JPS5893287A - Semiconductor device and manufacture thereof - Google Patents
Semiconductor device and manufacture thereofInfo
- Publication number
- JPS5893287A JPS5893287A JP19218081A JP19218081A JPS5893287A JP S5893287 A JPS5893287 A JP S5893287A JP 19218081 A JP19218081 A JP 19218081A JP 19218081 A JP19218081 A JP 19218081A JP S5893287 A JPS5893287 A JP S5893287A
- Authority
- JP
- Japan
- Prior art keywords
- film
- insulating film
- recess
- forming
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000005530 etching Methods 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 24
- 230000015572 biosynthetic process Effects 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 7
- 239000012535 impurity Substances 0.000 abstract description 4
- 229910052681 coesite Inorganic materials 0.000 abstract description 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 3
- 229910052682 stishovite Inorganic materials 0.000 abstract description 3
- 229910052905 tridymite Inorganic materials 0.000 abstract description 3
- 230000003449 preventive effect Effects 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 241000293849 Cordylanthus Species 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- -1 boron ions Chemical class 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Element Separation (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明はフィールド領域に比較的厚いフィールド絶縁膜
を表面が平坦になるように埋めこむMO8型半導体装置
及びその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an MO8 type semiconductor device in which a relatively thick field insulating film is buried in a field region so as to have a flat surface, and a method for manufacturing the same.
半導体としてシリコンを用いた半導体装置、特にMOS
型半導体装置においては寄生チャネルによる絶縁不良を
なくシ、かつ寄生容量を小さくする為に、素子間のいわ
ゆるフィールド領域には厚い絶縁膜が形成される。Semiconductor devices using silicon as a semiconductor, especially MOS
In a type semiconductor device, a thick insulating film is formed in a so-called field region between elements in order to eliminate insulation defects due to parasitic channels and to reduce parasitic capacitance.
従来このような素子間分離法としては選択酸化法が良く
知られている。これは素子形成領域を耐酸化性マスク、
代表的にはシリコン窒化膜で榎い、高温「ツ化をおこな
ってフィールド領域にのみ選択的に厚い酸化膜を形成す
る技術である。しかしこのような選択酸化法においては
、上記高温酸化中、シリコン窒化膜の下端部からフィー
ルド酸化膜が鳥のくちばしくバーズビーク)状にくいこ
む。このため素子形成領域の寸法誤差の原因となり、更
に乗積回路の高集積化を妨げている。また、フィールド
領域と素子形成領域の境界には約03〜0.5 、a
m 8度の表面段差が形成される。この表面段差は選択
酸化後のリングラフィ精度の低下及び表面段差部での金
属配森の信頼性低下の原因となっていた。A selective oxidation method is conventionally well known as such an element isolation method. This is an oxidation-resistant mask for the element formation area.
Typically, this technique involves forming a thick oxide film selectively only in the field region by using a silicon nitride film and performing high-temperature oxidation.However, in this selective oxidation method, during the high-temperature oxidation, The field oxide film is embedded in the shape of a bird's beak from the lower end of the silicon nitride film.This causes dimensional errors in the element formation area and further impedes high integration of multiplication circuits.Also, the field area and the boundary between the element formation region has a thickness of about 03 to 0.5, a
A surface step of 8 degrees is formed. This surface step caused a decrease in phosphorography accuracy after selective oxidation and a decrease in the reliability of the metal arrangement at the surface step.
これに対し、上記バーズビークをなくシ、シかも表面段
差のない状態で、素子間分離用の厚い酸化膜を形成する
方法が、BOX法(iuringOxide 1nto
3i11con Grove )として知られ、てい
る。以下にこのBOX法の工程を第1図を用いて簡単に
説明する。第1図(a)に示すように、たとえばシリコ
ン基8!1ζこ通常の写真食刻工程を用い、素子形成領
域をマスク2で覆い、フィールド領域のシリコン基板1
を所望のフィールド絶縁膜厚にイ4」当する深さにエツ
チングする。On the other hand, a method for forming a thick oxide film for isolation between elements without the above-mentioned bird's beaks or surface steps is the BOX method (iuring oxide 1nto oxide film).
3i11con Grove). The steps of this BOX method will be briefly explained below using FIG. As shown in FIG. 1(a), for example, a silicon substrate 8!1ζ is formed by using a normal photolithography process, covering the element formation region with a mask 2, and then covering the silicon substrate 1 in the field region.
Etch to a depth corresponding to the desired field dielectric thickness by 4".
次に(b)に示す如く前記マスク2を用いてフィールド
反転防止のために、シリコン基板1と同電型の不純物、
たとえばP型基板の場合はホウ素をイオン注入し反転防
止層3を形成する。その後(c)に示す如く、リフト・
オフ加工によりフィールド領域にシリコン酸化膜4を、
周辺に溝5が形成された状態で埋めこむ。このリフト・
第11′1
フ工程は、たとえば以下のようにしておこなう。Next, as shown in (b), using the mask 2, an impurity of the same electric type as the silicon substrate 1 is added to prevent field inversion.
For example, in the case of a P-type substrate, boron ions are implanted to form the anti-inversion layer 3. After that, as shown in (c), the lift
A silicon oxide film 4 is formed in the field area by off-processing.
It is buried with a groove 5 formed around the periphery. This lift
The 11'1 step is carried out, for example, as follows.
まず全面にプラズマCVD 5in2膜を堆積し、そ
のまま弗化アンモニウム溶液で1分程度エツチングする
。このとき素子形成領域周囲の側壁に堆積したプラズマ
CVD 5in2膜は、他の部位の8102膜よりエ
ツチングが急速に進むので、前記1111膜壁部のSi
Ox膜が選択的に除去され、溝5が形成される。その
後素子形成領域上のマスク2を除去すると、マスク上に
堆積したプラズマCVD Sin、膜が除去され、第
1図(C)に示した構造になる。次に(d)に示す如く
前記溝5を埋めこむように全面にCVD5iotllR
6を堆積し、更にその表面の凹部7を埋めこんで表面を
平坦化するように、流動性で、かつ後述のエツチング工
程で810□膜6と同じエツチング速度を有するレジス
ト等の被膜8を、塗布形成する。その後(e)に示す如
く、前記有機物pss及びCVD 5jOt膜6を均
一エツチングして素子形成領域を露出させる。First, a plasma CVD 5in2 film is deposited on the entire surface, and then etched with an ammonium fluoride solution for about 1 minute. At this time, the plasma CVD 5in2 film deposited on the side walls around the element formation region is etched more rapidly than the 8102 film in other parts, so the Si on the 1111 film wall
The Ox film is selectively removed and grooves 5 are formed. Thereafter, when the mask 2 on the element formation region is removed, the plasma CVD Sin film deposited on the mask is removed, resulting in the structure shown in FIG. 1(C). Next, as shown in (d), CVD5iotllR is applied to the entire surface so as to fill the groove 5.
6 is deposited, and a film 8 such as a resist that is fluid and has the same etching rate as the 810□ film 6 in the etching process described later is deposited so as to fill the recesses 7 on the surface and flatten the surface. Apply and form. Thereafter, as shown in (e), the organic material pss and the CVD 5jOt film 6 are uniformly etched to expose the element formation region.
BOX法に於ては、シリコン$板のエツチングに反応性
イオンエツチングを用いることにより、素子領域の寸法
は写真食刻工程で形成したマスクの寸法によって規定さ
れ、素子領域の寸法変換差はゼロにすることができる。In the BOX method, by using reactive ion etching to etch the silicon $ plate, the dimensions of the device region are defined by the dimensions of the mask formed in the photolithography process, and the difference in dimension conversion of the device region is reduced to zero. can do.
また、表面が平坦にできるため、リングラフィ精度の向
上と配線の信頼性も著しく向上する。Furthermore, since the surface can be made flat, the accuracy of phosphorography and the reliability of wiring are significantly improved.
しかしながらこのようなりOX構造を用いて微小寸法、
たとえば1μm以下のゲート幅をもつMOS)ランジス
タを製作した場合、素子形成領域表面の端部で電位が高
くなり、素子形成領域の中央部表面に較べ反転し易く、
そのためトランジスタのしきい値電圧が低下する。この
ようにMOSトランジスタのしきい値゛電圧はゲート幅
に依存するので、集積化の妨げとなる。However, using this OX structure, minute dimensions,
For example, when manufacturing a MOS (MOS) transistor with a gate width of 1 μm or less, the potential is higher at the edge of the surface of the element formation region and is more likely to be reversed than at the center surface of the element formation region.
Therefore, the threshold voltage of the transistor decreases. In this way, the threshold voltage of a MOS transistor depends on the gate width, which hinders integration.
本発明は上記BOX法の欠点に鑑みてなされたもので、
素子形成領域表面のゲート幅方向端部の絶縁膜厚を制御
することにより、上記欠点を除いた半導体装置及びその
製造方法を提供するものである。The present invention was made in view of the drawbacks of the BOX method mentioned above.
It is an object of the present invention to provide a semiconductor device and a method for manufacturing the same that eliminate the above-mentioned drawbacks by controlling the thickness of the insulating film at the ends in the gate width direction on the surface of the element forming region.
本発明に於てはBOX法でフィールド絶縁膜を埋めこん
だ後、素子形成領域表面に例えば異方性エツチングを施
す。その結果素子形成領域端部に結晶方位で定まる一定
の角度の傾が1を有する四部が形成される。この状態で
ゲート酸化膜を形成すると、前記傾斜面の酸化速度は素
子形成領域中火部の平坦面より酸化速度が大きい為、中
央部で18 < 、&it部で厚いゲー)II化膜が、
再現性よく形成される。この結果微小寸法のMOSトラ
ンジスタに於ても素子領域のケート幅方向端部の′電位
が中央部とほぼ同じになり、前記のしきい値電圧低下が
なくなる。In the present invention, after a field insulating film is buried by the BOX method, the surface of the element formation region is subjected to, for example, anisotropic etching. As a result, four portions having a constant angle of 1 determined by the crystal orientation are formed at the end of the element forming region. When a gate oxide film is formed in this state, the oxidation rate of the sloped surface is higher than that of the flat surface of the intermediate part of the element forming region, so that the gate oxide film is thicker than 18 < in the central part and thick in the &it part.
Formed with good reproducibility. As a result, even in a small-sized MOS transistor, the potential at the end portion in the gate width direction of the device region becomes approximately the same as that at the center portion, and the above-mentioned drop in threshold voltage is eliminated.
以下本発明の実施例について、第2図を用いて説明する
。Examples of the present invention will be described below with reference to FIG.
第2図(a)に示す如く半導体基板、たとλば面方位(
100)のシリコン基板11に通常の写真食刻工程を用
い、素子形成領域をマスク12で梳いフィールド領域の
シ1l−iン基)Fillを、所望のフィールド絶縁膜
厚に相当する量エツチングする。このとき、エツチング
法として反応性イオンエツチングを用いれば、はy垂直
な側不純物、たとえばP型基板の場合はホウ素をイオン
注入し、て反転防止層13を形成する。その後(b)に
示す如く、リフト・オフ加工によりフィールド領域に第
1の絶縁膜としてプラズマCVD膜14を、周辺に溝1
5が形成された状態で埋めこむ。ついで(C)に示す如
く前記溝15を埋めこむように第2の絶縁膜としてCV
D 8102膜16を堆積し、更に流動性物質たとえ
ばレジスト17を表面が平坦になるように塗布する。As shown in FIG. 2(a), the semiconductor substrate has a plane orientation of λ
Using a normal photolithography process on the silicon substrate 11 of 100), the element forming region is covered with a mask 12, and the field region's fill is etched by an amount corresponding to the desired field insulating film thickness. At this time, if reactive ion etching is used as the etching method, the inversion prevention layer 13 is formed by implanting ions of an impurity perpendicular to the y direction, such as boron in the case of a P-type substrate. Thereafter, as shown in (b), a plasma CVD film 14 is formed as a first insulating film in the field region by lift-off processing, and grooves 14 are formed around the periphery.
5 is formed and embed it. Next, as shown in (C), a CV film is formed as a second insulating film so as to fill the groove 15.
A D8102 film 16 is deposited, and a fluid material such as a resist 17 is further applied so that the surface is flat.
ここで、レジスト17の代わりに溶融可能なガラス膜た
とえばりン硅化ガラス +1ンーポロン硅化ガラス膜な
どを形成後溶融して平坦な被膜を形成してもよい。次に
(d)に示す如く前記レジスト17およびCVD 5
io2膜16をエツチング速度の等し謬エツチング条件
で均一エツチングして素子形成領域を碓出させる。この
状態で水酸化カリウムとイソプロピルアルコールの混合
液により、素子形成領域をエツチングする。前記混合液
はプラズマCVD S i o2膜14およびCvD
5102膜ノロは、T、 ”7−+−7りせず、シリ
コン基鈑ノ1のみを、結晶の面方位に応じた速度でエツ
チングする。面方位(ion)のSi基板を用いた場合
には約1分間のエツチングで約500 A−T:ツチン
グされ(e)に示す如く面方位(111)の斜−[71
11B及び同(100)の平坦面19からなる凹部が形
成される。ついで約900Cの酸素′jX−囲気中で酸
化する。酸素莢囲気中では(100)面より(111)
面の酸化速度が大きく、またCVD 5in2膜16
伸からも酸化される為(f)に示す如く素子形成領域端
部で厚い断面形状のゲート酸化膜20が得られる。この
後通常のシリコンゲートプロセスによりMOSトランジ
スタを形成する。Here, instead of the resist 17, a meltable glass film such as a phosphorus silicide glass +1-poron silicide glass film may be formed and then melted to form a flat film. Next, as shown in (d), the resist 17 and the CVD 5
The io2 film 16 is uniformly etched under etching conditions with equal etching speed to form an element formation region. In this state, the element formation region is etched using a mixed solution of potassium hydroxide and isopropyl alcohol. The mixed liquid is a plasma CVD SiO2 film 14 and a CvD
The 5102 film slag etches only the first silicon substrate at a speed that corresponds to the plane orientation of the crystal without etching T. is etched for about 1 minute, resulting in about 500 A-T etching, and as shown in (e), the diagonal plane orientation (111) -[71
11B and a concave portion consisting of a flat surface 19 (100) is formed. It is then oxidized in an oxygen atmosphere of about 900C. (111) from the (100) plane in the oxygen capsule atmosphere
The surface oxidation rate is high, and the CVD 5in2 film 16
Since the gate oxide film 20 is also oxidized from the expansion, a thick cross-sectional gate oxide film 20 is obtained at the end of the element formation region, as shown in (f). Thereafter, a MOS transistor is formed by a normal silicon gate process.
本実施例によれば、ゲート酸化膜が形成される部分は、
それ以前に他の物質たとλばCVDSi□、膜16等で
榎われることがなく、酸化膜形成直前にエツチングによ
り露出されるのでチャネル領域表面部の不純物による汚
染がない。According to this embodiment, the portion where the gate oxide film is formed is
Before that, other materials such as λ, CVDSi□, film 16, etc. are not exposed, and the surface of the channel region is not contaminated by impurities because it is exposed by etching immediately before forming the oxide film.
また素子形成領域とフィールド領域の境界の段差は約1
000A以下でも素子形成領域端部の電位と中央部の電
位をほぼ等しくすることができる。この程度の基板表面
の凹凸は、後に続くリソグラフィ工程での寸法精度の低
下及び表面段差部での金属配線の段切れ等の信頼性低下
は生じない。Also, the step difference between the element formation region and the field region is approximately 1
Even if the voltage is less than 000 A, the potential at the end of the element formation region and the potential at the center can be made almost equal. This degree of unevenness on the substrate surface does not cause a decrease in dimensional accuracy in the subsequent lithography process or a decrease in reliability such as breakage of the metal wiring at the surface step portion.
なお、本実施例では素子形成領域を異方性エツチングす
る際に水酸化力11ウムとイソプロピルアルコールの混
合液を用いたが、他のエツチング方法たとえばエチレン
ジアミンとピロカテコールの混合液を用いても同様の効
果がKlられる。さらにこのエツチング工程はp・方性
エツチングでなくとも索子形成領域表面が凹部になるよ
うエツチングすれば同様の幼芽が得られる。In this example, a mixture of 11 um hydroxide and isopropyl alcohol was used for anisotropic etching of the element formation region, but the same effect can be obtained using other etching methods, such as a mixture of ethylenediamine and pyrocatechol. The effect of is Kl. Furthermore, even if this etching step is not p-oriented etching, similar sprouts can be obtained by etching so that the surface of the cord formation region becomes a concave portion.
以上説明した如く、本発明によれば従来のBOX法の特
徴を損なうことなく、微細寸法のMOSトランジスタに
対しても、そのしきい値電圧を所望の値に制御すること
ができる。As described above, according to the present invention, it is possible to control the threshold voltage of a micro-sized MOS transistor to a desired value without impairing the characteristics of the conventional BOX method.
第1図(al〜(elは従来のBOX法による素子間分
離用本化膜の製造工程を示す断面図、第2図(a)〜(
f)は不発明の一実施例の晃造工程を示す断面図である
。
11・・・シ11コン基勝、12・・・マスク、13・
・・反転防止層、14・・・5io2模(第1の絶縁膜
)、15・・・!運、16・・・5102膜(第2の絶
縁膜)、17・・・レジスト(平坦化肢fa)、1g・
・・斜面、19・・・平坦面、20・・・ゲート酸化膜
。
出願人代理人 弁理士 鈴 江 武 彦1 )
第1図
ど
422−
l−〜 メー\
Φ 呻−Figure 1 (al to (el) is a cross-sectional view showing the manufacturing process of a real film for element isolation using the conventional BOX method, and Figure 2 (a) to (el).
f) is a sectional view showing the manufacturing process of an embodiment of the invention. 11...Shi11 Con Motokatsu, 12...Mask, 13.
...Inversion prevention layer, 14...5io2 model (first insulating film), 15...! luck, 16...5102 film (second insulating film), 17... resist (flattening edge fa), 1g.
...Slope, 19...Flat surface, 20... Gate oxide film. Applicant's agent Patent attorney Takehiko Suzue 1) Figure 1 422-l-~ Me\
Φ Moan-
Claims (3)
にフィールド絶縁膜が埋設され、このフィールド絶縁膜
で囲まれた領域にMOSトランジスタを形成してなる半
導体装置に於て、前記MOSトランジスタのゲート絶縁
膜は、ゲート幅方向の両端部の膜厚が中央部のそれより
も厚く形成されていることを特徴とする半導体装置。(1) In a semiconductor device in which a field insulating film is buried in a recess having a substantially vertical wall on the surface of a semiconductor substrate, and a MOS transistor is formed in a region surrounded by the field insulating film, the MOS transistor A semiconductor device characterized in that the gate insulating film is formed to be thicker at both ends in the gate width direction than at the center.
有する凹部を形成する工程と、この凹部に表面が平坦に
なるようにフィールド絶縁膜を埋設する工程と、素子形
成領域の基板表面を凹状になるようエツチングする工程
と、この素子形成領域にゲート幅方向両端部の斜面での
膜厚が中央部でのそれより厚くなるようにゲート酸化膜
を形成してMO8I−ランジスタを形成する工程とを備
えたことを特徴とする半導体装置の製造方法。(2) A step of forming a recess with vertical sidewalls in the field region of the semiconductor substrate, a step of burying a field insulating film in the recess so that the surface is flat, and a step of forming the substrate surface in the element formation region into a recess. and a step of forming a MO8I-transistor by forming a gate oxide film in this element formation region so that the film thickness on the slopes at both ends in the gate width direction is thicker than that at the center. A method for manufacturing a semiconductor device, comprising:
リフトオフ法により凹部の周辺に溝が形成された状態で
この凹部に第1の絶縁膜を形成する工程と、前記溝を埋
めるように全面に第2の絶縁膜を形成する工程と、全面
に表面が平坦になる流動性物質による被膜を形成する工
程と、この被膜および前記第2の絶縁膜をこれらのエツ
チング速度が等しいエツチング条件で素子形成領域の基
孕表面が露出するまで均一エツチングする工程とからな
る特許請求の範囲第2項記載の半導体装置の製造方法。(3) The process of embedding the field insulating film in the recess is as follows:
A step of forming a first insulating film in the recess with a groove formed around the recess by a lift-off method, a step of forming a second insulating film over the entire surface so as to fill the groove, and a step of forming a second insulating film over the entire surface so as to fill the groove. a step of uniformly etching this film and the second insulating film under etching conditions with equal etching rates until the substrate surface of the element forming region is exposed; A method of manufacturing a semiconductor device according to claim 2, comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19218081A JPS5893287A (en) | 1981-11-30 | 1981-11-30 | Semiconductor device and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19218081A JPS5893287A (en) | 1981-11-30 | 1981-11-30 | Semiconductor device and manufacture thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5893287A true JPS5893287A (en) | 1983-06-02 |
JPH0370386B2 JPH0370386B2 (en) | 1991-11-07 |
Family
ID=16287003
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19218081A Granted JPS5893287A (en) | 1981-11-30 | 1981-11-30 | Semiconductor device and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5893287A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63141346A (en) * | 1986-12-03 | 1988-06-13 | Sony Corp | Manufacture of semiconductor device |
-
1981
- 1981-11-30 JP JP19218081A patent/JPS5893287A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63141346A (en) * | 1986-12-03 | 1988-06-13 | Sony Corp | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPH0370386B2 (en) | 1991-11-07 |
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