため、＾抵抗材料を絶縁物に
蒸着し、絶縁物上の賦界を一様舎こすることはチャージ
アップ防止上有効である。また、第４図の５９″−６２
の遡しロッド以外の５１〜５８の杷−物を球形のものを
使用することも一エ能である。In this way, according to the present invention 11, by accurately determining the roundness and diameter of the 1IIC pole, magnetic pole, insulating material, non-magnetic material, etc., and determining the inner diameter of the outer lens fixing lens accordingly, multiplexing can be achieved. The positioning of #L angle and A reef in the polar lens can be done with high precision. 〇The four stripes 59 to 62 serve as the through rods between the % stages to suppress the azimuth error in the multi-stage lens system. However, since it is difficult to make it with non-magnetic metal, there is no chance that the insulator will peek out between the shells and the reflected beam or stray beam from the aperture. ! It is possible to reduce the drooping of the lens salivary area due to the charge-up IC of the edge. Here, 12 insulators and threaded rods were placed in the outer part 11 for fixing the lens, but the insulator can also be used as a rod by rubbing it. Only 18 pieces are arranged so that they are inscribed in the outer cylinder body.Q b ”J
It is clear that there is a charge γ, such as reflected beams, stray beams, etc.
In order to reduce the influence of the knob, depositing a resistive material on the insulator and uniformly rubbing the voltage on the insulator is effective in preventing charge-up. Also, 59″-62 in Figure 4
It is also possible to use spherical loquats for the loquats 51 to 58 other than the retracing rods.
この図ではレンズの側面−が表示さｔＩＣいないが、６
３−６６のネジの通る部分の絶縁物の径は当然細くしで
ある。In this figure, the side of the lens is not visible, but the 6
Naturally, the diameter of the insulator where the 3-66 screw passes is thinner.
第５図と第６図の夷織列はレンズ固定用外筒とτれに内
接させる絶縁物は同一のものを使用して、四憾子と八極
子相互の１ライメントをとるよう着こした靜電臘四憔子
と静電証人惧子である。The weaving rows shown in Figures 5 and 6 are made using the same insulator as the outer cylinder for fixing the lens, and are arranged so that the quadrupole and octupole are in one alignment with each other. These are Shitsuko Seiden, who did this, and Keiko, who was a witness to static electricity.
第７１と第８図は磁界型四惜子レンズの実九列をボして
いる０第７ｃｉ！Ｊの７１．７２，７６．７４は磁極、
７６．７６．７７．７δは電磁コイル、７９はヨーク毫
併ねたレンズ固定用外筒である。粥８図は１硫コイルを
レンズ−逆用り間のント、こ出したしのｊ！、ｌ。Figures 71 and 8 are the 7th ci! 71.72 and 76.74 of J are magnetic poles,
76, 76, 77, 7.delta. is an electromagnetic coil, and 79 is an outer cylinder for fixing the lens which also serves as a yoke. Figure 8 shows the 1 sulfur coil being used between lenses and spilled out! ,l.
ｃｉ、２．ｆ１６．ｄ４が奥憾、８コ、ｅｌｓ６．６７
、ｄａはコイル、Ｂ９はＪＦ−ｉ性材料によるレンズ固
定外浦、９０かヨークである。ci, 2. f16. d4 is deep regret, 8 pieces, els6.67
, da is a coil, B9 is a lens fixing outer periphery made of JF-i material, and 90 is a yoke.
以りのよう會こ本発明によって侍りれる高摺度な多直憾
しンスは釘龜ビーム装−尋の性能２同とさせるはη）り
でなく、妬め薯こ記述したような収差補正レンズ糸や電
子ビーム瘍光装置、Ｍｋ横回路儀責装を寺の烏硝度ビー
ムー向姦寺その利用範囲は広い。＃嵐型四懐子レンズ系
の＾摺度比は一界放射型電子枕を反った走査ｍ電子顧鎮
鏡や亀子ビーム露元表＃Ｌ畳の超＾＾仝系では電子光学
系をホー１ヒできること奢こよって大輪な藷性改醤が期
待できる〇また蝋近の尚４ｄＬイオン源の開発奢ζ汗っ
でイオンビーム装置のレンズ糸としてｔ侠である。In other words, the high friction multi-direction that can be achieved by the present invention is not due to the same performance as the nail beam system, but rather the aberration correction as described above. Lens threads, electron beam light devices, and Mk lateral circuit ritual equipment are used in the temple's crayon beams - the scope of its use is wide. # The sliding ratio of the Arashi-type Shikaiko lens system is the scanning m electron beam mirror with a curved one-field emission type electron beam, and the Kameko beam exposure table. We can expect a large-scale improvement in the quality of the product.Also, Rochika's development of a 4 dL ion source will be useful as a lens thread for an ion beam device.
１！Ｌｉ他子ｊ［−分析器では一般的に四憾子レンズ１
こ比べ配慮が億漏に長く、ミスアライメントが分解能、
感１ｉ１：Ｉこ大きく参書ｒ６ため、本発明１こよる＾
積置化はメリットか大きい。1! Li and other lenses [-In analyzers, generally four lenses 1
Compared to this, it takes a long time to consider, and misalignment causes problems with resolution and
Feeling 1i1: I have a big reference r6, so the present invention 1 is different ^
There are great benefits to having storage.
一１凶は一一櫨四憔子レンズの従来内を示す図Ｏ１〜４
は１礁、１１−１４は絶縁物、９はレンズ１疋用ベース
である。第２図は第１１の四億子を１ライメントするた
めの治具である０２１は四憔子亀憔を位置決めするため
のらので、２２は固定ペースとｇ憔との位［関詠を決め
るピンである。
弔３図は靜６を型へ惚子レンズの使米丙を示す図でめる
０！ｈ１〜６８はへ極子屯憔、６９は颯憔固定用の杷−
一である。
第４−は本発明暑こよる靜亀麺四憾子の実施的でめる０
４１〜４４は四憔子蝋憔、５１〜コｄは同一径の杷ｗ書
、５９〜６２は杷−物と同一径の１ジマス城制用のロッ
ド、６６〜６６はネジ、６７〜７υは蝋圧目目口用の絶
縁物でめるｏ７１はレンズ固゛定用外尚であるｏｓ１ｇ
５図と第６ｅｌ！Ｊは本発明中こよる四億子とへ極子の
実施例を示すもので同一のレンズ固定用外筒と絶縁物伊
ζよって四富子と八極子相互の１ライメントがとれるよ
う番こしたものでめる０第７図と第８図は蝉界謔四極子
普こおける本発明ｉ（よる実施例を示すもので、第８−
は電磁コイルをレンズ固定用外筒の外憂ζ覗り付けたも
のである。
図中のハ〜７４は磁極、７５〜７６はｔｍコイル、７９
はレンズ固定用外筒でありヨークの役目もはたｔｏ第８
図では８１〜８４が磁極、８５〜８８が屯磁コイル、８
９はレンズ固定用外筒、９０はヨークである。
％針山願人
通商腫業雀工業技術院長
石 坂 誠 −
株式会社日電子テクニクス
代表者 １）村 賊 三Diagrams O1 to 4 showing the conventional inside of the 11th and 11th lens
11-14 are insulators, and 9 is a base for lens 1. Figure 2 is a jig for making one alignment of the 11th 400 zi. 021 is a rake for positioning the 4 yakuzi, and 22 is a jig for determining the position between the fixed pace and the g zi. It's a pin. The third picture is a diagram showing the use of the Koko lens to the mold 6! h1 to 68 are hekoku tun, 69 is a loquat for fixing shu.
It is one. 4th - is a practical demonstration of the present invention's heat-loving quiet turtle noodles 0
41 to 44 are four rods, 51 to d are loquats of the same diameter, 59 to 62 are rods for one-dimensional castles with the same diameter as loquats, 66 to 66 are screws, 67 to 7υ o71 is made of insulating material for the eyes and mouth with wax pressure.Os1g is not used for lens fixation.
Figure 5 and 6el! J shows an example of the 400 million-pole element and the 8-pole element according to the present invention, and the same outer cylinder for fixing the lens and the same insulating material are arranged so that one alignment between the 400 million element and the 8-pole element can be maintained. Figures 7 and 8 show embodiments of the present invention (i) in the quadrupole world.
The electromagnetic coil is seen from the outside of the lens fixing barrel. In the figure, C ~ 74 are magnetic poles, 75 ~ 76 are tm coils, 79
is the outer cylinder for fixing the lens and also serves as a yoke.
In the figure, 81 to 84 are magnetic poles, 85 to 88 are magnetic poles, and 8
9 is an outer cylinder for fixing the lens, and 90 is a yoke. % Hariyama Ganjin, Director of the Institute of International Trade and Industry, Makoto Ishizaka - Representative of Nichiden Technics Co., Ltd. 1) Tsutomu Mura
Claims (1)
礁しンズ遥こおいて、外形寸法が晩卸の円柱形または球
形のｔｉｉおよび絶縁物または確性および＃ＩｆＩ＆性
材料を銀材料わせ、前記絶縁物または＃Ｉ砿注性材料パ
イプ状のＩｌｌに１間なく内接するように配喧し、２つ
の隣接する絶縁物または非ａ性Ｊｉｔ科Ｊ：に電極また
は磁極を取り付けることによって、所望の位置にＩＩＩ
Ｉ起鑞極または磁極を＾精度に配置することを時機とす
る多重極レンズ。In a multi-reef lens for a charged beam having four-core, six-pole, and hexagonal structures, cylindrical or spherical external dimensions and insulators or solid and #IfI & magnetic materials are The material is arranged so that it is inscribed in the insulating material or the pipe-like material without a gap, and electrodes or magnetic poles are attached to two adjacent insulating materials or non-aqueous materials. III to the desired position by
A multipole lens whose purpose is to place poles or magnetic poles with precision.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56192463A JPS5894745A (en) | 1981-11-30 | 1981-11-30 | Multipole lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56192463A JPS5894745A (en) | 1981-11-30 | 1981-11-30 | Multipole lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5894745A true JPS5894745A (en) | 1983-06-06 |
| JPS6331895B2 JPS6331895B2 (en) | 1988-06-27 |
Family
ID=16291711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56192463A Granted JPS5894745A (en) | 1981-11-30 | 1981-11-30 | Multipole lens |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5894745A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02230647A (en) * | 1989-01-24 | 1990-09-13 | Ict Integrated Circuit Testing G Fur Halbleiterprueftechnik Mbh | Multi-position device and its manufacture |
| JPH03100353U (en) * | 1990-01-30 | 1991-10-21 | ||
| JP2006185637A (en) * | 2004-12-24 | 2006-07-13 | Kyocera Corp | Electrostatic deflector and electron beam device using it |
| JP2007095702A (en) * | 1995-08-11 | 2007-04-12 | Mds Health Group Ltd | Spectrometer with axial electric field |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6291828B1 (en) * | 1999-12-21 | 2001-09-18 | Axchlisrtechnologies, Inc. | Glass-like insulator for electrically isolating electrodes from ion implanter housing |
| JP2007287365A (en) * | 2006-04-13 | 2007-11-01 | Jeol Ltd | Multipole lens and multipole lens manufacturing method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311280U (en) * | 1976-07-13 | 1978-01-30 | ||
| JPS53133561U (en) * | 1977-03-29 | 1978-10-23 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE408787B (en) * | 1973-06-14 | 1979-07-09 | Hoechst Ag | METHODS AND DEVICES FOR THE PREPARATION OF MAINLY WATER-SOLUBLE CHAIN-SHAPED AMMONIUM POLYPHOSPHATES |
-
1981
- 1981-11-30 JP JP56192463A patent/JPS5894745A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5311280U (en) * | 1976-07-13 | 1978-01-30 | ||
| JPS53133561U (en) * | 1977-03-29 | 1978-10-23 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02230647A (en) * | 1989-01-24 | 1990-09-13 | Ict Integrated Circuit Testing G Fur Halbleiterprueftechnik Mbh | Multi-position device and its manufacture |
| JPH03100353U (en) * | 1990-01-30 | 1991-10-21 | ||
| JP2007095702A (en) * | 1995-08-11 | 2007-04-12 | Mds Health Group Ltd | Spectrometer with axial electric field |
| JP4511505B2 (en) * | 1995-08-11 | 2010-07-28 | エムディーエス アナリティカル テクノロジーズ | Analyzer with axial electric field |
| JP2006185637A (en) * | 2004-12-24 | 2006-07-13 | Kyocera Corp | Electrostatic deflector and electron beam device using it |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6331895B2 (en) | 1988-06-27 |
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