JPS5883201A - Shape measuring device - Google Patents
Shape measuring deviceInfo
- Publication number
- JPS5883201A JPS5883201A JP18196681A JP18196681A JPS5883201A JP S5883201 A JPS5883201 A JP S5883201A JP 18196681 A JP18196681 A JP 18196681A JP 18196681 A JP18196681 A JP 18196681A JP S5883201 A JPS5883201 A JP S5883201A
- Authority
- JP
- Japan
- Prior art keywords
- stylus
- signal
- shape
- tip
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は被測定物と触針とを相対的に移動させて、そ
の被測定物の表面形状を拡大記録する形状測定器におい
て、触針が被測定物の形状に倣って上下動したときに生
ずる円弧誤差を電気的に補正する装置に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a shape measuring instrument that enlarges and records the surface shape of an object to be measured by moving the object to be measured and the stylus relatively. This invention relates to a device that electrically corrects arc errors that occur when moving up and down.
第１図によって形状測定器の概略構造を説明する。測定
台１上にコラム５が直立して固定され、上下動へンドル
４を回転さ°せることによって該コラム３に取付けられ
たＸ方向移動装置５は上下方向に移動される。Ｘ方向移
動装置５には基準板７が水平に設けられ、モータ８に連
絡されたねじ９を回転させることによってナツト１０を
介して移動板１１が基準板Ｚ上をＸ方向に沿って駆動さ
れる。このときの移動板１１のＸ方向移動量はＸ方向検
出器１２によって検出され、その出力はＸ−Ｙ記録計１
３のＸ方向人力となる。The schematic structure of the shape measuring instrument will be explained with reference to FIG. A column 5 is fixed upright on a measuring table 1, and by rotating a vertically moving handle 4, an X-direction moving device 5 attached to the column 3 is moved vertically. The X-direction moving device 5 is provided with a reference plate 7 horizontally, and by rotating a screw 9 connected to a motor 8, a moving plate 11 is driven along the X direction on the reference plate Z via a nut 10. Ru. The amount of movement of the moving plate 11 in the X direction at this time is detected by the X direction detector 12, and its output is detected by the X-Y recorder 1.
3 human power in the X direction.
Ｙ方向検出装置６は前記した移動板１１に連絡されてお
り、従ってＸ方向に駆動される。The Y-direction detection device 6 is connected to the aforementioned moving plate 11, and is therefore driven in the X-direction.
このＹ方向検出装置乙には支点１４によって回転運動可
能にレバー１５が支持され、その先端にＬ字形レバー１
６がＸ′−Ｘ″線を中心に回転可能に取付けられ、さら
にＬ字形レバー１６の先端には被測定物２に接触する触
針１７が固定されていムレパー１５の後端にはバランス
ウェイト１８が取付けられ、このバランスウェイト１８
には被測定物の上面あるいは下面を測定するときの測定
力を付加するための測定力切換ウェイト１９が回転軸２
０を中心に左右に回転可能に取付けられている。A lever 15 is rotatably supported by a fulcrum 14 on this Y-direction detection device B, and an L-shaped lever 1 is attached to the tip of the lever 15.
6 is attached rotatably around the X'-X'' line, and furthermore, a stylus 17 that contacts the object 2 to be measured is fixed to the tip of the L-shaped lever 16, and a balance weight 18 is attached to the rear end of the mulleper 15. is installed, and this balance weight 18
A measuring force switching weight 19 for adding measuring force when measuring the upper or lower surface of the object to be measured is attached to the rotating shaft 2.
It is attached so that it can rotate left and right around 0.
このような機構によって触針１７が被測定物２の形状に
倣って上下動したときの変位量かＹ方向検出器２１によ
って検出され、その出力はＸ−Ｙ記録計１３のＹ方向入
力となる。With such a mechanism, the amount of displacement when the stylus 17 moves up and down following the shape of the object to be measured 2 is detected by the Y-direction detector 21, and its output becomes the Y-direction input of the X-Y recorder 13. .
このような形状測定器において従来は触針１７の先１１
７’とレバー１５の支点１４とを結ぶ線Ｘ′−ｙ′がＸ
方向移動袋Ｍ５の基準板７の上面と平行となった状態に
おいてＹ方向検出器２１の中心位置すなわち零レベルと
なるように構成されている。Conventionally, in such a shape measuring instrument, the tip 11 of the stylus 17
The line X'-y' connecting 7' and the fulcrum 14 of the lever 15 is
It is configured such that the Y-direction detector 21 is at its center position, that is, at the zero level, when the directionally movable bag M5 is parallel to the upper surface of the reference plate 7.
これは、測定に際し触針先端１７′と支点１４とを結ぶ
線上には家被測定物２の測定表面を載置すれば、触針先
端１７′が支点１４を中心に回転運動するために生ずる
円弧誤差が最も小さい測定が行なえること、あるいはス
フットラッセル等の機構によって円弧誤差を補正する場
合の必要な条件となっていること等のためである。This occurs because the stylus tip 17' rotates around the fulcrum 14 if the measurement surface of the object to be measured 2 is placed on the line connecting the stylus tip 17' and the fulcrum 14 during measurement. This is because measurement with the smallest arc error can be performed, or because it is a necessary condition when arc errors are corrected by a mechanism such as a Schutt Russell.
ところが被測定物の形状によっては触針先端１７′が第
１図のｘ’−ｘ”線より上方あるいは下方にずれていな
いと測定できないものがある。However, depending on the shape of the object to be measured, there are some objects that cannot be measured unless the stylus tip 17' is shifted above or below the line x'-x'' in FIG.
例えば深い四部の底面や大きな被測定物の形状を測定し
ようとする場合には従来装置においてはレバー１５やＹ
方向検出装置６が被測定物に接触することとなり、実際
上測定不可能であるが、触針１７を長くしその先端１７
′をｘ’−）’線より下方に位置させれば容易に測定が
可能となる。また急角度の面の形状を測定する場合には
触針１７を短かくシ、その先端１７′をｘ’−ｘ”線よ
り上方に位置させた方がより急角度の面を触針先端１７
が容易に追従することができる。For example, when trying to measure the bottom surface of a deep part or the shape of a large object, the lever 15 or Y
The direction detection device 6 comes into contact with the object to be measured, making measurement impossible in practice, but the stylus 17 is lengthened and its tip 17
If ' is located below the x'-)' line, measurement can be easily performed. In addition, when measuring the shape of a surface with a steep angle, it is better to shorten the stylus 17 and position its tip 17' above the x'-x'' line.
can be easily followed.
また薄板の上下両面の形状を測定し、かつその肉厚をも
測定記録する場合やあるいは中空管の内部の上下面の相
対形状を測定する場合には従来装置においてはＬ字形レ
バー１６を１８０回転させて測定していたが、このよう
な場合にも後述するように触針先端１７′をｘ’−ｘ“
線よりずらせた特殊な構造とすることによって容易に測
定可能であムこの発明は上記したような触針先端１７′
と支点１４を結ぶ線が基準板７と平行でないように構成
し、すなわち触針先端１７′がｘ’−ｘｔｌ線より上方
もしくは下方に位置するように構成し、しかもそのよう
な構成にしたことによって生ずる円弧誤差を補正した拡
大記録図形を描かせることを可能とした形状測定器を提
供するものである。In addition, when measuring the shape of both the upper and lower surfaces of a thin plate and also measuring and recording its wall thickness, or when measuring the relative shape of the upper and lower surfaces inside a hollow tube, the L-shaped lever 16 is Measurements were taken by rotating the stylus, but in such cases as well, the tip 17' of the stylus should be rotated x'-x" as described later.
Measurement can be easily carried out by making the stylus tip 17' offset from the line.
and the fulcrum 14 are not parallel to the reference plate 7, that is, the stylus tip 17' is located above or below the x'-xtl line; The object of the present invention is to provide a shape measuring instrument that is capable of drawing an enlarged recorded figure in which arc errors caused by the above are corrected.
以下図面に従って本発明を説明する。第２図は触針１７
の先端１７′がｘ’−ｘ“線より上方にある場合の円弧
誤差の補正についての説明図である。The present invention will be explained below with reference to the drawings. Figure 2 shows the stylus 17.
FIG. 4 is an explanatory diagram of correction of arc error when the tip 17' of is located above the x'-x'' line.
すなわち従来装置のように触針先端１７′がｘ’−ｆ線
上にある場合に比してその先端がＨだけ上方にある場合
の方が円弧誤差は大となり、従来と同じ方法では円弧誤
差の補正ができない。In other words, when the stylus tip 17' is on the x'-f line as in the conventional device, the arc error is larger when the tip is above the x'-f line. Cannot be corrected.
そこで触針先端１７′がＨだけ上にある状態を基準とす
る本発明の装置においてはＹ方向検出器の出力に対して
、Ｈに相当する電圧りを加えて、これによって円弧誤差
の補正を行なう必要がある。Therefore, in the device of the present invention, which is based on the state in which the stylus tip 17' is above an amount H, a voltage corresponding to H is applied to the output of the Y direction detector, thereby correcting the arc error. It is necessary to do it.
ここでＨは測子レバーの形状から決まる値で測子レバー
が変わればそれに応じて補正をする。Here, H is a value determined from the shape of the probe lever, and if the probe lever changes, it is corrected accordingly.
同様に第３図に示すように触針先端１７′がＸ′−Ｘ“
線より下方にある場合には−Ｈに相当する補正電圧−人
を加算するようにする。Similarly, as shown in FIG. 3, the stylus tip 17' is
If it is below the line, a correction voltage -H corresponding to -H is added.
第４図は以上の場合の電気回路のブロック図でＹ方向検
出器の出力に対して常に十りあるいは、−りの補正を行
ない、これをＸ−Ｙ記録計のＹ方向入力とすると共にこ
れを使って円弧誤差の補正を行なって、Ｘ信号に加え、
記録計のＸ方向入力とする。Figure 4 is a block diagram of the electric circuit in the above case. The output of the Y direction detector is always corrected by + or -, and this is used as the Y direction input of the X-Y recorder. Correct the arc error using , add it to the X signal,
This is the X direction input for the recorder.
以上において触針を上方測定用、下方測定用と別々に設
けたが、これを第５図に示すように測子レバー先端を上
下に音叉形とし、予め十Ｈおよび−Ｈを測定して置いて
、これに対応する十ｋ、−Ａｆ第６図の補正回路で作り
、上面測定に際してはスイッチ２３を上に入れ、下面測
定には下に切換える。ここで上下のＨは同一寸法である
必要（ｊなく、Ｘ−Ｘ線に対する上下のずれ量によって
決める。In the above, the stylus was provided separately for upward and downward measurements, but as shown in Figure 5, the tip of the stylus lever was shaped like a tuning fork at the top and bottom, and 10H and -H were measured and placed in advance. The corresponding correction circuit 10k, -Af shown in FIG. 6 is made, and the switch 23 is turned up when measuring the upper surface, and turned down when measuring the lower surface. Here, the upper and lower H need to be the same size (j is not determined, but is determined by the amount of vertical deviation with respect to the X-X line.
′第５図のように音叉形として、触針先端を向い合：は
せると、加工上の困難性に起因して第７図に示すように
先端位置のＸ方向のずれｅを生ずる。'If the tip of the stylus is made into a tuning fork shape as shown in FIG. 5 and placed facing each other, the position of the tip will shift e in the X direction as shown in FIG. 7 due to processing difficulties.
そこで予めこれを測定して雪いて、第６図の補正値設定
回路２２によって、６に相当する信号を作り上を基準と
した場合には下の測定に際してその値をＸ信号に加算す
る。Therefore, this value is measured in advance, and a signal corresponding to 6 is created by the correction value setting circuit 22 in FIG. 6, and when the upper part is used as a reference, that value is added to the X signal when measuring the lower part.
図のスイッチ２４はスイッチ２３と連動し、下で測定す
るときだけ入れるようにしたものである。The switch 24 in the figure is linked to the switch 23 and is turned on only when measuring from below.
このようにすると、上下におけるＸ位置が正確に一散す
るので、記録紙上にワークピースの厚さと形状とを共に
そのまま拡大して記録することが可能で、例えば薄板の
肉厚測定なら〃噂の上下面の形状測定等を同時に拡大記
録する場合に好適である。In this way, the X positions in the upper and lower directions are accurately distributed, so it is possible to enlarge and record both the thickness and shape of the workpiece on the recording paper.For example, when measuring the thickness of a thin plate, it is possible to This is suitable for enlarging and recording the shape measurements of the upper and lower surfaces at the same time.
なお上下の考え方は例えば中空管内上下面の相対形状測
定においても可能で、第８図はその場合の測子レバー先
端の形状である。このときにも第６図の回路をそのまま
使用可能で、上下触針の先端位置のずれ補正も必要なら
ば第７図に示した場合と同様に補正することができる。Note that the concept of upper and lower can also be used, for example, in measuring the relative shape of the upper and lower surfaces within a hollow tube, and FIG. 8 shows the shape of the tip of the probe lever in that case. In this case, the circuit shown in FIG. 6 can be used as is, and if necessary, the deviation of the tip positions of the upper and lower stylus can be corrected in the same manner as shown in FIG. 7.
以上詳述したように本願発明によれば形状測定器の触針
先端をＸ′−Ｘ″線より上方もしくは下方に位置するよ
うに構成して従来困難であった被測定物の形状を容易に
拡大記録することができるようになり、かつそのときの
円弧誤差を補正することを可能とした形状測定器を提供
することができた。As detailed above, according to the present invention, the tip of the stylus of the shape measuring device is configured to be located above or below the X'-X'' line, making it possible to easily measure the shape of the object to be measured, which was previously difficult. It has been possible to provide a shape measuring instrument that is capable of enlarging recording and correcting arc errors at that time.
第１図は従来の形状測定器の概略説明図、第２図、第３
図、第５図、第７図、第８図は本発明を適用する場合の
触針形状の説明図、第４図、第６図は円弧誤差補正回路
のブロック図。
２ 被測定物 １１ 基準板 １２．Ｘ方向検出
器１３、Ｘ−Ｙ記録計 １４．支点 １５ レバ
ー１６、Ｌ字形レバー１ｙ、触針 ２１．Ｙ方向検出器
” ２２．２３．２４ スイッチ
特許出願人
株式会社 東京精密Figure 1 is a schematic explanatory diagram of a conventional shape measuring instrument, Figures 2 and 3
5, 7 and 8 are explanatory diagrams of the shape of the stylus when the present invention is applied, and FIGS. 4 and 6 are block diagrams of the arc error correction circuit. 2 Object to be measured 11 Reference plate 12. X-direction detector 13, X-Y recorder 14. Fulcrum 15 Lever 16, L-shaped lever 1y, stylus 21. Y direction detector” 22.23.24 Switch patent applicant Tokyo Seimitsu Co., Ltd.
Claims (3)
針が被測定物の形状に倣って上下動したときの変位量を
測定してＸ−Ｙ記録計にその形状を拡大記録する形状測
定器において、支点を通りかつ基準板に平行なＸ方向線
に対し触針先端をＹ方向に所定寸法ずらせて構成し、Ｙ
方向検出器のＹ信号に前記所定寸法に相当する補正信号
を加算し、その値をＸ−Ｙ記録計のＹ方向入力信号とし
、前記加算値によって演算さｈた円弧誤差補正信号をＸ
方向検出器のＸ信号に加算してその値をＸ−Ｙ記録計の
Ｘ方向入力信号とすることを特徴とする形状測定器。(1) Move the object to be measured and the stylus relatively, measure the amount of displacement when the stylus moves up and down following the shape of the object, and enlarge the shape on the X-Y recorder. In the shape measuring instrument for recording, the tip of the stylus is shifted by a predetermined distance in the Y direction with respect to the X direction line passing through the fulcrum and parallel to the reference plate.
A correction signal corresponding to the predetermined dimension is added to the Y signal of the direction detector, that value is used as the Y direction input signal of the X-Y recorder, and the arc error correction signal calculated using the added value is
A shape measuring instrument characterized in that the value is added to an X signal of a direction detector and the value is used as an X direction input signal of an XY recorder.
先端を上下に音叉形とし、士ルの補正を上下面測定に際
して選択的に行なわせるスイッチと上下触針先端のＸ方
向ずれ値に係る信号をＸ方向変位信号に加算する前記ス
イッチと連動する切換スイッチとを有する上下面の形状
を測定する形状測定器。(2) In the statement of claim 1, the top and bottom tips of the probe levers are shaped like a tuning fork, and a switch that selectively performs the correction of the angle when measuring the top and bottom surfaces, and an X-direction deviation value of the tips of the top and bottom probes. A shape measuring instrument for measuring the shapes of upper and lower surfaces, comprising a changeover switch that operates in conjunction with the switch that adds a signal related to the X-direction displacement signal to an X-direction displacement signal.
ー先端に上下方向の触針を設けた上下内面を測定する形
状測定器。(3) The shape measuring instrument as set forth in claim 1, which measures the upper and lower inner surfaces, and has a vertical stylus at the tip of the probe lever.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18196681A JPS5883201A (en) | 1981-11-13 | 1981-11-13 | Shape measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18196681A JPS5883201A (en) | 1981-11-13 | 1981-11-13 | Shape measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5883201A true JPS5883201A (en) | 1983-05-19 |
Family
ID=16109975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18196681A Pending JPS5883201A (en) | 1981-11-13 | 1981-11-13 | Shape measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5883201A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2498047A1 (en) | 2011-03-09 | 2012-09-12 | Mitutoyo Corporation | Surface texture measuring apparatus |
| EP2500684A1 (en) | 2011-03-18 | 2012-09-19 | Mitutoyo Corporation | Method of calibrating surface texture measurement device |
| US8701301B2 (en) | 2011-04-19 | 2014-04-22 | Mitutoyo Corporation | Surface texture measuring instrument |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51105848A (en) * | 1975-03-14 | 1976-09-20 | Tokyo Seimitsu Co Ltd | KEIJOSOKUTEIHOHO |
| JPS56132502A (en) * | 1980-03-21 | 1981-10-16 | Sony Corp | Fix detecting probe |
-
1981
- 1981-11-13 JP JP18196681A patent/JPS5883201A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51105848A (en) * | 1975-03-14 | 1976-09-20 | Tokyo Seimitsu Co Ltd | KEIJOSOKUTEIHOHO |
| JPS56132502A (en) * | 1980-03-21 | 1981-10-16 | Sony Corp | Fix detecting probe |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2498047A1 (en) | 2011-03-09 | 2012-09-12 | Mitutoyo Corporation | Surface texture measuring apparatus |
| JP2012189361A (en) * | 2011-03-09 | 2012-10-04 | Mitsutoyo Corp | Surface property measuring instrument |
| US8915124B2 (en) | 2011-03-09 | 2014-12-23 | Mitutoyo Corporation | Surface texture measuring apparatus |
| EP2498047B1 (en) * | 2011-03-09 | 2017-12-20 | Mitutoyo Corporation | Surface texture measuring apparatus |
| EP2500684A1 (en) | 2011-03-18 | 2012-09-19 | Mitutoyo Corporation | Method of calibrating surface texture measurement device |
| CN102692203A (en) * | 2011-03-18 | 2012-09-26 | 株式会社三丰 | Method of calibrating surface texture measurement device |
| US8925367B2 (en) | 2011-03-18 | 2015-01-06 | Mitutoyo Corporation | Method of calibrating surface texture measurement device |
| US8701301B2 (en) | 2011-04-19 | 2014-04-22 | Mitutoyo Corporation | Surface texture measuring instrument |
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