JPS58165960A - Fine displacement/angle setting device - Google Patents
Fine displacement/angle setting deviceInfo
- Publication number
- JPS58165960A JPS58165960A JP4862882A JP4862882A JPS58165960A JP S58165960 A JPS58165960 A JP S58165960A JP 4862882 A JP4862882 A JP 4862882A JP 4862882 A JP4862882 A JP 4862882A JP S58165960 A JPS58165960 A JP S58165960A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- pivot member
- static pressure
- pads
- servo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
- B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
- B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
- B23Q1/545—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
Abstract
Description
【発明の詳細な説明】
象部材に倣小な変位めるいは同転を与える装置に関する
ものでるる。DETAILED DESCRIPTION OF THE INVENTION This invention relates to a device for applying a small displacement or rotation to an imaginary member.
一般に、制御対象部材例えば平面研削盤のテーブルを正
確に微小量変位させたり微小角度傾ける場合、使用され
る装置はバックラッシュがなく、静的・動的に高剛性で
、分解能が高い事が望まれる。従来の装置では、これら
の総ての条件を、満足する装置はない。Generally, when accurately displacing or tilting a controlled object, such as the table of a surface grinder, by a minute amount, it is desirable that the equipment used be free of backlash, have high static and dynamic rigidity, and have high resolution. It will be done. No conventional device satisfies all of these conditions.
本発明は制御対象部材の変位を検出し、これと指令値と
の差を求め．、この差をなくす様サーボ弁により、対向
する２対もしくはそれ以上の静圧パツドに圧力を加える
閉回路を設ける事により、指令値に対する高い精度の変
位又は角度もしくは両方を得るとともに、バックラッシ
ュがなく、かつ静的・動的に高剛性で分解能が高い変位
・角度設定装置１−＊供する事を目的としたものでるる
。The present invention detects the displacement of the controlled member and calculates the difference between this and the command value. By providing a closed circuit that applies pressure to two or more pairs of static pressure pads facing each other using a servo valve to eliminate this difference, highly accurate displacement and/or angle relative to the command value can be obtained, and backlash can be avoided. The purpose of this device is to provide a displacement/angle setting device 1-* with high rigidity and high resolution both statically and dynamically.
以下に本発明の一実施例として、平面研削盤の工作物取
付治具に適用した装置を図面を参照して説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As an embodiment of the present invention, a device applied to a workpiece mounting jig for a surface grinder will be described below with reference to the drawings.
第１図は装置の構成図で、治具部は断面で示しである。FIG. 1 is a block diagram of the apparatus, and the jig section is shown in cross section.
制御対象部材であるテーブルＩＦｉ、基礎定盛２に固層
された枢支部材３の中に６ １ＷｊＡの靜圧パッド尋〜
９によって枢支部材３に対して、Ｓ受すきまを介して左
右に回動可能に一対の静圧軸受＃ＩＩ造で支持されてい
る。テーブル１の′ｉｔｂきはサーボ弁１０．１１の制
御によって、下静圧パッド４及び６、上静圧パッド５及
び７への作動流体の供給圧力を配分することにょシ、上
下方向に微小量変位したり、０点を中心に微小角度回転
したシ、変位と回転を同時に行なう事が出来る。左右に
配置された静圧パッド８，９は固定絞１２．１３を介し
て一定の供給圧力Ｐ＊ ｅ Ｐｔ ｋ受ける事により、
テーブル１を左右方向に一定位置に保持している。The table IFi, which is a member to be controlled, has a 61WjA silent pressure pad in the pivot member 3 fixed to the foundation plate 2.
9, it is supported by a pair of static pressure bearings #II structure so as to be rotatable left and right with respect to the pivot member 3 via an S-receiving gap. Table 1 'itb' is to distribute the supply pressure of the working fluid to the lower static pressure pads 4 and 6 and the upper static pressure pads 5 and 7 by controlling the servo valves 10.11, in small amounts in the vertical direction. It can be displaced, rotated by a minute angle around the 0 point, and can be displaced and rotated at the same time. The static pressure pads 8 and 9 arranged on the left and right sides receive a constant supply pressure P* e Pt k via the fixed throttle 12.13, so that
The table 1 is held at a fixed position in the left and right direction.
枢支部材３と制御対象部材であるテーブル１との間の相
対変位を検出する変位検出器１４．１５は、テーブル１
の移動方向に対向して枢支部材３の上に取り付けられて
いる。差動増中器１６及び１７はそれぞれコントローラ
２２にょシ与えられる移動指令信号Ｈ６ｌ ｌ Ｈｃ２
と、テーブル１と保持部材３との間の相対変位に対応し
た変位検出器１４．１５の出力信号Ｈ□、Ｈ２との闇で
減算を行ない、その差を増巾する。この増巾された誤差
信号は補償回路１８．１９を通り、サーボ増巾器２０゜
２１を介してサーボ弁１０及び１１に導かれる。Displacement detectors 14 and 15 that detect relative displacement between the pivot member 3 and the table 1, which is a member to be controlled,
The pivot member 3 is mounted on the pivot member 3 opposite to the moving direction of the pivot member 3. The differential multipliers 16 and 17 each receive a movement command signal H6l l Hc2 given to the controller 22.
and the output signals H□ and H2 of the displacement detectors 14 and 15 corresponding to the relative displacement between the table 1 and the holding member 3, and the difference is amplified. This amplified error signal passes through a compensation circuit 18, 19 and is guided to servo valves 10 and 11 via servo amplifiers 20 and 21.
サーボ弁１０及び１１は相対向する上下静圧パッド５，
４及び７，６に対して、制御信号■ｉｔＩ！に従って差
圧的に圧力を加えることによって、テーブル１を移動さ
せ、指令値だけ移動した時点で上下静圧パッド５，４及
び７，６の圧力を平衡させる。The servo valves 10 and 11 have upper and lower static pressure pads 5 facing each other,
4 and 7,6, the control signal ■itI! By applying pressure differentially according to the table 1, the table 1 is moved, and the pressures of the upper and lower static pressure pads 5, 4 and 7, 6 are balanced when the table 1 has moved by the command value.
第２図は第１図のＡ−Ａ断面図である。静圧パッド１０
１．１０’２は固定絞！２１０３，１０４に介して一定
の供給圧力Ｐｓ ＊ Ｐａ ｋ受けている。テーブル１
は静圧パッド１０１，１０２で左右方向（第１図の前後
方向）に、一定位置に保持さｎている。FIG. 2 is a sectional view taken along the line AA in FIG. 1. Static pressure pad 10
1.10'2 is a fixed aperture! 2103, 104 receives a constant supply pressure Ps*Pak. table 1
is held at a constant position in the left-right direction (front-back direction in FIG. 1) by static pressure pads 101 and 102.
次に動作について説明する。第１図において、Ｈｃｌ、
Ｈ，、と、テーブル１及び枢支部材３の間の相対Ｋａ
に対応した変位検出器１４．１５の出力 □信号Ｈ
１，Ｈ２との差全差動増巾器１６．１７で検出増巾する
。この増巾された誤差信号は補償回路１８．１９を通シ
、サーボ増巾器２０．２１によって祷られた制御信号１
．、Ｉ、としてサーボ弁１ｉ１，１１に供給される。サ
ーボ弁１０．１１はそｎぞれ供給圧力ＰＳＵｌ −ＰＳ
Ｕ、 １に％上下静圧パツ）’５と４との圧力差および
７と６との圧力差がそれぞれ制御信号１１および■、に
比例するように配分する。テーブル１を上方向に移動さ
せる場合は、指令信号をＨｃ、−＝＝Ｈｏ２とし、下静
圧パッド４，６への供給圧力を上静圧バッド５，７への
供給圧力より高くすれば、下静圧パッド４．６部の軸受
すきまは大きく上静圧パッド５，７部の軸受すきまは小
さくなるので、テーブル１は上方向に変位する。テーブ
ル１の変位により、変位検出信号Ｈ，，Ｈ，が変化し指
令信号Ｈ６，、Ｈｏｔとほぼ等しくなり動作が完了する
。この時の指令信号Ｈ８１，Ｈ９と変位検出信号Ｈ，、
Ｈ，との差は、サーボ系のループゲインを十分大きくす
ることによって少なくできる。Next, the operation will be explained. In FIG. 1, Hcl,
H, , and the relative Ka between the table 1 and the pivot member 3
Output of displacement detector 14.15 corresponding to □Signal H
1, H2 is detected and amplified by fully differential amplifiers 16 and 17. This amplified error signal is passed through the compensation circuit 18.19 and the control signal 1 outputted by the servo amplifier 20.21.
．． , I, to the servo valves 1i1, 11. Servo valves 10 and 11 each have a supply pressure PSUl -PS
U, 1% upper and lower static pressure parts) 'Distribute so that the pressure difference between 5 and 4 and the pressure difference between 7 and 6 are proportional to control signals 11 and 2, respectively. When moving the table 1 upward, the command signal is set to Hc, -==Ho2, and the supply pressure to the lower static pressure pads 4 and 6 is made higher than the supply pressure to the upper static pressure pads 5 and 7. Since the bearing clearance between the lower static pressure pads 4 and 6 is large and the bearing clearance between the upper static pressure pads 5 and 7 is small, the table 1 is displaced upward. Due to the displacement of the table 1, the displacement detection signal H,,H, changes and becomes almost equal to the command signal H6,,Hot, thereby completing the operation. At this time, command signals H81, H9 and displacement detection signals H, .
The difference from H can be reduced by making the loop gain of the servo system sufficiently large.
テーブル１を回転させる場合は、指令信号ＨＣ＋ｅＨ（
２ｔ ｔ” Ｈ（１＝Ｈ（ｊとなるようにすれば、変位
信号Ｈ１ｐ ｎ、はＨ１＝ −Ｈ，となるようにテーブ
ル１が移動する。従って、テーブル１はその軸心（ｊｋ
中心として微小角度反時計方向に回転する。When rotating table 1, command signal HC+eH(
2t t'' H(1=H(j), the table 1 will move so that the displacement signal H1p n, will be H1=-H. Therefore, the table 1 will move with its axis (jk
Rotates a small angle counterclockwise around the center.
一般的にテーブル１の変位および回転は、テーブル１の
中心の変位ｆｒ Ｈを回転角をθ、変位検出器１４．１
５の取付は間１４をＬとすればＨ＝＝ （Ｈｃｌ ＋
Ｈｔ；ｔ ） ／ ２ ｅ Ｓｉｎθ＝ （Ｈｅ、 −
Ｈｏ２）／Ｌとなる。ここで（ａｃｌ−Ｈｏ２）がＬＫ
Ｉｆｆべ十分小さければ、０吋（ＨＣＩ Ｈ（２）
／ Ｌと近似出来る。Generally, the displacement and rotation of the table 1 are determined by using the displacement fr H of the center of the table 1, the rotation angle θ, and the displacement detector 14.1.
5 is installed, if the distance 14 is L, then H== (Hcl +
Ht;t)/2e Sinθ= (He, −
Ho2)/L. Here (acl-Ho2) is LK
If it is small enough, 0 inches (HCI H(2)
/ Can be approximated as L.
Ｌは一定であるから（ＨＣｊ”Ｃ２） ｋ制御すれば角
度と変位が制御出来る。Since L is constant (HCj''C2), the angle and displacement can be controlled by controlling k.
本発明による微小変位角度設定装置は、指令信号に対す
る変位検出信号との誤差に応じた力を静圧パッド４，５
及び６，７を介して制御対象であるテーブル１に加えて
指令信号と変位検出信号とを等しくしようとする「力ヲ
燥作量とする変位制御系」を構成しておシ、高い精度の
変位や角度の設定が出来る事を特徴としている。さらに
テーブル１の回転に伴うテーブル上面の変位を補正した
り、変位と回転を同時に与えたりする事が出来る。The minute displacement angle setting device according to the present invention applies a force to the static pressure pads 4 and 5 according to the error between the command signal and the displacement detection signal.
In addition to Table 1, which is the object of control, a "displacement control system in which the force is used as the amount of work" is configured to equalize the command signal and the displacement detection signal through 6 and 7. It is characterized by the ability to set displacement and angle. Furthermore, it is possible to correct the displacement of the table top surface due to the rotation of the table 1, or to apply displacement and rotation at the same time.
なお補償回路１８・、１９はこの制御系の修正動作に２
ける特性、例えば定常時性金調金する為に神入されたも
のである。Note that the compensation circuits 18 and 19 are used for corrective operation of this control system.
For example, it is a divine attribute that is used to make money in steady state.
なお、作動流体は油等の液体だけでなく、空気等気体を
用いる事も出来る。また上記実ｍ例では左右一対の静圧
軸受構造の静圧パッドの配置を示したが、この構成全平
行に２対以上配置することにより、モーメント荷重に対
し剛性ｔｆ＃ＦＪめることかできる。また上記実施例の
構成を第１図の平面以外の方向にも配置することにより
、テーブルのｅ会的な移動制御も可能でるる。Note that the working fluid can be not only a liquid such as oil but also a gas such as air. Furthermore, in the actual example above, the arrangement of the static pressure pads with a pair of left and right hydrostatic pressure bearings is shown, but by arranging two or more pairs of this structure in parallel, it is possible to increase the rigidity tf#FJ against moment loads. . Further, by arranging the configuration of the above embodiment in directions other than the plane shown in FIG. 1, it is also possible to control the movement of the table in an electronic manner.
以上の様に本発明による微小変位角度設定装置は静圧軸
受パッドの供給圧力を制御して、その軸受すきまを変え
る事によって制御対象部材を微小量変位させたり回転さ
せ、その変位ｔｔ検出してフィードバックし、指令信号
との差を修正することによって制御対象部材を正確に＃
小量変位させたり回転させたりすることを特徴とするも
ので、高剛性かつ微小な変位（例えば０．００５μｍ以
下）や微小な角度（例えば０．０１秒以下）を設定する
事が可能である。従って、工作機械、測足器等多くの分
野できわめて高いＭ剛性が発揮される。As described above, the minute displacement angle setting device according to the present invention controls the supply pressure of the hydrostatic bearing pad, changes the bearing clearance, displaces or rotates the controlled member by a minute amount, and detects the displacement tt. Accurately control the controlled object by feeding back and correcting the difference with the command signal.
It is characterized by small displacement or rotation, and it is possible to set high rigidity and minute displacement (for example, 0.005 μm or less) and minute angle (for example, 0.01 seconds or less). . Therefore, extremely high M rigidity is exhibited in many fields such as machine tools and foot measuring instruments.
第１図は本発明の一実施例を示す構成図、第２図は第１
図のＡ−Ａ断面図である。
１・・・テーブル、２・・・基礎定盤、３・・・枢支部
材、５．７・・・上静圧パッド、４，６・・・下静圧パ
ッド、１０．１１・・・サーボ弁、１４．１５・・・変
位検出弘１６．１７−・・差動増巾器、２０，２１・・
・サーボ増巾器、２２・・・コントローラ。
？１FIG. 1 is a configuration diagram showing one embodiment of the present invention, and FIG.
It is an AA sectional view of the figure. 1... Table, 2... Foundation surface plate, 3... Pivotal support member, 5.7... Upper static pressure pad, 4, 6... Lower static pressure pad, 10.11... Servo valve, 14.15...Displacement detection 16.17-...Differential amplifier, 20,21...
- Servo amplifier, 22...controller. ? 1
Claims (1)
の静圧軸受にて回動可能に支持する枢支部材と、該対向
する静圧軸受のそれぞれの上下に対向して設けた少くも
一対の静圧バッドと、一対の指令信号を出すコントロー
ラと、前記制御対象部材と枢支部材との相対変位を検出
する検出器と、号を増巾するサーボ増巾器と、該サーボ
増巾器の制御信号に対応して作動流体の供給圧力を前記
上下の静圧パッドに配分するサーボ弁とからなる微小変
位角度設定装置。A member to be controlled, a pivot member rotatably supporting the member to be controlled by at least one pair of opposing hydrostatic bearings, and at least one pivot member provided oppositely above and below each of the opposing hydrostatic bearings. a pair of static pressure pads, a controller that outputs a pair of command signals, a detector that detects relative displacement between the control target member and the pivot member, a servo amplifier that amplifies the signal, and the servo amplifier A minute displacement angle setting device comprising a servo valve that distributes the supply pressure of working fluid to the upper and lower static pressure pads in response to a control signal of the device.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4862882A JPS58165960A (en) | 1982-03-26 | 1982-03-26 | Fine displacement/angle setting device |
| US06/441,131 US4504048A (en) | 1981-11-13 | 1982-11-12 | Micro-adjustable displacement and rotation setting apparatus |
| NL8204383A NL8204383A (en) | 1981-11-13 | 1982-11-12 | MICRO-ADJUSTABLE MOVEMENT AND ROTATION ADJUSTMENT. |
| DE19823241940 DE3241940A1 (en) | 1981-11-13 | 1982-11-12 | MICRO-ADJUSTABLE DEVICE FOR DETERMINING SHIFT AND ROTATION |
| CH6659/82A CH660805A5 (en) | 1981-11-13 | 1982-11-15 | DEVICE FOR FINE ADJUSTING A SHIFT AND / OR ROTATION. |
| GB08232522A GB2112963B (en) | 1981-11-13 | 1982-11-15 | Micro-adjustable displacement and rotation setting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4862882A JPS58165960A (en) | 1982-03-26 | 1982-03-26 | Fine displacement/angle setting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58165960A true JPS58165960A (en) | 1983-10-01 |
Family
ID=12808650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4862882A Pending JPS58165960A (en) | 1981-11-13 | 1982-03-26 | Fine displacement/angle setting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58165960A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003089026A (en) * | 2001-09-17 | 2003-03-25 | Toyoda Mach Works Ltd | Main spindle device for machine tool |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5217915A (en) * | 1975-07-31 | 1977-02-10 | Nippon Telegraph & Telephone | Printer |
-
1982
- 1982-03-26 JP JP4862882A patent/JPS58165960A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5217915A (en) * | 1975-07-31 | 1977-02-10 | Nippon Telegraph & Telephone | Printer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003089026A (en) * | 2001-09-17 | 2003-03-25 | Toyoda Mach Works Ltd | Main spindle device for machine tool |
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