JPS589234A - Optical information recording medium - Google Patents

Optical information recording medium

Info

Publication number
JPS589234A
JPS589234A JP56107036A JP10703681A JPS589234A JP S589234 A JPS589234 A JP S589234A JP 56107036 A JP56107036 A JP 56107036A JP 10703681 A JP10703681 A JP 10703681A JP S589234 A JPS589234 A JP S589234A
Authority
JP
Japan
Prior art keywords
recording medium
optical information
information recording
melting point
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56107036A
Other languages
Japanese (ja)
Other versions
JPS6327778B2 (en
Inventor
Noburo Yasuda
安田 修朗
Masao Mashita
真下 正夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56107036A priority Critical patent/JPS589234A/en
Publication of JPS589234A publication Critical patent/JPS589234A/en
Publication of JPS6327778B2 publication Critical patent/JPS6327778B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24304Metals or metalloids group 2 or 12 elements (e.g. Be, Ca, Mg, Zn, Cd)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/2431Metals or metalloids group 13 elements (B, Al, Ga, In)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24312Metals or metalloids group 14 elements (e.g. Si, Ge, Sn)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24314Metals or metalloids group 15 elements (e.g. Sb, Bi)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24316Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24318Non-metallic elements
    • G11B2007/24328Carbon
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2531Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)

Abstract

PURPOSE:To obtain an optical information recording medium with high sensitivity and long life by forming a thin recording film which contains low melting point metals and C and H on a substrate. CONSTITUTION:A recording film 2 which contains metals of Te, Bi, Zn, Cd, In, Sb, Pb, and Sn independently or as alloy which have 25-600 deg.C fusion points, and about 3 atomic number ratio H based upon carbon is provided over a substrate 1 of glass or synthetic resin. In the layer 2, C and F are interposed among Te atoms as -CmFn radical by sputting the low-fusion-point metals in mixed gas of gaseous CH4 containing C, gaseous C2H2 and gaseous Ar. Consequently, Te never deteriorates even in a high-humidity atmosphere owing to oxidation and a recording medium with high sensitivity and long life is obtained.

Description

【発明の詳細な説明】 本発明は光、熱等のエネルギービームの照射によ〉記録
層に穴もしく5、は凹部、を形成することによ唯て情報
を可働するよう、KL九光学的情報記記録体に係〉、轡
、lIc感度の向上及び長寿命化を図、つた光学的情報
記録媒体、に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention provides a method for activating information only by forming holes or recesses in the recording layer by irradiation with an energy beam such as light or heat. The present invention relates to an optical information recording medium that has improved sensitivity and extended life.

基板上に形成された薄膜層にエネルギービームを照射し
記録されるべき1、信号に対応したビット列を形成する
ようにした光学的情報記録媒体において、従来よ避紀碌
薄膜としてテルル(T・)、ビスマス(Bi)、!!鉛
(ム)等の低融点金属を使用することが知られている0
これらの金属薄膜は、低いエネルギーで所望のビットを
形成できるため、この種用途においては高感度材料とし
て有望である。こむで感度とは単位面積轟シのビット形
成Kllするエネルギー(w/cd )で定義される。
In an optical information recording medium in which a thin film layer formed on a substrate is irradiated with an energy beam to form a bit string corresponding to a signal to be recorded, tellurium (T) is used as a conventional thin film. , bismuth (Bi),! ! It is known that low melting point metals such as lead are used.
These metal thin films can form desired bits with low energy, so they are promising as highly sensitive materials for this type of application. The sensitivity is defined as the energy (w/cd) for bit formation per unit area.

しかしながらこれらの低一点金属は大気中に放置された
場合、酸素中水分によシ酸化し中すく。
However, when these low single point metals are left in the atmosphere, they are oxidized by moisture in oxygen and become obsolete.

膜表面Kll化物が形成されて感度が劣化する。たとえ
ばT・や81においてろこれらを70℃、相対温[88
慢の雰囲気に放置した場合、約5時間で感度が約20−
低下し、約腸時間で約501低下してしまう。このため
T@属上に有機保−属をコーテイ/グする等の手段がと
られているが、未九十分な寿命は得られていない0 本発明はこのような問題点に鑑みなされたもので、高感
度でかつ長寿命の光学的情報記録媒体を提供することを
目的とする。
KII compounds are formed on the film surface and the sensitivity deteriorates. For example, filter them at 70°C at T.ya81, relative temperature [88
If left in a harsh atmosphere, the sensitivity will drop to about 20-20% in about 5 hours.
It decreases by about 501 points in about an hour. For this reason, measures have been taken to coat/glue organic carriers on the T@ genus, but a sufficient lifespan has not been achieved.The present invention was created in view of these problems. The purpose is to provide an optical information recording medium with high sensitivity and long life.

本発明の光学的情報記録媒体は、記i&属を低融点金属
、炭素及び水素を含有する薄膜で形成したことを特徴と
し、これによって高感度と長寿命とを兼ね備えたもので
ある。
The optical information recording medium of the present invention is characterized by being formed of a thin film containing a low melting point metal, carbon, and hydrogen, and thereby has both high sensitivity and long life.

以下図面を参照して本発明の実施例につき詳細に説−す
る。嬉1図は本発明の一実施例を示す断面構成図である
Embodiments of the present invention will be described in detail below with reference to the drawings. Figure 1 is a cross-sectional configuration diagram showing an embodiment of the present invention.

11において(1)は基板で、本実施例では合成樹脂の
1つであるアクリル板が用いられる。しかしこの他にも
プラスチック中ガラス基板であってもよく、情報紀鍮の
読み出し方法によって適宜選択し得る。(11)はC及
びHを含有する低一点金属1Ilj[で26’0〜・O
Oυの融点を有し、その厚さは、十分な光反射率を得る
1度Kjl<、かつ感度を損なわない程IEK薄いこと
が必要で、5oo1〜1μm一度が適轟である。ζζで
低融点金属としてはT―1組、zaCd、I町mb、P
b、8trなどもしくはその含金が使用されCILびH
を含む低融点金属としてテ・を例にとると、!・をター
ゲットとし、Cを含む有機オス例えば、−CHa中C5
Hsガスとムrとの1金ガス中でスパッタすることによ
〉C及びHを會むT・薄膜が得られる。
In 11, (1) is a substrate, and in this embodiment, an acrylic plate, which is one of synthetic resins, is used. However, in addition to this, a plastic-in-glass substrate may be used, and the substrate may be appropriately selected depending on the information readout method. (11) is a low single point metal 1Ilj containing C and H [with 26'0~・O
It has a melting point of Oυ, and its thickness needs to be 1°Kjl<1° to obtain sufficient light reflectance and IEK thin enough not to impair sensitivity, and a thickness of 5oo1 to 1 μm is suitable. The low melting point metals in ζζ are T-1 group, zaCd, I-cho mb, and P.
b, 8tr, etc. or its metal content is used for CIL and H
Taking Te as an example of a low melting point metal containing ! - Targeting organic males containing C, e.g., C5 in -CHa
By sputtering in a single gold gas containing Hs gas and hydrogen, a T thin film in which C and H meet can be obtained.

すなわちT−薄膜中のC及び°Hの含有量はムrと01
4(又はCff1m)との混合比を変えることによ)制
御でき、例えばAr/CH4W 1のときには% Te
1−xcx(H)と表記した場合約40原子−のCを含
有させることかで自、また原子数比でCに対し3@度の
Hを含有させることができる。尚、Te以外1cZa、
CもIn。
That is, the content of C and °H in the T-thin film is equal to mr and 01
4 (or Cff1m)), for example, when Ar/CH4W is 1, %Te
When expressed as 1-xcx(H), by containing about 40 atoms of C, it is possible to contain 3 degrees of H to C in the atomic ratio. In addition, other than Te, 1cZa,
C is also In.

8b、Pb等の低融点金属をターゲットとし、 CHa
あるいはC出3ガスとArとの混合ガス中でス/4ツタ
する□ことによシ、中は)C及びHを含有する低融点金
属薄膜を得ることかで自る。
Targeting low melting point metals such as 8b and Pb, CHa
Alternatively, it is possible to obtain a low melting point metal thin film containing C and H by immersing it in a mixed gas of C3 gas and Ar.

一方相あるいは8nにおいては、これらの低一点金属を
ルツボ又は&−)K入れて国4ガスとムrガスの混合ガ
ス中(IF”Torr)で加熱蒸発させ、基板と蒸発源
との間に予め電界を加えてにスをイオン化させておくこ
とによ〉CとHを゛′省有す4低融点金属薄属を得るこ
とができる。例えばBiの□場合□ムt/CHa = 
1でかつ約soeνのイオンを与えることによ)、約I
′原子参のCと□、原子数比CK対し311度のHとを
含有する引薄膜を得ること□がで自るンこのようにして
形成されるC及びHな含有するl!融点金属薄膜におけ
る光学定数は、CとHとの含有量によって異なp、情報
紀鑞用として活用するには、反射率ならびに消衰係数を
考直して膜厚を決定する必要する必要がある。実験の結
果2001〜ls−の範囲が適崗で、約1ooolのと
龜に最良であることが判った。そして上記条件で形成し
た膜は非晶質であ)%低融点金属単体で形成し九麟に比
べて、記録状態のピット周辺エッヂ部がなめらかとな1
、情報読み出し時のノイズレベルを低くおさえ得基こと
が判明した。
On the other hand, in the phase or 8n, these low single point metals are placed in a crucible or &-)K and heated and evaporated in a mixed gas of 4 gases and MR gas (IF" Torr), and the metals are placed between the substrate and the evaporation source. By applying an electric field in advance to ionize the gas, it is possible to obtain a 4-low melting point metal thin metal that eliminates C and H.For example, in the case of Bi, t/CHa =
1 and about soeν), about I
'It is possible to obtain a thin film containing C and □ in the atomic ratio, and H with an atomic ratio of 311 degrees to CK.The C and H containing l! formed in this way can be obtained. The optical constants of a melting point metal thin film vary depending on the content of C and H. In order to utilize the film for information purposes, it is necessary to reconsider the reflectance and extinction coefficient in determining the film thickness. As a result of experiments, it was found that a range of 2001 to ls- is suitable and is best for a diameter of approximately 100 mm. The film formed under the above conditions is amorphous, and the edges around the pits in the recorded state are smoother than those formed from a single low-melting point metal.
It has been found that the noise level during information reading can be kept low.

次にこのようにして形成されたC及びHを含有する”低
融点金属薄膜中のCとHの含有量の最適値11につ−で
説明する。まずCKついては、T・;−8Cx(H)と
表記した場合、5〜40原子−〇含有量であることが好
ましい。これFis原子−以下であると後述する寿命の
点で低融点金属単体で形成した記録膜との有意差がみら
れなくなるためであ)、ま九40原子−以上になると後
述する感度の点で不十分なものになるためである。次K
HKついては所望の感度を有する記録膜を作製した後に
その記録膜を真空中で放出jス分析を行りた結果Qim
の存在が確認されたところから、Hの含有量は原子数比
でCに対しm6度が好ましいことが推欄で自る。このよ
うなC及びHを所定量含有する本発明の低融点金属紀鍮
属が感度、寿命共に優れていることにつき以下に詳述す
る。
Next, the optimal value 11 of the content of C and H in the low melting point metal thin film containing C and H formed in this way will be explained. First, regarding CK, T. ), it is preferable that the content is 5 to 40 atoms.If the content is less than Fis atoms, there will be a significant difference in the lifespan described later from a recording film formed of a low melting point metal alone. This is because if the number of atoms exceeds 40 atoms, the sensitivity will be insufficient as described below.Next K
For HK, after producing a recording film with the desired sensitivity, the recording film was released in a vacuum and analyzed, resulting in Qim.
Since the existence of H was confirmed, the recommendation column shows that the content of H is preferably m6 degrees relative to C in terms of atomic ratio. The fact that the low melting point metal of the present invention containing such C and H in predetermined amounts is excellent in both sensitivity and life will be explained in detail below.

第2図(11〜(→は有機ガスとしてα4を用い、ガス
混合比すなわちムr /CHaをθ〜100と変化させ
1.5謹厚のアクリル基板(1)KC及びHを含有する
T・薄膜をスパッタによ〕形成し、得られ九7001種
度の記録膜についての緒特性を示したものである。
Figure 2 (11-(→) uses α4 as the organic gas and changes the gas mixture ratio, that is, mr/CHa, from θ to 100. The thin film was formed by sputtering, and the characteristics of the resulting 97001-grade recording film are shown.

−において横軸はスパッタ中のガス混合比、縦軸は光吸
収、Gi4100−で得られた薄膜の呻性値で規格化し
た膜形成速度(膜形成速度比)JLび感度の逆数比(感
度比)を各々示す。ζζで単位体積のlII&に吸収さ
れる光エネルギーは、薄膜の屈折率をn、消衰係数をk
とすると、2ak lf:比例する。
In -, the horizontal axis is the gas mixture ratio during sputtering, the vertical axis is light absorption, the film formation rate (film formation rate ratio) normalized by the resistance value of the thin film obtained with Gi4100-, and the reciprocal ratio of the sensitivity (sensitivity). ratio) are shown respectively. The optical energy absorbed by unit volume lII& of ζζ is given by the refractive index of the thin film as n and the extinction coefficient as k.
Then, 2ak lf: Proportional.

第2図でわかるように光吸収(2nk )は混合ガス中
のArが増加するにつれて増大するが、膜形成速度及び
感度は共K 1G % =程度の変化におさまっている
Cそして感度について着目すると、92図(C) K示
すようにガス混合比の広い範囲にわ九ってほぼ等しい値
をとっておシ、かつこの値は、アクリル基板上K 40
0ム程度の純T・薄膜を形成した場合の感度に相轟し、
本発明の記録媒体が高感度を有することを示している。
As can be seen in Figure 2, the optical absorption (2nk) increases as the Ar content in the mixed gas increases, but the film formation rate and sensitivity both remain within the range of K 1G % = C and sensitivity. As shown in Figure 92 (C), K takes approximately the same value over a wide range of gas mixture ratios.
The sensitivity when forming a thin film of pure T with a thickness of about 0 μm was greatly improved.
This shows that the recording medium of the present invention has high sensitivity.

ここで第2図(→、第2図(C)における人r/C■4
がO〜10−の間の場合は光吸収及び感度が減少してい
るが、これは上述し九〇の量が鉛原子−以上の場合に相
幽し、記録膜゛が透明に近づき記録の為のエネルギービ
ームの照射を強くする必豊かある丸め、この範囲は好ま
しくない。
Here, in Figure 2 (→, person r/C in Figure 2 (C) ■4
When the amount of lead atoms is between 0 and 10-, the light absorption and sensitivity decrease, but this is counteracted when the amount of lead atoms is more than 90-, as mentioned above, and the recording film becomes transparent and recording becomes difficult. This range is undesirable because it is necessary to strengthen the energy beam irradiation.

尚、第2図(→〜(→に示した特性はTe以外の低融点
金属(引、Zn、Cd、Is、1iib、Pb、8n 
)及び引3T・3゜In8b4等の含金についても、は
ぼ同じ傾向がsii!された。
In addition, the characteristics shown in Figure 2 (→ to (→)
) and the metal content of 3T, 3゜In8b4, etc. have almost the same tendency sii! It was done.

第3図は70℃、相対温度859Gの雰囲気中での時 
 −関経過に対する感度の劣化を、従来のテ・単体°の
ものと、CをW〜あ原子−1Hを原子数比でCに対して
はぼ3倍含有するTe記録膜とで比軟した図である0本
図における感度の劣化は、記録に必費なエネルギーの逆
数の初期値に対する変化として表わしており、Tel単
体からなる従業の記録膜1本発明による記録膜共にアク
リル基板上に形成され九場合を示す。本図かられかるよ
うにT11単体からなる記録膜の場合は図中(A)で示
すように時間経過とともに感度が劣化する。これは時間
とともに局部的な透明領域(シミ)が発生するためで、
約170時間経過後には全面にわ九って劣化してしまう
Figure 3 shows the case in an atmosphere of 70℃ and relative temperature of 859G.
- The deterioration of the sensitivity to the relationship between the conventional Te and the Te recording film, which contains about three times as much C as W~A atom-1H in terms of atomic ratio, has been improved. The deterioration in sensitivity in this figure is expressed as a change with respect to the initial value of the reciprocal of the energy required for recording. Indicates nine cases. As can be seen from this figure, in the case of a recording film made of T11 alone, the sensitivity deteriorates over time as shown in (A) in the figure. This is because localized transparent areas (stains) occur over time.
After approximately 170 hours, the entire surface cracks and deteriorates.

−万事発明によるC及びHを含有するT・薄膜の場合は
、同図中(呻で示すようK 1000時間経過後もT・
薄INK見られたようなシミは全く認められず、常Ki
tぼ一定の感度責保持してお)、長寿命化を達成してい
ることがわかる。
- In the case of the T thin film containing C and H according to the invention, even after 1000 hours of K as shown in the same figure (as shown by the groan)
There are no stains like those seen with light INK, and it is always clean.
It can be seen that the sensor maintains a constant sensitivity and has a long life.

#I4図(a) 、 (b)は低融点金属としてT・を
例にとシこれにCを5〜4o原子優、Hを原子数比でC
K対して約3倍含有する記録膜をN2中で示差熱分析を
行った結果を示し、(I4は温度に対応した重量変化(
b)は温度に対応し良熱変化を示す。
#I4 Figures (a) and (b) take T as an example of a low melting point metal, with C in the atomic ratio of 5 to 4 o, and H in the atomic ratio of C.
The results of differential thermal analysis in N2 are shown for a recording film containing about 3 times as much K as (I4 is the weight change corresponding to temperature (
b) corresponds to temperature and shows a good thermal change.

これらの図からもわかるように140℃付近で結晶化に
よる発熱ピークと分解が観測され、さらに温度を上けて
443 ”0では融点を示す吸熱が見られる。こむで前
述のように放出ガス分析の結果、T@m(CHs)mの
形態でガス放出があることが確認されているため、第4
図における140℃付近で生ずる分解によって、CHs
基を會む蒸気圧の高いガスが放出されていることがわか
る そしてこのようにCHs基を含むガスが放出して分解後
結晶化された記録膜は実質的にはT@単体の薄膜Kfl
めて近い状■あると考えられるので、これが本発明の紀
鍮属が高感度である理由となる。
As can be seen from these figures, an exothermic peak due to crystallization and decomposition are observed at around 140°C, and when the temperature is further increased to 443'0, an endotherm indicating the melting point is observed. As a result, it has been confirmed that gas is released in the form of T@m(CHs)m, so the fourth
CHs
It can be seen that a gas with a high vapor pressure that meets the CHs group is released, and the recording film that is crystallized after the gas containing the CHs group is released and decomposed is essentially a thin film of T@ simple substance Kfl.
This is considered to be a very similar condition, and this is the reason why the present invention has a high sensitivity.

ここでHの存在は蒸気圧の高い分解ガス生成(CHs″
基)K寄与し、これによつズ属の分解温度を下げる役割
を呆九している。ま九テ・原子KH4−Cが結合するこ
とによJ) HiO中01がT・と結合するのを賭止し
ていると考えられ、その結果本発明による記録膜が化学
的に安定で酸化しに((なっているものと考えられる。
Here, the presence of H is responsible for the production of cracked gases with high vapor pressure (CHs″
group) K, which plays a role in lowering the decomposition temperature of the genus. It is thought that the bonding of the KH4-C atoms in J) HiO prevents the bonding of 01 with T, and as a result, the recording film according to the present invention is chemically stable and oxidized. (It is thought that it has become.

崗1分析結兼はC及びHを所定量含有する!・属につい
てのみ示したが、先に列挙し九個の低融点金属及びそれ
らの合金についてもはは同じ傾向を示す。
Granule 1 analysis Yuikane contains a certain amount of C and H!・Although only the genus is shown, the same tendency is shown for the nine low-melting point metals listed above and their alloys.

以上詳しく説明したように本発明によれば感度寿命共に
優れ九4I法を有する記録層を提供することができ、そ
の結果基板として水分中酸素を通しやすいアクリル基板
、プラスチック基板等を用いることができる丸め、安価
でかつ量産−に優れた光学的情報記録謀体とすることが
できる。
As explained in detail above, according to the present invention, it is possible to provide a recording layer that has excellent sensitivity life and uses the 94I method, and as a result, an acrylic substrate, a plastic substrate, etc. that easily allows oxygen in moisture to pass through can be used as the substrate. This makes it possible to create an optical information recording system that is inexpensive and suitable for mass production.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す断面構成図。 第2図(Q〜(→は本発−による記録層のガス混合比に
対するM特性を示す図で、(姉は光1kIIILを、(
呻は膜形成速度比を、(→は感置比を各々示す図、第3
FjAは本発明による紀鎌属と従来の記録層との寿命に
ついての比較図、#I4図(荀、(b)は本発明による
記録層の温度に対する緒特性を示す図で(→は重量変化
、(→は熱変イビを示す図である。 (1)・・・基板、(2ト・・C及びHを含有する低融
点金属記録膜。 代理人 介珊士  則 近 盾 佑(ほか1名)第1図 1’ // h DI 4# 316671’ lid
 f/ /melt %H。 第8図 第4図 手続補正書(自発) 昭和  年  月  日 57.1.13 特許庁長官島田春樹殿 1、事件の表示 昭和56年特願第107036号 2、発明の名称 光学的情報記龜媒体 3、補正をする者 事件との関係 特許出願人 (307)東京芝浦電気株式会社 明細書の「発明の詳細な説明」の橢 及び図面の第2111.第4図 (1)明細書第3頁@12行目の「おいてろ」を「おい
ては」と訂正する。 (2)第5頁第4行目の「人r7cH4= tのときは
、」を「人r/CH4= 0のときは、」と訂正する〇
(3)同頁第8行目の「Ar、/CH4= 1で」を「
人r/CH4=0で」と訂正する〇 (4)第6頁第5行目の「決定する必要する必要がある
0」を「′決定する必要がある。」と訂正する。 (5)同頁第8行目の「単位」を「単体」と訂正する0 (6)第7頁第2行目のrcHsJを「CH3基」と訂
正する。 (7)同頁第9行目の「O〜100 Jを「θ〜1」と
訂正する。 (8)第8頁第5行目の[400A Jを「400X」
と訂正する。 (9)同頁第8行目乃至第13行目の「ここで・・・好
ましくない。」を次のように訂正する。 「ここで第2図におけるAr/CH4が0のときはCの
量が約40原子うに相轟するが、第2図0から4推測で
きるようにCの量が40原子%よ#)41多くなると感
度が徐々に低下していき記録膜が透明に近づいていくた
め、i己録の為のエネルギービームの照射を強くする必
要が生じてくる。従ってCの量は40%以下であること
が好ましい。」四第9頁第1行目の「はぼ3倍」を「は
ぼ3倍(詳しくは1〜4倍)」と訂正する。 αυ図面中第2図及び第4図を別紙のとうり訂正する。 以上 第2− 第4図 手続補正書(自発) 姉晶、、、%Oa 特許庁長官 若 極相 大股 1、 事件の表示 昭和56年特鵬第107036号 2、発明の名称、 光学的情報記録媒体 3、補正をする看 事件との関係 特許出願人 (307)東京芝浦電気株式会社 4、代理人 〒100 東京都千代田区内幸町1−$−6 6、補正の内容 (1)特許請求の範囲を別紙のどう一ノ補正する。 (2)明細書第2頁第15行目の「凹部」を「例え゛ば
凹部等の変形部」と訂正する。 以上 特許請求の範囲 (1)  基板上に記録膜を形成し、この記録膜にエネ
ルギービームな照射すること鑑=よって記録膜に穴もし
くは変形部を形成して情報を記録するようにした光学的
情報記録媒体(二おいて、前記記録膜を低融点金属、炭
素及び水−を含む薄膜で形成したことを特徴とする光学
的情報記録媒体。 (2)低融点金属はテルル、ビスマス、亜鉛、カドミウ
ム、インジウム、アンチモン、鉛、錫のうちのいずれか
、もしくはこれらのうちの複数からなる合金であること
を特徴とする特許請求の範囲第1項記載の光学的情報記
録媒体。 (3)合金は25℃乃至600℃の融点を有することを
特徴とする特許請求の範囲第2項記載の光学的情報記録
媒体。 (4)炭素及び水素は炭化水素基として含有されている
ことを特徴とする特許請求の範囲第1項記載の光学的情
報記録媒体。 (5)記録膜中の炭素の含有量は5乃至40原子鴨で、
水素の含有量は原子数比で炭素に対しほぼ3であること
を特徴とする特許請求の範囲第1項記載の光学的情報記
録媒体。 (6)記録膜は非晶質であることを特徴とする特許請求
の範囲第1項記載の光学的情報記録媒体。 (7)記録膜の厚さは200A乃至1.mであることを
特徴とする特許請求の範囲第1項記載の光学的情報記録
媒体。 (8)  基板はガラスもしくは合成樹脂であることを
特徴とする特許請求の範囲第1項記載の光学的情報記録
媒体。
FIG. 1 is a cross-sectional configuration diagram showing one embodiment of the present invention. Figure 2 (Q~(→ is a diagram showing the M characteristics with respect to the gas mixture ratio of the recording layer according to the present invention).
Moaning indicates the film formation rate ratio, (→ indicates the sensing ratio, 3rd figure)
FjA is a comparison diagram of the lifespan of the recording layer according to the present invention and a conventional recording layer, and Figure #I4 (Xu) is a diagram showing the temperature-related characteristics of the recording layer according to the present invention (→ indicates weight change). (→ is a diagram showing thermal change. Name) Figure 1 1' // h DI 4# 316671' lid
f/ /melt %H. Figure 8 Figure 4 Procedural Amendment (Spontaneous) January 13, 1939 57.1.13 Director General of the Japan Patent Office Haruki Shimada1, Indication of the case, 1982 Patent Application No. 1070362, Name of the invention Optical information recording Media 3, Relationship with the case of the person making the amendment Patent applicant (307) Tokyo Shibaura Electric Co., Ltd. Description of the "Detailed Description of the Invention" in the specification and No. 2111 of the drawings. Figure 4 (1) "Otero" on page 3 of the specification @ line 12 is corrected to "Oeteha". (2) Correct “When r7cH4=t” on the 4th line of page 5 to “When r/CH4=0” (3) Correct “Ar” on the 8th line of the same page. , /CH4=1” is changed to “
〇(4) On page 6, line 5, "0" should be corrected to "'need to be determined." (5) Correct “unit” in the 8th line of the same page to “single substance” 0 (6) Correct rcHsJ in the 2nd line of the 7th page to “CH3 group”. (7) Correct "O~100 J" on the 9th line of the same page to "θ~1". (8) On page 8, line 5, change 400A J to “400X”
I am corrected. (9) "This is not desirable." in lines 8 to 13 of the same page is corrected as follows. ``Here, when Ar/CH4 in Figure 2 is 0, the amount of C is about 40 atoms, but as we can infer from 0 in Figure 2, the amount of C is 40 at%. As the sensitivity gradually decreases and the recording film approaches transparency, it becomes necessary to strengthen the energy beam irradiation for self-recording.Therefore, the amount of C should be 40% or less. It is preferable.'' In the first line of page 9 of the fourth page, ``Habo 3 times'' is corrected to ``Habo 3 times (more specifically, 1 to 4 times)''. Figures 2 and 4 in the αυ drawings are corrected as attached. The above 2-4 Procedural Amendment (Voluntary) Aneaki...,%Oa Commissioner of the Patent Office Wakayokuso Omata 1, Indication of the case, Tokuho No. 107036 of 1982, 2, Title of invention, Optical information Recording medium 3, Relationship with the case for which the amendment is made Patent applicant (307) Tokyo Shibaura Electric Co., Ltd. 4, Agent 1-$-6 Uchisaiwai-cho, Chiyoda-ku, Tokyo 100 6. Contents of the amendment (1) Patent claim Correct the range as shown in the attached sheet. (2) "Recessed portion" on page 2, line 15 of the specification is corrected to "deformed portion, such as a recessed portion." Claims (1) A recording film is formed on a substrate and the recording film is irradiated with an energy beam. Therefore, an optical system in which information is recorded by forming holes or deformed portions in the recording film. Information recording medium (2) An optical information recording medium characterized in that the recording film is formed of a thin film containing a low melting point metal, carbon and water. (2) The low melting point metal is tellurium, bismuth, zinc, The optical information recording medium according to claim 1, characterized in that it is an alloy consisting of one or more of cadmium, indium, antimony, lead, and tin. (3) Alloy has a melting point of 25°C to 600°C. (4) The optical information recording medium is characterized in that carbon and hydrogen are contained as hydrocarbon groups. The optical information recording medium according to claim 1. (5) The carbon content in the recording film is 5 to 40 atoms,
2. The optical information recording medium according to claim 1, wherein the content of hydrogen is approximately 3 to that of carbon in terms of atomic ratio. (6) The optical information recording medium according to claim 1, wherein the recording film is amorphous. (7) The thickness of the recording film is 200A to 1. The optical information recording medium according to claim 1, wherein the optical information recording medium is m. (8) The optical information recording medium according to claim 1, wherein the substrate is made of glass or synthetic resin.

Claims (1)

【特許請求の範囲】 (1)基板上に記録、属を形成し、との記録11[Kエ
ネルギービームを照射することによって記録層に穴もし
くは凹部を形成して情報を記−するようにした光学的情
報記#に媒体において、前記岬鍮属を低融点金属、炭素
及び水素を含む薄膜で形成したことを特徴とする光学的
情報記録媒体。、(2)低融点金属はテルル、、ビスマ
ス、亜鉛、カドンクム、インジウム、アンチモノ、鉛、
錫のうちのいずれか、もしくはこれらのうちの複数から
なる合金であることを4+1黴・とする特、、許請求の
@置薬1項記載の光学的情報記録媒体。 (3)合金はS”O乃ji60G℃の、融点を有、する
ことを特徴とする特許請求の範囲第2項記載の光学的情
報記録媒体。           ・(4)炭素及び
水素は炭化水素基として含有されていることを特徴とす
る特許請求の範囲第1.3J[記載の光学的情報記−媒
体〇 (5)me鍮属中の炭素の含有量は5乃至4oX子−で
水素の含有量は原子数比で炭素に対しほぼ3であゐこと
を特徴とする特許請求の範囲第1項記載の光学的情報記
録媒体。 (6)記録層は、非晶質であることを特徴とする特許請
求のl[II嬉1項記載の光学的情報記録媒体。 (7)記録層の厚さはzoo X乃至1μmであること
を特徴とする11!#杵請求の範Sat項記載の光学的
情報記録媒体。 (8)基1!拡ガラス、もしくは合、成樹脂であること
を特徴とする特許請求の範囲第1項記載の、光学的情報
記鍮媒体。
[Claims] (1) Information is recorded by forming holes or recesses in the recording layer by irradiating it with a K energy beam. 1. An optical information recording medium, characterized in that the misaki metal is formed of a thin film containing a low melting point metal, carbon, and hydrogen. (2) Low melting point metals are tellurium, bismuth, zinc, cadoncum, indium, antimono, lead,
The optical information recording medium according to claim 1 of the patent claim, wherein the optical information recording medium is one of tin or an alloy consisting of a plurality of tin. (3) The optical information recording medium according to claim 2, characterized in that the alloy has a melting point of 60 G°C. (4) Carbon and hydrogen are used as hydrocarbon groups. Claim 1.3J [Optical information storage medium 〇(5) me Brass has a carbon content of 5 to 4 oX atoms and a hydrogen content of] The optical information recording medium according to claim 1, wherein the atomic ratio of carbon to carbon is approximately 3. (6) The recording layer is amorphous. (7) The optical information recording medium according to claim 1, characterized in that the thickness of the recording layer is between 1 μm and 1 μm. Information recording medium. (8) The optical information recording medium according to claim 1, which is made of expanded glass, synthetic resin, or synthetic resin.
JP56107036A 1981-07-10 1981-07-10 Optical information recording medium Granted JPS589234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56107036A JPS589234A (en) 1981-07-10 1981-07-10 Optical information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56107036A JPS589234A (en) 1981-07-10 1981-07-10 Optical information recording medium

Publications (2)

Publication Number Publication Date
JPS589234A true JPS589234A (en) 1983-01-19
JPS6327778B2 JPS6327778B2 (en) 1988-06-06

Family

ID=14448886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56107036A Granted JPS589234A (en) 1981-07-10 1981-07-10 Optical information recording medium

Country Status (1)

Country Link
JP (1) JPS589234A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59160841A (en) * 1983-03-04 1984-09-11 Toshiba Corp Optical recording medium film
EP0335275A2 (en) * 1988-03-31 1989-10-04 Kabushiki Kaisha Toshiba Information storage medium
US4929485A (en) * 1988-02-01 1990-05-29 Kabushiki Kaisha Toshiba Information storage medium and method of manufacturing the same
JPH0420852U (en) * 1990-06-14 1992-02-21
US6416929B2 (en) 1997-10-17 2002-07-09 Kabushiki Kaisha Toyota Chuo Kenkyusho Memory member
US8124211B2 (en) 2007-03-28 2012-02-28 Ricoh Company, Ltd. Optical recording medium, sputtering target, and method for manufacturing the same

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Publication number Priority date Publication date Assignee Title
CN107647578A (en) * 2017-07-17 2018-02-02 东莞集思工业设计有限公司 A kind of knapsack with heat sinking function
JP7373180B2 (en) * 2019-06-24 2023-11-02 株式会社セフト研究所 infant cooling device
KR102530135B1 (en) * 2021-08-24 2023-05-10 (주)대성파인텍 Tunnel structure type flexible duct and back including the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5627395A (en) * 1979-08-14 1981-03-17 Nippon Telegr & Teleph Corp <Ntt> Recording medium and preparation thereof
JPS5662192A (en) * 1979-10-29 1981-05-27 Nippon Telegr & Teleph Corp <Ntt> Medium for optical recording use and preparation thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5627395A (en) * 1979-08-14 1981-03-17 Nippon Telegr & Teleph Corp <Ntt> Recording medium and preparation thereof
JPS5662192A (en) * 1979-10-29 1981-05-27 Nippon Telegr & Teleph Corp <Ntt> Medium for optical recording use and preparation thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59160841A (en) * 1983-03-04 1984-09-11 Toshiba Corp Optical recording medium film
JPH0441056B2 (en) * 1983-03-04 1992-07-07 Tokyo Shibaura Electric Co
US4929485A (en) * 1988-02-01 1990-05-29 Kabushiki Kaisha Toshiba Information storage medium and method of manufacturing the same
EP0335275A2 (en) * 1988-03-31 1989-10-04 Kabushiki Kaisha Toshiba Information storage medium
JPH0420852U (en) * 1990-06-14 1992-02-21
US6416929B2 (en) 1997-10-17 2002-07-09 Kabushiki Kaisha Toyota Chuo Kenkyusho Memory member
US8124211B2 (en) 2007-03-28 2012-02-28 Ricoh Company, Ltd. Optical recording medium, sputtering target, and method for manufacturing the same

Also Published As

Publication number Publication date
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