JPS5859395A - Molecular turbo-pump - Google Patents
Molecular turbo-pumpInfo
- Publication number
- JPS5859395A JPS5859395A JP15905681A JP15905681A JPS5859395A JP S5859395 A JPS5859395 A JP S5859395A JP 15905681 A JP15905681 A JP 15905681A JP 15905681 A JP15905681 A JP 15905681A JP S5859395 A JPS5859395 A JP S5859395A
- Authority
- JP
- Japan
- Prior art keywords
- blades
- pump
- shaft
- rotor
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/024—Multi-stage pumps with contrarotating parts
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
【発明の詳細な説明】
本１発明はターボ分子ボン、プに調し、排気速匿・圧縮
比を大きくできる構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a structure that can adjust the turbo molecular pressure and increase the exhaust speed and compression ratio.
第１′８ｉＨＣ従来のターボ分子ポｙｙＯ構造を示す。1'8iHC shows the conventional turbomolecular polyyyO structure.
回転自在の回転軸ＩＫ任意の内置と取付は枚数、段数を
有する一転属３が取付けられ、固定軸２に敞付けられた
モータで一転軸゛１が回転する。軸受には磁気軸受、ま
たは機械式軸受が使用されている６回転誠３０間ごとに
固定翼４が挿入されており６、外筒５で外部と区切ると
ともに固定翼４ｆ止めている。この工うに従来のターボ
分子ポンプは回転翼のｎ１ＩＩＫ挿入された翼ａ固定さ
れており、この構造に関する排気速Ｉ・圧縮比等は古く
から研【されている。これら排気速ｉ・圧縮比を決足す
るものＦｉ回転翼の回転数・翼の角置・翼の段数である
。これらのうち、ターボ分子ポンプの性能をより向上さ
せる友めＫは回転する翼の回転数を増加させれば艮い。A freely rotatable rotating shaft IK can be arbitrarily installed and installed, and a single-transfer member 3 having a number of sheets and stages is attached, and the single-transfer shaft 1 is rotated by a motor attached to a fixed shaft 2. A magnetic bearing or a mechanical bearing is used in the bearing, and fixed blades 4 are inserted every 6 rotations 30, separated from the outside by an outer cylinder 5 and fixed by the fixed blades 4f. In this case, the conventional turbo molecular pump has a fixed rotary blade with n1IIK inserted, and the exhaust speed I, compression ratio, etc. related to this structure have been refined for a long time. What determines the exhaust speed i and the compression ratio are the rotational speed of the rotor, the angle of the blade, and the number of stages of the blade. Among these, the best way to improve the performance of a turbomolecular pump is to increase the number of rotations of the rotating blades.
しη・しながら、回転ｉを高速回転させることは翼にχ
きな遠心力が働くことになり、使用する材料のＩｉ！ｉ
ｙ、高真空中で使用可能な材料、軸受機構等のＩＩＩＪ
約を受けＪ使用回転数が限られてし１つことになる。While rotating η・, rotating the rotation i at high speed causes the wing to
A large centrifugal force will be exerted on the Ii! of the material used. i
y, materials usable in high vacuum, bearing mechanisms, etc. IIIJ
Due to the restrictions, the number of revolutions J can be used is limited to one.
本殆ｉＩ＃は、従来固定されていた翼を、本体側の（ロ
）転属と逆方向に回転させる真に置き換える構造を設け
ることに１０１本体餉の鼻か従来と同じ回転数のまま排
気速［−圧縮比を大きくする構造を提供するものである
。This most iI # has a structure that completely replaces the conventionally fixed blades by rotating them in the opposite direction to the (b) transfer on the main body side. [-Provides a structure that increases the compression ratio.
第２図に本櫨明の一実施例を示ｔｅｌ！転輪ｌ。Figure 2 shows an example of an embodiment of Akira Motogishi. Rolling wheel l.
固定軸２１回転翼３は第１図と同じてあり、軸受機構も
同じものを使用で負る。逆回転属６は従来の固定翼４の
換りに取り付けられた−のであり、回転翼３の間ととに
挿入され、１転翼３と岡、じ形状で逆方向に回転する翼
であり、ボルトγで外部回転′軸８に止められてηる。The fixed shaft 21 and rotary blade 3 are the same as in FIG. 1, and the bearing mechanism is also the same. The counter-rotating blade 6 is installed in place of the conventional fixed blade 4, and is inserted between the rotary blades 3 and has the same shape as the rotor blade 3 and rotates in the opposite direction. , is fixed to the external rotating shaft 8 by a bolt γ.
外部回転軸８＃ｉ、半径方向（Ｘ、Ｙ方向）をセンサー
１０で位置を検出し、電磁石９で位置を制御され、軸方
向（２方向）はセンサー１３と電磁石１２で位置を制御
されている。また、モータ１１で外側回転輪８ｔｌｓ転
させている。この工うに従来固定されて−た翼を回転す
る翼に蓄′＃換えることによって回転翼３０回転数ｒｍ
、ｖＩｌさせることな（排気速１１圧縮比を大きくする
ことができる。これ社、従来の動翼と靜輿の組合せから
互いに逆に回転する動翼同志の組合せになり、気体分子
の輸送確率の値がχ倉（なるからである。また、磁気軸
受を使用するととで無接触で逆回転属６を（ロ）転させ
ることかで★るため清潔な高真空を得ることができる。The position of the external rotating shaft 8#i is detected in the radial direction (X, Y direction) by a sensor 10, and the position is controlled by an electromagnet 9, and the position in the axial direction (two directions) is controlled by a sensor 13 and an electromagnet 12. There is. In addition, the motor 11 rotates the outer rotating wheel 8tls. By replacing the conventionally fixed blades with rotating blades, the rotor speed can be increased to 30 rpm.
, vIl (exhaust speed 11) The compression ratio can be increased.In this company, the conventional combination of rotor blades and a pallet has been changed to a combination of rotor blades that rotate in opposite directions to each other, and the transport probability of gas molecules has been increased. This is because the value is χ. Also, when a magnetic bearing is used, a clean high vacuum can be obtained by rotating the counter-rotating element 6 without contact.
尚、回転軸１と固定軸２の支持構造にも磁気軸受を使用
することにエリ、より清潔な真空が得られる。In addition, by using magnetic bearings for the support structure of the rotating shaft 1 and the fixed shaft 2, a cleaner vacuum can be obtained.
、上記実施例は、磁気軸受を使用した例であるが機械式
軸受を用いた構造によってでも従来固定されてい７ｔｋ
ｔ肋転する翼にｆＩＩＩ負換えることが可能なことは１
つまでもな−。, the above embodiment uses a magnetic bearing, but even with a structure using a mechanical bearing, the 7tk
It is possible to change fIII to a wing that rotates t.
Not forever.
以上述べた如く、本発明の構造を採用することＫＪＣす
、次の効巣を得ることができる。As described above, by adopting the structure of the present invention, the following effects can be obtained.
シ１１従来の回転数のままで、エリ人糞な排気速ｉ圧縮
比ｆ４ることがで真効率が増加する。11 The true efficiency increases by increasing the exhaust speed i and the compression ratio f4 while maintaining the conventional rotation speed.
■磁気軸受を採用することに工り、軸受寿命が半永久的
に伸び、エリ清潔な真空を得ることかで負る。■The use of magnetic bearings extends the life of the bearings semi-permanently, resulting in a clean vacuum.
纂１図は従来のターボ分子ポンプの回転翼と固定ＪＩｇ
１″示す１１９′ｒ−図、第２図番ゴ本殆明の一実施例
を示す断ｔｈｉ−である。
ｌ・・回転軸 ２・・固定軸 ３ｅ＠回転翼４・・固定
翼 ５・・外筒 ６ｅ・逆回転属 ７・・ボルト ８・
・外部回転軸 ９°−・電磁石ＩＯ−・センサー １１
＠・モータ １２−・電磁石 １３・・センサー
以 上
出願人 株式会社グニ糟工舎
代理人 弁珊士最 上 務
第１図The first diagram shows the rotor blade and fixed JIg of a conventional turbo molecular pump.
Figure 119'r-showing 1'' is a section thi- showing an embodiment of the 2nd figure.l...Rotating shaft 2...Fixed shaft 3e@rotor blade 4...Fixed blade 5.・Outer cylinder 6e・Reverse rotation metal 7・・Bolt 8・
・External rotation axis 9°-・Electromagnet IO-・Sensor 11
@・Motor 12−・Electromagnet 13・・Sensor and above Applicant Gunikasukosha Co., Ltd. Agent Mogami Bensanshi Figure 1
Claims (1)
、内側回転軸に多数段の翼列な有するロータを設け、そ
のロータ翼とロータ翼の閣ととに１内側ロータ翼゛と同
じ形状の翼を持つ多数段の翼列を有する外側ロータ翼を
１櫨し内側回転軸を互ｖｈＫ逆方向に回転させることｔ
特徴とする／−＆分子ポンプ・ （２１外側回転軸を無接触で支持される磁気軸受で支持
した請求範囲（１１のターボ分子ポンプ。[Claims] (11) In a single-molecule pump using turbine blades, a rotor having multiple stages of blades is provided on the inner rotating shaft, and one inner rotor blade is provided between the rotor blade and the rotor blade cabinet. The outer rotor blade has multiple stages of blades having the same shape as the outer rotor blade, and the inner rotating shaft is rotated in opposite directions.
Features/- & Molecular Pump (Claim 11 Turbomolecular pump in which the outer rotating shaft is supported by a magnetic bearing that is supported without contact.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15905681A JPS5859395A (en) | 1981-10-06 | 1981-10-06 | Molecular turbo-pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15905681A JPS5859395A (en) | 1981-10-06 | 1981-10-06 | Molecular turbo-pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5859395A true JPS5859395A (en) | 1983-04-08 |
| JPH0240879B2 JPH0240879B2 (en) | 1990-09-13 |
Family
ID=15685253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15905681A Granted JPS5859395A (en) | 1981-10-06 | 1981-10-06 | Molecular turbo-pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5859395A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003031823A1 (en) * | 2001-10-06 | 2003-04-17 | Leybold Vakuum Gmbh | Axially discharging friction vacuum pump |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3044685A (en) * | 1959-02-13 | 1962-07-17 | Nicholas P Lapiken | Air compressor |
-
1981
- 1981-10-06 JP JP15905681A patent/JPS5859395A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3044685A (en) * | 1959-02-13 | 1962-07-17 | Nicholas P Lapiken | Air compressor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003031823A1 (en) * | 2001-10-06 | 2003-04-17 | Leybold Vakuum Gmbh | Axially discharging friction vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0240879B2 (en) | 1990-09-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3047292B1 (en) | Turbo molecular pump and vacuum device | |
| JPH0261387A (en) | Turbomolecular pump | |
| JP2002242876A5 (en) | ||
| JP2002138987A (en) | Vacuum pump | |
| JPS61145394A (en) | Molecular pump | |
| JPS5859395A (en) | Molecular turbo-pump | |
| JPH0538389U (en) | Vacuum pump | |
| JPH1089284A (en) | Turbo-molecular pump | |
| JPS60204997A (en) | Composite vacuum pump | |
| JPS60182394A (en) | Turbomolecular pump | |
| JPH0419393B2 (en) | ||
| JPS6361799A (en) | Turbo molecular pump | |
| US3659958A (en) | Built up rotor assemblies for vacuum pumps | |
| JP2865888B2 (en) | Multi-turbo type vacuum pump | |
| US1282065A (en) | Centrifugal fan for blowers. | |
| JPH0687691U (en) | Turbo molecular pump | |
| JP3518343B2 (en) | Turbo vacuum pump | |
| JP2000110771A (en) | Turbo molecular pump | |
| JPH05141389A (en) | Vacuum pump | |
| JPH03237297A (en) | Turbo-molecular pump | |
| JPS58197497A (en) | Turbo element pump | |
| JP4382689B2 (en) | Touchdown bearing for turbomolecular pump and turbomolecular pump | |
| JPH0617035Y2 (en) | Turbo molecular pump | |
| JP2008240571A (en) | Turbo-molecular pump | |
| JP2000274392A (en) | Pump |