JPS5883209A - Microangle inclining device - Google Patents

Microangle inclining device

Info

Publication number
JPS5883209A
JPS5883209A JP18186381A JP18186381A JPS5883209A JP S5883209 A JPS5883209 A JP S5883209A JP 18186381 A JP18186381 A JP 18186381A JP 18186381 A JP18186381 A JP 18186381A JP S5883209 A JPS5883209 A JP S5883209A
Authority
JP
Japan
Prior art keywords
signals
angle
tilting
inclining
differences
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18186381A
Other languages
Japanese (ja)
Inventor
Kazuo Shiba
柴　和男
Akira Kanai
金井　彰
Koichi Koizumi
孝一 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Original Assignee
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Holdings Co Ltd, Citizen Watch Co Ltd filed Critical Citizen Holdings Co Ltd
Priority to JP18186381A priority Critical patent/JPS5883209A/en
Priority to US06/441,131 priority patent/US4504048A/en
Priority to NL8204383A priority patent/NL8204383A/en
Priority to DE19823241940 priority patent/DE3241940A1/en
Priority to CH6659/82A priority patent/CH660805A5/en
Priority to GB08232522A priority patent/GB2112963B/en
Publication of JPS5883209A publication Critical patent/JPS5883209A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
    • B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
    • B23Q1/545—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

PURPOSE:To permit inclination at microangles with high rigidity by operating the supply pressure of a static pressure bearing pads and changing the holding clearance thereof thereby inclining the same at microangles, correcting the difference from command values and inclining the pad accurately. CONSTITUTION:When angle command signals Hc1, Hc2 are applied to differential amplifiers 16, 17, the amplifiers 16, 17 operate the differences between said signals Hc1, Hc2 and the output signals H1, H2 of displacement detectors 14, 15 corresponding to the relative displacements between an inclining body 1 and a holding member 3 and amplify said differences. The amplified error signals pass through compensating circuits 18, 19 and are supplied as control signals I1, I2 obtained by servo amplifiers 20, 21 to servo control valves 10, 11. The valves 10, 11 distribute supply pressures Psu1, Psu2 to the differential pressures conforming to the signals I1, I2 in such a way that the differences between the signals Hc1, Hc2 and the signals H1, H2 are made zero, that is, the body 1 inclines at the command angle. In this case it is necessary to apply the signals Hc1, Hc2 in such a way that the directions of displacement are made opposite to each other.

Description

【発明の詳細な説明】 本発明は、希望する微小角度傾斜させようとする場合に
使用さ江る微小角度傾斜装置に関するものである。一般
に、傾斜対象を微小角匿傾けて正確な角度法めもしくは
角度の補正を実施する場合、使用される装置は、バック
ラッシュがなく、静的・動的に高剛性で、分解能が高い
事が望ま扛る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a small angle tilting device that is used when tilting a desired small angle. Generally, when performing accurate angle measurement or angle correction by tilting a tilted object by a small angle, the equipment used must be free of backlash, have high static and dynamic rigidity, and have high resolution. Desire.

従来の装置ではこれらの条件を全て満足するものはほと
んどない。Few conventional devices satisfy all of these conditions.

本発明は、傾斜する対象の傾斜角度を検出し、これと指
令値との差を求め、この差をなくす様、サーボ弁により
対向する２ケもしくはそれ以上の静圧バッドに圧力を加
える閉回路を設ける事により指令値に対する高い精度の
傾斜角度を得るとともに、バックラッシュがなくかつ静
的・動的に高剛性な傾斜装置を提供する事を目的とした
ものである。The present invention is a closed circuit that detects the tilt angle of a tilting object, calculates the difference between this and a command value, and applies pressure to two or more opposing static pressure pads using a servo valve to eliminate this difference. The purpose of this invention is to obtain a highly accurate tilt angle relative to a command value by providing a tilting device that is free from backlash and has high static and dynamic rigidity.

以下に、本発明の一実施例について、図面を参照して説
明する。図において、傾斜対象である傾斜体１は基礎定
盤２に固着された保持部材３の中に、６個の静圧パッド
４．５．６．７．８および９によって、保持部材３に対
して設定すきまを介して静圧支持されている。この傾斜
体１はサーボ弁１０．１１を操作することによって、下
静圧パッド４および６、上静圧パッド５および７への供
給圧力を操作して図に矢印ａで示す回転方向に、図に示
す黒丸０を中心として微小量だけ傾斜させることができ
る。また左右に配置された靜圧パツド８．９は固定絞り
１２．１３を介して一定の供給圧力Ｐ１．Ｐ２を受ける
ことにより傾斜体１を左右方向に一定位置に保持する静
圧保持機構を構成している。また保持部材３と傾斜対象
である傾斜体１との間の相対変位を検出する変位検出器
１４および１５が傾斜体１の回転方向に対向して保持部
材３上に装置されている。An embodiment of the present invention will be described below with reference to the drawings. In the figure, a tilting body 1 to be tilted is mounted in a retaining member 3 fixed to a base surface plate 2 by six static pressure pads 4.5.6.7.8 and 9. It is supported by static pressure through a set gap. This inclined body 1 operates the supply pressure to the lower static pressure pads 4 and 6 and the upper static pressure pads 5 and 7 by operating the servo valve 10.11, and rotates in the direction of rotation shown by the arrow a in the figure. It is possible to tilt only a minute amount around the black circle 0 shown in . Further, the quiet pressure pads 8.9 arranged on the left and right are supplied with a constant supply pressure P1 through fixed throttles 12.13. It constitutes a static pressure holding mechanism that holds the tilting body 1 at a fixed position in the left-right direction by receiving P2. Further, displacement detectors 14 and 15 for detecting the relative displacement between the holding member 3 and the tilting body 1 to be tilted are arranged on the holding member 3 so as to face each other in the rotational direction of the tilting body 1.

傾斜体１が角度θ傾いた時の変位検出器１４および１５
の値が１（、、Ｈ，で変位検出器が間隔りで取り付けら
れていたとすると Ｈ ８石θ＝ の関係が成り立つ。θが小さい範囲ではとなるからＨ，
、Ｈ２を測定する事により角度が求められる。差動増巾
器１６および１７はそれぞれ変位検出器１４および１５
を第１の入力とし、図示しない指令機構から与えられた
角度指令信号Ｈｅ、およびＨｃ、を第２の入力信号とす
る。これらの差動増巾器１６および１７の出力信号はご
補償回路１８および１９を通りサーボ増巾器２０および
２１を介してサーボ弁１０および１１に導かれる。Displacement detectors 14 and 15 when the tilting body 1 is tilted at an angle θ
If the value of is 1 (,,H, and the displacement detectors are installed at intervals, then the relationship H 8 stones θ= holds true.In the range where θ is small, H,
, H2, the angle can be determined. Differential amplifiers 16 and 17 are connected to displacement detectors 14 and 15, respectively.
is the first input, and angle command signals He and Hc given from a command mechanism (not shown) are the second input signals. The output signals of these differential amplifiers 16 and 17 pass through compensation circuits 18 and 19, and are led to servo valves 10 and 11 via servo amplifiers 20 and 21.

本発明の装置において、サーボ弁１０および１１は、相
対向する静圧パッド４，５および６，７に対して、駆動
信号に従って差圧的に圧力を加えることによって傾斜体
１を傾斜させ、指令角度だけ傾斜した時点で両静圧パッ
ド４，５および６，７の圧力を平衡させることが必要で
ある。In the device of the present invention, the servo valves 10 and 11 tilt the tilting body 1 by differentially applying pressure to the opposing static pressure pads 4, 5 and 6, 7 according to a drive signal, and It is necessary to balance the pressures of both hydrostatic pads 4, 5 and 6, 7 at the moment of tilting.

本実施例ではノズルフラッパー型サーボ弁を用いている
が、他の形式のサーボ弁を用いる事も可能である。Although a nozzle flapper type servo valve is used in this embodiment, it is also possible to use other types of servo valves.

つぎに動作について説明する。Next, the operation will be explained.

角度指令信号ｔ（ｃ、　、　Ｈｅ、が差動増巾器１６．
１７に加えられると差動増巾器１６．１７はこの信号Ｈ
ｅ、　、　ｌ（ｃ、と傾斜体１及び保持部材３の間の相
対変位に対応した変位検出器１４．１５の出力信号Ｈ，
，Ｈ，との間で演算を行い、その差を増巾すを通り、サ
ーボ増巾器２０．２１によって得られた制御信号Ｉ、　
、　Ｉ２としてサーボ弁１０．１１に供給さｎる。この
サーボ弁１０．１１は指令信号Ｈｅ、、Ｈｃ、と変位検
出信号）Ｉ、　、　Ｈ，との差がゼロとなるように、す
なわち傾斜体１が指令角度傾斜するように、供給圧力Ｐ
ｓｕ、、Ｐｓｕ、を制御信号Ｉ、　、　Ｉ、に従った差
圧力となるように配分する。The angle command signal t(c, , He, is sent to the differential amplifier 16.
17, the differential amplifier 16.17 receives this signal H
Output signals H,
, H, and amplifying the difference, the control signal I, obtained by the servo amplifiers 20 and 21.
, I2 to the servo valve 10.11. This servo valve 10.11 adjusts the supply pressure P so that the difference between the command signal He, , Hc and the displacement detection signal I, , H, becomes zero, that is, so that the tilting body 1 tilts at the command angle.
Su, , Psu, are distributed so as to have a differential pressure according to the control signals I, , I,.

この場合、変位の方向が互いに反対となる様に指令信号
）（ｃ、　、　Ｈｃ２を与える必要がある。In this case, it is necessary to give the command signals (c, , Hc2) so that the directions of displacement are opposite to each other.

すなわち本発明による微小角度傾斜装置は、角度指令信
号に対する傾斜角度信号の誤差を求め、この誤差に応じ
た力を静圧パッド４，５および６゜７を介して制御対象
である傾斜体１に加えて傾斜角度と角度指令信号を等し
くしようとする「力を操作量とする変位制御系」を構成
して分り、高い精度の角度設定が出来ることを特徴とし
ている。That is, the small angle tilting device according to the present invention determines the error of the tilt angle signal with respect to the angle command signal, and applies a force corresponding to this error to the tilting body 1, which is the controlled object, via the static pressure pads 4, 5 and 6°7. In addition, it consists of a ``displacement control system using force as the manipulated variable'' that attempts to equalize the tilt angle and the angle command signal, and is characterized by the ability to set angles with high precision.

なお補償直路１８．１９はこの制御系の修正動作におけ
る特性、たとえば定常特性を調整する為に挿入されたも
のである。Note that the compensation straight lines 18 and 19 are inserted to adjust the characteristics in the corrective operation of this control system, for example, the steady-state characteristics.

なお、実施例では変位検出器を用いて傾斜角度を測定し
たが、傾斜計等により角度を検出してフィードバックす
る事も可能である。In the embodiment, the inclination angle was measured using a displacement detector, but it is also possible to detect the angle using an inclinometer or the like and feed it back.

また、作動流体は油等液体だけでなく空気等気体を用い
る事も出来る。Further, as the working fluid, not only liquid such as oil but also gas such as air can be used.

さらに実施例として１軸の例を示したが多軸にも応用す
る事が出来る。Furthermore, although a single-axis example has been shown as an example, it can also be applied to multiple axes.

以上のように本発明による微小角度傾斜装置は、静圧軸
受パッドの供給圧力を操作して、その保持すきまを変え
ることによって傾斜対象を微小角度傾斜させ、傾斜を検
出してフィードバックし、角度指令値との差を修正して
正確に微小角度傾斜させることを特徴とするもので、高
剛性でかつ微小な角度（例えば０．０１秒以下）を傾斜
させることが可能である。したがって工作機械を含む多
くの分野できわめて高い有用性が発揮される。As described above, the small angle tilting device according to the present invention tilts the object to be tilted by a small angle by manipulating the supply pressure of the hydrostatic bearing pad and changing the holding gap, detects the tilt, feeds it back, and commands the angle. It is characterized by accurately tilting by a small angle by correcting the difference with the value, and is highly rigid and capable of tilting by a small angle (for example, 0.01 seconds or less). Therefore, it is extremely useful in many fields including machine tools.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明の一実施例による微小角度傾斜装置の概略的
な断面図である。 １・・・傾斜体、２・・・基礎定盤、３・・・保持部材
、４゜５、６．７．８．９・・・静圧パッド、１０．１
１・・・す−ボ弁、１２，１３・・・固定絞り、１４．
１５・・・変位検出器、１６．１７・・・差動増巾器、
１８．１９・・・補償回路、２０．２１・・・サーボ増
巾器、Ｐｓｕ、。 Ｐｓｕ２．Ｐ　１．Ｐ　’ｌ・−供給圧力。The figure is a schematic cross-sectional view of a small angle tilting device according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Inclined body, 2... Foundation surface plate, 3... Holding member, 4°5, 6.7.8.9... Static pressure pad, 10.1
1... Subo valve, 12, 13... Fixed throttle, 14.
15... Displacement detector, 16.17... Differential amplifier,
18.19... Compensation circuit, 20.21... Servo amplifier, Psu. Psu2. P1. P'l - supply pressure.

Claims (1)

【特許請求の範囲】[Claims] 傾斜する対象の傾斜角度を検出する検出器と、傾斜角開
指令信号と傾斜角度信号の差を求める差動増巾器と、差
信号に応じた作動圧を供給するサーボ弁と、このサーボ
弁を駆動するサーボ讐巾器及び傾斜する対象を支持し、
前記サーボ弁から発生した作動圧により傾斜誤差を補正
する少なくとも２個の静圧パッドからなり、傾斜角度誤
差を修正する事を特徴とする微小角度傾斜装置。A detector that detects the tilt angle of a tilting object, a differential amplifier that determines the difference between the tilt angle opening command signal and the tilt angle signal, a servo valve that supplies an operating pressure according to the difference signal, and this servo valve. A servo hood drive device and a tilting target are supported.
A micro-angle tilting device comprising at least two static pressure pads that correct tilting errors using operating pressure generated from the servo valve, and correcting tilting angle errors.
JP18186381A 1981-11-13 1981-11-13 Microangle inclining device Pending JPS5883209A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP18186381A JPS5883209A (en) 1981-11-13 1981-11-13 Microangle inclining device
US06/441,131 US4504048A (en) 1981-11-13 1982-11-12 Micro-adjustable displacement and rotation setting apparatus
NL8204383A NL8204383A (en) 1981-11-13 1982-11-12 MICRO-ADJUSTABLE MOVEMENT AND ROTATION ADJUSTMENT.
DE19823241940 DE3241940A1 (en) 1981-11-13 1982-11-12 MICRO-ADJUSTABLE DEVICE FOR DETERMINING SHIFT AND ROTATION
CH6659/82A CH660805A5 (en) 1981-11-13 1982-11-15 DEVICE FOR FINE ADJUSTING A SHIFT AND / OR ROTATION.
GB08232522A GB2112963B (en) 1981-11-13 1982-11-15 Micro-adjustable displacement and rotation setting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18186381A JPS5883209A (en) 1981-11-13 1981-11-13 Microangle inclining device

Publications (1)

Publication Number Publication Date
JPS5883209A true JPS5883209A (en) 1983-05-19

Family

ID=16108150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18186381A Pending JPS5883209A (en) 1981-11-13 1981-11-13 Microangle inclining device

Country Status (1)

Country Link
JP (1) JPS5883209A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5547483A (en) * 1978-09-30 1980-04-03 Tokyo Shibaura Electric Co Positioning device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5547483A (en) * 1978-09-30 1980-04-03 Tokyo Shibaura Electric Co Positioning device

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