JPS5880801A - Moisture sensitive element - Google Patents
Moisture sensitive elementInfo
- Publication number
- JPS5880801A JPS5880801A JP56180087A JP18008781A JPS5880801A JP S5880801 A JPS5880801 A JP S5880801A JP 56180087 A JP56180087 A JP 56180087A JP 18008781 A JP18008781 A JP 18008781A JP S5880801 A JPS5880801 A JP S5880801A
- Authority
- JP
- Japan
- Prior art keywords
- sensitive element
- moisture sensitive
- moisture
- humidity
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 229910052596 spinel Inorganic materials 0.000 description 3
- 239000011029 spinel Substances 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- VNDYJBBGRKZCSX-UHFFFAOYSA-L zinc bromide Chemical compound Br[Zn]Br VNDYJBBGRKZCSX-UHFFFAOYSA-L 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000001110 calcium chloride Substances 0.000 description 1
- 229910001628 calcium chloride Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 235000010755 mineral Nutrition 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004677 spark ionization mass spectrometry Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002522 swelling effect Effects 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229940102001 zinc bromide Drugs 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Magnetic Ceramics (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明社湿度によってその電気抵抗が変化する性質を利
用し、電気信号として湿度音検知する感湿素子に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a humidity sensing element that detects humidity sound as an electrical signal by utilizing the property that its electrical resistance changes depending on humidity.
従来から使用されている感湿抵抗体として塩化リチウム
、塩化カルシウムなどの塩類、Ｃｒ１０３、Ｆｅｄ Ｏ
＠ 、Ｎ ｉ！ＯＢ 、ＺｎＵ、ムｉｔ Ｏｘ 塾の金
属酸化物の微粉末を絶縁基板に揄布し、電気抵抗体にし
たものがある。ま良、固有抵抗を下けるためアルカリ金
属酸化物（Ｌｉ２Ｏ、Ｋ、０）等を添加した焼結体感湿
奮子や、有機材料の＠湿性と膨潤性全利用した高分子タ
イプの素子もある。Conventionally used moisture sensitive resistors include salts such as lithium chloride and calcium chloride, Cr103, and Fed O.
@ , Ni! OB, ZnU, Mut Ox There are electrical resistors made by spreading fine powder of metal oxides on an insulating substrate. There are also sintered moisture-sensitive devices that contain alkali metal oxides (Li2O, K, 0), etc. to lower the resistivity, and polymer-type devices that take full advantage of the moisture and swelling properties of organic materials. .
しかしＩｋから、塩化リチウム等の素子は、汚れに弱く
水に飽和されると溶出しやすく不安定であり、また検出
範囲が挟−０金属酸化物の微粉末を利用したタイプ鉱一
般に固有抵抗が高く、これｉ電気的に精度よく検出する
こと社困−である。更に、アルカリ金属等を添加した素
子社濶度サイクルの履歴が着しく大きく、経時変化１大
き−。また、高分子タイプの素子社、高温に対して特性
・の変化が大き−ため、使用環境条件が限定される欠点
を有する。However, based on Ik, elements such as lithium chloride are susceptible to dirt and easily elute when saturated with water, making them unstable, and type minerals using fine powder of metal oxides with a detection range of -0 generally have a specific resistance. This is difficult to detect electrically with high accuracy. Furthermore, the temperature cycle history of the element added with alkali metals etc. is quite large, and the change over time is 1 large. In addition, polymer type devices have the disadvantage that the environmental conditions in which they can be used are limited because their properties change significantly at high temperatures.
本発明ｉｊ、ＺｎＦｅ１０４９０ｗ１モル襲と８ ＫＩ
Ｕｓ ｌ Ｏ〜９９モル≦とを含む仁とから焼結型
ＭＡ温素子を構成する仁とＫより、上記の欠点を解消し
ようとするものである。Invention ij, ZnFe10490w 1 mol attack and 8 KI
The above-mentioned drawbacks are to be solved by forming a sintered MA thermal element from a core and a core containing Us l O≦99 mol.
以下本発明ｔ−具体的実施例により説明する。゛第１図
は本発明の感湿素子の形状を示すもので、ｌはＺ ｎ
Ｆ ｅ言０４ （亜鉛、鉄スピネル）と８ｎｏ意との
組成からなる焼結体である。３Ｆｉ薄展状の電極であり
、前記焼結体ｌの両面に印刷や蒸着等の手段により取り
付けられて−る。この電極材料としてはムｇ−、ムｕＳ
ＩＬｕＯ，等が用−られる。８は電気信号を取り出すた
めの一対のリード騙で、前記［極８に半田付けや導電ペ
ーストにて強固に取り付けられている。The present invention will be explained below using specific examples.゛Figure 1 shows the shape of the moisture sensitive element of the present invention, l is Z n
It is a sintered body having a composition of Fe 04 (zinc, iron spinel) and 8 no. The electrode is a thin 3Fi electrode, and is attached to both sides of the sintered body 1 by printing, vapor deposition, or other means. This electrode material is Mug-, MuS
ILuO, etc. are used. Reference numeral 8 denotes a pair of lead wires for extracting electrical signals, which are firmly attached to the above-mentioned electrode 8 by soldering or conductive paste.
次に、上記構成からなる感湿素子の製造方法の一実Ｉａ
ｆＩｌを説明すると、出発原料としてＺｎＯ１Ｆｅ、０
．および８ｎＯ，）第１表に示すようなｆＩ！Ｌ１１合
に配合した。なお、ＺｎＯとＦｅ２Ｏ。Next, a method for manufacturing a moisture-sensitive element having the above structure Ia
To explain fIl, starting materials are ZnO1Fe, 0
．． and 8nO,) fI! as shown in Table 1! It was blended into L11. Note that ZnO and Fe2O.
は１モルずつでスピネルを構成してあり、このスピネル
と８ｎＯ！との混合割合が第１表に示しである。これら
の原料ｔＰｍ式混合し乾燥した後、ポリビニルアルコー
ル（バインダー）を添加配合し、１ｉｏｎ／−の圧力で
直４ｘｓｓｍｓ厚さ８■の円板状に加圧を杉してから、
１１００”Ｃの１Ｍ度にてｇ時間焼成した。この焼成体
素子をさらに厚さ０．５１にスライスした。次に、第１
図に示すよう、 に上記焼結体１にＲｕｂ、電極２全印
刷焼付けし、この電極にリード！１８を半田付けあるい
は導電ペーストにて取り付けた。constitutes spinel with 1 mole each, and this spinel and 8nO! Table 1 shows the mixing ratio. After mixing and drying these raw materials, polyvinyl alcohol (binder) is added and blended, and after pressurizing into a disc shape of 4 x SSMS and 8 cm thick at a pressure of 1 ion/-,
It was fired for g hours at 1100"C and 1M degrees. This fired element was further sliced to a thickness of 0.51 mm. Next, the first
As shown in the figure, Rub and electrode 2 are all printed and baked on the sintered body 1, and lead is attached to this electrode! 18 was attached by soldering or conductive paste.
このようにして得られた第１表の組成の各素子の感湿特
性を第２図に示す。The moisture sensitivity characteristics of each element having the composition shown in Table 1 thus obtained are shown in FIG.
第１表 第８図の試料庫は第１表の試料凪と対応する。Table 1 The sample storage in FIG. 8 corresponds to the sample calm in Table 1.
第２図において、試料Ｊ４ａ、ｂ、ｃはＺｎｋ’ｅ、０
４に８ｎ Ｏ！ ｆそれぞれ０．１，５ｍｏ１％添加し
た場合で湿度変化に対する抵抗値変化が小さく夾用上不
適当である。また、試料Ｎａｏは８ｎ０２単体の場合で
、抵抗値が低く湿度変化に対する抵抗変化がほとんどな
い。しかも強度的に弱いため、適当でない。In Fig. 2, samples J4a, b, c are Znk'e, 0
4 to 8n O! When 0.1 and 5 mo1% of each of f is added, the change in resistance value with respect to changes in humidity is small, making it inappropriate for use. Further, sample Nao is a case of 8n02 alone, and has a low resistance value and hardly changes in resistance with respect to changes in humidity. Moreover, it is not suitable because it is weak in strength.
一方、試料Ｎａ ｄ −ｎの組成の場合、低湿側からＭ
１湿側にわたって抵抗値変化が大きく、しかも実用上適
当な抵抗値を示すため、感湿素子として使用可能である
。On the other hand, in the case of the composition of sample Na d -n, M
Since the resistance value changes greatly over one humidity side and shows a practically appropriate resistance value, it can be used as a humidity sensing element.
なお、第１表の試料＆ａはＺｎＦｅ２（Ｊ４のみの相で
あり、試料隘ｂ−ｎの組成はＺｎＦｅ、Ｕ４と８ｎ０３
の２相系であることがＸ線ディフラクトメータによシ掘
紹されている。In addition, sample &a in Table 1 has a phase of ZnFe2 (J4 only), and the composition of sample bn is ZnFe, U4 and 8n03.
An X-ray diffractometer has shown that this is a two-phase system.
本発明は上述の実施例に限定されず、以下のごとく極々
の変形が可能である。The present invention is not limited to the above-described embodiments, but can be greatly modified as described below.
（１）本実施例で鉱出発原料はＦ ｅ ！ ＯＢ 、Ｚ
ｎ ０１８ｎＯ，を用≠たが出発原料として例えば鉄
原料としてＦｅ１０４、ＦｅＯ硝憩鉄等、また亜鉛原料
としてＺ ｎ （３０１ｓ塩化亜鉛、臭化亜鉛等、更に
スズ原料として８ｎＯ，塩化スズ、臭化スズ等を用いて
もよい。(1) In this example, the ore starting material is Fe! OB, Z
n 018nO, was used as a starting material, for example, as an iron raw material Fe104, FeO nitrate, etc., as a zinc raw material Zn (301s zinc chloride, zinc bromide, etc.), and as a tin raw material 8nO, tin chloride, bromide, etc. Tin or the like may also be used.
（２）本実施例では電極を素子の両面に付けであるが、
片側に８つの電極をくし歯状に付けてもよ−。(2) In this example, electrodes are attached to both sides of the element, but
You can also attach eight electrodes in a comb shape on one side.
ま冷、リード線を直接一体化して成形した焼結体でもよ
ψ。A sintered body formed by directly integrating lead wires may also be used.
（８）なお、本発明焼結体中に不可避不純物成分が人っ
ていてもよいし、また別の目的例えに焼結促進を図る材
料が人って−てもよ−。(8) Incidentally, the sintered body of the present invention may contain unavoidable impurity components, or may contain materials for promoting sintering for another purpose.
以上述べたごとく本発明によれｄ１次に挙ける効果を持
つ。As described above, the present invention has the following effects.
（ａ）金属酸化物の固有抵抗値を下げ電気的に検出しや
す一値となる。(a) The specific resistance value of the metal oxide is lowered to a value that is easily detected electrically.
（ｂ）また、温度変化に対する電気抵抗変化量が大きく
検知可能な湿度領域が広くなる。(b) Furthermore, the amount of change in electrical resistance with respect to temperature changes is large, and the detectable humidity range becomes wide.
（Ｃ）更に、本素子社焼結体であるため、高温度まで安
定している。(C) Furthermore, since it is a sintered body made by this company, it is stable even at high temperatures.
第１図は本発明の一実施例を示す斜視図、第２図は本発
明の説明に供するもので、ＺｎＦｅ、Ｕ４と８ ｎ ０
２ との成分比による感湿特性図である。
ｌ・・・焼結体、２・・・電極、８・・・リード線。
代理人弁理士 岡 部 隆
＠ ２ 図
第１図
相対塩度（ｙ、）FIG. 1 is a perspective view showing one embodiment of the present invention, and FIG. 2 is for explaining the present invention.
2 is a diagram showing moisture sensitivity characteristics according to the component ratio. l... Sintered body, 2... Electrode, 8... Lead wire. Representative patent attorney Takashi Okabe @ 2 Figure 1 Relative salinity (y,)
Claims (1)
子。[Claims] Z n t el 0490-1 mol and 8 nO. A sintered moisture-sensitive element comprising 10 to 99 molar arcs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56180087A JPS5880801A (en) | 1981-11-09 | 1981-11-09 | Moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56180087A JPS5880801A (en) | 1981-11-09 | 1981-11-09 | Moisture sensitive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5880801A true JPS5880801A (en) | 1983-05-16 |
Family
ID=16077216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56180087A Pending JPS5880801A (en) | 1981-11-09 | 1981-11-09 | Moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5880801A (en) |
-
1981
- 1981-11-09 JP JP56180087A patent/JPS5880801A/en active Pending
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