JPS5875391A - Parallel picture detector - Google Patents
Parallel picture detectorInfo
- Publication number
- JPS5875391A JPS5875391A JP17301281A JP17301281A JPS5875391A JP S5875391 A JPS5875391 A JP S5875391A JP 17301281 A JP17301281 A JP 17301281A JP 17301281 A JP17301281 A JP 17301281A JP S5875391 A JPS5875391 A JP S5875391A
- Authority
- JP
- Japan
- Prior art keywords
- windows
- fibers
- plate
- light
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N7/00—Television systems
- H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Projection-Type Copiers In General (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Closed-Circuit Television Systems (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はＬＳＩウェハなどのパターンの外観を自動的に
検査する装置等に用いられる並列ｍ画像検出器置に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a parallel m-image detector arrangement used in an apparatus for automatically inspecting the appearance of a pattern on an LSI wafer or the like.
Ｌ８Ｉなどのパターンを高速に検出する手段には既に並
列型検出器が提案されている。この装置は第１図に於−
て試料１の上の一点２を対物レンズ５で拡大し、中′間
に回転多面鏡４又は振動鏡などを配して実像を走査し、
光ファイバ５とホトツル群６で実像を並列に電気信号に
変換するのを基本構成として−る。A parallel detector has already been proposed as a means for detecting patterns such as L8I at high speed. This device is shown in Figure 1.
A point 2 on the sample 1 is magnified using an objective lens 5, and a rotating polygon mirror 4 or a vibrating mirror is placed in the middle to scan the real image.
The basic configuration is to convert a real image into an electrical signal in parallel using an optical fiber 5 and a phototle group 6.
ＬＳＩパターンの比較検査では対物レンズを２個（３と
７）設け、元ファイバとホトツル群も同様に２組（５と
８及び６と９）設け、対応するホトマル同士、例えば１
０と１１の信号を比較して、一致しな一場合には試料上
に欠陥があると判定している。For comparative inspection of LSI patterns, two objective lenses (3 and 7) are provided, and two groups of original fibers and photopiles (5 and 8 and 6 and 9) are also provided, and corresponding photomuls, for example, 1
The signals of 0 and 11 are compared, and if they do not match, it is determined that there is a defect on the sample.
ここで元ファイバは一般には円形であるので第２図のよ
うに配置し、光ファイバの先端にホトマルを設けて−る
。しかし元ファイバには原理的に被覆部分１２が必要で
Ｔｏす、光を通す部分は１３の部分だけである。従って
この元ファイバで実像を検出した時には、被覆部分の情
報が失われるので、被覆部分に当った実像が、欠陥の実
像であった時には、欠陥を見逃すことになる。Since the original fiber is generally circular, it is arranged as shown in FIG. 2, and a photomul is provided at the tip of the optical fiber. However, in principle, the original fiber requires the covering portion 12, and only the portion 13 allows light to pass through. Therefore, when a real image is detected using this original fiber, information about the covered portion is lost, so if the real image that hits the covered portion is a real image of a defect, the defect will be overlooked.
これを防ぐために第３図で、太さ１０〜２０μｍｉｔの
細い光７アイバ１４を正方形に束ねて使用することも考
えられるが、実際には加工が極めて困難である。ｉた細
−光ファイバは光の伝達効率が低いため、光の損失が生
じる欠点がある。更に正方形の束を精度よく配置するこ
とが出来ないので、実像を検出する際に歪が生じる欠点
もある。In order to prevent this, it is conceivable to use thin optical fibers 14 having a thickness of 10 to 20 .mu.mit bundled in a square shape as shown in FIG. 3, but in practice this is extremely difficult to process. Since thin optical fibers have low light transmission efficiency, they have the disadvantage of causing light loss. Furthermore, since the bundle of squares cannot be arranged with high precision, there is also the drawback that distortion occurs when detecting a real image.
本発明の目的は上記した従来の欠点をなくし、情報の損
失がなく、高−精度で像を検出できるようにした並列部
画像検出装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned conventional drawbacks and to provide a parallel section image detection device that can detect images with high precision without loss of information.
即ち本発明は、光ファイバとして伝達効率の高い比較的
太い光ファイバを使用し、光ファイバの前面にホトエツ
チングで精度良〈作りた正方形又は長方形の窓を設け、
窓を通過した光を元ファイバで受光し、ホトマル等に導
く構成をとることを特徴とするものである。特に窓はホ
トエツチングで作られるため、高−配列精度が得られる
。That is, the present invention uses a relatively thick optical fiber with high transmission efficiency as an optical fiber, and provides a square or rectangular window made with high precision by photoetching on the front surface of the optical fiber.
It is characterized by having a configuration in which the light that has passed through the window is received by the source fiber and guided to a photomultiplier or the like. In particular, since the windows are made by photo-etching, high alignment accuracy can be achieved.
以下本発明を図に示す実施例にもとづいて具体的に説明
する。The present invention will be specifically described below based on embodiments shown in the drawings.
第４図で１５は直径約１００μｍの党ファイバを一列に
密に並べたものであり、その前面にプレート１６を設け
る。プレート１６は板又はガラス乾板などであり、ホト
エツチング々どで精度良く作った５０μｍ の窓１７．
１８などを有している。In FIG. 4, reference numeral 15 denotes fibers having a diameter of about 100 μm arranged closely in a row, and a plate 16 is provided in front of the fibers. The plate 16 is a plate or a glass dry plate, and has a 50 μm window 17 made with high precision by photo-etching.
18 etc.
これにより高精度で実像が検出出来るが、窓の間に間隙
がある丸めに、ここでは実像が検出できず情報が失われ
る。この欠点を除去するために次の方法を用いても良い
。Although this allows real images to be detected with high precision, the real images cannot be detected and information is lost due to the presence of gaps between the windows. The following method may be used to eliminate this drawback.
第１図に示した同転多面鏡により実像は一方向に走査さ
れるが、走査方向は第５図で１９の方向になっている。The real image is scanned in one direction by the co-rotating polygon mirror shown in FIG. 1, and the scanning direction is the direction 19 in FIG.
従って情報を失わないで実像を検出するためには窓を２
行にし、窓の縦方向の間隙ｙＦｉあっても良−が、横方
向の関＠ｘを零にする。Therefore, in order to detect the real image without losing information, the window should be set to 2.
There may be a vertical gap yFi between the windows, but the horizontal gap @x should be zero.
窓をこのように配置すれば実像の検出が出来る。If the windows are arranged in this way, a real image can be detected.
実際には第６図のように元ファイバ２２を２行にし、隙
間なく千鳥状に配置し、その前に窓２３゜２４などを有
するプレート２５を設ける。この際窓の横方向の間＠２
４を零にすれば実像の情報を失わずに検出することが出
来る。Actually, as shown in FIG. 6, the original fibers 22 are arranged in two rows in a staggered manner without any gaps, and a plate 25 having windows 23 and 24 is provided in front of them. In this case, between the windows in the horizontal direction @2
If 4 is set to zero, it is possible to detect the real image without losing its information.
実際には第１図の光７ア、イバ５の先端系に本発明を適
用することにより、実像を高精度且つ情報を失うことな
く、ｙｔの損失も少なｉ状態で検出する仁とが出来る。In fact, by applying the present invention to the tip system of the light 7a and the fiber 5 shown in Fig. 1, it is possible to detect a real image in the i state with high precision, without losing information, and with less loss of yt. .
ところで直径１００μｍ（ＱＪＪｔファイバを単純に密
に配列した場合の配列誤差は±５μｍ以上生ずるため、
実像を並列に検出する際にはこの分が像歪となって現わ
れる０本発明によるプレート上の窓は±１μｍ以内の誤
差で容易に製作可能であるので、実像の検出に当って像
歪が少な−。By the way, if QJJt fibers with a diameter of 100 μm are simply arranged densely, the arrangement error will be ±5 μm or more, so
When real images are detected in parallel, this amount appears as image distortion. Since the window on the plate according to the present invention can be easily manufactured with an error within ±1 μm, image distortion occurs when detecting real images. A little.
また直径１００μｍＯ党ファイバでは被覆厚さが１０μ
ｍ以上あるため、真に光を伝達する部分の直径は８０μ
ｍｓ度である。この九め被覆部分の情報（約２０−）が
失われるので、正確には実像が検出出来な鱒０本発明を
用−れば情報を全く失うことなく、正確に実像が検出出
来る。In addition, the coating thickness is 10 μm for O2 fiber with a diameter of 100 μm.
The diameter of the part that truly transmits light is 80 μm.
It is ms degrees. Since the information (approximately 20 mm) of this corner covered portion is lost, the real image cannot be accurately detected.Using the present invention, the real image can be accurately detected without losing any information.
以上説明したように本発明によれは、像の歪が少なく正
確に実像を検出できる効果を奏する。As explained above, according to the present invention, it is possible to accurately detect a real image with little image distortion.
第１図は本発明に係る並列製検出器を示した図、第２図
及び第３図は従来の光ファイバの並べ方の説明図、第４
図、第５図及び第６図は各々本発明の一実施例を示す図
である。
１５．２２ ・・・ 元ファイバ
１６．２５ ・・・ プレート
１７、１８．２０．２１．２５．２４・・・窓才 ／
図
〃
才２ 囚
／Ａ
第３図
り ４１１！ｌＩ
才乙図
第１頁の続き
０発 明 者 伏見智
横浜市戸塚区吉田町２９２番地株
式会社日立製作所生産技術研究
所内
０発 明 者 青木信彦
横浜市戸塚区吉田町２９２番地株
式会社日立製作所生産技術研究
所内Fig. 1 is a diagram showing a parallel detector according to the present invention, Figs. 2 and 3 are explanatory diagrams of the conventional arrangement of optical fibers, and Fig. 4
5 and 6 are diagrams each showing an embodiment of the present invention. 15.22 ... original fiber 16.25 ... plate 17, 18.20.21.25.24 ... window size /
Diagram: Sai 2 Prisoner/A Third Diagram 411! lI Continuing from page 1 of Saiotzu 0 Author: Satoshi Fushimi, Hitachi, Ltd. Production Technology Laboratory, 292 Yoshida-cho, Totsuka-ku, Yokohama 0 Author: Nobuhiko Aoki, 292 Yoshida-cho, Totsuka-ku, Yokohama, Hitachi, Ltd. Production Inside the Technology Research Institute
Claims (3)
明手段と、試料の表面からの像を走査する走査手段を、
該走査手段によって走査された儂を導く元ファイバと、
該光ファイバの前面に設けられ、かつ複数個の窓を有す
るプレートと、該光ファイバで導びかれた像を撮像する
撮像装置とを備え付けたことを特徴とする並列ｍ画像検
出器置。(1) An illumination means that illuminates the sample using reflected light or transmitted light, and a scanning means that scans an image from the surface of the sample,
a source fiber that guides me scanned by the scanning means;
A parallel m-image detector device comprising: a plate provided in front of the optical fiber and having a plurality of windows; and an imaging device for capturing images guided by the optical fiber.
部分を写真技術で形成したことを特徴とする特＃ｌＦｌ
ｉ１ｗ求の範囲第１項記載の並列型画像検出装置。(2) The above plate is a special #lFl characterized in that a transparent window portion is formed on a glass dry plate using photographic technology.
Parallel image detection device according to item 1 of the range of i1w requirements.
窓を形成したことを特徴とする％＃’！ＦＭ求第１項記
載の並列５１１ｍ像検出装置。(3) The above-mentioned plate is characterized in that a window is formed on a thin plate by etching or the like! Parallel 511m image detection device as described in FM requirement No. 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17301281A JPS5875391A (en) | 1981-10-30 | 1981-10-30 | Parallel picture detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17301281A JPS5875391A (en) | 1981-10-30 | 1981-10-30 | Parallel picture detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5875391A true JPS5875391A (en) | 1983-05-07 |
Family
ID=15952555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17301281A Pending JPS5875391A (en) | 1981-10-30 | 1981-10-30 | Parallel picture detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5875391A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61104659A (en) * | 1984-10-29 | 1986-05-22 | Hitachi Ltd | Array of semiconductor solid-state image pickup element |
-
1981
- 1981-10-30 JP JP17301281A patent/JPS5875391A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61104659A (en) * | 1984-10-29 | 1986-05-22 | Hitachi Ltd | Array of semiconductor solid-state image pickup element |
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